JPH0333700Y2 - - Google Patents

Info

Publication number
JPH0333700Y2
JPH0333700Y2 JP1987068315U JP6831587U JPH0333700Y2 JP H0333700 Y2 JPH0333700 Y2 JP H0333700Y2 JP 1987068315 U JP1987068315 U JP 1987068315U JP 6831587 U JP6831587 U JP 6831587U JP H0333700 Y2 JPH0333700 Y2 JP H0333700Y2
Authority
JP
Japan
Prior art keywords
air
air blowing
conveyed object
drive
pallet
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1987068315U
Other languages
English (en)
Japanese (ja)
Other versions
JPS63178229U (fi
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1987068315U priority Critical patent/JPH0333700Y2/ja
Publication of JPS63178229U publication Critical patent/JPS63178229U/ja
Application granted granted Critical
Publication of JPH0333700Y2 publication Critical patent/JPH0333700Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Rollers For Roller Conveyors For Transfer (AREA)
  • Specific Conveyance Elements (AREA)
JP1987068315U 1987-05-07 1987-05-07 Expired JPH0333700Y2 (fi)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1987068315U JPH0333700Y2 (fi) 1987-05-07 1987-05-07

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1987068315U JPH0333700Y2 (fi) 1987-05-07 1987-05-07

Publications (2)

Publication Number Publication Date
JPS63178229U JPS63178229U (fi) 1988-11-18
JPH0333700Y2 true JPH0333700Y2 (fi) 1991-07-17

Family

ID=30908016

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1987068315U Expired JPH0333700Y2 (fi) 1987-05-07 1987-05-07

Country Status (1)

Country Link
JP (1) JPH0333700Y2 (fi)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4754885B2 (ja) * 2004-11-30 2011-08-24 株式会社ダイヘン 基板搬送装置

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS503033U (fi) * 1973-05-08 1975-01-13
JPS5221579U (fi) * 1975-08-01 1977-02-16

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS503033U (fi) * 1973-05-08 1975-01-13
JPS5221579U (fi) * 1975-08-01 1977-02-16

Also Published As

Publication number Publication date
JPS63178229U (fi) 1988-11-18

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