JPH0159727B2 - - Google Patents
Info
- Publication number
- JPH0159727B2 JPH0159727B2 JP22879382A JP22879382A JPH0159727B2 JP H0159727 B2 JPH0159727 B2 JP H0159727B2 JP 22879382 A JP22879382 A JP 22879382A JP 22879382 A JP22879382 A JP 22879382A JP H0159727 B2 JPH0159727 B2 JP H0159727B2
- Authority
- JP
- Japan
- Prior art keywords
- film
- composition
- aluminum
- alloy
- deposited
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 229910045601 alloy Inorganic materials 0.000 claims description 41
- 239000000956 alloy Substances 0.000 claims description 41
- 239000000203 mixture Substances 0.000 claims description 26
- 229910052782 aluminium Inorganic materials 0.000 claims description 18
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims description 18
- 239000000758 substrate Substances 0.000 claims description 16
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 14
- 230000035699 permeability Effects 0.000 claims description 14
- 229910052710 silicon Inorganic materials 0.000 claims description 14
- 239000010703 silicon Substances 0.000 claims description 14
- 238000004519 manufacturing process Methods 0.000 claims description 13
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 claims description 12
- 238000010894 electron beam technology Methods 0.000 claims description 9
- 229910052742 iron Inorganic materials 0.000 claims description 6
- 238000007740 vapor deposition Methods 0.000 claims description 6
- 239000000126 substance Substances 0.000 claims description 4
- 238000010438 heat treatment Methods 0.000 claims description 3
- 230000001678 irradiating effect Effects 0.000 claims description 2
- 229910000702 sendust Inorganic materials 0.000 description 25
- 238000000034 method Methods 0.000 description 14
- 230000015572 biosynthetic process Effects 0.000 description 5
- 238000000151 deposition Methods 0.000 description 5
- 230000008021 deposition Effects 0.000 description 5
- 238000005566 electron beam evaporation Methods 0.000 description 5
- 238000010586 diagram Methods 0.000 description 4
- 238000007738 vacuum evaporation Methods 0.000 description 4
- 238000002441 X-ray diffraction Methods 0.000 description 3
- 238000004544 sputter deposition Methods 0.000 description 3
- 238000005019 vapor deposition process Methods 0.000 description 3
- 230000000903 blocking effect Effects 0.000 description 2
- 239000013590 bulk material Substances 0.000 description 2
- 239000013078 crystal Substances 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 238000012545 processing Methods 0.000 description 2
- 229910000640 Fe alloy Inorganic materials 0.000 description 1
- 235000009470 Theobroma cacao Nutrition 0.000 description 1
- 238000004458 analytical method Methods 0.000 description 1
- 238000010923 batch production Methods 0.000 description 1
- 244000240602 cacao Species 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 238000001035 drying Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000001704 evaporation Methods 0.000 description 1
- 230000008020 evaporation Effects 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 230000004907 flux Effects 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 229910001004 magnetic alloy Inorganic materials 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 239000006089 photosensitive glass Substances 0.000 description 1
- 238000005498 polishing Methods 0.000 description 1
- 238000010791 quenching Methods 0.000 description 1
- 230000000171 quenching effect Effects 0.000 description 1
- 238000011160 research Methods 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 238000001771 vacuum deposition Methods 0.000 description 1
- 229910000859 α-Fe Inorganic materials 0.000 description 1
Classifications
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
- G11B5/84—Processes or apparatus specially adapted for manufacturing record carriers
- G11B5/85—Coating a support with a magnetic layer by vapour deposition
Landscapes
- Magnetic Heads (AREA)
- Physical Vapour Deposition (AREA)
- Manufacturing Of Magnetic Record Carriers (AREA)
- Thin Magnetic Films (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP22879382A JPS59121629A (ja) | 1982-12-28 | 1982-12-28 | 高透磁率合金膜の製造方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP22879382A JPS59121629A (ja) | 1982-12-28 | 1982-12-28 | 高透磁率合金膜の製造方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS59121629A JPS59121629A (ja) | 1984-07-13 |
| JPH0159727B2 true JPH0159727B2 (enrdf_load_stackoverflow) | 1989-12-19 |
Family
ID=16881935
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP22879382A Granted JPS59121629A (ja) | 1982-12-28 | 1982-12-28 | 高透磁率合金膜の製造方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS59121629A (enrdf_load_stackoverflow) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS61260611A (ja) * | 1985-05-14 | 1986-11-18 | Sharp Corp | 軟磁性膜 |
| JP2551539Y2 (ja) * | 1990-10-03 | 1997-10-22 | ティーディーケイ株式会社 | 磁気テープ用蒸着装置 |
-
1982
- 1982-12-28 JP JP22879382A patent/JPS59121629A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS59121629A (ja) | 1984-07-13 |
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