JPH03202128A - Ｎｆ↓３の除害方法 - Google Patents
Ｎｆ↓３の除害方法Info
- Publication number
- JPH03202128A JPH03202128A JP1338271A JP33827189A JPH03202128A JP H03202128 A JPH03202128 A JP H03202128A JP 1338271 A JP1338271 A JP 1338271A JP 33827189 A JP33827189 A JP 33827189A JP H03202128 A JPH03202128 A JP H03202128A
- Authority
- JP
- Japan
- Prior art keywords
- fluoride
- nitrogen oxide
- treatment agent
- treating
- sorbent
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- MWUXSHHQAYIFBG-UHFFFAOYSA-N Nitric oxide Chemical compound O=[N] MWUXSHHQAYIFBG-UHFFFAOYSA-N 0.000 claims abstract description 56
- 239000007789 gas Substances 0.000 claims abstract description 20
- 239000003795 chemical substances by application Substances 0.000 claims abstract description 18
- 238000000034 method Methods 0.000 claims abstract description 15
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims abstract description 13
- 229910052751 metal Inorganic materials 0.000 claims abstract description 10
- 239000002184 metal Substances 0.000 claims abstract description 10
- 239000002594 sorbent Substances 0.000 claims abstract description 7
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims abstract description 4
- 239000002808 molecular sieve Substances 0.000 claims abstract description 4
- 239000000741 silica gel Substances 0.000 claims abstract description 4
- 229910002027 silica gel Inorganic materials 0.000 claims abstract description 4
- URGAHOPLAPQHLN-UHFFFAOYSA-N sodium aluminosilicate Chemical compound [Na+].[Al+3].[O-][Si]([O-])=O.[O-][Si]([O-])=O URGAHOPLAPQHLN-UHFFFAOYSA-N 0.000 claims abstract description 4
- QPLDLSVMHZLSFG-UHFFFAOYSA-N Copper oxide Chemical compound [Cu]=O QPLDLSVMHZLSFG-UHFFFAOYSA-N 0.000 claims abstract description 3
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 claims abstract description 3
- 150000002222 fluorine compounds Chemical class 0.000 claims description 9
- 229910001512 metal fluoride Inorganic materials 0.000 claims description 5
- 238000002844 melting Methods 0.000 claims description 3
- 230000008018 melting Effects 0.000 claims description 3
- GVGCUCJTUSOZKP-UHFFFAOYSA-N nitrogen trifluoride Chemical compound FN(F)F GVGCUCJTUSOZKP-UHFFFAOYSA-N 0.000 abstract description 15
- KRHYYFGTRYWZRS-UHFFFAOYSA-M Fluoride anion Chemical compound [F-] KRHYYFGTRYWZRS-UHFFFAOYSA-M 0.000 abstract description 11
- 229910004014 SiF4 Inorganic materials 0.000 abstract description 2
- 229910052742 iron Inorganic materials 0.000 abstract description 2
- ABTOQLMXBSRXSM-UHFFFAOYSA-N silicon tetrafluoride Chemical compound F[Si](F)(F)F ABTOQLMXBSRXSM-UHFFFAOYSA-N 0.000 abstract description 2
- NUJOXMJBOLGQSY-UHFFFAOYSA-N manganese dioxide Chemical compound O=[Mn]=O NUJOXMJBOLGQSY-UHFFFAOYSA-N 0.000 abstract 2
- AXCZMVOFGPJBDE-UHFFFAOYSA-L calcium dihydroxide Chemical compound [OH-].[OH-].[Ca+2] AXCZMVOFGPJBDE-UHFFFAOYSA-L 0.000 abstract 1
- 239000000920 calcium hydroxide Substances 0.000 abstract 1
- 235000011116 calcium hydroxide Nutrition 0.000 abstract 1
- 229910001861 calcium hydroxide Inorganic materials 0.000 abstract 1
- 229910052802 copper Inorganic materials 0.000 abstract 1
- VTHJTEIRLNZDEV-UHFFFAOYSA-L magnesium dihydroxide Chemical compound [OH-].[OH-].[Mg+2] VTHJTEIRLNZDEV-UHFFFAOYSA-L 0.000 abstract 1
- 239000000347 magnesium hydroxide Substances 0.000 abstract 1
- 235000012254 magnesium hydroxide Nutrition 0.000 abstract 1
- 229910001862 magnesium hydroxide Inorganic materials 0.000 abstract 1
- YCKRFDGAMUMZLT-UHFFFAOYSA-N Fluorine atom Chemical compound [F] YCKRFDGAMUMZLT-UHFFFAOYSA-N 0.000 description 5
- 239000011737 fluorine Substances 0.000 description 5
- 229910052731 fluorine Inorganic materials 0.000 description 5
- -1 5in1.12 Chemical class 0.000 description 2
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 2
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 2
- NIXOWILDQLNWCW-UHFFFAOYSA-N acrylic acid group Chemical group C(C=C)(=O)O NIXOWILDQLNWCW-UHFFFAOYSA-N 0.000 description 2
- 239000007795 chemical reaction product Substances 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 239000000835 fiber Substances 0.000 description 2
- 239000000203 mixture Substances 0.000 description 2
- QKCGXXHCELUCKW-UHFFFAOYSA-N n-[4-[4-(dinaphthalen-2-ylamino)phenyl]phenyl]-n-naphthalen-2-ylnaphthalen-2-amine Chemical compound C1=CC=CC2=CC(N(C=3C=CC(=CC=3)C=3C=CC(=CC=3)N(C=3C=C4C=CC=CC4=CC=3)C=3C=C4C=CC=CC4=CC=3)C3=CC4=CC=CC=C4C=C3)=CC=C21 QKCGXXHCELUCKW-UHFFFAOYSA-N 0.000 description 2
- MGWGWNFMUOTEHG-UHFFFAOYSA-N 4-(3,5-dimethylphenyl)-1,3-thiazol-2-amine Chemical compound CC1=CC(C)=CC(C=2N=C(N)SC=2)=C1 MGWGWNFMUOTEHG-UHFFFAOYSA-N 0.000 description 1
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 description 1
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 1
- 239000006227 byproduct Substances 0.000 description 1
- 229910052799 carbon Inorganic materials 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 238000001784 detoxification Methods 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 229910052750 molybdenum Inorganic materials 0.000 description 1
- 239000011733 molybdenum Substances 0.000 description 1
- 229910052757 nitrogen Inorganic materials 0.000 description 1
- JCXJVPUVTGWSNB-UHFFFAOYSA-N nitrogen dioxide Inorganic materials O=[N]=O JCXJVPUVTGWSNB-UHFFFAOYSA-N 0.000 description 1
- JTJMJGYZQZDUJJ-UHFFFAOYSA-N phencyclidine Chemical compound C1CCCCN1C1(C=2C=CC=CC=2)CCCCC1 JTJMJGYZQZDUJJ-UHFFFAOYSA-N 0.000 description 1
- 239000002760 rocket fuel Substances 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 239000010936 titanium Substances 0.000 description 1
- 229910052719 titanium Inorganic materials 0.000 description 1
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 1
- 229910052721 tungsten Inorganic materials 0.000 description 1
- 239000010937 tungsten Substances 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Landscapes
- Treating Waste Gases (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1338271A JPH03202128A (ja) | 1989-12-28 | 1989-12-28 | Ｎｆ↓３の除害方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1338271A JPH03202128A (ja) | 1989-12-28 | 1989-12-28 | Ｎｆ↓３の除害方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH03202128A true JPH03202128A (ja) | 1991-09-03 |
| JPH0523814B2 JPH0523814B2 (enExample) | 1993-04-05 |
Family
ID=18316556
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1338271A Granted JPH03202128A (ja) | 1989-12-28 | 1989-12-28 | Ｎｆ↓３の除害方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH03202128A (enExample) |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH09267027A (ja) * | 1996-03-29 | 1997-10-14 | Japan Pionics Co Ltd | 有害ガスの浄化剤 |
| JP2006314905A (ja) * | 2005-05-12 | 2006-11-24 | Hitachi Ltd | フッ素化合物含有ガスの処理方法及び処理装置 |
| WO2010095512A1 (ja) * | 2009-02-23 | 2010-08-26 | セントラル硝子株式会社 | 三フッ化窒素の分解方法及び分解装置 |
| CN102447486A (zh) * | 2010-10-06 | 2012-05-09 | 三星电机株式会社 | 具有自适应延迟控制功能的数据接口设备 |
| JP2013086088A (ja) * | 2011-10-24 | 2013-05-13 | Taiyo Nippon Sanso Corp | ハロゲン化物粒子を含むガスの除害方法 |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6161619A (ja) * | 1984-09-04 | 1986-03-29 | Asahi Glass Co Ltd | 排ガスの処理方法 |
| JPS61204025A (ja) * | 1985-03-06 | 1986-09-10 | Central Glass Co Ltd | Ｎｆ↓３の除害方法 |
| JPS61287424A (ja) * | 1985-06-11 | 1986-12-17 | Showa Denko Kk | 窒素弗化物の処理方法 |
| JPS62289222A (ja) * | 1986-06-09 | 1987-12-16 | Ube Ind Ltd | 気体吸着捕捉装置 |
| JPS6312322A (ja) * | 1986-07-04 | 1988-01-19 | Showa Denko Kk | 排ガス処理方法 |
-
1989
- 1989-12-28 JP JP1338271A patent/JPH03202128A/ja active Granted
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6161619A (ja) * | 1984-09-04 | 1986-03-29 | Asahi Glass Co Ltd | 排ガスの処理方法 |
| JPS61204025A (ja) * | 1985-03-06 | 1986-09-10 | Central Glass Co Ltd | Ｎｆ↓３の除害方法 |
| JPS61287424A (ja) * | 1985-06-11 | 1986-12-17 | Showa Denko Kk | 窒素弗化物の処理方法 |
| JPS62289222A (ja) * | 1986-06-09 | 1987-12-16 | Ube Ind Ltd | 気体吸着捕捉装置 |
| JPS6312322A (ja) * | 1986-07-04 | 1988-01-19 | Showa Denko Kk | 排ガス処理方法 |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH09267027A (ja) * | 1996-03-29 | 1997-10-14 | Japan Pionics Co Ltd | 有害ガスの浄化剤 |
| JP2006314905A (ja) * | 2005-05-12 | 2006-11-24 | Hitachi Ltd | フッ素化合物含有ガスの処理方法及び処理装置 |
| WO2010095512A1 (ja) * | 2009-02-23 | 2010-08-26 | セントラル硝子株式会社 | 三フッ化窒素の分解方法及び分解装置 |
| CN102447486A (zh) * | 2010-10-06 | 2012-05-09 | 三星电机株式会社 | 具有自适应延迟控制功能的数据接口设备 |
| JP2013086088A (ja) * | 2011-10-24 | 2013-05-13 | Taiyo Nippon Sanso Corp | ハロゲン化物粒子を含むガスの除害方法 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0523814B2 (enExample) | 1993-04-05 |
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