JPH03237605A - 複合型磁気ヘッドの製造方法 - Google Patents
複合型磁気ヘッドの製造方法Info
- Publication number
- JPH03237605A JPH03237605A JP22036390A JP22036390A JPH03237605A JP H03237605 A JPH03237605 A JP H03237605A JP 22036390 A JP22036390 A JP 22036390A JP 22036390 A JP22036390 A JP 22036390A JP H03237605 A JPH03237605 A JP H03237605A
- Authority
- JP
- Japan
- Prior art keywords
- magnetic head
- thin film
- magnetic
- etching
- grooves
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000004519 manufacturing process Methods 0.000 title claims abstract description 17
- 239000002131 composite material Substances 0.000 title claims description 16
- 239000010409 thin film Substances 0.000 claims abstract description 47
- 238000005530 etching Methods 0.000 claims abstract description 23
- 238000000034 method Methods 0.000 claims description 18
- 239000000696 magnetic material Substances 0.000 claims description 9
- 230000004907 flux Effects 0.000 claims description 6
- 238000010884 ion-beam technique Methods 0.000 claims description 2
- 229910000702 sendust Inorganic materials 0.000 abstract description 28
- 230000001105 regulatory effect Effects 0.000 abstract description 15
- 229910000859 α-Fe Inorganic materials 0.000 abstract description 11
- 239000000463 material Substances 0.000 abstract description 9
- 230000015572 biosynthetic process Effects 0.000 abstract description 2
- 239000011521 glass Substances 0.000 abstract description 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 abstract 2
- 229910021364 Al-Si alloy Inorganic materials 0.000 abstract 1
- 229910052681 coesite Inorganic materials 0.000 abstract 1
- 229910052906 cristobalite Inorganic materials 0.000 abstract 1
- 239000000377 silicon dioxide Substances 0.000 abstract 1
- 235000012239 silicon dioxide Nutrition 0.000 abstract 1
- 229910052682 stishovite Inorganic materials 0.000 abstract 1
- 229910052905 tridymite Inorganic materials 0.000 abstract 1
- 239000010408 film Substances 0.000 description 10
- 238000005260 corrosion Methods 0.000 description 8
- 230000007797 corrosion Effects 0.000 description 8
- 235000012431 wafers Nutrition 0.000 description 8
- 238000003754 machining Methods 0.000 description 7
- 239000011248 coating agent Substances 0.000 description 2
- 238000000576 coating method Methods 0.000 description 2
- 229910003460 diamond Inorganic materials 0.000 description 2
- 239000010432 diamond Substances 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 239000006060 molten glass Substances 0.000 description 2
- 239000002245 particle Substances 0.000 description 2
- 229910000889 permalloy Inorganic materials 0.000 description 2
- 238000004544 sputter deposition Methods 0.000 description 2
- 238000004804 winding Methods 0.000 description 2
- GRYLNZFGIOXLOG-UHFFFAOYSA-N Nitric acid Chemical compound O[N+]([O-])=O GRYLNZFGIOXLOG-UHFFFAOYSA-N 0.000 description 1
- 239000002253 acid Substances 0.000 description 1
- 238000003486 chemical etching Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- SOCTUWSJJQCPFX-UHFFFAOYSA-N dichromate(2-) Chemical compound [O-][Cr](=O)(=O)O[Cr]([O-])(=O)=O SOCTUWSJJQCPFX-UHFFFAOYSA-N 0.000 description 1
- 238000001312 dry etching Methods 0.000 description 1
- 238000001035 drying Methods 0.000 description 1
- 230000001678 irradiating effect Effects 0.000 description 1
- 238000005304 joining Methods 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 229910017604 nitric acid Inorganic materials 0.000 description 1
- 238000007738 vacuum evaporation Methods 0.000 description 1
- 238000001039 wet etching Methods 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP22036390A JPH03237605A (ja) | 1990-08-21 | 1990-08-21 | 複合型磁気ヘッドの製造方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP22036390A JPH03237605A (ja) | 1990-08-21 | 1990-08-21 | 複合型磁気ヘッドの製造方法 |
Related Parent Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP22036290A Division JPH03141006A (ja) | 1990-08-21 | 1990-08-21 | 複合型磁気ヘッド |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH03237605A true JPH03237605A (ja) | 1991-10-23 |
| JPH0479042B2 JPH0479042B2 (enrdf_load_stackoverflow) | 1992-12-14 |
Family
ID=16749965
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP22036390A Granted JPH03237605A (ja) | 1990-08-21 | 1990-08-21 | 複合型磁気ヘッドの製造方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH03237605A (enrdf_load_stackoverflow) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0583889A3 (en) * | 1992-07-22 | 1994-10-12 | Ngk Insulators Ltd | A method of pickling Sendust and pickling a pattern in layers of Sendust and chrome. |
-
1990
- 1990-08-21 JP JP22036390A patent/JPH03237605A/ja active Granted
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0583889A3 (en) * | 1992-07-22 | 1994-10-12 | Ngk Insulators Ltd | A method of pickling Sendust and pickling a pattern in layers of Sendust and chrome. |
| US5413672A (en) * | 1992-07-22 | 1995-05-09 | Ngk Insulators, Ltd. | Method of etching sendust and method of pattern-etching sendust and chromium films |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0479042B2 (enrdf_load_stackoverflow) | 1992-12-14 |
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