JPS6291433U - - Google Patents

Info

Publication number
JPS6291433U
JPS6291433U JP18393385U JP18393385U JPS6291433U JP S6291433 U JPS6291433 U JP S6291433U JP 18393385 U JP18393385 U JP 18393385U JP 18393385 U JP18393385 U JP 18393385U JP S6291433 U JPS6291433 U JP S6291433U
Authority
JP
Japan
Prior art keywords
manifold
ring
vapor phase
phase growth
opening
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP18393385U
Other languages
English (en)
Other versions
JPH0530352Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1985183933U priority Critical patent/JPH0530352Y2/ja
Publication of JPS6291433U publication Critical patent/JPS6291433U/ja
Application granted granted Critical
Publication of JPH0530352Y2 publication Critical patent/JPH0530352Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)

Description

【図面の簡単な説明】
第１図は本考案の気相成長装置の説明図、第２
図は従来の気相成長装置の説明図である。 図に於いて、１は反応管、２はマニホールド、
４はＯリング、５は溝、６は開放扉、１１はガス
導入管、２１は開放扉の面、２２は開口部、２３
は突出部を示す。

Claims (1)

  1. 【実用新案登録請求の範囲】 一端に反応ガスが導入されるガス導入管１１を
    有し、他端が開放状態の反応管１の開放端部に設
    けられ、前記反応管１の内径に対応する開口部２
    ２を有し、一端部にＯリング４が挿入される溝５
    を有するマニホールド２と、 前記Ｏリング４を介して前記マニホールド２に
    対向配置される平板状の開放扉６とよりなり、 前記開放扉６のマニホールド２と対向する平面
    ２１に前記マニホールド２の開口部２２に挿入さ
    れるリング状の突出部２３を設けたことを特徴と
    する気相成長装置。
JP1985183933U 1985-11-28 1985-11-28 Expired - Lifetime JPH0530352Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1985183933U JPH0530352Y2 (ja) 1985-11-28 1985-11-28

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1985183933U JPH0530352Y2 (ja) 1985-11-28 1985-11-28

Publications (2)

Publication Number Publication Date
JPS6291433U true JPS6291433U (ja) 1987-06-11
JPH0530352Y2 JPH0530352Y2 (ja) 1993-08-03

Family

ID=31131125

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1985183933U Expired - Lifetime JPH0530352Y2 (ja) 1985-11-28 1985-11-28

Country Status (1)

Country Link
JP (1) JPH0530352Y2 (ja)

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS607122A (ja) * 1983-06-01 1985-01-14 アムテック・システムズ・インコーポレーテッド 炉中での複数の半導体ウェハを処理する方法および装置
JPS6031000U (ja) * 1983-08-09 1985-03-02 ウシオ電機株式会社 光照射炉

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6031000B2 (ja) * 1978-12-26 1985-07-19 カシオ計算機株式会社 電子式金銭登録機

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS607122A (ja) * 1983-06-01 1985-01-14 アムテック・システムズ・インコーポレーテッド 炉中での複数の半導体ウェハを処理する方法および装置
JPS6031000U (ja) * 1983-08-09 1985-03-02 ウシオ電機株式会社 光照射炉

Also Published As

Publication number Publication date
JPH0530352Y2 (ja) 1993-08-03

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