JPH0551357B2 - - Google Patents
Info
- Publication number
- JPH0551357B2 JPH0551357B2 JP14441089A JP14441089A JPH0551357B2 JP H0551357 B2 JPH0551357 B2 JP H0551357B2 JP 14441089 A JP14441089 A JP 14441089A JP 14441089 A JP14441089 A JP 14441089A JP H0551357 B2 JPH0551357 B2 JP H0551357B2
- Authority
- JP
- Japan
- Prior art keywords
- upper chamber
- cleaning
- washing
- cleaned
- tank
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000004140 cleaning Methods 0.000 claims description 119
- 238000005406 washing Methods 0.000 claims description 59
- 239000007788 liquid Substances 0.000 claims description 27
- 238000004891 communication Methods 0.000 claims description 25
- 239000002904 solvent Substances 0.000 claims description 25
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims description 16
- 238000010438 heat treatment Methods 0.000 claims description 4
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 4
- 239000007789 gas Substances 0.000 description 22
- 238000000034 method Methods 0.000 description 5
- 238000013020 steam cleaning Methods 0.000 description 5
- 238000004519 manufacturing process Methods 0.000 description 3
- 238000003860 storage Methods 0.000 description 3
- 230000005494 condensation Effects 0.000 description 2
- 238000009833 condensation Methods 0.000 description 2
- 238000001816 cooling Methods 0.000 description 2
- 230000007423 decrease Effects 0.000 description 2
- 238000009792 diffusion process Methods 0.000 description 2
- 238000007789 sealing Methods 0.000 description 2
- BOSAWIQFTJIYIS-UHFFFAOYSA-N 1,1,1-trichloro-2,2,2-trifluoroethane Chemical compound FC(F)(F)C(Cl)(Cl)Cl BOSAWIQFTJIYIS-UHFFFAOYSA-N 0.000 description 1
- XSTXAVWGXDQKEL-UHFFFAOYSA-N Trichloroethylene Chemical group ClC=C(Cl)Cl XSTXAVWGXDQKEL-UHFFFAOYSA-N 0.000 description 1
- 238000003915 air pollution Methods 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000003350 kerosene Substances 0.000 description 1
- 239000003960 organic solvent Substances 0.000 description 1
- 238000003825 pressing Methods 0.000 description 1
- 238000003892 spreading Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
Landscapes
- Cleaning By Liquid Or Steam (AREA)
- Apparatus For Disinfection Or Sterilisation (AREA)
- Cleaning And De-Greasing Of Metallic Materials By Chemical Methods (AREA)
- Cleaning Or Drying Semiconductors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14441089A JPH038483A (ja) | 1989-06-07 | 1989-06-07 | 洗浄装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14441089A JPH038483A (ja) | 1989-06-07 | 1989-06-07 | 洗浄装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH038483A JPH038483A (ja) | 1991-01-16 |
| JPH0551357B2 true JPH0551357B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1993-08-02 |
Family
ID=15361524
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP14441089A Granted JPH038483A (ja) | 1989-06-07 | 1989-06-07 | 洗浄装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH038483A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0754179A (ja) * | 1993-08-06 | 1995-02-28 | Kimura Chem Plants Co Ltd | 洗浄乾燥装置 |
-
1989
- 1989-06-07 JP JP14441089A patent/JPH038483A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPH038483A (ja) | 1991-01-16 |
Similar Documents
Legal Events
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| R250 | Receipt of annual fees |
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| EXPY | Cancellation because of completion of term |