JPH0333066Y2 - - Google Patents

Info

Publication number
JPH0333066Y2
JPH0333066Y2 JP1986202862U JP20286286U JPH0333066Y2 JP H0333066 Y2 JPH0333066 Y2 JP H0333066Y2 JP 1986202862 U JP1986202862 U JP 1986202862U JP 20286286 U JP20286286 U JP 20286286U JP H0333066 Y2 JPH0333066 Y2 JP H0333066Y2
Authority
JP
Japan
Prior art keywords
wafer
wafers
transfer
sensor
boat
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1986202862U
Other languages
English (en)
Japanese (ja)
Other versions
JPS63105335U (enExample
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1986202862U priority Critical patent/JPH0333066Y2/ja
Publication of JPS63105335U publication Critical patent/JPS63105335U/ja
Application granted granted Critical
Publication of JPH0333066Y2 publication Critical patent/JPH0333066Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Specific Conveyance Elements (AREA)
  • Warehouses Or Storage Devices (AREA)
JP1986202862U 1986-12-24 1986-12-24 Expired JPH0333066Y2 (enExample)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1986202862U JPH0333066Y2 (enExample) 1986-12-24 1986-12-24

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1986202862U JPH0333066Y2 (enExample) 1986-12-24 1986-12-24

Publications (2)

Publication Number Publication Date
JPS63105335U JPS63105335U (enExample) 1988-07-08
JPH0333066Y2 true JPH0333066Y2 (enExample) 1991-07-12

Family

ID=31167645

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1986202862U Expired JPH0333066Y2 (enExample) 1986-12-24 1986-12-24

Country Status (1)

Country Link
JP (1) JPH0333066Y2 (enExample)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3014433B2 (ja) * 1990-10-26 2000-02-28 富士通株式会社 ウエハの移し換え方法

Also Published As

Publication number Publication date
JPS63105335U (enExample) 1988-07-08

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