JPH0322976B2 - - Google Patents

Info

Publication number
JPH0322976B2
JPH0322976B2 JP58102968A JP10296883A JPH0322976B2 JP H0322976 B2 JPH0322976 B2 JP H0322976B2 JP 58102968 A JP58102968 A JP 58102968A JP 10296883 A JP10296883 A JP 10296883A JP H0322976 B2 JPH0322976 B2 JP H0322976B2
Authority
JP
Japan
Prior art keywords
photomask
liquid
photosensitive layer
substrate
layer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP58102968A
Other languages
English (en)
Japanese (ja)
Other versions
JPS592047A (ja
Inventor
Baanaado Heiaato Robaato
Baanaado Koen Aburahamu
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
EIDP Inc
Original Assignee
EI Du Pont de Nemours and Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by EI Du Pont de Nemours and Co filed Critical EI Du Pont de Nemours and Co
Publication of JPS592047A publication Critical patent/JPS592047A/ja
Publication of JPH0322976B2 publication Critical patent/JPH0322976B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/16—Coating processes; Apparatus therefor
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/20—Exposure; Apparatus therefor
    • G03F7/22—Exposing sequentially with the same light pattern different positions of the same surface
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00—Apparatus or processes for manufacturing printed circuits
    • H05K3/0073—Masks not provided for in groups H05K3/02 - H05K3/46, e.g. for photomechanical production of patterned surfaces
    • H05K3/0082—Masks not provided for in groups H05K3/02 - H05K3/46, e.g. for photomechanical production of patterned surfaces characterised by the exposure method of radiation-sensitive masks

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Photosensitive Polymer And Photoresist Processing (AREA)
JP58102968A 1982-06-11 1983-06-10 整合および画像形成方法 Granted JPS592047A (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US06/387,537 US4508802A (en) 1982-06-11 1982-06-11 Multiple registration and imaging process to form a set of registered imaged elements
US387537 1982-06-11

Publications (2)

Publication Number Publication Date
JPS592047A JPS592047A (ja) 1984-01-07
JPH0322976B2 true JPH0322976B2 (enExample) 1991-03-28

Family

ID=23530303

Family Applications (1)

Application Number Title Priority Date Filing Date
JP58102968A Granted JPS592047A (ja) 1982-06-11 1983-06-10 整合および画像形成方法

Country Status (8)

Country Link
US (1) US4508802A (enExample)
EP (1) EP0096862B1 (enExample)
JP (1) JPS592047A (enExample)
AU (1) AU559695B2 (enExample)
BR (1) BR8302993A (enExample)
CA (1) CA1247446A (enExample)
DE (1) DE3380190D1 (enExample)
HK (1) HK10390A (enExample)

Families Citing this family (19)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59186850U (ja) * 1983-05-31 1984-12-11 日本メクトロン株式会社 感光性皮膜の露光装置
JPS60158450A (ja) * 1984-01-28 1985-08-19 Hoya Corp 密着露光方法
US4690880A (en) * 1984-07-20 1987-09-01 Canon Kabushiki Kaisha Pattern forming method
DE3443178A1 (de) * 1984-11-27 1986-05-28 Hoechst Ag, 6230 Frankfurt Verfahren zum positionieren von druckformen vor dem stanzen von registerlochungen sowie anordnung zum durchfuehren des verfahrens
US4698284A (en) * 1985-10-25 1987-10-06 M&T Chemicals Inc. Device for aligning a photomask onto a printed wiring board
US4794061A (en) * 1985-10-25 1988-12-27 M&T Chemicals Inc. Device for aligning a photomask onto a printed wiring board
JPH0830892B2 (ja) * 1986-07-25 1996-03-27 東京応化工業株式会社 密着焼付け方法
US4897802A (en) * 1986-11-19 1990-01-30 John Hassmann Method and apparatus for preparing and displaying visual displays
JPH0243556A (ja) * 1988-08-04 1990-02-14 Somar Corp 感光性樹脂の露光方法
GB2245374B (en) * 1990-05-29 1994-11-30 Printing Tech Equipment Ltd Plate handling apparatus
US5459954A (en) * 1993-08-31 1995-10-24 Admotion Corporation Advertising display method and apparatus
US5496685A (en) * 1993-09-17 1996-03-05 Chase Elastomer Corporation Photosensitive compositions and elements for flexographic printing
US5513458A (en) * 1993-11-15 1996-05-07 Admotion Corporation Advertising display apparatus with precise rotary drive
US5440214A (en) * 1993-11-15 1995-08-08 Admotion Corporation Quiet drive control and interface apparatus
US6001893A (en) 1996-05-17 1999-12-14 Datacard Corporation Curable topcoat composition and methods for use
US5701823A (en) * 1997-01-27 1997-12-30 Morris; Jerry L. Self aligning tool for registering rotary printing plates and method of registering plates
US7279254B2 (en) * 2005-05-16 2007-10-09 Eastman Kodak Company Method of making an article bearing a relief image using a removable film
JP2009093027A (ja) * 2007-10-10 2009-04-30 Csun Mfg Ltd マスクパターンフィルム圧着機の圧着構造及びその圧着方法
GB201019874D0 (en) * 2010-11-23 2011-01-05 Rainbow Technology Systems Ltd Improved photoimaging

Family Cites Families (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2718181A (en) * 1951-09-14 1955-09-20 Ditto Inc Contact printer
US3547730A (en) * 1966-12-16 1970-12-15 Du Pont Machine for making resist images
US3573975A (en) * 1968-07-10 1971-04-06 Ibm Photochemical fabrication process
BE787803A (fr) * 1971-08-20 1973-02-21 Sandoz Sa Procede de preparation de phenylamines alkylees sur le noyau
JPS502936A (enExample) * 1973-05-08 1975-01-13
US3877808A (en) * 1973-08-30 1975-04-15 Jr Carl R Jasperson Printed circuit board exposure holding device
JPS5469076A (en) * 1977-11-12 1979-06-02 Toshiba Corp Adhesion exposure device
JPS6052579B2 (ja) * 1978-02-28 1985-11-20 超エル・エス・アイ技術研究組合 ポジ型フオトレジストの密着露光方法
US4201581A (en) * 1978-03-13 1980-05-06 Eastman Kodak Company Method of providing close contact for contact printing
US4281922A (en) * 1978-11-14 1981-08-04 Fuji Photo Film Co., Ltd. Plate feeding apparatus for printing apparatus
US4311381A (en) * 1980-03-24 1982-01-19 Schwaab, Inc. Method and apparatus for producing printing patterns
DE3038810A1 (de) * 1980-06-04 1981-12-24 Censor Patent- und Versuchs-Anstalt, 9490 Vaduz Verfahren zur verminderung des einflusses optischer inhomogenitaeten
US4334009A (en) * 1980-09-23 1982-06-08 E. I. Du Pont De Nemours And Company Process for modifying tacky surfaces
JPS58102972A (ja) * 1981-12-15 1983-06-18 日本電気株式会社 構内網用暗号方法およびその装置
JPS6057062B2 (ja) * 1981-12-16 1985-12-13 松下電送株式会社 閃光定着装置
JPS58102971A (ja) * 1981-12-16 1983-06-18 Fuji Xerox Co Ltd 電子複写機におけるクリ−ニング装置

Also Published As

Publication number Publication date
US4508802A (en) 1985-04-02
AU559695B2 (en) 1987-03-19
BR8302993A (pt) 1984-01-31
AU1569183A (en) 1983-12-15
EP0096862A3 (en) 1986-05-07
HK10390A (en) 1990-02-16
CA1247446A (en) 1988-12-28
JPS592047A (ja) 1984-01-07
DE3380190D1 (en) 1989-08-17
EP0096862A2 (en) 1983-12-28
EP0096862B1 (en) 1989-07-12

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