JPH0584566B2 - - Google Patents
Info
- Publication number
- JPH0584566B2 JPH0584566B2 JP4575186A JP4575186A JPH0584566B2 JP H0584566 B2 JPH0584566 B2 JP H0584566B2 JP 4575186 A JP4575186 A JP 4575186A JP 4575186 A JP4575186 A JP 4575186A JP H0584566 B2 JPH0584566 B2 JP H0584566B2
- Authority
- JP
- Japan
- Prior art keywords
- magnetic
- substrate
- film
- electron beam
- soft magnetic
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 239000000758 substrate Substances 0.000 claims description 26
- 229910002796 Si–Al Inorganic materials 0.000 claims description 8
- 238000001704 evaporation Methods 0.000 claims description 8
- 230000008020 evaporation Effects 0.000 claims description 8
- 238000005566 electron beam evaporation Methods 0.000 claims description 7
- 239000000463 material Substances 0.000 claims description 7
- 238000000034 method Methods 0.000 claims description 6
- 229910052710 silicon Inorganic materials 0.000 claims description 4
- 229910052782 aluminium Inorganic materials 0.000 claims description 3
- 238000004519 manufacturing process Methods 0.000 claims description 3
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims description 2
- 229910052742 iron Inorganic materials 0.000 claims description 2
- 239000010703 silicon Substances 0.000 claims description 2
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 claims 2
- 239000010408 film Substances 0.000 description 18
- 239000011162 core material Substances 0.000 description 8
- 230000004907 flux Effects 0.000 description 7
- 230000035699 permeability Effects 0.000 description 7
- 238000010894 electron beam technology Methods 0.000 description 5
- 239000013078 crystal Substances 0.000 description 3
- 238000000151 deposition Methods 0.000 description 3
- 230000008021 deposition Effects 0.000 description 3
- 238000010586 diagram Methods 0.000 description 3
- 239000011521 glass Substances 0.000 description 3
- 238000007740 vapor deposition Methods 0.000 description 3
- 238000002441 X-ray diffraction Methods 0.000 description 2
- 229910045601 alloy Inorganic materials 0.000 description 2
- 239000000956 alloy Substances 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 2
- 239000000203 mixture Substances 0.000 description 2
- 239000011347 resin Substances 0.000 description 2
- 229920005989 resin Polymers 0.000 description 2
- 229910000702 sendust Inorganic materials 0.000 description 2
- 239000012790 adhesive layer Substances 0.000 description 1
- 238000004458 analytical method Methods 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 238000005520 cutting process Methods 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 239000000428 dust Substances 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 230000005415 magnetization Effects 0.000 description 1
- 238000010791 quenching Methods 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
- 229910000859 α-Fe Inorganic materials 0.000 description 1
Landscapes
- Magnetic Heads (AREA)
- Thin Magnetic Films (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4575186A JPS62202307A (ja) | 1986-02-28 | 1986-02-28 | 磁気ヘツドコアの製造方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4575186A JPS62202307A (ja) | 1986-02-28 | 1986-02-28 | 磁気ヘツドコアの製造方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS62202307A JPS62202307A (ja) | 1987-09-07 |
| JPH0584566B2 true JPH0584566B2 (enrdf_load_stackoverflow) | 1993-12-02 |
Family
ID=12728009
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4575186A Granted JPS62202307A (ja) | 1986-02-28 | 1986-02-28 | 磁気ヘツドコアの製造方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62202307A (enrdf_load_stackoverflow) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0744110B2 (ja) * | 1988-09-02 | 1995-05-15 | 松下電器産業株式会社 | 高飽和磁束密度軟磁性膜及び磁気ヘッド |
-
1986
- 1986-02-28 JP JP4575186A patent/JPS62202307A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS62202307A (ja) | 1987-09-07 |
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