JPH0329175B2 - - Google Patents

Info

Publication number
JPH0329175B2
JPH0329175B2 JP58250154A JP25015483A JPH0329175B2 JP H0329175 B2 JPH0329175 B2 JP H0329175B2 JP 58250154 A JP58250154 A JP 58250154A JP 25015483 A JP25015483 A JP 25015483A JP H0329175 B2 JPH0329175 B2 JP H0329175B2
Authority
JP
Japan
Prior art keywords
probe
contact
tip
circuit board
probe holder
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP58250154A
Other languages
English (en)
Japanese (ja)
Other versions
JPS60142529A (ja
Inventor
Ko Nakajima
Katsutoshi Saida
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
YOKOO KK
Original Assignee
YOKOO KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by YOKOO KK filed Critical YOKOO KK
Priority to JP58250154A priority Critical patent/JPS60142529A/ja
Publication of JPS60142529A publication Critical patent/JPS60142529A/ja
Publication of JPH0329175B2 publication Critical patent/JPH0329175B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H10P74/00—

Landscapes

  • Testing Of Individual Semiconductor Devices (AREA)
  • Measuring Leads Or Probes (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
JP58250154A 1983-12-28 1983-12-28 回路基板等の検査装置 Granted JPS60142529A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP58250154A JPS60142529A (ja) 1983-12-28 1983-12-28 回路基板等の検査装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP58250154A JPS60142529A (ja) 1983-12-28 1983-12-28 回路基板等の検査装置

Publications (2)

Publication Number Publication Date
JPS60142529A JPS60142529A (ja) 1985-07-27
JPH0329175B2 true JPH0329175B2 (OSRAM) 1991-04-23

Family

ID=17203620

Family Applications (1)

Application Number Title Priority Date Filing Date
JP58250154A Granted JPS60142529A (ja) 1983-12-28 1983-12-28 回路基板等の検査装置

Country Status (1)

Country Link
JP (1) JPS60142529A (OSRAM)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0436461Y2 (OSRAM) * 1986-07-01 1992-08-27
JPH0537437Y2 (OSRAM) * 1986-10-14 1993-09-21
JPH0752210B2 (ja) * 1987-10-07 1995-06-05 松下電子工業株式会社 半導体装置測定用器具
JP6559470B2 (ja) * 2015-06-02 2019-08-14 日置電機株式会社 プローブユニットおよび測定装置

Also Published As

Publication number Publication date
JPS60142529A (ja) 1985-07-27

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