JPS6278745U - - Google Patents
Info
- Publication number
- JPS6278745U JPS6278745U JP16973385U JP16973385U JPS6278745U JP S6278745 U JPS6278745 U JP S6278745U JP 16973385 U JP16973385 U JP 16973385U JP 16973385 U JP16973385 U JP 16973385U JP S6278745 U JPS6278745 U JP S6278745U
- Authority
- JP
- Japan
- Prior art keywords
- grooves
- vacuums
- circumference
- suction
- holds
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000010586 diagram Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 238000001179 sorption measurement Methods 0.000 description 1
Landscapes
- Gripping Jigs, Holding Jigs, And Positioning Jigs (AREA)
- Jigs For Machine Tools (AREA)
Description
第１図は本考案の一実施例を示す斜視図、第２
図は溝形状を実線で示す説明図、第３図は第１図
の―線に沿つた断面図である。 〔主要部分の符号の説明〕、１０……試料台、
１４……平面、１６……溝、１８……吸着孔、２
０……排気系、Ｗ……半導体ウエハ。
図は溝形状を実線で示す説明図、第３図は第１図
の―線に沿つた断面図である。 〔主要部分の符号の説明〕、１０……試料台、
１４……平面、１６……溝、１８……吸着孔、２
０……排気系、Ｗ……半導体ウエハ。
Claims (1)
- 【実用新案登録請求の範囲】 その表面に形成された溝内を排気手段によつて
減圧し、表面上に載置された対象物を吸着保持す
る試料台において、 前記溝は、径の異なる円周の一部を連続させた
ものであることを特徴とする試料台。
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16973385U JPH0311890Y2 (ja) | 1985-11-06 | 1985-11-06 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16973385U JPH0311890Y2 (ja) | 1985-11-06 | 1985-11-06 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6278745U true JPS6278745U (ja) | 1987-05-20 |
| JPH0311890Y2 JPH0311890Y2 (ja) | 1991-03-20 |
Family
ID=31103811
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP16973385U Expired JPH0311890Y2 (ja) | 1985-11-06 | 1985-11-06 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0311890Y2 (ja) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2008119758A (ja) * | 2006-11-08 | 2008-05-29 | Aronshiya:Kk | 吸着盤 |
-
1985
- 1985-11-06 JP JP16973385U patent/JPH0311890Y2/ja not_active Expired
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2008119758A (ja) * | 2006-11-08 | 2008-05-29 | Aronshiya:Kk | 吸着盤 |
| JP4657193B2 (ja) * | 2006-11-08 | 2011-03-23 | 株式会社アロン社 | 吸着盤 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0311890Y2 (ja) | 1991-03-20 |