JPH0160531U - - Google Patents

Info

Publication number
JPH0160531U
JPH0160531U JP15570887U JP15570887U JPH0160531U JP H0160531 U JPH0160531 U JP H0160531U JP 15570887 U JP15570887 U JP 15570887U JP 15570887 U JP15570887 U JP 15570887U JP H0160531 U JPH0160531 U JP H0160531U
Authority
JP
Japan
Prior art keywords
processing
plasma
processing chamber
infrared lamp
chamber
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP15570887U
Other languages
English (en)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP15570887U priority Critical patent/JPH0160531U/ja
Publication of JPH0160531U publication Critical patent/JPH0160531U/ja
Pending legal-status Critical Current

Links

Landscapes

  • ing And Chemical Polishing (AREA)
  • Drying Of Semiconductors (AREA)

Description

【図面の簡単な説明】
第１図はこの考案の一実施例によるプラズマ処
理装置を示す構成図、第２図は従来のプラズマ処
理装置を示す構成図である。図において、１は処
理室、９は赤外線ランプである。なお、図中同一
符号は同一、又は相当部分を示す。

Claims (1)

  1. 【実用新案登録請求の範囲】 (1) 供給された処理ガスをプラズマ化し試料を
    処理するための処理室、この処理室の内壁面を照
    射する赤外線ランプを備えたプラズマ処理装置。 (2) 赤外線ランプは処理室内に設置されている
    ことを特徴とする実用新案登録請求の範囲第１項
    記載のプラズマ処理装置。
JP15570887U 1987-10-12 1987-10-12 Pending JPH0160531U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15570887U JPH0160531U (ja) 1987-10-12 1987-10-12

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15570887U JPH0160531U (ja) 1987-10-12 1987-10-12

Publications (1)

Publication Number Publication Date
JPH0160531U true JPH0160531U (ja) 1989-04-17

Family

ID=31433579

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15570887U Pending JPH0160531U (ja) 1987-10-12 1987-10-12

Country Status (1)

Country Link
JP (1) JPH0160531U (ja)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03153884A (ja) * 1989-11-10 1991-07-01 Nec Corp エッチング装置およびエッチング方法

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03153884A (ja) * 1989-11-10 1991-07-01 Nec Corp エッチング装置およびエッチング方法

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