JPH0338585Y2 - - Google Patents
Info
- Publication number
- JPH0338585Y2 JPH0338585Y2 JP1986104280U JP10428086U JPH0338585Y2 JP H0338585 Y2 JPH0338585 Y2 JP H0338585Y2 JP 1986104280 U JP1986104280 U JP 1986104280U JP 10428086 U JP10428086 U JP 10428086U JP H0338585 Y2 JPH0338585 Y2 JP H0338585Y2
- Authority
- JP
- Japan
- Prior art keywords
- tunnel
- space
- air
- workpiece
- transport vehicle
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000004140 cleaning Methods 0.000 claims description 3
- 239000000428 dust Substances 0.000 description 8
- 230000003749 cleanliness Effects 0.000 description 6
- 235000012431 wafers Nutrition 0.000 description 4
- 230000000694 effects Effects 0.000 description 3
- 238000011109 contamination Methods 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 238000007664 blowing Methods 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 238000003780 insertion Methods 0.000 description 1
- 230000037431 insertion Effects 0.000 description 1
- 238000003756 stirring Methods 0.000 description 1
Description
【考案の詳細な説明】
産業上の利用分野
この考案は、搬送台車走行空間の空気清浄化装
置に関し、精密部品搬送台車が走る空間を無塵状
態に保持する各種の搬送装置に利用できるもので
ある。特に、この空気清浄化装置を、ウエーハー
の搬送機が走行する空間に利用するときは、ワー
ク載荷台上に載せられたウエーハーを、殆んど無
塵の雰囲気中で搬送することができるものであ
る。[Detailed description of the invention] Industrial field of application This invention relates to an air purifying device for the space in which a transportation vehicle runs, and can be used in various transportation devices that keep the space in which a precision parts transportation vehicle runs in a dust-free state. be. In particular, when this air purifying device is used in a space where a wafer transport machine travels, it is possible to transport the wafers placed on the workpiece loading platform in an almost dust-free atmosphere. be.
従来技術及びその問題点
従来の搬送機の走行空間の空気清浄化装置は次
の如くである。Prior Art and its Problems A conventional air cleaning device for a running space of a conveyor is as follows.
即ち、第１図及び第２図によつて説明すると、
支持脚Ｌ上のチヤンネル材ＦにガイドレールR1，
R2が取付けられていて、このガイドレールR1.R2
上を台車２の車輪W1，W2が走行する。台車２の
下方に、レールR1，R2と平行に駆動軸３が回転
自在に配置されており、この駆動軸３に対して台
車２の被動輪４をバネによつて圧接させている。 That is, when explained with reference to FIGS. 1 and 2,
Guide rail R 1 to channel material F on support leg L,
R 2 is installed and this guide rail R 1 .R 2
Wheels W 1 and W 2 of truck 2 run on top. A drive shaft 3 is rotatably arranged below the truck 2 in parallel with the rails R 1 and R 2 , and the driven wheels 4 of the truck 2 are pressed against the drive shaft 3 by a spring.
駆動軸３の軸芯に対して被動輪４は斜めに配置
されていて、駆動軸３の回転により被動輪４が駆
動され、台車２がワークＷを載せてレールR1，
R2上を走行する。この台車２が走行する空間Ｓ
はカーテン５の垂設によつて両側を被われてお
り、この台車２の走行空間の天井に配置した
HEPAフイルタ６を有するフードから、この走
行空間Ｓにクリーンエアが吹き出される。吹き出
されたクリーンエアは、走行空間Ｓ内を下方に流
れ、カーテン下縁よりカーテン外に流出する。 The driven wheel 4 is arranged diagonally with respect to the axis of the drive shaft 3, and the driven wheel 4 is driven by the rotation of the drive shaft 3, and the trolley 2 carries the workpiece W on the rail R1 ,
Drive on R 2 . Space S in which this trolley 2 runs
is covered on both sides by hanging curtains 5, and is placed on the ceiling of the running space of this trolley 2.
Clean air is blown into this running space S from a hood having a HEPA filter 6. The blown clean air flows downward within the travel space S and flows out of the curtain from the lower edge of the curtain.
以上の従来の空気清浄装置においては、
HEPAフイルターを透して上方から吹き出され
る下降気流は、台車の周辺で乱流を発生し、該乱
流によつて車輪等の走行系統からの発塵が舞い上
り、台車上に載せたウエーハー等のLSI部品を汚
染することが屡々である。 In the above conventional air purifier,
The downdraft that blows out from above through the HEPA filter generates turbulence around the cart, and this turbulence causes dust from the wheels and other running systems to fly up, causing the wafers placed on the cart to be washed away. It often contaminates other LSI parts.
上述の乱流は、クリーンエアが天井から下方へ
向けて吹き出され、この空気流に対して、レール
R1，R2を支えているチヤンネル材Ｆ及びレール
R1，R2、ワーク載荷台１及びその台車２が障害
物となり、さらに台車の走行に伴う空気の巻き込
み等により生じるものである。 The above-mentioned turbulent flow is caused by clean air being blown downward from the ceiling, and against this airflow, the rail
Channel material F and rail supporting R 1 and R 2
This is caused by R 1 , R 2 , the work loading platform 1 and its trolley 2 acting as obstacles, and air being drawn in as the trolley travels.
考案の技術的課題
本考案の技術的課題は、上述の従来の搬送台車
走行空間の空気清浄化装置における、台車まわり
の乱気流のワーク載荷台への吹き上りを確実に防
止することである。Technical Problem of the Invention The technical problem of the invention is to reliably prevent turbulent air around the cart from blowing up onto the workpiece loading platform in the above-mentioned conventional air cleaning device for the traveling space of the transport cart.
考案の構成
(1) 課題解決のために講じた手段
本考案の解決手段は、次の２つの要素によつて
構成される。Structure of the invention (1) Measures taken to solve the problem The solution of the invention consists of the following two elements.
イ 上部と両側とを区画された搬送台車の走行空
間内に台車及び軌道を囲撓するトンネルを設
け、ワークを載せた載荷台のみを該トンネル外
に位置させるため、トンネル上部に載荷台支柱
の通過を許容するスリツトを設けること。(a) A tunnel surrounding the trolley and track is provided in the running space of the transport vehicle, which is divided into the upper part and both sides, and in order to position only the loading platform carrying the workpiece outside the tunnel, a loading platform support is installed at the top of the tunnel. Provide a slit to allow passage.
ロ 上記トンネルの底面に排気ダクトを設けると
共に、該排気ダクトに排気ブロアを設けて前記
スリツトより吸引したトンネル内空気を強制排
気すること。(b) An exhaust duct is provided at the bottom of the tunnel, and an exhaust blower is provided in the exhaust duct to forcibly exhaust the air inside the tunnel sucked through the slit.
ハ ワーク載荷台上のワークに指向した吸引ノズ
ルを有する吸気管をトンネル内の負圧に連通し
て前記排気ブロアによりトンネル外走行空間内
の空気を強制排気すること。(c) An intake pipe having a suction nozzle directed toward the workpiece on the workpiece loading platform is communicated with the negative pressure inside the tunnel, and the air in the travel space outside the tunnel is forcibly exhausted by the exhaust blower.
(2) 解決手段の作用
両側を防塵カーテンによつて囲まれた搬送台車
走行空間内に上方のHEPAフイルタを透して下
方に吹き出された清浄空気は、ワーク載荷台上よ
り吹き下し、その一部はスリツトよりトンネル内
に強制吸引されて排気ダクトを経て下方へ排気さ
れる。したがつて、トンネル内の台車及び軌道に
より生じる乱気流は台車走行による粉塵を捲き上
げるが、スリツトよりの強制的な下降吸引流によ
りトンネル外に漏洩することなく排気ブロアによ
り下方へ引かれるので、載荷上のワークが台車の
走行によつて発生する粉塵によつて汚染されるお
それはない。(2) Effect of the solution The clean air that is blown downward through the HEPA filter above into the transportation space surrounded by dustproof curtains on both sides is blown down from above the workpiece loading platform and A portion is forcibly drawn into the tunnel through the slit and exhausted downward through the exhaust duct. Therefore, the turbulent air generated by the bogie and track inside the tunnel stirs up dust caused by the bogie running, but the forced downward suction flow from the slit prevents it from leaking outside the tunnel and is pulled downward by the exhaust blower, reducing the load. There is no risk that the workpiece above will be contaminated by dust generated by the running of the trolley.
また、ワーク載荷台上のワークに指向した吸引
ノズルを有する吸気管は、ワークの清浄度を高め
るとともにワークの取り出し又は差し入れの際の
カーテンの開閉によるトンネル外上方空間内の清
浄度の低下を防止することができる。 In addition, the suction pipe with a suction nozzle directed toward the workpiece on the workpiece loading platform increases the cleanliness of the workpiece and prevents a decrease in cleanliness in the upper space outside the tunnel due to opening and closing of the curtain when taking out or inserting the workpiece. can do.
(3) 第１図に図示する実施例について説明する。(3) The embodiment shown in FIG. 1 will be explained.
上部を給気フード１２を有するHEPAフイル
タ６で、両側を垂設した防塵カーテン５で夫々区
画された搬送台車走行空間Ｓ内に、搬送台車２、
軌道Ｆ，Ｒ，R2及び駆動手段３，４を囲撓した
トンネルＴを区画形成し、該トンネルＴの上壁に
搬送台車２上にワーク載荷台１を支承した支柱
２′の通過を許容するスリツト７を設け、該トン
ネルＴの下壁にフイルタ８を有する排気ダクト９
を開口せしめ、該排気ダクト９は強制排気ブロア
１０を介して環流管１１により前記給気フード１
２に連通する。 A transport vehicle 2,
A tunnel T is defined by surrounding the tracks F, R, R 2 and the driving means 3, 4, and the upper wall of the tunnel T allows the passage of a support 2' supporting a workpiece loading platform 1 on a transport vehicle 2. An exhaust duct 9 is provided with a slit 7 and has a filter 8 on the lower wall of the tunnel T.
The exhaust duct 9 is connected to the air supply hood 1 by a recirculation pipe 11 via a forced exhaust blower 10.
Connects to 2.
したがつて、搬送台車走行空間Ｓの上部から
HEPAフイルタ６によつて清浄化された空気が
下方へ吹き出されて、該空間Ｓ内は清浄空気で満
される一方、トンネルＴ内においては、搬送台車
の走行によつて発生した粉塵がスリツト７より強
制吸引した空気のトンネルＴ内での乱気流によつ
て舞い上がるが、スリツト７は排気ブロア１０に
よつて下降吸引流が形成されているので、該スリ
ツト７より前記空間Ｓ間へ粉塵が漏出するおそれ
は全くなく、排気ダクト９を経て排気ブロア１０
によりフイルタ８を透して強制排気される。 Therefore, from the top of the transport vehicle running space S
The air purified by the HEPA filter 6 is blown downward, and the space S is filled with clean air, while in the tunnel T, dust generated by the traveling of the transport vehicle is blown out through the slit 7. The dust is blown up by the turbulence in the tunnel T of the more forcibly sucked air, but since a downward suction flow is formed in the slit 7 by the exhaust blower 10, the dust leaks from the slit 7 into the space S. There is no fear at all, the exhaust blower 10 passes through the exhaust duct 9.
The air is forcibly exhausted through the filter 8.
そして、支柱２′によりトンネルＴ外に位置す
る載荷台１上のワークには、トンネルＴ内で発生
する粉塵による汚染のおそれは全くない。さら
に、ワークの近傍に吸引ノズルを有する吸気管１
３をトンネルＴ内の負圧に連通して、排気ブロア
１０によりトンネル外の走行空間内の空気を強制
排気することにより、ワークの清浄度を一層高め
ることができるばかりでなく、ワークの取り出し
又は差し入れの際のカーテン５の開閉による走行
空間Ｓ内の清浄度の低下を防止することができ
る。 There is no risk of contamination of the workpieces on the loading platform 1 located outside the tunnel T by the support columns 2' due to dust generated inside the tunnel T. Furthermore, an intake pipe 1 having a suction nozzle near the workpiece
3 to the negative pressure inside the tunnel T and forcibly exhaust the air in the running space outside the tunnel by the exhaust blower 10, not only can the cleanliness of the workpiece be further improved, but also when the workpiece is taken out or It is possible to prevent the cleanliness inside the traveling space S from decreasing due to opening and closing of the curtain 5 during insertion.
考案の効果
本考案は、発塵原因を有する搬送台車走行系統
をトンネル内に収納して台車走行空間を形成する
清浄空気室内と区画し、且つ該トンネル内に前記
清浄空気室内の空気をスリツトを介して強制吸引
することにより、トンネル内の汚染空気が前記清
浄室内に漏出することを防止すると共に、トンネ
ル内の汚染空気を強制的に下方へ排出し、一方、
ウエーハー等のワークはトンネル外に位置させた
搬送台車上の載荷台にのせたので、トンネル内空
気に汚染されるおそれが全くないばかりでなく、
汚染のおそれのない清浄空気室内を搬送され、ま
た、清浄空気室を形成する搬送台車走行空間の両
側は、防塵カーテンで区画されているので、カー
テンを介してカーテン内のワークを容易に取り出
すことができるものであり、さらに載荷台上のワ
ークに指向した吸引ノズルを有する吸気管によつ
て、ワークの清浄度を一層高めるとともに、ワー
クの出し入れに際してのカーテン開閉に伴うトン
ネル外上方空間の清浄度の低下を防止できるもの
であり、搬送物を清浄雰囲気中で搬送し、且つ該
搬送物の積み卸しを容易にした効果は著大であ
る。Effects of the invention The present invention accommodates a transport system that causes dust generation in a tunnel and separates it from a clean air chamber that forms a travel space for the transport vehicle, and also provides a slit in the tunnel to channel the air in the clean air chamber. By forcibly suctioning the air through the tunnel, the contaminated air in the tunnel is prevented from leaking into the clean room, and the contaminated air in the tunnel is forcibly discharged downward.
Works such as wafers are placed on a loading platform on a transport vehicle located outside the tunnel, so there is no risk of them being contaminated by the air inside the tunnel.
The workpiece is transported in a clean air chamber with no risk of contamination, and both sides of the transport vehicle running space that forms the clean air chamber are separated by a dustproof curtain, so the workpiece inside the curtain can be easily taken out through the curtain. In addition, the intake pipe has a suction nozzle directed toward the workpiece on the loading platform, which further increases the cleanliness of the workpiece and reduces the cleanliness of the space above the outside of the tunnel due to opening and closing of the curtain when loading and unloading the workpiece. The effect of transporting the transported objects in a clean atmosphere and facilitating the loading and unloading of the transported objects is significant.
第１図は本考案の一実施例の説明用断面図、第
２図は従来技術の問題についての説明用図面であ
る。
１……ワーク載荷台、２……搬送台車、２′…
…支柱、３……駆動軸、４……被動輪、５……カ
ーテン、６……HEPAフイルタ、７……スリツ
ト、９……排気ダクト、１０……排気ブロア、１
２……フード、１３……吸気管、R1，R2……レ
ール、Ｓ……搬送台車走行空間、Ｗ……ワーク、
W1，W2……車輪。
FIG. 1 is an explanatory sectional view of one embodiment of the present invention, and FIG. 2 is an explanatory drawing regarding the problems of the prior art. 1...Work loading platform, 2...Transfer truck, 2'...
...Strut, 3...Drive shaft, 4...Driven wheel, 5...Curtain, 6...HEPA filter, 7...Slit, 9...Exhaust duct, 10...Exhaust blower, 1
2...Hood, 13...Intake pipe, R1 , R2 ...Rail, S...Transportation vehicle running space, W...Workpiece,
W 1 , W 2 ...wheels.
Claims (1)
するとともに、両側に防塵カーテンを垂設して搬
送台車走行空間を形成し、該空間内に配設した台
車走行軌道及び該軌道上の搬送台車を囲繞するト
ンネルを設け、該トンネルの底部に開口する排気
ダクトを設けると共に該排気ダクトを排気ブロア
を介して前記上部のフードに連通し、前記トンネ
ルの上部に前記台車に立設した載荷台支柱の通過
を許容するスリツトを形成し、且つ前記載荷台支
柱の頂部に取付けたワーク載荷台上のワークに指
向した吸引ノズルを有する吸気管を前記トンネル
内の負圧に連通し、該スリツトおよび吸気管より
排気ブロアにより強制吸気した空気をトンネル内
を経て排気ダクトより前記HEPAフイルタを透
して搬送台車走行空間上方より下方へ吹き出すこ
とを特徴とする搬送台車走行空間の空気清浄化装
置。 A hood with a HEPA filter is placed on the top, and dustproof curtains are hung on both sides to form a transport vehicle running space, which surrounds the trolley running track arranged in the space and the transport vehicle on the track. A tunnel is provided, and an exhaust duct that opens at the bottom of the tunnel is provided, and the exhaust duct is communicated with the upper hood via an exhaust blower, so that the loading platform support installed on the trolley can pass through the tunnel. An intake pipe having a suction nozzle oriented toward the workpiece on the workpiece loading platform attached to the top of the aforementioned loading platform support is connected to the negative pressure in the tunnel, and exhaust air is discharged from the slit and the intake pipe. An air cleaning device for a transport vehicle running space, characterized in that air is forcibly taken in by a blower, passes through a tunnel, passes through the HEPA filter from an exhaust duct, and is blown out from above to below the transport vehicle travel space.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1986104280U JPH0338585Y2 (en) | 1986-07-09 | 1986-07-09 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1986104280U JPH0338585Y2 (en) | 1986-07-09 | 1986-07-09 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6310336U JPS6310336U (en) | 1988-01-23 |
| JPH0338585Y2 true JPH0338585Y2 (en) | 1991-08-14 |
Family
ID=30977627
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1986104280U Expired JPH0338585Y2 (en) | 1986-07-09 | 1986-07-09 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0338585Y2 (en) |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS60140841U (en) * | 1984-02-29 | 1985-09-18 | 株式会社椿本チエイン | Dust removal equipment in the air purification room that houses the goods transport equipment |
-
1986
- 1986-07-09 JP JP1986104280U patent/JPH0338585Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6310336U (en) | 1988-01-23 |
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