JPS6332256B2 - - Google Patents

Info

Publication number
JPS6332256B2
JPS6332256B2 JP58250153A JP25015383A JPS6332256B2 JP S6332256 B2 JPS6332256 B2 JP S6332256B2 JP 58250153 A JP58250153 A JP 58250153A JP 25015383 A JP25015383 A JP 25015383A JP S6332256 B2 JPS6332256 B2 JP S6332256B2
Authority
JP
Japan
Prior art keywords
probe
probe holder
support plate
contact
circuit board
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP58250153A
Other languages
English (en)
Japanese (ja)
Other versions
JPS60142528A (ja
Inventor
Ko Nakajima
Katsutoshi Saida
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
YOKO SEISAKUSHO KK
Original Assignee
YOKO SEISAKUSHO KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by YOKO SEISAKUSHO KK filed Critical YOKO SEISAKUSHO KK
Priority to JP58250153A priority Critical patent/JPS60142528A/ja
Publication of JPS60142528A publication Critical patent/JPS60142528A/ja
Publication of JPS6332256B2 publication Critical patent/JPS6332256B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H10P74/00—

Landscapes

  • Measuring Leads Or Probes (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Testing Of Individual Semiconductor Devices (AREA)
JP58250153A 1983-12-28 1983-12-28 回路基板等の検査装置 Granted JPS60142528A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP58250153A JPS60142528A (ja) 1983-12-28 1983-12-28 回路基板等の検査装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP58250153A JPS60142528A (ja) 1983-12-28 1983-12-28 回路基板等の検査装置

Publications (2)

Publication Number Publication Date
JPS60142528A JPS60142528A (ja) 1985-07-27
JPS6332256B2 true JPS6332256B2 (OSRAM) 1988-06-29

Family

ID=17203606

Family Applications (1)

Application Number Title Priority Date Filing Date
JP58250153A Granted JPS60142528A (ja) 1983-12-28 1983-12-28 回路基板等の検査装置

Country Status (1)

Country Link
JP (1) JPS60142528A (OSRAM)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010101821A (ja) * 2008-10-27 2010-05-06 Ricoh Co Ltd 基板検査装置及び基板検査システム
JP6559470B2 (ja) * 2015-06-02 2019-08-14 日置電機株式会社 プローブユニットおよび測定装置

Also Published As

Publication number Publication date
JPS60142528A (ja) 1985-07-27

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Legal Events

Date Code Title Description
LAPS Cancellation because of no payment of annual fees