JPS63170457U - - Google Patents
Info
- Publication number
- JPS63170457U JPS63170457U JP6268487U JP6268487U JPS63170457U JP S63170457 U JPS63170457 U JP S63170457U JP 6268487 U JP6268487 U JP 6268487U JP 6268487 U JP6268487 U JP 6268487U JP S63170457 U JPS63170457 U JP S63170457U
- Authority
- JP
- Japan
- Prior art keywords
- vacuum
- vacuum chamber
- evaporation
- utilizes
- power source
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims description 3
- 229910052799 carbon Inorganic materials 0.000 claims description 3
- 238000001704 evaporation Methods 0.000 claims 1
- 230000008020 evaporation Effects 0.000 claims 1
- 238000007738 vacuum evaporation Methods 0.000 claims 1
- 239000012212 insulator Substances 0.000 description 2
- 239000011521 glass Substances 0.000 description 1
Landscapes
- Physical Vapour Deposition (AREA)
Description
第１図は本案の一実施例の縦断面図である。
１……真空チヤンバ、２……ガラス窓、３……
カーボンロツド大、４……カーボンロツド小、５
……ガイシＡ、６……ガイシＢ、７……ロツド押
さえＡ、８……ロツド押さえＢ、９……試料。
カーボンロツド大、４……カーボンロツド小、５
……ガイシＡ、６……ガイシＢ、７……ロツド押
さえＡ、８……ロツド押さえＢ、９……試料。
Claims (1)
- 真空排気ユニツトと真空チヤンバーと蒸着用電
源より成る真空蒸着装置において真空チヤンバー
内外の圧力差を利用したカーボン送り機構を設け
たことを特徴とする真空蒸着装置。
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6268487U JPS63170457U (ja) | 1987-04-27 | 1987-04-27 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6268487U JPS63170457U (ja) | 1987-04-27 | 1987-04-27 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63170457U true JPS63170457U (ja) | 1988-11-07 |
Family
ID=30897189
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP6268487U Pending JPS63170457U (ja) | 1987-04-27 | 1987-04-27 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63170457U (ja) |
-
1987
- 1987-04-27 JP JP6268487U patent/JPS63170457U/ja active Pending