JPH0330281B2 - - Google Patents

Info

Publication number
JPH0330281B2
JPH0330281B2 JP57021450A JP2145082A JPH0330281B2 JP H0330281 B2 JPH0330281 B2 JP H0330281B2 JP 57021450 A JP57021450 A JP 57021450A JP 2145082 A JP2145082 A JP 2145082A JP H0330281 B2 JPH0330281 B2 JP H0330281B2
Authority
JP
Japan
Prior art keywords
platinum
thin film
pattern
resistance
hydrogen peroxide
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP57021450A
Other languages
English (en)
Japanese (ja)
Other versions
JPS58138002A (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP57021450A priority Critical patent/JPS58138002A/ja
Publication of JPS58138002A publication Critical patent/JPS58138002A/ja
Publication of JPH0330281B2 publication Critical patent/JPH0330281B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Thermistors And Varistors (AREA)
JP57021450A 1982-02-12 1982-02-12 薄膜白金温度センサの製造方法 Granted JPS58138002A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP57021450A JPS58138002A (ja) 1982-02-12 1982-02-12 薄膜白金温度センサの製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP57021450A JPS58138002A (ja) 1982-02-12 1982-02-12 薄膜白金温度センサの製造方法

Publications (2)

Publication Number Publication Date
JPS58138002A JPS58138002A (ja) 1983-08-16
JPH0330281B2 true JPH0330281B2 (enExample) 1991-04-26

Family

ID=12055297

Family Applications (1)

Application Number Title Priority Date Filing Date
JP57021450A Granted JPS58138002A (ja) 1982-02-12 1982-02-12 薄膜白金温度センサの製造方法

Country Status (1)

Country Link
JP (1) JPS58138002A (enExample)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2860799B2 (ja) * 1989-07-21 1999-02-24 ティーディーケイ株式会社 感温抵抗器の製造方法
CN104807554B (zh) * 2015-03-03 2019-01-01 江苏多维科技有限公司 一种铜热电阻薄膜温度传感器芯片及其制备方法

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4375056A (en) * 1980-02-29 1983-02-22 Leeds & Northrup Company Thin film resistance thermometer device with a predetermined temperature coefficent of resistance and its method of manufacture

Also Published As

Publication number Publication date
JPS58138002A (ja) 1983-08-16

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