JP2002154782A - Overhead traveling type work carrier - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide an overhead traveling type work carrier capable of immediately suction-recovering dust generated by running wheels during the conveyance of works without scattering the dust so as to prevent sticking to the works, and realizing an equipment mechanism easily at a low cost. SOLUTION: This overhead traveling type work carrier is provided with the running wheels 1 running on an elevated rail R; suction nozzles 2 installed close behind the running wheels 1 to suck the dust generated on the elevated rail R; a negative pressure generating means 3 for generating suction force to the suction nozzle; and a work holding means 4 for removably holding the works W at a body lower part. The dust generated by the running wheels 1 during the conveyance of works is thereby sucked and recovered immediately without scattering.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an overhead traveling work carrier used in a clean room for manufacturing semiconductor substrates, magnetic disks, liquid crystal substrates, and the like, and more particularly, to an overhead traveling rail mounted on a ceiling. TECHNICAL FIELD The present invention relates to an overhead traveling type work transport vehicle that transports a work while traveling on wheels.

[0002]

2. Description of the Related Art Conventionally, when products such as a semiconductor substrate, a magnetic disk, and a liquid crystal substrate are manufactured in a clean room, a work carrier having wheels traveling along a track installed in the clean room is used. There is a problem that dust or the like is generated by running friction between a running wheel of a car and a track and adheres to a work made of a product such as a semiconductor substrate, a magnetic disk, and a liquid crystal substrate to generate a defective product.
Japanese Patent Laid-Open Publication No. Sho 63-17 discloses a dust scattering prevention mechanism designed to prevent the dust generated by the friction between the running wheels and the track from scattering in the clean room.
No. 3733, the entire track is enclosed by a duct and vacuum suction is performed to collect dust, or a dust-proof cover portion of a traveling wheel disclosed in JP-A-63-227460. A magnet and a magnetic fluid applied to a wheel running surface for preventing dust from scattering are known.

[0003]

However, the dust scattering prevention mechanism of the linear transfer device disclosed in Japanese Patent Application Laid-Open No. 63-173733 discloses a method in which the entire track formed by hollow rails is enclosed by a duct. The space between the rail and the duct is defined by a porous pressure-regulating plate, and the air in the hollow rail is suctioned from the piping provided below the duct to remove dust. Since suction is performed from the pressure regulating plate over the entire length of the rail, there is a problem that the dust suction efficiency cannot be sufficiently exhibited. Further, since a large amount of these members and components are required over the entire length of the hollow rail, dust prevention is required. The equipment structure for
There is a problem that the equipment cost burden increases.

On the other hand, the dust scattering prevention mechanism of the transporting and traveling device disclosed in Japanese Patent Application Laid-Open No. 63-227460 is provided with a magnet on a dust-proof cover that covers the wheels of the transporting vehicle, and also has a full-length wheel traveling surface of a track. Since the magnetic fluid is applied over the entire surface to prevent the scattering of dust, there is a problem that it is difficult to completely prevent the leakage of dust, and that the cost of the magnetic fluid is high and the equipment cost is high. Was. In addition, since both of the dust scattering prevention mechanisms have complicated track mechanisms, the layout of the power supply terminal and the current collection terminal serving as a drive power supply mechanism for linear transport is restricted, and the maintenance burden of the maintenance is reduced. There was a problem that was large.

Therefore, the present invention solves the problems of the prior art, and can prevent the dust generated by the traveling wheels during the transfer of the workpiece from being scattered and immediately collected by suction to prevent the dust from adhering to the workpiece. It is an object of the present invention to provide an overhead traveling type work carrier that can realize the facility mechanism simply and at low cost. In addition, an object of the present invention is to provide an overhead traveling type work carrier in which a facility mechanism for detachably holding a work is simplified. Still another object of the present invention is to provide an overhead traveling type work transport vehicle capable of positively blowing off dust on a work surface during work transfer and preventing the adhesion of dust.

[0006]

In order to achieve the above object, the invention according to the first aspect of the present invention is directed to a traveling wheel that travels on an elevated rail and a wheel that is provided on the elevated rail near the rear of the traveling wheel. A suction nozzle for sucking dust to be generated and negative pressure generating means for generating a suction force on the suction nozzle, and a work holding means for detachably holding the work at a lower part of the vehicle body. An overhead traveling work carrier according to a second aspect of the present invention, in addition to the first aspect of the present invention, further includes a suction pad in which the work holding means generates a suction force by the negative pressure generating means. Things. An overhead traveling work carrier according to a third aspect of the present invention, in addition to the invention according to the first or second aspect, further includes a dust collecting mechanism interposed between the suction nozzle and the negative pressure generating means. The exhaust side is installed facing the work held by the work holding means.

The work handled by the overhead traveling work carrier of the present invention is a product such as a semiconductor substrate, a magnetic disk, a liquid crystal substrate, or a transport container containing these products, but must be handled in a clean room. If it is a certain conveyed article, articles other than these can also be set as conveyed objects.

The transport drive mechanism employed in the overhead traveling work transport vehicle of the present invention is either a contact power supply drive mechanism using a power supply line and a current collector, or a non-contact power supply drive mechanism. However, if a non-contact power supply type drive mechanism is adopted, the generation of dust due to the contact between the power supply line and the current collector can be avoided,
The cleanliness in the clean room can be further improved.

The work holding means employed in the overhead traveling work carrier of the present invention may be any work holding means as long as the work can be detachably held at the lower part of the vehicle body. If a hoist mechanism is provided for raising and lowering the holding position of the work so as to be able to move up and down freely, the present invention can be applied to various series of processing steps in which the up and down positions of the work processing are different.

[0010]

The overhead traveling work carrier of the present invention transports a work by traveling on an elevated rail erected on the ceiling by traveling wheels and detachably holding the work below the body by means of work holding means. To do
In particular, the following effects unique to the present invention are exhibited. First, an overhead traveling type work carrier according to claim 1 is provided with a traveling wheel traveling on an elevated rail, a suction nozzle disposed near the rear of the traveling wheel and sucking dust generated on the elevated rail, and the suction nozzle. By providing the nozzle with negative pressure generating means that generates suction force, even if dust is generated on the elevated rail due to contact friction between the elevated rail and the traveling wheels during workpiece transfer, such dust is generated in the clean room. A so-called dust collection and recovery function is provided in which the suction nozzle sucks immediately at a position behind the traveling wheels when the workpiece is conveyed without being scattered or diffused.

According to a second aspect of the present invention, in addition to the first aspect of the present invention, there is provided a suction pad in which the work holding means generates a suction force by the negative pressure generating means. Is provided, a suction force is generated in both the suction nozzle and the suction pad by a single negative pressure generating means. In particular, the suction pad suctions and holds the work by the suction force, so-called work suction. Has a holding function.

Further, the overhead traveling work carrier according to the third aspect of the present invention is, in addition to the first or second aspect, interposed between the suction nozzle and the negative pressure generating means. Since the exhaust side of the dust collecting mechanism is installed to face the work held by the work holding means,
Pure clean air is blown from the exhaust side of the dust collection mechanism toward the work held by the work holding means, so that dust that floats toward the work held by the work holding means and adheres to the work surface. It has a so-called air shower function that cleans the work surface by actively blowing away dust.

[0013]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS One embodiment of the present invention will be described below with reference to FIGS. FIG. 1 is a side view showing the internal structure of an overhead traveling work carrier with a vehicle body cover removed by an imaginary line to explain the structure of the overhead traveling work carrier. FIG. X-
It is an enlarged view of wheel running seen from the X-ray section. The overhead traveling type work carrier of the present embodiment is configured such that a product such as a semiconductor substrate, a magnetic disk, and a liquid crystal substrate, or a workpiece W including a carrier container containing the same is detachably held at a lower part of the vehicle body while being suspended. In addition, an elevated rail R installed on a ceiling or the like in a clean room travels by wheels and is conveyed.
Although not shown, the overhead traveling type work carrier of the present embodiment employs a non-contact power supply type driving mechanism in order to further improve the cleanliness in the clean room.

In view of this, two traveling wheels 1 traveling on an elevated rail R are disposed in front of and behind the vehicle body of the overhead traveling type work carrier of this embodiment, and the traveling wheels are used when the workpiece is carried. Suction nozzles 2 for sucking dust generated on the elevated rail R by the contact ring 1 are provided in the vicinity of the rear of the traveling wheel 1 in close proximity to each other.
A negative pressure generating means 3 having a vacuum pump 3a with an oil strainer for generating a suction force is mounted.
Therefore, the negative pressure generating means 3 separates and collects only dust by a vacuum pump 3a with an oil strainer, and generates a suction force on the suction nozzle 2 at the time of transporting the work via an electromagnetic valve (not shown). When the workpiece is not conveyed, the suction force can be cut off because no dust is generated by running the wheels. Further, even if dust is generated on the elevated rail R due to contact friction between the elevated rail R and the traveling wheel 1 during the transfer of the work, the suction nozzle 2 does not scatter or diffuse such dust into the clean room. When the workpiece is conveyed, the suction can be immediately performed at the position behind the traveling wheel 1. The reference numeral 2a in FIG.
A tube for a suction nozzle system which communicates with the negative pressure generating means 3, and reference numeral 5 is a drive motor for traveling.

On the other hand, a work holding means 4 for detachably holding a work W is provided at the lower part of the body of the overhead traveling work carrier of the present embodiment. The work W is generated by the suction force of the pressure generating means 3.
Is provided, and a hoist mechanism 6 for vertically moving the holding position of the work W up and down is provided.

The mechanism for generating a suction force on the suction pad 5 includes a suction pad system tube 5a communicating with the negative pressure generating means 3 and a suction pad system tube 5a.
a flexible tube guide 5b for flexibly protecting a.
A negative pressure adjusting vacuum tank 5c communicating with the suction pad system tube 5a; and a suction electromagnetic valve 5d for shutting off or acting on the negative pressure generated from the negative pressure adjusting vacuum tank 5c to make the work W detachable. And a pressure switch 5e with a gauge for detecting the negative pressure acting via the suction electromagnetic valve 5d and adjusting the suction force to the work W. Therefore, since the suction pad 5 is operated by switching the suction force generated by the negative pressure generating means 3 through an electromagnetic valve (not shown), it is sufficient to use one of the negative pressure generating means 3 as well. Can function.

The hoist mechanism 6 includes a hoist drive motor 6a serving as a drive source for a lifting operation and a hoist drum 6b driven by the hoist drive motor 6a.
And a lifting / lowering belt 6c that is wound up or down by forward / reverse rotation of the hoist drum 6b. The lower end of the lifting / lowering belt 6c is fixed to the suction pad 5.

Further, in the overhead traveling type work carrier of this embodiment, the exhaust side of the dust collecting mechanism 7 interposed between the suction nozzle 2 and the negative pressure generating means 3 is held by the work holding means 4. Pure clean air is blown toward the work W held by the work holding means 4 through a dust collecting filter 7a disposed on the exhaust side of the dust collecting mechanism 7 so as to face the work W. The work surface can be cleaned by positively blowing off dust floating toward the work W held on the work 4 and dust adhering to the work surface. Reference numeral 7b in FIG. 1 denotes a blower fan for forcibly blowing pure clean air toward the work W. In the present embodiment, the blower fan 7b is provided via a dust collection filter 7a.
Although b is arranged, the dust collecting filter 7a may be arranged via the blowing fan 7b.

The overhead traveling type work carrier of the present embodiment obtained in this way, the dust generated on the elevated rail R due to the contact friction between the elevated rail R and the traveling wheel 1 during the transfer of the work is generated by the traveling wheel 1. At the rear position of the workpiece, the adhesion to the work W is prevented, maintenance of the elevated rail R can be easily achieved, and one of the negative pressure generating means 3 is attached to the suction nozzle 2 by suction. The effect is enormous, for example, by realizing a simplified device configuration by using both of the pads 5 and preventing dust from adhering to the work surface during work transfer.

[0020]

Accordingly, the overhead traveling type work carrier of the present invention can be used for products such as semiconductor substrates, magnetic disks, and liquid crystal substrates.
Alternatively, when a work composed of a transfer container containing these is transported in a clean room, the traveling wheel travels on an elevated rail erected on the ceiling by a traveling wheel, and the workpiece is detachably held at a lower part of the vehicle body by a work holding means. In particular, the following effects unique to the present invention are exhibited. First, an overhead traveling type work carrier according to claim 1 is provided with a traveling wheel traveling on an elevated rail, a suction nozzle disposed near the rear of the traveling wheel and sucking dust generated on the elevated rail, and the suction nozzle. By providing the nozzle with negative pressure generating means that generates suction force, even if dust is generated on the elevated rail due to contact friction between the elevated rail and the traveling wheels during workpiece transfer, such dust is generated in the clean room. A suction nozzle located near the rear of the traveling wheel when transporting the work without suction or diffusion can prevent the sticking to the work by sucking and collecting immediately, and equipped with the conventional dust scattering prevention mechanism Since a large-scale track structure is not required, a scatter prevention mechanism can be realized simply and at low cost, and power is supplied as a drive power supply for the self-propelled transport vehicle. The maintenance Maintence the bets electrode current collector convenient layout can be easily achieved.

According to a second aspect of the present invention, in addition to the first aspect of the present invention, there is provided a suction pad in which the work holding means generates a suction force by the negative pressure generating means. With this arrangement, a single negative pressure generating means for generating a suction force can be used for both the suction nozzle and the suction pad, thereby simplifying the component configuration of the negative pressure generating source and the work holding means. And simpler handling than conventional work holding means.

Further, the overhead traveling type work carrier according to the third aspect of the present invention is, in addition to the first or second aspect, interposed between the suction nozzle and the negative pressure generating means. Since the exhaust side of the dust collecting mechanism is installed to face the work held by the work holding means, pure clean air is blown from the exhaust side of the dust collecting mechanism toward the work held by the work holding means. ,
The dust on the work surface during the transfer of the work is positively blown off to prevent the adhesion of the dust, and at the same time, the work surface can be air-cleaned.

[Brief description of the drawings]

FIG. 1 is a side view showing an outline of an overhead traveling work carrier according to one embodiment of the present invention.

FIG. 2 is an enlarged view of wheel traveling as viewed from a cross section taken along line XX of FIG.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 1 ... Running wheel 2 ... Suction nozzle 2a ... Tube for suction nozzle system 3 ... Negative pressure generating means 3a ... Vacuum pump with oil strainer 4 ... Work holding means 5 ... Suction Pad 5a: Tube for suction pad system 5b: Flexible tube guide 5c: Vacuum tank for negative pressure adjustment 5d: Solenoid valve for suction 5e: Pressure switch with gauge 6: Hoist Mechanism 6a ··· Hoist drive motor 6b ··· Hoist drum 6c ··· Lifting belt 7 ··· Dust collecting mechanism 7a ··· Dust collecting filter 7b ··· Blower fan R ··· Elevated rail W ··· · work

──────────────────────────────────────────────────続 き Continued on the front page (51) Int.Cl. ⁷ Identification symbol FI Theme coat ゛ (Reference) B65G 49/07 B65G 49/07 Z B66C 1/02 B66C 1/02 B 9/02 9/02 11/06 11/06 11/12 11/12 17/06 17/06 H01L 21/68 H01L 21/68 A F term (reference) 3B116 AA31 AB54 BB72 BB77 3F004 EA40 FA02 3F203 AA10 BA06 CA02 CC01 DA08 EB03 EC08 FA01 5F031 CA01 CA02 CA05 GA08 GA58 NA14 PA06

Claims (3)

[Claims] 1. A traveling wheel traveling on an elevated rail, a suction nozzle provided near the rear of the traveling wheel to suck dust generated on the elevated rail, and a negative pressure generating means for generating a suction force at the suction nozzle. And a work holding means for detachably holding the work at a lower part of the vehicle body. 2. The overhead traveling work carrier according to claim 1, wherein said work holding means includes a suction pad for generating a suction force by said negative pressure generating means. 3. The exhaust system according to claim 1, wherein an exhaust side of a dust collecting mechanism interposed between the suction nozzle and the negative pressure generating means is installed so as to face a work held by the work holding means. Or the overhead traveling type work carrier according to claim 2.