CN114955417B - Dust collection system of contact type overhead transport vehicle (OHT) with electric rail - Google Patents
Dust collection system of contact type overhead transport vehicle (OHT) with electric rail Download PDFInfo
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- CN114955417B CN114955417B CN202110931245.6A CN202110931245A CN114955417B CN 114955417 B CN114955417 B CN 114955417B CN 202110931245 A CN202110931245 A CN 202110931245A CN 114955417 B CN114955417 B CN 114955417B
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- dust
- overhead
- dust collecting
- electric rail
- dust collection
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- 239000000428 dust Substances 0.000 title claims abstract description 166
- 238000001514 detection method Methods 0.000 claims abstract description 29
- 238000004458 analytical method Methods 0.000 claims abstract description 21
- 239000002245 particle Substances 0.000 claims abstract description 4
- 238000012544 monitoring process Methods 0.000 claims description 11
- 238000004891 communication Methods 0.000 claims description 6
- 230000000737 periodic effect Effects 0.000 claims description 3
- 238000011897 real-time detection Methods 0.000 claims description 3
- 230000005611 electricity Effects 0.000 abstract description 2
- 230000009471 action Effects 0.000 description 3
- 238000013461 design Methods 0.000 description 3
- 230000036541 health Effects 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 3
- 238000000034 method Methods 0.000 description 3
- 230000008569 process Effects 0.000 description 3
- 230000005856 abnormality Effects 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 238000012423 maintenance Methods 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 238000010009 beating Methods 0.000 description 1
- 239000000969 carrier Substances 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000011156 evaluation Methods 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 230000001939 inductive effect Effects 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 238000004806 packaging method and process Methods 0.000 description 1
- 238000012360 testing method Methods 0.000 description 1
- 238000012546 transfer Methods 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G35/00—Mechanical conveyors not otherwise provided for
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D21/00—Measuring or testing not otherwise provided for
- G01D21/02—Measuring two or more variables by means not covered by a single other subclass
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Electric Propulsion And Braking For Vehicles (AREA)
- Current-Collector Devices For Electrically Propelled Vehicles (AREA)
Abstract
A contact overhead trolley (OHT) dust collection system comprising: the electric rail track is characterized in that the electric bow is connected with an electric rail in the electric rail track to form a contact electric rail; at least one dust collecting system assembly, this dust collecting system assembly includes and is equipped with a plurality of dust collecting motor, a dust fall detection module, an output module and an analysis module interconnect electricity, establish a dust collecting filter core in this dust collecting motor, a current detector and a drive module, this dust fall detection module includes and is equipped with a plurality of dust fall detectors, this drive module starts this dust collecting motor for clear away the produced particle of contact electric rail and dust, this dust fall detection module detects the dust fall, makes can really grasp the actual condition of dust fall distribution.
Description
Technical Field
The invention belongs to the technical field of overhead trucks (Overhead Hoist Transfer, OHT), in particular to a dust collecting system of a contact type electric rail overhead truck, which is technically provided with a scattered dust fall detection module to judge and monitor the dust fall amount; by installing the current detector on the dust collecting motor, the health management function of each dust collecting motor is carried out, and the effect of actively protecting the dust collecting motor is achieved.
Background
In addition to the recent trend of advanced process technology, factory intelligence is also required to advance over time, and overhead vehicles (OHT) can effectively utilize the three-dimensional space of the factory building, so that the space utilization rate in the clean room is maximized without occupying the walkway of personnel. Such a system was widely used for material handling in a 12-inch semiconductor front end fab, but the semiconductor industry back end packaging and testing processes are also susceptible to manpower demands and follow-up with overhead carriers for saving manpower.
The existing overhead traveling vehicles can be divided into two types, namely a non-contact (High Efficiency Inductive Power Distribution Technology, HID) overhead traveling vehicle and a contact type electric rail overhead traveling vehicle, and the non-contact (HID) overhead traveling vehicle mainly provides traveling power for the overhead traveling vehicle through non-contact power supply. The advantages of existing non-contact (HID) overhead trucks include: (1) the dust falling amount is small. (2) no spark phenomenon occurs. (3) Has a modular version, but also has the following drawbacks: (1) the equipment is expensive. (2) Subsequent maintenance equipment is costly (requires replacement of the power conversion components). (3) No detection is made for dust fall during travel or action.
The existing contact type overhead trolley with the electric rail is used for providing electricity for the overhead trolley to travel after being contacted with the electric rail through the pantograph, and the overhead trolley can generate dust fall phenomenon due to contact in the traveling process. Therefore, the prior contact type electric rail overhead carrier has the advantages that: (1) the equipment is low in cost. And (2) the subsequent maintenance cost is low. (3) has a modular form, but the disadvantages are: (1) high dust fall. (2) there is a risk of sparks being generated. (3) No detection is made for dust fall during travel or action.
The existing dust control mode for the contact type electric rail dust fall comprises the following steps: (1) employing a dust collection system: the dust collector uses a commercial dust collector to collect dust, has the advantages of collecting falling dust, and has the following disadvantages: (a) the dust fall area is not provided with a corresponding sensor. (b) the drive motor portion is not provided with a corresponding sensor. (c) the dust collection filter element portion is not provided with a corresponding sensor. (2) adopt dust fall panel beating mask: the metal plate type shielding device has the advantages that the dust falling quantity can be concentrated, and the defect that a corresponding sensor is not arranged in a dust falling area.
Therefore, aiming at the problems of the existing overhead carrier structure, how to develop an innovative structure with more ideal practicability is greatly appreciated by consumers, and the aim and direction of breakthrough of related industries are needed to be researched and developed.
In view of this, the inventors have conducted years of manufacturing development and design experience of related products, and have aimed at the above-mentioned objects, and have devised detailed designs and judicious evaluations, so as to obtain the invention with practical applicability.
Disclosure of Invention
The technical problem to be solved is as follows: the existing overhead carrier is not provided with a corresponding sensor aiming at a dust falling area, a driving motor part is not provided with a corresponding sensor, a dust collecting filter element part is not provided with a corresponding sensor, so that the driving Ma Dayi faults and dust falling pollute the production environment, the product quality and the production efficiency are seriously influenced, and the improvement is necessary.
Technical characteristics of solving the problems: in order to solve the above problems, the present invention provides a dust collecting system of a contact type overhead trolley, comprising: the electric rail track is arranged at an overhead position of the factory building, at least one overhead carrier is movably arranged on the electric rail track, at least one collector bow is arranged above the overhead carrier, and the collector bow conducts current with the electric rail in the electric rail track to form a contact type electric rail.
At least one dust collecting system assembly is arranged on the at least one overhead traveling vehicle correspondingly, the dust collecting system assembly comprises a plurality of dust collecting motors, a dust falling detection module, an output module and an analysis module which are electrically connected with each other, the output module and the analysis module are directly connected with an external central control analysis system in a communication mode, each dust collecting motor is arranged above the overhead traveling vehicle and is used for removing particles and dust generated by the contact type electric rail, a dust collecting filter element, a current detector and a driving module are arranged in the dust collecting motor, the dust falling detection module comprises a plurality of dust falling detectors, each detector is fixedly arranged on a shell of the overhead traveling vehicle, the driving module starts the dust collecting motor, the dust falling detection module detects dust falling, meanwhile, the current detector monitors the current of the dust collecting motor and judges whether the current of the dust collecting motor exceeds a maximum current definition value MAX (A) of the analysis module, if overload phenomenon is avoided, the dust collecting filter element can be continuously used, and if overload problem is possible to be that the dust collecting motor is damaged or the dust collecting filter element is blocked.
In the contact type electric rail overhead carrier dust collection system, the dust collection motors are arranged on two sides above the overhead carrier shell.
The contact type electric rail overhead carrier dust collecting system is characterized in that each detector is fixedly arranged on the inner walls of two sides below the overhead carrier shell or the overhead carrier shell below the collector bow respectively.
The contact type overhead trolley dust collection system, wherein each detector adopts scattered detection so as to facilitate regional detection of a plurality of points.
The dust collection system of the contact type overhead trolley with the electric rail is characterized in that a filter element detector is arranged at the dust collection filter element, and the filter element detector adopts a periodic detection mode or a real-time detection mode and can adopt a counting mode for monitoring the current or the use time of the dust collection motor for detection.
The dust collecting system of the contact type electric rail overhead carrier, wherein the dust collecting filter element is a replaceable filter element.
The contact type electric rail overhead carrier dust collection system is characterized in that the output module is an RS485 communication interface and an input/output interface.
Efficacy against prior art: according to the dust collection system of the contact type overhead electric rail carrier, the dust falling amount is judged and monitored by arranging the distributed dust falling detection modules on the overhead carrier, and the detection result is transmitted to the central control analysis system to be monitored and controlled to be forbidden or allowed or maintained, so that the dust collection system is superior to the existing non-contact (HID) or contact type overhead electric rail carrier; by additionally arranging the current detector on the dust collecting motor, the health management function of each dust collecting motor can be carried out, and the dust collecting motor can be monitored and controlled by being transmitted to a central control analysis system, so that the dust collecting motor is superior to the existing overhead transport vehicle, and the dust collecting motor can be pre-known in advance before abnormality by applying active protection to ensure that the dust collecting motor can normally operate; the dust collecting filter element is provided with a filter element detector for monitoring and detecting, and the current of a monitoring motor or the number of times of use are counted, and can be transmitted to a central control analysis system for monitoring and controlling, so that the use condition of the dust collecting filter element is fully mastered, and the dust collecting filter element is superior to the existing overhead carrier, and the optimal efficiency of the active dust collecting filter element can be achieved.
The above-described objects, constructions and features of the present invention are believed to be apparent from a thorough and complete understanding of the present invention, when utilized in connection with the present invention, as well as the detailed description of the preferred embodiment thereof, taken in conjunction with the accompanying drawings.
Drawings
FIG. 1 is a schematic perspective view of an embodiment of the present invention.
Fig. 2 is a schematic front plan view of an embodiment of the present invention.
FIG. 3 is a system block diagram of one embodiment of the present invention.
List of reference numerals: 10-contact type electric rail; 11-electric rail tracks; 12-overhead vehicles (OHT); 121-a collector bow; 20-a dust collection system assembly; 30-a dust collection motor; 31-a dust collection filter element; 311-cartridge detector; 32-a current detector; 33-a drive module; 40-a dust fall detection module; 41-dust fall detector; 50-an output module; 60-an analysis module; 70-a central control analysis system.
Detailed Description
The invention provides a design of a dust collection system of a contact type overhead transport vehicle (OHT).
For the convenience of the reader to further understand and appreciate the objects, features and effects of the present invention, the following detailed description of the embodiments and drawings will follow:
referring to fig. 1 to 3, the present invention provides a dust collecting system of a contact overhead travelling crane (OHT), comprising:
the electric rail track 11 is arranged at an overhead position of a factory building, at least one overhead travelling crane (OHT) 12 is movably arranged on the electric rail track 11, at least one collector bow 121 is arranged above the at least one overhead travelling crane (OHT) 12 correspondingly, and the at least one collector bow 121 conducts current with the electric rail in the electric rail track 11 to form a contact electric rail 10.
At least one dust collecting system assembly 20 is disposed on the at least one overhead traveling vehicle (OHT) 12, the dust collecting system assembly 20 comprises a plurality of dust collecting motors 30, a dust fall detection module 40, an output module 50 and an analysis module 60 electrically connected to each other, the output module 50 and the analysis module 60 are directly connected to a central control analysis system 70 outside in communication, each dust collecting motor 30 is disposed above the overhead traveling vehicle (OHT) 12, preferably each dust collecting motor 30 is disposed on two sides above the overhead traveling vehicle (OHT) 12 housing for removing particles and dust generated by operation of the overhead traveling vehicle (OHT) 12 from the contact type electric rail 10, a dust collecting filter 31, a current detector 32 and a driving module 33 are disposed in the dust collecting motor 30, the dust detection module 40 includes a plurality of dust detectors 41, each of the dust detectors 41 is respectively fixed on a housing of the overhead traveling vehicle (OHT) 12, preferably each of the dust detectors 41 is respectively fixed on inner walls of two sides below the housing of the overhead traveling vehicle (OHT) 12 or on the housing of the overhead traveling vehicle (OHT) 12 below the pantograph 121, each of the dust detectors 41 adopts distributed detection so as to facilitate regional detection at a plurality of points, so that the actual condition of dust distribution can be more accurately grasped, the driving module 33 starts the dust collecting motor 30, the dust detection module 40 detects dust, and the current detector 32 monitors the current of the dust collecting motor 30 and determines whether the current of the dust collecting motor 30 exceeds the maximum current definition value MAX (a) of the analysis module 60, if no overload phenomenon exists, the dust collecting filter element 31 can be continuously used, if overload problem exists, the dust collecting motor 30 can be damaged or the dust collecting filter element 31 can be blocked, and related treatment can be performed in real time.
In the foregoing contact overhead travelling crane (OHT) dust collecting system, a filter element detector 311 is disposed at the dust collecting filter element 31, and the filter element detector 311 uses a periodic detection mode or a real-time detection mode, and can detect by adopting a counting mode for monitoring the current or the time of use of the dust collecting motor 30.
The aforementioned contact overhead guided vehicle (OHT) dust collection system wherein the dust collection cartridge 31 is a replaceable cartridge.
In the foregoing contact overhead transport vehicle (OHT) dust collecting system, the output module 50 is an RS485 communication interface and an input/output (IO) interface.
The dust collection system of the contact overhead travelling crane (OHT) of the invention judges and monitors the dust falling amount by installing the scattered dust falling detection module 40 on the overhead travelling crane (OHT) 12, and can be superior to the existing non-contact (HID) or contact overhead travelling crane (OHT) by transmitting the detection result to the central control analysis system 70 to monitor and manage the action mode to be forbidden or allowed or maintained.
The contact type overhead travelling crane (OHT) dust collecting system of the invention is superior to the existing overhead travelling crane (OHT) in that the health management function of each dust collecting motor 30 is carried out by adding the current detector 32 to the dust collecting motor 30 and transmitting to the central control analysis system 70 for monitoring and controlling, and the active type dust collecting motor 30 is protected, so that the dust collecting motor 30 can be predicted in advance before abnormality, and the normal operation of the dust collecting motor 30 is ensured.
The dust collection filter element 31 of the contact type overhead travelling crane (OHT) dust collection system is provided with the filter element detector 311 for monitoring and detecting, and the current of a monitoring motor or the counting of the number of use hours are adopted, so that the use condition of the dust collection filter element 31 can be fully mastered by transmitting the current to the central control analysis system 70 for monitoring and controlling, and the best efficiency of the active type dust collection filter element can be achieved better than the existing overhead travelling crane (OHT).
As can be seen from the above, the dust collecting system of the overhead trolley (OHT) of the present invention has the advantages of monitoring and controlling dust falling better than the existing non-contact (HID) or overhead trolley (OHT) of the contact type, and is suitable for better industrial applicability.
The foregoing has been presented with a specific description of the features of the present invention with reference to the preferred embodiments thereof; however, those skilled in the art will recognize that variations and modifications can be made without departing from the spirit and principles of the invention, and that such variations and modifications are intended to be covered by the scope of the following claims.
Claims (8)
1. A contact electric rail overhead carrier dust collection system, comprising:
the electric rail track is arranged at an overhead position of the factory building, at least one overhead carrier is movably arranged on the electric rail track, at least one collector bow is arranged above the at least one overhead carrier correspondingly, and the at least one collector bow conducts current with the electric rail in the electric rail track to form a contact type electric rail; and
At least one dust collecting system assembly is arranged on the at least one overhead traveling vehicle correspondingly, the dust collecting system assembly comprises a plurality of dust collecting motors, a dust fall detection module, an output module and an analysis module which are electrically connected with each other, the output module and the analysis module are directly connected with an external central control analysis system in a communication mode, each dust collecting motor is arranged above the overhead traveling vehicle and is used for removing particles and dust generated by the contact type electric rail, a dust collecting filter element, a current detector and a driving module are arranged in the dust collecting motor, the dust fall detection module comprises a plurality of dust fall detectors, each dust fall detector is fixedly arranged on a shell of the overhead traveling vehicle respectively, the driving module starts the dust collecting motor, the dust fall detection module detects dust fall, and meanwhile, the current detector monitors the current of the dust collecting motor and judges whether the current of the dust collecting motor exceeds the maximum current definition value of the analysis module.
2. The overhead trolley dust collection system of claim 1 wherein a filter element detector is provided at the dust collection filter element, the filter element detector being configured to detect by monitoring the current of the dust collection motor or by counting the number of hours of use.
3. The overhead trolley dust collection system of claim 2 wherein the cartridge detector uses periodic or real-time detection.
4. A contact rail overhead carrier dust collection system according to claim 2 or 3, wherein the dust collection cartridge is a replaceable cartridge.
5. The overhead trolley dust collection system of claim 1 wherein the output module is an RS485 communication interface and an input-output interface.
6. The overhead trolley dust collection system of claim 1 wherein each dust collection motor is disposed on either side above the overhead trolley housing.
7. The dust collecting system of claim 1, wherein each dust fall detector is fixedly arranged on the inner wall of two sides below the overhead trolley housing or the overhead trolley housing below the pantograph.
8. The overhead trolley dust collection system of claim 1, wherein each of the dust fall detectors employs a distributed detection to facilitate localized detection at a plurality of points.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| TW110107438A TWI751919B (en) | 2021-02-26 | 2021-02-26 | Contact type electric rail overhead transport vehicle (OHT) dust collection system |
| TW110107438 | 2021-02-26 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN114955417A CN114955417A (en) | 2022-08-30 |
| CN114955417B true CN114955417B (en) | 2024-04-02 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN202110931245.6A Active CN114955417B (en) | 2021-02-26 | 2021-08-13 | Dust collection system of contact type overhead transport vehicle (OHT) with electric rail |
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| Country | Link |
|---|---|
| CN (1) | CN114955417B (en) |
| TW (1) | TWI751919B (en) |
Citations (17)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH07112393A (en) * | 1993-10-18 | 1995-05-02 | Yamaha Motor Co Ltd | Dust collecting device for robot |
| JP2000271552A (en) * | 1999-03-26 | 2000-10-03 | Hitachi Kiden Kogyo Ltd | Device for cleaning inside of traveling path for overhead travel conveyance truck |
| JP2002154782A (en) * | 2000-11-15 | 2002-05-28 | Tsubakimoto Chain Co | Overhead traveling type work carrier |
| CN1473357A (en) * | 2000-12-04 | 2004-02-04 | 株式会社荏原制作所 | Substrate processing method |
| CN101195437A (en) * | 2006-11-17 | 2008-06-11 | 日本阿西斯特技术株式会社 | Rail transport apparatus |
| CN101398632A (en) * | 2007-09-27 | 2009-04-01 | Asml荷兰有限公司 | Lithographic apparatus and method of cleaning a lithographic apparatus |
| TW200921808A (en) * | 2007-11-09 | 2009-05-16 | Able Print Technology Co Ltd | Bubble exclusion method for chip adhesive layer of semiconductor packaging |
| CN202575750U (en) * | 2012-05-18 | 2012-12-05 | 馨宝显机械有限公司 | Dust-free crown block |
| KR20130070194A (en) * | 2011-12-19 | 2013-06-27 | 주식회사 신성에프에이 | Wheels dust collector of overhead hoist transport |
| TWI522182B (en) * | 2014-10-03 | 2016-02-21 | 德範先進科技有限公司 | Automation vehicles washer |
| JP2016047520A (en) * | 2014-08-26 | 2016-04-07 | ユーエスウラサキ株式会社 | Dust collector |
| CN206948758U (en) * | 2017-06-14 | 2018-01-30 | 河南新科起重机股份有限公司 | A kind of novel electric appliance cabinet with dedusting function |
| KR101924311B1 (en) * | 2017-06-23 | 2018-12-03 | 주식회사 엔아이티코리아 | A Cleaning Apparatus for a Electrical Dust Collecting Apparatus |
| CN208853380U (en) * | 2018-09-17 | 2019-05-14 | 德淮半导体有限公司 | Semiconductor processing equipment |
| EP3533735A1 (en) * | 2018-03-02 | 2019-09-04 | Kannegiesser UK Limited | Cleaning apparatus for cleaning a rail system |
| CN209542382U (en) * | 2019-01-31 | 2019-10-25 | 湖北方圆环保科技有限公司 | A kind of apparatus for measuring dust concentration |
| WO2021013905A2 (en) * | 2019-07-22 | 2021-01-28 | Conservator Tyche Beheer B.V. | Device for and method of cleaning installations |
Family Cites Families (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6374748B1 (en) * | 1999-10-28 | 2002-04-23 | Murata Kikai Kabushiki Kaisha | Tracking cart system |
| JP5495070B2 (en) * | 2011-06-10 | 2014-05-21 | 株式会社ダイフク | Cleaning device for ceiling transfer equipment |
| JP5720954B2 (en) * | 2012-03-06 | 2015-05-20 | 株式会社ダイフク | Cleaning device for overhead conveyor |
| JP2013216446A (en) * | 2012-04-09 | 2013-10-24 | Daifuku Co Ltd | Cleaning device |
| TWI645162B (en) * | 2017-03-23 | 2018-12-21 | 台灣積體電路製造股份有限公司 | Environment monitoring system |
| US11183409B2 (en) * | 2018-08-28 | 2021-11-23 | Taiwan Semiconductor Manufacturing Company Ltd. | System for a semiconductor fabrication facility and method for operating the same |
-
2021
- 2021-02-26 TW TW110107438A patent/TWI751919B/en active
- 2021-08-13 CN CN202110931245.6A patent/CN114955417B/en active Active
Patent Citations (17)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH07112393A (en) * | 1993-10-18 | 1995-05-02 | Yamaha Motor Co Ltd | Dust collecting device for robot |
| JP2000271552A (en) * | 1999-03-26 | 2000-10-03 | Hitachi Kiden Kogyo Ltd | Device for cleaning inside of traveling path for overhead travel conveyance truck |
| JP2002154782A (en) * | 2000-11-15 | 2002-05-28 | Tsubakimoto Chain Co | Overhead traveling type work carrier |
| CN1473357A (en) * | 2000-12-04 | 2004-02-04 | 株式会社荏原制作所 | Substrate processing method |
| CN101195437A (en) * | 2006-11-17 | 2008-06-11 | 日本阿西斯特技术株式会社 | Rail transport apparatus |
| CN101398632A (en) * | 2007-09-27 | 2009-04-01 | Asml荷兰有限公司 | Lithographic apparatus and method of cleaning a lithographic apparatus |
| TW200921808A (en) * | 2007-11-09 | 2009-05-16 | Able Print Technology Co Ltd | Bubble exclusion method for chip adhesive layer of semiconductor packaging |
| KR20130070194A (en) * | 2011-12-19 | 2013-06-27 | 주식회사 신성에프에이 | Wheels dust collector of overhead hoist transport |
| CN202575750U (en) * | 2012-05-18 | 2012-12-05 | 馨宝显机械有限公司 | Dust-free crown block |
| JP2016047520A (en) * | 2014-08-26 | 2016-04-07 | ユーエスウラサキ株式会社 | Dust collector |
| TWI522182B (en) * | 2014-10-03 | 2016-02-21 | 德範先進科技有限公司 | Automation vehicles washer |
| CN206948758U (en) * | 2017-06-14 | 2018-01-30 | 河南新科起重机股份有限公司 | A kind of novel electric appliance cabinet with dedusting function |
| KR101924311B1 (en) * | 2017-06-23 | 2018-12-03 | 주식회사 엔아이티코리아 | A Cleaning Apparatus for a Electrical Dust Collecting Apparatus |
| EP3533735A1 (en) * | 2018-03-02 | 2019-09-04 | Kannegiesser UK Limited | Cleaning apparatus for cleaning a rail system |
| CN208853380U (en) * | 2018-09-17 | 2019-05-14 | 德淮半导体有限公司 | Semiconductor processing equipment |
| CN209542382U (en) * | 2019-01-31 | 2019-10-25 | 湖北方圆环保科技有限公司 | A kind of apparatus for measuring dust concentration |
| WO2021013905A2 (en) * | 2019-07-22 | 2021-01-28 | Conservator Tyche Beheer B.V. | Device for and method of cleaning installations |
Non-Patent Citations (1)
| Title |
|---|
| 新美星智能磁导搬运车;沈华;《酒·饮料技术装备》;20190228(第1期);第63-65页 * |
Also Published As
| Publication number | Publication date |
|---|---|
| TW202233465A (en) | 2022-09-01 |
| TWI751919B (en) | 2022-01-01 |
| CN114955417A (en) | 2022-08-30 |
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