JPH0243243B2 - - Google Patents
Info
- Publication number
- JPH0243243B2 JPH0243243B2 JP18129284A JP18129284A JPH0243243B2 JP H0243243 B2 JPH0243243 B2 JP H0243243B2 JP 18129284 A JP18129284 A JP 18129284A JP 18129284 A JP18129284 A JP 18129284A JP H0243243 B2 JPH0243243 B2 JP H0243243B2
- Authority
- JP
- Japan
- Prior art keywords
- electron beam
- minutes
- silicon
- aluminum
- head core
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 claims description 23
- 229910052710 silicon Inorganic materials 0.000 claims description 15
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims description 14
- 229910052782 aluminium Inorganic materials 0.000 claims description 14
- 239000010703 silicon Substances 0.000 claims description 14
- 238000005566 electron beam evaporation Methods 0.000 claims description 12
- 229910052742 iron Inorganic materials 0.000 claims description 12
- 238000000034 method Methods 0.000 claims description 11
- 238000004519 manufacturing process Methods 0.000 claims description 10
- 238000000151 deposition Methods 0.000 claims description 8
- 230000008021 deposition Effects 0.000 claims description 8
- 238000002844 melting Methods 0.000 claims description 8
- 230000008018 melting Effects 0.000 claims description 8
- 238000007740 vapor deposition Methods 0.000 claims description 8
- 239000000463 material Substances 0.000 claims description 7
- 238000001704 evaporation Methods 0.000 claims description 6
- 230000008020 evaporation Effects 0.000 claims description 6
- 238000000313 electron-beam-induced deposition Methods 0.000 claims 1
- 239000011162 core material Substances 0.000 description 17
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 12
- 238000010894 electron beam technology Methods 0.000 description 11
- 239000000758 substrate Substances 0.000 description 9
- 239000000203 mixture Substances 0.000 description 8
- 230000035699 permeability Effects 0.000 description 7
- 238000010586 diagram Methods 0.000 description 5
- 238000005516 engineering process Methods 0.000 description 5
- 238000009826 distribution Methods 0.000 description 4
- 239000010410 layer Substances 0.000 description 4
- 229910000702 sendust Inorganic materials 0.000 description 4
- 239000012790 adhesive layer Substances 0.000 description 3
- 230000015572 biosynthetic process Effects 0.000 description 3
- 229910045601 alloy Inorganic materials 0.000 description 2
- 239000000956 alloy Substances 0.000 description 2
- 238000004458 analytical method Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 239000012535 impurity Substances 0.000 description 2
- 238000010309 melting process Methods 0.000 description 2
- 239000011347 resin Substances 0.000 description 2
- 229920005989 resin Polymers 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- 238000005303 weighing Methods 0.000 description 2
- 229910018072 Al 2 O 3 Inorganic materials 0.000 description 1
- 229910004298 SiO 2 Inorganic materials 0.000 description 1
- 238000002441 X-ray diffraction Methods 0.000 description 1
- 239000000853 adhesive Substances 0.000 description 1
- 230000001070 adhesive effect Effects 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 238000005520 cutting process Methods 0.000 description 1
- 239000010419 fine particle Substances 0.000 description 1
- 230000004907 flux Effects 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 230000005415 magnetization Effects 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 238000010791 quenching Methods 0.000 description 1
- 239000006104 solid solution Substances 0.000 description 1
- 238000007738 vacuum evaporation Methods 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/14—Metallic material, boron or silicon
Landscapes
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Magnetic Heads (AREA)
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18129284A JPS6157025A (ja) | 1984-08-28 | 1984-08-28 | 磁気ヘツドコアの製造方法 |
| US06/664,425 US4592923A (en) | 1983-10-24 | 1984-10-24 | Production method of a high magnetic permeability film |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18129284A JPS6157025A (ja) | 1984-08-28 | 1984-08-28 | 磁気ヘツドコアの製造方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6157025A JPS6157025A (ja) | 1986-03-22 |
| JPH0243243B2 true JPH0243243B2 (enrdf_load_stackoverflow) | 1990-09-27 |
Family
ID=16098129
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP18129284A Granted JPS6157025A (ja) | 1983-10-24 | 1984-08-28 | 磁気ヘツドコアの製造方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6157025A (enrdf_load_stackoverflow) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH06247452A (ja) * | 1993-02-16 | 1994-09-06 | Sacchettificio Nationale G Corazza Spa | 封止可能な充填口付きバッグ及びベルトキャリヤ上に載置する熱封止可能な充填口を有するバッグ封止装置 |
-
1984
- 1984-08-28 JP JP18129284A patent/JPS6157025A/ja active Granted
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH06247452A (ja) * | 1993-02-16 | 1994-09-06 | Sacchettificio Nationale G Corazza Spa | 封止可能な充填口付きバッグ及びベルトキャリヤ上に載置する熱封止可能な充填口を有するバッグ封止装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6157025A (ja) | 1986-03-22 |
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