JPH0523814B2 - - Google Patents

Info

Publication number
JPH0523814B2
JPH0523814B2 JP1338271A JP33827189A JPH0523814B2 JP H0523814 B2 JPH0523814 B2 JP H0523814B2 JP 1338271 A JP1338271 A JP 1338271A JP 33827189 A JP33827189 A JP 33827189A JP H0523814 B2 JPH0523814 B2 JP H0523814B2
Authority
JP
Japan
Prior art keywords
treatment
fluorides
gas
nitrogen oxides
temperature
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP1338271A
Other languages
English (en)
Japanese (ja)
Other versions
JPH03202128A (ja
Inventor
Yoshiharu Yasuhara
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ebara Corp
Ebara Research Co Ltd
Original Assignee
Ebara Corp
Ebara Research Co Ltd
Ebara Infilco Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ebara Corp, Ebara Research Co Ltd, Ebara Infilco Co Ltd filed Critical Ebara Corp
Priority to JP1338271A priority Critical patent/JPH03202128A/ja
Publication of JPH03202128A publication Critical patent/JPH03202128A/ja
Publication of JPH0523814B2 publication Critical patent/JPH0523814B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Treating Waste Gases (AREA)
JP1338271A 1989-12-28 1989-12-28 Ｎｆ↓３の除害方法 Granted JPH03202128A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1338271A JPH03202128A (ja) 1989-12-28 1989-12-28 Ｎｆ↓３の除害方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1338271A JPH03202128A (ja) 1989-12-28 1989-12-28 Ｎｆ↓３の除害方法

Publications (2)

Publication Number Publication Date
JPH03202128A JPH03202128A (ja) 1991-09-03
JPH0523814B2 true JPH0523814B2 (enExample) 1993-04-05

Family

ID=18316556

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1338271A Granted JPH03202128A (ja) 1989-12-28 1989-12-28 Ｎｆ↓３の除害方法

Country Status (1)

Country Link
JP (1) JPH03202128A (enExample)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH09267027A (ja) * 1996-03-29 1997-10-14 Japan Pionics Co Ltd 有害ガスの浄化剤
JP4675148B2 (ja) * 2005-05-12 2011-04-20 昭和電工株式会社 フッ素化合物含有ガスの処理方法及び処理装置
JP2010194416A (ja) * 2009-02-23 2010-09-09 Central Glass Co Ltd Ｎｆ３の分解方法およびその方法を用いる装置
KR20120035755A (ko) * 2010-10-06 2012-04-16 삼성전기주식회사 적응형 지연 조절 기능이 구비된 데이터 인터페이스 장치
JP2013086088A (ja) * 2011-10-24 2013-05-13 Taiyo Nippon Sanso Corp ハロゲン化物粒子を含むガスの除害方法

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6161619A (ja) * 1984-09-04 1986-03-29 Asahi Glass Co Ltd 排ガスの処理方法
JPS61204025A (ja) * 1985-03-06 1986-09-10 Central Glass Co Ltd Ｎｆ↓３の除害方法
JPS61287424A (ja) * 1985-06-11 1986-12-17 Showa Denko Kk 窒素弗化物の処理方法
JPS62289222A (ja) * 1986-06-09 1987-12-16 Ube Ind Ltd 気体吸着捕捉装置
JPS6312322A (ja) * 1986-07-04 1988-01-19 Showa Denko Kk 排ガス処理方法

Also Published As

Publication number Publication date
JPH03202128A (ja) 1991-09-03

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