JPS5469076A - Adhesion exposure device - Google Patents

Adhesion exposure device

Info

Publication number
JPS5469076A
JPS5469076A JP13599677A JP13599677A JPS5469076A JP S5469076 A JPS5469076 A JP S5469076A JP 13599677 A JP13599677 A JP 13599677A JP 13599677 A JP13599677 A JP 13599677A JP S5469076 A JPS5469076 A JP S5469076A
Authority
JP
Japan
Prior art keywords
mask
exposure device
adhesion
pushing rod
rod
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP13599677A
Other languages
Japanese (ja)
Inventor
Okimitsu Yasuda
Nobuo Kikuchi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp, Tokyo Shibaura Electric Co Ltd filed Critical Toshiba Corp
Priority to JP13599677A priority Critical patent/JPS5469076A/en
Publication of JPS5469076A publication Critical patent/JPS5469076A/en
Pending legal-status Critical Current

Links

Landscapes

  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)

Abstract

PURPOSE:To secure the adhesion between the mask and the sensitizer layer in a short time through the mechanical push at the center part of the glass mask by means of a pushing rod. CONSTITUTION:Glass mask 2 is set on semiconductor substrate 4 put on mount table 1, and then the mask is matched. Mask 2 is pressed down via pushing rod 5 with attachment 6 made of rubber or the like with the vacuum absorption. Then rod 5 is removed after the mask is adhered completely over the entire surface, and then the exposure is given.
JP13599677A 1977-11-12 1977-11-12 Adhesion exposure device Pending JPS5469076A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13599677A JPS5469076A (en) 1977-11-12 1977-11-12 Adhesion exposure device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13599677A JPS5469076A (en) 1977-11-12 1977-11-12 Adhesion exposure device

Publications (1)

Publication Number Publication Date
JPS5469076A true JPS5469076A (en) 1979-06-02

Family

ID=15164747

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13599677A Pending JPS5469076A (en) 1977-11-12 1977-11-12 Adhesion exposure device

Country Status (1)

Country Link
JP (1) JPS5469076A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4508802A (en) * 1982-06-11 1985-04-02 E. I. Du Pont De Nemours And Company Multiple registration and imaging process to form a set of registered imaged elements
US4522903A (en) * 1982-06-11 1985-06-11 E. I. Du Pont De Nemours And Company Sequential automatic registration and imagewise exposure of a sheet substrate

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4508802A (en) * 1982-06-11 1985-04-02 E. I. Du Pont De Nemours And Company Multiple registration and imaging process to form a set of registered imaged elements
US4522903A (en) * 1982-06-11 1985-06-11 E. I. Du Pont De Nemours And Company Sequential automatic registration and imagewise exposure of a sheet substrate

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