JPH0224016Y2 - - Google Patents

Description

[Detailed description of the invention] Generally, when it is necessary to perform processing, assembly, and transportation work in a clean air atmosphere from which even minute dust is removed, such as with electronic components such as wafers, these operations are carried out. BACKGROUND ART Measures have been taken to maintain the indoor air in a clean state by installing an air purifying device in a room to constantly remove fine dust and the like generated indoors.

The present invention not only removes the dust generated in the room when the transport device is stored in the room where the air is purified, but also suppresses the generation of dust when the door of the room is opened and closed. This is a dust removal device for air cleaning rooms that prevents indoor contamination.

Conventionally, a dust removal device for an air cleaning room that houses a conveyance device has a table T on which an upper filter F is stretched over the top and an article A is supported on the bottom, as shown in Fig. 1.
An air recirculation duct D having an air supply end opened above the upper filter F in the chamber H and an intake end opened in the lower part of the chamber H is installed outside the air purification chamber H in which the drive cart C with the attached drive truck C is housed. An air circulation fan P is interposed in the middle of the duct, and most of the floating dust such as attached dust or abrasion powder generated by the operation of the transport device is removed from the lower part of the chamber H at the intake end. The air is then introduced into the chamber H from the air supply end that opens above the upper filter F of the chamber H, passes through the upper filter F, is dedusted, becomes clean air, flows down, and returns to the air intake end opening. Since the air in the room H is sucked in and circulated, the air in the room H is always kept clean. When the lower part of the air cleaning chamber H is removed for maintenance of the transport device, the accumulated dust G not only becomes floating and scattered due to the vibration, but also when the trolley C passes by. The room H rises due to the movement of air that occurs.
It has the disadvantage that it floats and diffuses inside the room, significantly polluting the atmosphere inside the air cleaning room.

Therefore, the present invention is a dust removal device that prevents the generation of accumulated dust in order to eliminate the above-mentioned drawbacks of the conventional technology.An embodiment of the present invention will be described below with reference to Fig. 2.A horizontally installed tubular air cleaning chamber 1 A transport device drive unit housing 3 suspended by the lower end of the suspension bolt 2 is removably fitted into the lower surface of the transport unit, and inside the drive unit housing 3 are installed the wheel running rails 5 of the transport vehicle 4 and the A plurality of power supply rails 7, 7, .

On the trolley 4, a transport table 10 for a storage case 9 for electronic components, which must be prevented from attracting fine dust, is attached to the upper end of a support shaft 11 that penetrates the upper surface of the drive unit case 3, and the air cleaning chamber 1 is installed. It is stored inside.

A lower filter 12 is removably attached to the lower surface of the rails 5, 5 by a known means such as a snap fastener. Note that the lower filter 12
may be easily attached to and detached from the side wall of the drive unit housing 3 below the rails instead of the lower surfaces of the rails 5, 5.

Further, an upper filter 13 is attached to the upper part of the air purification chamber 1, and an air supply duct 15 of an air circulation fan 14 provided outside the air purification chamber 1 opens into the air purification chamber 1 above the upper filter 13. The intake duct 16 opens into the lower drive housing 3 of the lower filter 12 .

Therefore, the air in the air cleaning chamber 1 forms a downward flow, and the air sent through the air supply duct 15 is filtered to remove dust by the upper filter 13 and descends as clean air, and a part of the air flows downward. It is discharged from the exhaust port 17 formed on the bottom of the clean room 1, and the remaining part enters the drive unit housing 3 through the gap between the support shaft 11 and the drive unit housing 3, and the dust, abrasion powder, etc. accompanying the operation of the transport device descends. When the flow passes through the lower filter 12, it is completely captured by the filter, so fine dust, abrasion powder, etc. do not accumulate on the bottom cover 8, and the air flows back into the air cleaning chamber 1 through the intake duct 16. The recirculated air in the air cleaning chamber 1 is always maintained clean as the air is returned together with the air flowing in from the air supply port 18 opened at the upper part of the air cleaning chamber 1.

As mentioned above, since dust does not accumulate on the bottom cover 8, there is no floating diffusion of dust from the top of the bottom cover 8 even when the trolley 4 passes, and the wheels and the running Since wear particles generated between the rails are also captured in the lower filter 12, there is no risk of dust floating and scattering when the bottom cover 8 is removed, and the inside of the air cleaning chamber 1 is not contaminated. Dust etc. trapped in the filter 12 will not float and fall when the filter 12 is removed and will not pollute the atmosphere inside the air cleaning chamber 1, so the opening and closing of the bottom cover during replacement and maintenance of the lower filter will not be carried out by air. The practical effect as a device for removing dust in an air cleaning room is significant, as it can be carried out without contaminating the inside of the clean room 1.

[Brief explanation of the drawing]

FIG. 1 is a schematic front sectional view of a conventional device, and FIG. 2 is a schematic front sectional view of the present invention. DESCRIPTION OF SYMBOLS 1...Air purification room, 3...Drive unit housing, 4...Dolly, 5...Traveling rail, 8...Bottom cover, 9...Electronic component storage case, 12...Lower filter, 13...Upper filter , 14...Air circulation fan.

Claims (1)

[Scope of utility model registration request] An air recirculation duct with an air circulation fan is installed outside the air purification chamber with an upper filter stretched over the upper part and an article conveying device housed in the lower part, and the air supply end of the duct is used to clean the air above the upper filter. In an apparatus for removing dust in an air purification chamber, the device is opened into the room, and the intake end of the duct is opened in the lower part of the air purification chamber to form a descending airflow inside the air purification chamber, and the drive unit of the article conveyance device is installed in the air purification chamber. A removable bottom cover is provided on the lower surface of the partitioned drive unit housing, and a lower filter that captures dust generated by the operation of the transport device is removably installed below the transport device. A dust removal device in which the intake end of the duct is opened.