JPH0320810B2 - - Google Patents

Info

Publication number
JPH0320810B2
JPH0320810B2 JP59182087A JP18208784A JPH0320810B2 JP H0320810 B2 JPH0320810 B2 JP H0320810B2 JP 59182087 A JP59182087 A JP 59182087A JP 18208784 A JP18208784 A JP 18208784A JP H0320810 B2 JPH0320810 B2 JP H0320810B2
Authority
JP
Japan
Prior art keywords
electron beam
film
head core
evaporation
seconds
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP59182087A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6159616A (ja
Inventor
Kumio Nako
Masaru Kadono
Shuhei Tsuchimoto
Mitsuhiko Yoshikawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sharp Corp
Original Assignee
Sharp Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sharp Corp filed Critical Sharp Corp
Priority to JP18208784A priority Critical patent/JPS6159616A/ja
Priority to US06/664,425 priority patent/US4592923A/en
Publication of JPS6159616A publication Critical patent/JPS6159616A/ja
Publication of JPH0320810B2 publication Critical patent/JPH0320810B2/ja
Granted legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/14—Metallic material, boron or silicon

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Magnetic Heads (AREA)
JP18208784A 1983-10-24 1984-08-29 磁気ヘツドコアの製造方法 Granted JPS6159616A (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP18208784A JPS6159616A (ja) 1984-08-29 1984-08-29 磁気ヘツドコアの製造方法
US06/664,425 US4592923A (en) 1983-10-24 1984-10-24 Production method of a high magnetic permeability film

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP18208784A JPS6159616A (ja) 1984-08-29 1984-08-29 磁気ヘツドコアの製造方法

Publications (2)

Publication Number Publication Date
JPS6159616A JPS6159616A (ja) 1986-03-27
JPH0320810B2 true JPH0320810B2 (enrdf_load_stackoverflow) 1991-03-20

Family

ID=16112132

Family Applications (1)

Application Number Title Priority Date Filing Date
JP18208784A Granted JPS6159616A (ja) 1983-10-24 1984-08-29 磁気ヘツドコアの製造方法

Country Status (1)

Country Link
JP (1) JPS6159616A (enrdf_load_stackoverflow)

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4890513A (enrdf_load_stackoverflow) * 1972-03-02 1973-11-26
JPS599905A (ja) * 1982-07-09 1984-01-19 Hitachi Ltd 磁性体膜およびそれを用いた磁気ヘッド
JPH061729B2 (ja) * 1983-01-17 1994-01-05 株式会社日立製作所 磁性体膜およびそれを用いた磁気ヘッド

Also Published As

Publication number Publication date
JPS6159616A (ja) 1986-03-27

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