JPH0320858U - - Google Patents
Info
- Publication number
- JPH0320858U JPH0320858U JP8068789U JP8068789U JPH0320858U JP H0320858 U JPH0320858 U JP H0320858U JP 8068789 U JP8068789 U JP 8068789U JP 8068789 U JP8068789 U JP 8068789U JP H0320858 U JPH0320858 U JP H0320858U
- Authority
- JP
- Japan
- Prior art keywords
- observation
- processing
- preliminary evacuation
- chamber
- evacuation chamber
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000003463 adsorbent Substances 0.000 claims 1
- 239000000463 material Substances 0.000 claims 1
- 239000000126 substance Substances 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 1
- 238000007689 inspection Methods 0.000 description 1
Description
第１図は本考案の一実施例を示すための図であ
る。 １：検査室、２：予備排気室、３：仕切弁、４
：排気管、５：ウエハホルダ、６：ガイドレール
、７：送りネジ、８：モータ、９：ウエハ、１０
：蓋、１１：オイル。
る。 １：検査室、２：予備排気室、３：仕切弁、４
：排気管、５：ウエハホルダ、６：ガイドレール
、７：送りネジ、８：モータ、９：ウエハ、１０
：蓋、１１：オイル。
Claims (1)
- 真空に維持された観察、加工又は処理室に試料
又は材料を導入するための予備排気室を有する観
察又は処理装置において、前記予備排気室におけ
るガスの移動に伴う微粒子の舞い上がりを防ぐた
め、粘着性又は吸着性物質を前記予備排気室底部
に備えたことを特徴とする観察又は処理装置。
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8068789U JPH0320858U (ja) | 1989-07-07 | 1989-07-07 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8068789U JPH0320858U (ja) | 1989-07-07 | 1989-07-07 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0320858U true JPH0320858U (ja) | 1991-02-28 |
Family
ID=31625971
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP8068789U Pending JPH0320858U (ja) | 1989-07-07 | 1989-07-07 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0320858U (ja) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR20220094588A (ko) * | 2020-12-29 | 2022-07-06 | 황윤지 | 펀치형 스테이플러 리무버 |
-
1989
- 1989-07-07 JP JP8068789U patent/JPH0320858U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR20220094588A (ko) * | 2020-12-29 | 2022-07-06 | 황윤지 | 펀치형 스테이플러 리무버 |
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