JPH0330881A - 洗浄装置 - Google Patents
洗浄装置Info
- Publication number
- JPH0330881A JPH0330881A JP16630489A JP16630489A JPH0330881A JP H0330881 A JPH0330881 A JP H0330881A JP 16630489 A JP16630489 A JP 16630489A JP 16630489 A JP16630489 A JP 16630489A JP H0330881 A JPH0330881 A JP H0330881A
- Authority
- JP
- Japan
- Prior art keywords
- cleaning
- processing chamber
- solvent
- processing
- cleaned
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000005406 washing Methods 0.000 title claims abstract description 30
- 239000002904 solvent Substances 0.000 claims abstract description 65
- 230000007246 mechanism Effects 0.000 claims abstract description 53
- 238000004140 cleaning Methods 0.000 claims description 103
- 238000012545 processing Methods 0.000 claims description 89
- 238000004891 communication Methods 0.000 claims description 19
- 239000003463 adsorbent Substances 0.000 claims description 16
- 238000001816 cooling Methods 0.000 claims description 13
- 239000000126 substance Substances 0.000 claims description 11
- 238000010438 heat treatment Methods 0.000 claims description 9
- 238000007789 sealing Methods 0.000 claims description 5
- 238000000034 method Methods 0.000 abstract description 20
- 239000007788 liquid Substances 0.000 abstract description 10
- 239000007789 gas Substances 0.000 description 16
- 239000000463 material Substances 0.000 description 9
- 238000013020 steam cleaning Methods 0.000 description 9
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 8
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 4
- 239000003960 organic solvent Substances 0.000 description 3
- 238000011084 recovery Methods 0.000 description 3
- 239000011538 cleaning material Substances 0.000 description 2
- 238000009792 diffusion process Methods 0.000 description 2
- 238000001179 sorption measurement Methods 0.000 description 2
- BOSAWIQFTJIYIS-UHFFFAOYSA-N 1,1,1-trichloro-2,2,2-trifluoroethane Chemical compound FC(F)(F)C(Cl)(Cl)Cl BOSAWIQFTJIYIS-UHFFFAOYSA-N 0.000 description 1
- 235000017166 Bambusa arundinacea Nutrition 0.000 description 1
- 235000017491 Bambusa tulda Nutrition 0.000 description 1
- 241001330002 Bambuseae Species 0.000 description 1
- 235000015334 Phyllostachys viridis Nutrition 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- XSTXAVWGXDQKEL-UHFFFAOYSA-N Trichloroethylene Chemical group ClC=C(Cl)Cl XSTXAVWGXDQKEL-UHFFFAOYSA-N 0.000 description 1
- 239000011358 absorbing material Substances 0.000 description 1
- 239000002156 adsorbate Substances 0.000 description 1
- 238000003915 air pollution Methods 0.000 description 1
- 239000011425 bamboo Substances 0.000 description 1
- 238000009833 condensation Methods 0.000 description 1
- 230000005494 condensation Effects 0.000 description 1
- 239000000498 cooling water Substances 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 238000001035 drying Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000003292 glue Substances 0.000 description 1
- 239000003350 kerosene Substances 0.000 description 1
- 230000001151 other effect Effects 0.000 description 1
- 238000010992 reflux Methods 0.000 description 1
- 239000000741 silica gel Substances 0.000 description 1
- 229910002027 silica gel Inorganic materials 0.000 description 1
- 238000012546 transfer Methods 0.000 description 1
Landscapes
- Cleaning And De-Greasing Of Metallic Materials By Chemical Methods (AREA)
- Cleaning By Liquid Or Steam (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16630489A JPH0330881A (ja) | 1989-06-28 | 1989-06-28 | 洗浄装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16630489A JPH0330881A (ja) | 1989-06-28 | 1989-06-28 | 洗浄装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0330881A true JPH0330881A (ja) | 1991-02-08 |
| JPH0549355B2 JPH0549355B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1993-07-26 |
Family
ID=15828860
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP16630489A Granted JPH0330881A (ja) | 1989-06-28 | 1989-06-28 | 洗浄装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0330881A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH10321580A (ja) * | 1997-05-15 | 1998-12-04 | Tokyo Electron Ltd | 基板の洗浄ユニット及び洗浄システム |
| JP2017170425A (ja) * | 2016-03-18 | 2017-09-28 | 株式会社クリンビー | ワーク洗浄方法およびワーク洗浄装置 |
-
1989
- 1989-06-28 JP JP16630489A patent/JPH0330881A/ja active Granted
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH10321580A (ja) * | 1997-05-15 | 1998-12-04 | Tokyo Electron Ltd | 基板の洗浄ユニット及び洗浄システム |
| JP2017170425A (ja) * | 2016-03-18 | 2017-09-28 | 株式会社クリンビー | ワーク洗浄方法およびワーク洗浄装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0549355B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1993-07-26 |
Similar Documents
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| LAPS | Cancellation because of no payment of annual fees |