JPH0331077Y2 - - Google Patents
Info
- Publication number
- JPH0331077Y2 JPH0331077Y2 JP1984185270U JP18527084U JPH0331077Y2 JP H0331077 Y2 JPH0331077 Y2 JP H0331077Y2 JP 1984185270 U JP1984185270 U JP 1984185270U JP 18527084 U JP18527084 U JP 18527084U JP H0331077 Y2 JPH0331077 Y2 JP H0331077Y2
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- stage
- prober
- recess
- probe
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000000523 sample Substances 0.000 claims description 18
- 230000002093 peripheral effect Effects 0.000 claims description 4
- 239000002184 metal Substances 0.000 claims description 3
- 235000012431 wafers Nutrition 0.000 description 48
- 239000000700 radioactive tracer Substances 0.000 description 5
- 238000012360 testing method Methods 0.000 description 4
- 230000000694 effects Effects 0.000 description 3
- WABPQHHGFIMREM-UHFFFAOYSA-N lead(0) Chemical compound [Pb] WABPQHHGFIMREM-UHFFFAOYSA-N 0.000 description 2
- 229910001369 Brass Inorganic materials 0.000 description 1
- 229910004298 SiO 2 Inorganic materials 0.000 description 1
- 239000010951 brass Substances 0.000 description 1
- 239000013013 elastic material Substances 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000007689 inspection Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000000034 method Methods 0.000 description 1
Landscapes
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
- Testing Of Individual Semiconductor Devices (AREA)
- Measuring Leads Or Probes (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1984185270U JPH0331077Y2 (US06815460-20041109-C00097.png) | 1984-12-05 | 1984-12-05 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1984185270U JPH0331077Y2 (US06815460-20041109-C00097.png) | 1984-12-05 | 1984-12-05 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS61100138U JPS61100138U (US06815460-20041109-C00097.png) | 1986-06-26 |
| JPH0331077Y2 true JPH0331077Y2 (US06815460-20041109-C00097.png) | 1991-07-01 |
Family
ID=30742748
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1984185270U Expired JPH0331077Y2 (US06815460-20041109-C00097.png) | 1984-12-05 | 1984-12-05 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0331077Y2 (US06815460-20041109-C00097.png) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP5470766B2 (ja) * | 2008-07-18 | 2014-04-16 | 株式会社Ｓｕｍｃｏ | 半導体デバイスの製造方法 |
| JP2015049137A (ja) * | 2013-09-02 | 2015-03-16 | 三菱電機株式会社 | 半導体チップ試験装置及び方法 |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4123701Y1 (US06815460-20041109-C00097.png) * | 1966-02-22 | 1966-12-02 | ||
| JPS546867U (US06815460-20041109-C00097.png) * | 1977-06-16 | 1979-01-17 | ||
| JPS56147076A (en) * | 1980-04-18 | 1981-11-14 | Hitachi Ltd | Characteristic testing electrode |
| JPS6080772A (ja) * | 1983-10-08 | 1985-05-08 | Rohm Co Ltd | プロ−ブニ−ドル |
-
1984
- 1984-12-05 JP JP1984185270U patent/JPH0331077Y2/ja not_active Expired
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4123701Y1 (US06815460-20041109-C00097.png) * | 1966-02-22 | 1966-12-02 | ||
| JPS546867U (US06815460-20041109-C00097.png) * | 1977-06-16 | 1979-01-17 | ||
| JPS56147076A (en) * | 1980-04-18 | 1981-11-14 | Hitachi Ltd | Characteristic testing electrode |
| JPS6080772A (ja) * | 1983-10-08 | 1985-05-08 | Rohm Co Ltd | プロ−ブニ−ドル |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS61100138U (US06815460-20041109-C00097.png) | 1986-06-26 |
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