JPH0319694B2 - - Google Patents

Info

Publication number
JPH0319694B2
JPH0319694B2 JP55062590A JP6259080A JPH0319694B2 JP H0319694 B2 JPH0319694 B2 JP H0319694B2 JP 55062590 A JP55062590 A JP 55062590A JP 6259080 A JP6259080 A JP 6259080A JP H0319694 B2 JPH0319694 B2 JP H0319694B2
Authority
JP
Japan
Prior art keywords
current
semiconductor
amorphous
amorphous semiconductor
type
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP55062590A
Other languages
English (en)
Japanese (ja)
Other versions
JPS56158419A (en
Inventor
Shunpei Yamazaki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Semiconductor Energy Laboratory Co Ltd
Original Assignee
Semiconductor Energy Laboratory Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Semiconductor Energy Laboratory Co Ltd filed Critical Semiconductor Energy Laboratory Co Ltd
Priority to JP6259080A priority Critical patent/JPS56158419A/ja
Publication of JPS56158419A publication Critical patent/JPS56158419A/ja
Publication of JPH0319694B2 publication Critical patent/JPH0319694B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/02104—Forming layers
    • H01L21/02365—Forming inorganic semiconducting materials on a substrate
    • H01L21/02612—Formation types
    • H01L21/02617—Deposition types
    • H01L21/0262—Reduction or decomposition of gaseous compounds, e.g. CVD
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/02104—Forming layers
    • H01L21/02365—Forming inorganic semiconducting materials on a substrate
    • H01L21/02518—Deposited layers
    • H01L21/02521—Materials
    • H01L21/02524—Group 14 semiconducting materials
    • H01L21/02532—Silicon, silicon germanium, germanium

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Photovoltaic Devices (AREA)
JP6259080A 1980-05-12 1980-05-12 Semiamorphous semiconductor and manufacture therefor Granted JPS56158419A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6259080A JPS56158419A (en) 1980-05-12 1980-05-12 Semiamorphous semiconductor and manufacture therefor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6259080A JPS56158419A (en) 1980-05-12 1980-05-12 Semiamorphous semiconductor and manufacture therefor

Publications (2)

Publication Number Publication Date
JPS56158419A JPS56158419A (en) 1981-12-07
JPH0319694B2 true JPH0319694B2 (enrdf_load_stackoverflow) 1991-03-15

Family

ID=13204680

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6259080A Granted JPS56158419A (en) 1980-05-12 1980-05-12 Semiamorphous semiconductor and manufacture therefor

Country Status (1)

Country Link
JP (1) JPS56158419A (enrdf_load_stackoverflow)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62119978A (ja) * 1985-11-20 1987-06-01 Matsushita Electric Ind Co Ltd 非晶質太陽電池素子
JP2708864B2 (ja) * 1989-03-22 1998-02-04 富士電機 株式会社 非晶質半導体の生成方法

Also Published As

Publication number Publication date
JPS56158419A (en) 1981-12-07

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