JPS58138002A - 薄膜白金温度センサの製造方法 - Google Patents

薄膜白金温度センサの製造方法

Info

Publication number
JPS58138002A
JPS58138002A JP57021450A JP2145082A JPS58138002A JP S58138002 A JPS58138002 A JP S58138002A JP 57021450 A JP57021450 A JP 57021450A JP 2145082 A JP2145082 A JP 2145082A JP S58138002 A JPS58138002 A JP S58138002A
Authority
JP
Japan
Prior art keywords
thin film
manufacturing
pattern
temperature sensor
resistance
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP57021450A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0330281B2 (enExample
Inventor
和久 松本
一雄 緒方
邦宏 松田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP57021450A priority Critical patent/JPS58138002A/ja
Publication of JPS58138002A publication Critical patent/JPS58138002A/ja
Publication of JPH0330281B2 publication Critical patent/JPH0330281B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Thermistors And Varistors (AREA)
JP57021450A 1982-02-12 1982-02-12 薄膜白金温度センサの製造方法 Granted JPS58138002A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP57021450A JPS58138002A (ja) 1982-02-12 1982-02-12 薄膜白金温度センサの製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP57021450A JPS58138002A (ja) 1982-02-12 1982-02-12 薄膜白金温度センサの製造方法

Publications (2)

Publication Number Publication Date
JPS58138002A true JPS58138002A (ja) 1983-08-16
JPH0330281B2 JPH0330281B2 (enExample) 1991-04-26

Family

ID=12055297

Family Applications (1)

Application Number Title Priority Date Filing Date
JP57021450A Granted JPS58138002A (ja) 1982-02-12 1982-02-12 薄膜白金温度センサの製造方法

Country Status (1)

Country Link
JP (1) JPS58138002A (enExample)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0354801A (ja) * 1989-07-21 1991-03-08 Tdk Corp 感温抵抗器の製造方法
JP2018508781A (ja) * 2015-03-03 2018-03-29 江▲蘇▼多▲維▼科技有限公司Ｍｕｌｔｉｄｉｍｅｎｓｉｏｎ Ｔｅｃｈｎｏｌｏｇｙ Ｃｏ．， Ｌｔｄ． 銅熱抵抗薄膜温度センサチップおよびその製造方法

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS56134702A (en) * 1980-02-29 1981-10-21 Leeds & Northrup Co Thin film resistance thermometer having prescribed resistance temperature coefficient and method of producing same

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS56134702A (en) * 1980-02-29 1981-10-21 Leeds & Northrup Co Thin film resistance thermometer having prescribed resistance temperature coefficient and method of producing same

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0354801A (ja) * 1989-07-21 1991-03-08 Tdk Corp 感温抵抗器の製造方法
JP2018508781A (ja) * 2015-03-03 2018-03-29 江▲蘇▼多▲維▼科技有限公司Ｍｕｌｔｉｄｉｍｅｎｓｉｏｎ Ｔｅｃｈｎｏｌｏｇｙ Ｃｏ．， Ｌｔｄ． 銅熱抵抗薄膜温度センサチップおよびその製造方法

Also Published As

Publication number Publication date
JPH0330281B2 (enExample) 1991-04-26

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