TW202233465A - Dust collection system of contact-type busbar overhead hoist transfer (OHT) capable of performing various health management functions for dust collecting motor to actively protect dust collecting motor - Google Patents

Abstract

A dust collection system of contact-type busbar overhead hoist transfer (OHT) comprises: a busbar rail, wherein the collector bow conducts electric current to the busbar in the busbar rail to form a contact-type busbar; at least one dust collection system assembly. The dust collection system assembly comprises a plurality of dust collecting motors, a dustfall detection module, an output module, and an analysis module that are electrically connected with each other. The dust collecting motor is provided therein with a dust collection filter element, an electric current detection sensor, and a driving module. The dustfall detection module includes a plurality of detector sensors. The driving module activates the dust collecting motors to remove the particles and dust generated by the contact-type busbar. The dustfall detection module carries out detection of the falling dust, so as to precisely control the actual situation of dustfall distribution.

Description

Contact Tram Overhead Truck (OHT) Dust Collection System

The invention belongs to the technical field of Overhead Hoist Transfer (OHT), in particular, it technically provides a contact type electric rail overhead transport vehicle (OHT) dust collection system. The distributed dust detection module is used to judge and monitor the amount of dust falling; by installing current detection and detection in the dust collection motor, various dust collection motor health management functions are performed to achieve the effect of active protection of the dust collection motor.

In recent years, the competition in the global semiconductor industry has been fierce. In addition to the rapid development of advanced process technology, factory intelligence also needs to keep pace with the times. Overhead trucks (OHT) can effectively use the three-dimensional space of the factory, and will be dust-free without occupying personnel aisles. Indoor space utilization is maximized. This system was originally widely used for material handling in 12-inch semiconductor front-end fabs, but the back-end packaging and testing process in the semiconductor industry also felt the need for manpower. OHT).

According to the above, conventional overhead trucks (OHT) can be divided into non-contact (High Efficiency Inductive Power Distribution Technology, HID) type overhead trucks (OHT) and contact rail overhead trucks (OHT) two Type, non-contact (HID) type overhead truck (OHT) mainly provides the use of overhead truck (OHT) traveling power through non-contact power supply, because the power supply equipment does not have physical contact with the overhead truck (OHT) , so it is less likely to generate particles or dust. With this non-contact feature, it can reduce dust and achieve the function of less dust. Therefore, the advantages of the conventional non-contact (HID) type overhead truck (OHT) include: (1) less dust fall. (2) There will be no spark phenomenon. (3) It has a modular type, but it also has the following disadvantages: (1) The equipment is expensive. (2) The cost of subsequent maintenance equipment is high (power conversion components need to be replaced). (3) There is no detection of falling dust while traveling or in motion.

The conventional contact-type electric rail overhead truck (OHT) is used to generate electricity after contacting the electric rail through the pantograph to provide the overhead truck (OHT) to travel. The overhead truck (OHT) will produce dust due to contact during the travel Phenomenon. Therefore, the advantages of the conventional contact-type overhead transport vehicle (OHT) are: (1) The equipment is inexpensive. (2) The follow-up maintenance cost is low. (3) It has a modular type, but its disadvantages are: (1) The amount of dust falling is high. (2) There is a risk of sparks. (3) There is no detection of falling dust while traveling or in motion.

The conventional methods for controlling dust falling from contact rails are as follows: (1) Using a dust collection system: it uses a commercially available vacuum cleaner to collect dust. The advantage is that the falling dust can be concentrated. sensing detection. (b) There is no corresponding sensing detection in the driving motor part. (c) There is no corresponding sensing detection in the dust collecting filter. (2) Use sheet metal mask for dust fall: use sheet metal form for masking, the advantage is that the amount of dust falling can be concentrated, and the disadvantage is that the dust fall There is no corresponding sensing detection in the area.

Therefore, how to develop a more ideal and practical innovative structure in view of the problems existing in the above-mentioned conventional Overhead Truck (OHT) structure is what consumers are eagerly looking forward to. direction.

In view of this, the inventor has been engaged in the manufacturing, development and design of related products for many years, aiming at the above-mentioned goals, after detailed design and careful evaluation, finally came up with a practical invention.

Conventional overhead trucks (OHT) have no corresponding sensing detection for the dust-falling area, no corresponding sensing detection for the driving motor part, and no corresponding sensing detection for the dust collecting filter part. It is known that the drive motor is prone to failure and dust pollution pollutes the production environment, which seriously affects product quality and production efficiency, and it is necessary to improve it.

In order to improve the above-mentioned problems, the present invention provides a dust collection system for a contact type electric rail overhead transport vehicle (OHT), which includes: an electric rail track, the electric rail track is arranged at the elevated position of the factory building, and at least one overhead transport vehicle ( OHT) is operably assembled on the electric rail track, and at least one pantograph is arranged above at least one of the overhead transport vehicles (OHT), and at least one of the pantographs conducts current with the electric rail in the electric rail track. , which constitutes a contact rail.

At least one dust collection system assembly, corresponding to at least one of the overhead handling The vehicle (OHT) is provided with at least one dust collection system assembly, and the dust collection system assembly includes a plurality of dust collection motors, a dust detection module, an output module and an analysis module that are electrically connected to each other. The output module and the analysis module are directly connected to an external central control analysis system. Each of the dust collecting motors is installed above the overhead transport vehicle (OHT) to remove the particles and particles generated by the contact rail. Dust, the dust collecting motor is provided with a dust collecting filter, a current detection detection and a drive module, the dust detection module includes a plurality of detection detections, each of the detection detections is fixed separately Set on the housing of the overhead transport vehicle (OHT), the driving module activates the dust collecting motor, the dust falling detection module detects falling dust, and at the same time, the current detection detection monitors the current of the dust collecting motor, and Determine whether the current of the dust collecting motor exceeds the maximum current definition value MAX(A) of the analysis module. If there is no overload phenomenon, the dust collecting filter can continue to be used. If there is an overload problem, the dust collecting motor may be damaged or the The dust filter is clogged.

In the above-mentioned dust collecting system of the contact type electric rail overhead transport vehicle (OHT), each of the dust collecting motors is arranged on both sides above the housing of the overhead transport vehicle (OHT).

In the above-mentioned dust collection system of contact type electric rail overhead transport vehicle (OHT), each of the detection detections is respectively fixed on the inner walls of the two sides below the overhead transport vehicle (OHT) shell or the underside of the pantograph. On the Overhead Truck (OHT) housing.

In the above-mentioned contact type electric rail overhead transport vehicle (OHT) dust collection system, each of the detection detection adopts distributed detection, so as to facilitate the detection of multiple points regional detection.

In the above-mentioned dust collection system of contact type electric rail overhead transport vehicle (OHT), wherein the dust collecting filter is provided with a filter detection detection, and the filter detection uses the periodic detection method or the real-time detection method, It can be detected by monitoring the current of the dust collecting motor or the counting method of using hours.

In the above-mentioned contact type electric rail overhead transport vehicle (OHT) dust collection system, the dust collection filter core is a replaceable filter element.

In the above-mentioned dust collection system for contact type overhead transport vehicle (OHT), the output module is an RS485 communication port and an input/output (IO) interface.

In the dust collection system of the contact type electric rail overhead transport vehicle (OHT) of the present invention, the distributed dust detection module is installed on the overhead transport vehicle (OHT) to judge and monitor the amount of dust falling, and the detection result can be transmitted by sending the detection result. Go to the central control analysis system to monitor and control the behavior mode for prohibition or permission or maintenance, so that it can be better than the existing non-contact (HID) or contact electric rail overhead truck (OHT); Added current detection and detection to carry out the health management functions of various dust collection motors, which can be monitored and controlled by transmitting to the central control analysis system, which is superior to conventional overhead trucks (OHT) and uses active protection for dust collection. The motor can be predicted in advance before the abnormality to ensure the normal operation of the dust collecting motor; the dust collecting filter core is equipped with monitoring and detection filter detection detection, which uses monitoring motor current or usage hours count, which can be transmitted to the central Control analysis system to monitor and control, fully grasp the use of dust filter, better than conventional overhead truck (OHT), can achieve Active dust filter for optimum performance.

Regarding the techniques, means and effects of the present invention, a preferred embodiment is given and described in detail in conjunction with the drawings. It is believed that the above-mentioned purposes, structures and features of the present invention can be used to gain an in-depth and specific understanding. .

10: Contact Rails

11: Electric rail track

12: Overhead Truck (OHT)

121: Pantograph

20: Dust collection system assembly

30: Dust collection motor

31: Dust collection filter

311: Filter detection detection

32: Current detection detection

33: Driver module

40: Dust detection module

41: Detection detection

50: Output module

60: Analysis Module

70: Central control analysis system

[FIG. 1] is a three-dimensional schematic view of an embodiment of the present invention.

[FIG. 2] is a schematic plan view from the front of an embodiment of the present invention.

[FIG. 3] is a system block diagram of an embodiment of the present invention.

The present invention provides a designer of a dust collection system for a contact type electric rail overhead transport vehicle (OHT).

In order to enable your examiners to have a further understanding and understanding of the purpose, features and effects of the present invention, the detailed description is as follows in conjunction with the embodiments and drawings:

Referring to Figures 1 to 3, the present invention provides a dust collection system for a contact-type overhead transport vehicle (OHT), which includes:

An electric rail 11, the electric rail 11 is arranged at an elevated position of the factory building, and at least one overhead transport vehicle (OHT) 12 is operably assembled on the electric rail 11, corresponding to at least one of the overhead transport vehicles (OHT) At least one pantograph 121 is arranged above the 12 , and at least one of the pantographs 121 conducts current with the electric rail in the electric rail 11 , which constitutes a contact electric rail 10 .

At least one dust collection system assembly 20, corresponding to at least one of the overhead trucks (OHT) 12, is provided with at least one dust collection system assembly 20, the dust collection system assembly 20 includes a plurality of dust collection motors 30, a The dust detection module 40, an output module 50 and an analysis module 60 are electrically connected to each other. The output module 50 and the analysis module 60 are directly connected to an external central control analysis system 70 by signals. 30 is installed above the overhead transport vehicle (OHT) 12, preferably each of the dust collecting motors 30 is arranged on both sides above the housing of the overhead transport vehicle (OHT) 12 to remove the contact type electric rail 10 due to For the particles and dust generated by the operation of the overhead transport vehicle (OHT) 12, the dust collecting motor 30 is provided with a dust collecting filter 31, a current detection detection 32 and a driving module 33. The dust detection module 40 includes a plurality of detection detections 41, each of the detection detections 41 is respectively fixed on the casing of the overhead transport vehicle (OHT) 12, preferably each of the detection detections 41 is respectively fixed on On the inner walls of the two sides below the casing of the overhead transport vehicle (OHT) 12 or the casing of the overhead transport vehicle (OHT) 12 under the pantograph 121 , the detection detection 41 adopts distributed detection, so as to In order to carry out regional detection of multiple points, in order to more accurately grasp the actual situation of the dust distribution, the drive module 33 starts the dust collecting motor 30, the dust detection module 40 detects the dust, and the current The detection detection 32 monitors the current of the dust collecting motor 30, and determines whether the current of the dust collecting motor 30 exceeds the maximum current defined value MAX(A) of the analysis module 60, if there is no overload phenomenon, the dust collecting filter 31 can be For continuous use, if there is an overload problem, the dust collecting motor 30 may be damaged or the dust collecting filter core 31 may be blocked, and relevant treatment can be performed immediately.

The aforementioned contact type rail overhead transport vehicle (OHT) dust collection system system, wherein the dust collecting filter 31 is provided with a filter detection detection 311, the filter detection detection 311 uses the periodic detection method or the real-time detection method, which can be used to monitor the current of the dust collecting motor 30 or use The counting method of hours is detected.

In the above-mentioned dust collection system of the contact type overhead transport vehicle (OHT), the dust collection filter core 31 is a replaceable filter element.

In the above-mentioned contact-type overhead transport vehicle (OHT) dust collection system, the output module 50 is an RS485 communication port and an input/output (IO) interface.

In the dust collection system of the contact type electric rail overhead transport vehicle (OHT) of the present invention, the distributed dust detection module 40 is installed on the overhead transport vehicle (OHT) 12 to determine and monitor the amount of dust falling. The results are sent to the central control analysis system 70 for monitoring and control of behavior patterns as prohibited or permitted or maintenance, making it superior to existing non-contact (HID) or contact-type overhead trucks (OHT).

In the dust collection system of the contact-type overhead transport vehicle (OHT) of the present invention, by adding a current detection and detection 32 to the dust collection motor 30, various health management functions of the dust collection motor 30 can be performed, which can be transmitted to the central The control analysis system 70 is used for monitoring and control, which is superior to the conventional overhead truck (OHT), and the active protection of the dust collecting motor 30 can be used to predict the abnormality in advance, so as to ensure the normal operation of the dust collecting motor 30 .

In the dust collection system of the contact type electric rail overhead transport vehicle (OHT) of the present invention, the dust collection filter core 31 is provided with a filter core detection detection 311 for monitoring and detection, which uses monitoring motor current or counting the hours of use, which can be transmitted to Central control analysis The system 70 performs monitoring and control to fully grasp the usage status of the dust collecting filter 31, which is superior to the conventional overhead truck (OHT) and can achieve the best performance of the active dust collecting filter.

From the above, it can be seen that the dust collection system of the contact-type overhead transport vehicle (OHT) of the present invention is indeed the first in the industry and meets the novelty requirements of the invention patent, and its comprehensive innovative design is in line with the progress of the invention patent. The dustfall area, the dust collection motor and the dust collection filter are all equipped with detection and detection, so that the monitoring and control of dust fall is better than the conventional non-contact (HID) type or contact type electric rail overhead transport vehicle (OHT). , in line with better industrial utilization.

The foregoing is a specific description of the technical features of the present invention with respect to the preferred embodiments of the present invention; however, those who are familiar with the art can make changes and modifications to the present invention without departing from the spirit and principles of the present invention. Such changes and modifications shall be covered by the scope defined by the following patent application scope.

To sum up, the present invention provides a dust collection system for a contact type electric rail overhead transport vehicle (OHT), which has indeed achieved all the objectives of the present invention, and the spatial pattern of its combined structure has not been found in similar products, nor has it been disclosed. Before the application, the provisions of the Patent Law have been complied with, and the application shall be filed in accordance with the law.

10: Contact Rails

11: Electric rail track

12: Overhead Truck (OHT)

121: Pantograph

30: Dust collection motor

41: Detection detection

Claims (8)

A contact-type rail overhead truck (OHT) dust collection system, comprising: an electric rail track, the electric rail track is arranged at the elevated position of the factory building, at least one overhead transport vehicle (OHT) is operably assembled on the electric rail track, and at least one overhead transport vehicle (OHT) is provided with at least one A pantograph, at least one of the pantographs conducts current with the rails in the rails, which form a contact rail; and At least one dust collection system assembly, corresponding to at least one of the overhead trucks (OHT), is provided with at least one dust collection system assembly, the dust collection system assembly includes a plurality of dust collection motors, a dust detection module , An output module and an analysis module are electrically connected to each other, the output module and the analysis module are directly connected to an external central control analysis system, and each of the dust collecting motors is installed above the overhead truck (OHT) , used to remove the particles and dust generated by the contacting electric rail, the dust collecting motor is equipped with a dust collecting filter, a current detection detection and a drive module, the dust detection module includes a plurality of Each detection detection module is respectively fixed on the housing of the overhead transport vehicle (OHT), the drive module activates the dust collecting motor, the dust detection module detects the falling dust, and at the same time The current detection detection monitors the current of the dust collecting motor, and determines whether the current of the dust collecting motor exceeds the maximum current definition value of the analysis module. The dust collection system of the contact type electric rail overhead transport vehicle (OHT) as claimed in claim 1, wherein the dust collection filter is provided with a filter detection detection, and the filter detection detection can be used to monitor the dust collection Detected by counting motor current or hours of use. The dust collection system of the contact-type electric rail overhead transport vehicle (OHT) as claimed in claim 2, wherein the filter detection and detection use a periodic detection method or a real-time detection method. The dust collection system of a contact type electric rail overhead transport vehicle (OHT) as claimed in claim 2 or 3, wherein the dust collection filter is a replaceable filter element. The dust collection system for a contact type electric rail overhead transport vehicle (OHT) as claimed in claim 1, wherein the output module is an RS485 communication port and an input/output (IO) interface. The contact-type electric rail overhead transport vehicle (OHT) dust collection system as claimed in claim 1, wherein each of the dust collection motors is disposed on both sides above the overhead transport vehicle (OHT) housing. The contact type electric rail overhead transport vehicle (OHT) dust collection system as claimed in claim 1, wherein each of the detections is respectively fixed on the inner walls of the two sides below the overhead transport vehicle (OHT) shell or the collection On the Overhead Truck (OHT) housing below the pantograph. The dust collection system of the contact type electric rail overhead transport vehicle (OHT) as claimed in claim 1, wherein each of the detection detection adopts distributed detection, so as to perform regional detection of multiple points.

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