JPS63124736U - - Google Patents
Info
- Publication number
- JPS63124736U JPS63124736U JP1589287U JP1589287U JPS63124736U JP S63124736 U JPS63124736 U JP S63124736U JP 1589287 U JP1589287 U JP 1589287U JP 1589287 U JP1589287 U JP 1589287U JP S63124736 U JPS63124736 U JP S63124736U
- Authority
- JP
- Japan
- Prior art keywords
- end cap
- heat treatment
- vacuum adsorption
- adsorption chamber
- tube
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000001179 sorption measurement Methods 0.000 claims description 3
- 238000010438 heat treatment Methods 0.000 claims 2
Description
第１図はこの考案の一実施例を示す断面図、第
２図は従来例を示す断面図である。 １…炉心管、２…ウエハ、１０…真空吸着室、
１３…真空ポンプ。
２図は従来例を示す断面図である。 １…炉心管、２…ウエハ、１０…真空吸着室、
１３…真空ポンプ。
Claims (1)
- 炉心管の管端をエンドキヤツプで開閉する熱処
理炉において、該管端部に設けられ、エンドキヤ
ツプ側に開口を有し、かつエンドキヤツプ面と当
接可能な面を有する真空吸着室と、この真空吸着
室を真空にする手段とを備えたことを特徴とする
熱処理炉。
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1589287U JPS63124736U (ja) | 1987-02-05 | 1987-02-05 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1589287U JPS63124736U (ja) | 1987-02-05 | 1987-02-05 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63124736U true JPS63124736U (ja) | 1988-08-15 |
Family
ID=30807245
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1589287U Pending JPS63124736U (ja) | 1987-02-05 | 1987-02-05 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63124736U (ja) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6431411A (en) * | 1987-07-28 | 1989-02-01 | Toshiba Corp | Device for closing tube opening of heat treatment furnace |
| JPH01161829A (ja) * | 1987-12-18 | 1989-06-26 | Tel Sagami Ltd | 熱処理装置 |
-
1987
- 1987-02-05 JP JP1589287U patent/JPS63124736U/ja active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6431411A (en) * | 1987-07-28 | 1989-02-01 | Toshiba Corp | Device for closing tube opening of heat treatment furnace |
| JPH01161829A (ja) * | 1987-12-18 | 1989-06-26 | Tel Sagami Ltd | 熱処理装置 |