CN114955417A - Contact overhead transport vehicle (OHT) dust collecting system - Google Patents
Contact overhead transport vehicle (OHT) dust collecting system Download PDFInfo
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- CN114955417A CN114955417A CN202110931245.6A CN202110931245A CN114955417A CN 114955417 A CN114955417 A CN 114955417A CN 202110931245 A CN202110931245 A CN 202110931245A CN 114955417 A CN114955417 A CN 114955417A
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- 239000000428 dust Substances 0.000 title claims abstract description 161
- 238000001514 detection method Methods 0.000 claims abstract description 26
- 238000004458 analytical method Methods 0.000 claims abstract description 18
- 239000002245 particle Substances 0.000 claims abstract description 5
- 238000000034 method Methods 0.000 claims description 6
- 238000004891 communication Methods 0.000 claims description 4
- 238000011897 real-time detection Methods 0.000 claims description 3
- 230000000737 periodic effect Effects 0.000 claims description 2
- 230000005611 electricity Effects 0.000 abstract 1
- 239000003981 vehicle Substances 0.000 description 48
- 238000012544 monitoring process Methods 0.000 description 8
- 230000036541 health Effects 0.000 description 6
- 230000008901 benefit Effects 0.000 description 5
- 238000013461 design Methods 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 3
- 230000008569 process Effects 0.000 description 3
- 239000004065 semiconductor Substances 0.000 description 3
- 230000002159 abnormal effect Effects 0.000 description 2
- 238000012423 maintenance Methods 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 241001391944 Commicarpus scandens Species 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 230000002860 competitive effect Effects 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000011156 evaluation Methods 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000004806 packaging method and process Methods 0.000 description 1
- 238000012827 research and development Methods 0.000 description 1
- 238000012360 testing method Methods 0.000 description 1
- 238000012546 transfer Methods 0.000 description 1
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G35/00—Mechanical conveyors not otherwise provided for
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D21/00—Measuring or testing not otherwise provided for
- G01D21/02—Measuring two or more variables by means not covered by a single other subclass
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- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Electric Propulsion And Braking For Vehicles (AREA)
- Current-Collector Devices For Electrically Propelled Vehicles (AREA)
Abstract
A contact overhead trolley (OHT) dust collection system, comprising: a power rail track, wherein the current collector bow and the power rail in the power rail track are conducted with current to form a contact power rail; at least one dust collecting system assembly, this dust collecting system assembly contains and is equipped with a plurality of album dirt motors, a dust fall detection module, an output module and an analysis module electricity each other and connects, establishes a collection dirt filter core, a current detector and a drive module in this collection dirt motor, this dust fall detection module contains and is equipped with a plurality of dust fall detectors, this drive module starts this collection dirt motor for clear away the produced particle of contact electric rail and dust, this dust fall detection module detects the dust fall, makes and can really master the actual situation that the dust fall distributes.
Description
Technical Field
The invention belongs to the technical field of Overhead Hoist Transfer (OHT), in particular to a dust collecting system of a contact type electric rail Overhead transport vehicle, which is characterized in that a distributed dust falling detection module is arranged on the Overhead transport vehicle to judge and monitor the dust falling amount; the current detector is arranged on the dust collecting motor to perform the health management function of each dust collecting motor, thereby achieving the effect of actively protecting the dust collecting motor.
Background
In recent years, the global semiconductor industry has been competitive, and in addition to the gradual change of advanced process technologies, factory intelligence also needs to be advanced, and an overhead transport vehicle (OHT) can effectively utilize the three-dimensional space of a factory building, so that the utilization rate of the space in a dust-free room is maximized on the premise of not occupying personnel walkways. The system is originally widely used for material transportation in the front-end 12-inch semiconductor wafer fab, but the back-end packaging and testing process of the semiconductor industry is also sensitive to the urgent need of manpower, and overhead transport vehicles are adopted to save manpower.
The conventional overhead transport vehicle can be classified into two types, i.e., a non-contact (HID) overhead transport vehicle and a contact type electric rail overhead transport vehicle, and the HID overhead transport vehicle mainly provides Power for the overhead transport vehicle to travel by non-contact Power supply, and thus, since the Power supply device is not physically contacted with the overhead transport vehicle, particles or dust are less likely to be generated, and the dust drop is reduced by the non-contact characteristic, thereby reducing the dust drop and achieving the function of reducing the dust drop. The advantages of the existing non-contact (HID) overhead truck include: (1) the dust falling amount is small. (2) No sparking occurs. (3) Of modular type, but also has the following drawbacks: (1) the equipment is expensive. (2) The subsequent maintenance equipment costs are high (replacement of power conversion components is required). (3) No detection is made of dust falling in progress or motion.
The existing contact type electric rail overhead transport vehicle generates electric power after contacting with an electric rail through a pantograph and is provided for the overhead transport vehicle to travel, and the overhead transport vehicle can generate a dust falling phenomenon due to contact in the traveling process. Consequently, its advantage of current contact electric rail overhead van is: (1) the equipment is low in price. (2) And the subsequent maintenance cost is low. (3) Of modular type, with the following disadvantages: (1) the dust fall amount is high. (2) There is a risk of sparking. (3) No detection is made of falling dust in progress or motion.
The existing control dust falling mode for the contact type power rail dust falling has the following steps: (1) adopting a dust collecting system: the dust collector uses a commercial dust collector for dust collection, has the advantages of concentrating falling dust and has the following disadvantages: (a) the dust falling area is not provided with a corresponding sensor. (b) The driving motor part is not provided with a corresponding sensor. (c) The dust collecting filter element part is not provided with a corresponding sensor. (2) Adopting a dust falling metal plate shielding sheet: the shielding is carried out by using a metal plate form, so that the dust falling quantity can be concentrated, and the defect that a corresponding sensor is not arranged in a dust falling area is overcome.
Therefore, in order to solve the above problems of the conventional overhead transportation vehicle structure, how to develop an innovative structure with more ideal practicability is desired by the consumers, and the goal and direction of the related manufacturers to make efforts for research and development breakthroughs.
In view of the above, the inventor of the present invention has made various experiments on the manufacturing, development and design of related products for many years, and has made a detailed design and a careful evaluation to the above-mentioned objects, and finally, has obtained a practical invention.
Disclosure of Invention
The technical problems to be solved are as follows: the existing overhead transport vehicle is not provided with a corresponding sensor aiming at a dust falling area, a driving motor part is not provided with a corresponding sensor, and a dust collecting filter element part is not provided with a corresponding sensor, so that the driving motor is easy to break down, the dust falling pollutes the production environment, the product quality and the production efficiency are seriously influenced, and the improvement is necessary.
The technical characteristics of solving the problems are as follows: in order to solve the above problems, the present invention provides a dust collecting system for a contact-type electric rail overhead conveyer, comprising: the electric rail track is arranged at the elevated position of the factory building, at least one elevated carrier can be assembled on the electric rail track in a running way, at least one pantograph is arranged above the at least one elevated carrier, and the at least one pantograph and the electric rail in the electric rail track are conducted with current to form a contact type electric rail.
At least one dust collecting system assembly, which is arranged on the overhead transport vehicle corresponding to the at least one overhead transport vehicle and comprises a plurality of dust collecting motors, a dust falling detection module, an output module and an analysis module which are electrically connected with each other, the output module and the analysis module are directly communicated with an external central control analysis system, each dust collecting motor is arranged above the overhead transport vehicle and used for removing particles and dust generated by the contact type electric rail, a dust collecting filter core, a current detector and a driving module are arranged in the dust collecting motor, the dust falling detection module comprises a plurality of dust falling detectors, each detector is fixedly arranged on a shell of the overhead transport vehicle, the driving module starts the dust collecting motor, the dust falling detection module detects the falling dust, and the current detector monitors the current of the dust collecting motor at the same time, and judging whether the current of the dust collecting motor exceeds the maximum current defined value MAX (A) of the analysis module, if no overload phenomenon exists, the dust collecting filter element can be continuously used, and if overload problem exists, the dust collecting motor is damaged or the dust collecting filter element is blocked.
In the dust collecting system of the contact type electric rail overhead traveling vehicle, each of the dust collecting motors is disposed at two sides above the housing of the overhead traveling vehicle.
In the dust collecting system of the contact type electric rail overhead transport vehicle, each of the detectors is respectively fixed on the inner walls of two sides below the housing of the overhead transport vehicle or the housing of the overhead transport vehicle below the pantograph.
In the above-mentioned dust collecting system of the contact type overhead trolley, each of the detectors employs distributed detection to facilitate regional detection of a plurality of points.
In the dust collecting system of the contact type electric rail overhead transport vehicle, a filter element detector is arranged at the dust collecting filter element, and the filter element detector can detect in a cycle detection mode or a real-time detection mode by adopting a counting mode of monitoring the current or service time of the dust collecting motor.
In the dust collecting system of the contact type overhead trolley, the dust collecting filter core is a replaceable filter core.
In the dust collecting system of the contact type electric rail overhead transport vehicle, the output module is an RS485 communication interface and an input/output interface.
Efficacy against the prior art: the dust collecting system of the contact type electric rail overhead transport vehicle of the invention judges and monitors the dust falling amount by arranging the distributed dust falling detection modules on the overhead transport vehicle, and the detection result is transmitted to the central control analysis system to monitor and control the behavior mode to be forbidden or allowed or maintained, so that the dust collecting system is superior to the prior non-contact (HID) type or contact type electric rail overhead transport vehicle; the current detector is additionally arranged on the dust collection motor to perform the health management function of each dust collection motor, the health management function can be monitored and controlled by transmitting the health management function to the central control analysis system, the current detector is superior to the existing overhead transport vehicle, the active protection dust collection motor is applied, and the health management function can be predicted before the abnormal condition so as to ensure that the dust collection motor can normally operate; the filter element detector for monitoring and detecting the dust collecting filter element adopts the counting of the current or service time of the monitoring motor, can be transmitted to the central control analysis system for monitoring and control, fully masters the use condition of the dust collecting filter element, is superior to the existing overhead carrier, and can achieve the best efficiency of the active dust collecting filter element.
The foregoing objects, features and advantages of the invention will be apparent from the following more particular description of preferred embodiments of the invention, as illustrated in the accompanying drawings.
Drawings
FIG. 1 is a perspective view of an embodiment of the present invention.
FIG. 2 is a schematic front plan view of an embodiment of the present invention.
FIG. 3 is a system block diagram of an embodiment of the present invention.
List of reference numerals: 10-contact power rail; 11-rail track; 12-overhead transport vehicle (OHT); 121-pantograph; 20-a dust collection system assembly; 30-a dust collecting motor; 31-a dust collecting filter element; 311-a cartridge detector; 32-a current detector; 33-a drive module; 40-a dust fall detection module; 41-dust fall detector; 50-an output module; 60-an analysis module; 70-Central control analysis System.
Detailed Description
The present invention provides a design of a contact overhead rail transport vehicle (OHT) dust collecting system.
To facilitate the reader's understanding and appreciation of the objects, features, and advantages of the present invention, the following detailed description of the preferred embodiments and drawings is provided:
referring to fig. 1 to 3, the present invention provides a contact overhead trolley (OHT) dust collecting system, comprising:
the electric rail track 11 is arranged at an elevated position of a factory building, at least one overhead handling vehicle (OHT)12 is arranged on the electric rail track 11 in a running mode, at least one pantograph 121 is arranged above the at least one overhead handling vehicle (OHT)12, and the at least one pantograph 121 and the electric rail in the electric rail track 11 are in current conduction to form a contact type electric rail 10.
At least one dust collecting system assembly 20 disposed on the at least one overhead transport vehicle (OHT)12, the dust collecting system assembly 20 comprising a plurality of dust collecting motors 30, a dust drop detecting module 40, an output module 50 and an analyzing module 60 electrically connected to each other, the output module 50 and the analyzing module 60 directly connected to an external central control analyzing system 70 in communication, each of the dust collecting motors 30 is disposed above the overhead transport vehicle (OHT)12, preferably, each of the dust collecting motors 30 is disposed on both sides of the overhead transport vehicle (OHT)12 housing for removing particles and dust generated by the contact type electric rail 10 due to the operation of the overhead transport vehicle (OHT)12, a dust collecting filter 31, a current detector 32 and a driving module 33 are disposed in the dust collecting motor 30, the dust drop detecting module 40 comprises a plurality of dust drop detectors 41, each of the dust falling detectors 41 is fixed to the housing of the overhead transport vehicle (OHT)12, preferably each of the dust falling detectors 41 is fixed to the inner walls of the two sides of the housing of the overhead transport vehicle (OHT)12 or the housing of the overhead transport vehicle (OHT)12 under the pantograph 121, each of the dust falling detectors 41 is configured to perform distributed detection so as to perform regional detection at a plurality of points, so that the actual status of dust falling distribution can be accurately grasped, the driving module 33 starts the dust collecting motor 30, the dust falling detection module 40 detects dust falling, the current detector 32 monitors the current of the dust collecting motor 30 and determines whether the current of the dust collecting motor 30 exceeds the maximum current limit max (a) of the analysis module 60, the dust collecting filter 31 can be continuously used if no overload occurs, the dust collecting motor 30 may be damaged or the dust collecting filter 31 may be blocked if overload occurs, the relevant treatment can be done in real time.
In the above-mentioned contact overhead trolley (OHT) dust collecting system, a filter core detector 311 is disposed at the dust collecting filter core 31, and the filter core detector 311 can detect the current or the number of hours of use of the dust collecting motor 30 by a counting method using a periodic detection method or a real-time detection method.
In the above-mentioned contact overhead trolley (OHT) dust collecting system, the dust collecting filter element 31 is a replaceable filter element.
In the above-mentioned overhead trolley (OHT) dust collecting system, the output module 50 is an RS485 communication interface and an input/output (IO) interface.
The dust collecting system of the present invention is superior to the prior art non-contact (HID) type or contact type overhead rail transport vehicle (OHT) by installing a distributed dust detecting module 40 on the overhead rail transport vehicle (OHT)12 to determine and monitor the dust falling amount, and transmitting the detection result to the central control analysis system 70 to monitor and control the behavior mode as forbidden or allowed or maintained.
The present invention relates to a contact overhead trolley (OHT) dust collecting system, which is superior to the prior overhead trolley (OHT) dust collecting system in that the current detector 32 is additionally installed on the dust collecting motor 30 to perform the health management function of each dust collecting motor 30, and the dust collecting motor can be monitored and controlled by being transmitted to the central control analysis system 70, and the active protection dust collecting motor 30 is applied to ensure the dust collecting motor 30 to normally operate before an abnormal condition occurs.
The dust collecting filter element 31 of the contact type overhead transport vehicle (OHT) dust collecting system of the invention is provided with a filter element detector 311 for monitoring and detecting, adopts the counting of the current or service hours of a monitoring motor, and can carry out monitoring and control by transmitting to a central control analysis system 70, thereby fully mastering the service condition of the dust collecting filter element 31, being superior to the existing overhead transport vehicle (OHT) and achieving the best efficiency of an active dust collecting filter element.
In view of the above, the dust collecting system of the contact overhead rail transport vehicle (OHT) of the present invention has the dust falling area, the dust collecting motor and the dust collecting filter all provided with the detectors, so that the monitoring and controlling of the dust falling is better than the existing non-contact (HID) type or contact overhead rail transport vehicle (OHT), and the present invention is suitable for better industrial applicability.
The foregoing is a detailed description of the features of the invention with reference to preferred embodiments thereof; however, it will be apparent to those skilled in the art that various changes and modifications can be made therein without departing from the spirit and scope of the invention as defined in the following claims.
Claims (8)
1. The utility model provides an overhead carrier dust collection system of contact electric rail which characterized in that includes:
the electric rail track is arranged at an elevated position of a factory building, at least one elevated carrier can be assembled on the electric rail track in a running way, at least one pantograph is arranged above the at least one elevated carrier correspondingly, and the at least one pantograph and the electric rail in the electric rail track are conducted with current to form a contact type electric rail; and
at least one dust collecting system assembly, at least one dust collecting system assembly is arranged on the at least one overhead transport vehicle corresponding to the at least one overhead transport vehicle, the dust collecting system assembly comprises a plurality of dust collecting motors, a dust falling detection module, an output module and an analysis module which are mutually and electrically connected, the output module and the analysis module are directly communicated and connected with an external central control analysis system, each dust collecting motor is arranged above the overhead transport vehicle and used for clearing particles and dust generated by the contact type electric rail, a dust collecting filter core, a current detector and a driving module are arranged in the dust collecting motor, the dust falling detection module comprises a plurality of dust falling detectors, each dust falling detector is respectively and fixedly arranged on a shell of the overhead transport vehicle, the driving module starts the dust collecting motor, the dust falling detection module detects the falling dust, and the current detector monitors the current of the dust collecting motor at the same time, and judging whether the current of the dust collection motor exceeds the maximum current definition value of the analysis module.
2. The system of claim 1, wherein the dust filter is provided with a filter detector, and the filter detector monitors the current or the number of hours of use of the dust collecting motor.
3. The contact type electric rail overhead conveyer dust collecting system of claim 2, wherein the filter detector uses a periodic detection method or a real-time detection method.
4. The contact rail overhead trolley dust collecting system of claim 2 or 3, wherein the dust collecting filter is a replaceable filter.
5. The system of claim 1, wherein the output module is an RS485 communication interface and an input/output interface.
6. The system of claim 1, wherein each of the motors is disposed at two sides above the overhead traveling vehicle housing.
7. The overhead trolley dust collecting system of claim 1, wherein each of the detectors is fixed to the inner wall of the overhead trolley housing on both sides below the overhead trolley housing or the overhead trolley housing below the pantograph.
8. The contact rail overhead vehicle dust collection system of claim 1, wherein each of said detectors employs distributed detection to facilitate regional detection of a plurality of points.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| TW110107438A TWI751919B (en) | 2021-02-26 | 2021-02-26 | Contact type electric rail overhead transport vehicle (OHT) dust collection system |
| TW110107438 | 2021-02-26 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN114955417A true CN114955417A (en) | 2022-08-30 |
| CN114955417B CN114955417B (en) | 2024-04-02 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202110931245.6A Active CN114955417B (en) | 2021-02-26 | 2021-08-13 | Dust collection system of contact type overhead transport vehicle (OHT) with electric rail |
Country Status (2)
| Country | Link |
|---|---|
| CN (1) | CN114955417B (en) |
| TW (1) | TWI751919B (en) |
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Also Published As
| Publication number | Publication date |
|---|---|
| CN114955417B (en) | 2024-04-02 |
| TW202233465A (en) | 2022-09-01 |
| TWI751919B (en) | 2022-01-01 |
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