JPH0325739B2 - - Google Patents

Info

Publication number
JPH0325739B2
JPH0325739B2 JP56155025A JP15502581A JPH0325739B2 JP H0325739 B2 JPH0325739 B2 JP H0325739B2 JP 56155025 A JP56155025 A JP 56155025A JP 15502581 A JP15502581 A JP 15502581A JP H0325739 B2 JPH0325739 B2 JP H0325739B2
Authority
JP
Japan
Prior art keywords
pattern
width
lower width
length measurement
upper width
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP56155025A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5855841A (ja
Inventor
Giichi Kakigi
Kikuo Mita
Moritoshi Ando
Akifumi Muto
Kazuo Yagi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP15502581A priority Critical patent/JPS5855841A/ja
Publication of JPS5855841A publication Critical patent/JPS5855841A/ja
Publication of JPH0325739B2 publication Critical patent/JPH0325739B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N21/956—Inspecting patterns on the surface of objects

Landscapes

  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
JP15502581A 1981-09-30 1981-09-30 パタ−ン欠陥検出装置 Granted JPS5855841A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15502581A JPS5855841A (ja) 1981-09-30 1981-09-30 パタ−ン欠陥検出装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15502581A JPS5855841A (ja) 1981-09-30 1981-09-30 パタ−ン欠陥検出装置

Publications (2)

Publication Number Publication Date
JPS5855841A JPS5855841A (ja) 1983-04-02
JPH0325739B2 true JPH0325739B2 (enrdf_load_html_response) 1991-04-08

Family

ID=15597018

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15502581A Granted JPS5855841A (ja) 1981-09-30 1981-09-30 パタ−ン欠陥検出装置

Country Status (1)

Country Link
JP (1) JPS5855841A (enrdf_load_html_response)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6645993B2 (ja) 2016-03-29 2020-02-14 株式会社Ｋｏｋｕｓａｉ Ｅｌｅｃｔｒｉｃ 処理装置、装置管理コントローラ、及びプログラム並びに半導体装置の製造方法
JP6594931B2 (ja) 2016-10-31 2019-10-23 株式会社Ｋｏｋｕｓａｉ Ｅｌｅｃｔｒｉｃ 基板処理装置、監視プログラム及び半導体装置の製造方法

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5282859U (enrdf_load_html_response) * 1975-12-18 1977-06-21
JPS53146171A (en) * 1977-05-26 1978-12-19 Fujitsu Ltd Method of inspecting printed board

Also Published As

Publication number Publication date
JPS5855841A (ja) 1983-04-02

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