JPS56158419A - Semiamorphous semiconductor and manufacture therefor - Google Patents
Semiamorphous semiconductor and manufacture thereforInfo
- Publication number
- JPS56158419A JPS56158419A JP6259080A JP6259080A JPS56158419A JP S56158419 A JPS56158419 A JP S56158419A JP 6259080 A JP6259080 A JP 6259080A JP 6259080 A JP6259080 A JP 6259080A JP S56158419 A JPS56158419 A JP S56158419A
- Authority
- JP
- Japan
- Prior art keywords
- nonpaired
- semiconductor
- couples
- amorphous
- coupling hands
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000004065 semiconductor Substances 0.000 title abstract 5
- 238000004519 manufacturing process Methods 0.000 title 1
- 230000008878 coupling Effects 0.000 abstract 4
- 238000010168 coupling process Methods 0.000 abstract 4
- 238000005859 coupling reaction Methods 0.000 abstract 4
- 230000006798 recombination Effects 0.000 abstract 3
- 238000010276 construction Methods 0.000 abstract 2
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 abstract 1
- 229910021417 amorphous silicon Inorganic materials 0.000 abstract 1
- 239000013078 crystal Substances 0.000 abstract 1
- 238000010438 heat treatment Methods 0.000 abstract 1
- 229910052739 hydrogen Inorganic materials 0.000 abstract 1
- 239000001257 hydrogen Substances 0.000 abstract 1
- 239000002184 metal Substances 0.000 abstract 1
- 239000000758 substrate Substances 0.000 abstract 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02365—Forming inorganic semiconducting materials on a substrate
- H01L21/02612—Formation types
- H01L21/02617—Deposition types
- H01L21/0262—Reduction or decomposition of gaseous compounds, e.g. CVD
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02365—Forming inorganic semiconducting materials on a substrate
- H01L21/02518—Deposited layers
- H01L21/02521—Materials
- H01L21/02524—Group 14 semiconducting materials
- H01L21/02532—Silicon, silicon germanium, germanium
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Photovoltaic Devices (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6259080A JPS56158419A (en) | 1980-05-12 | 1980-05-12 | Semiamorphous semiconductor and manufacture therefor |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6259080A JPS56158419A (en) | 1980-05-12 | 1980-05-12 | Semiamorphous semiconductor and manufacture therefor |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS56158419A true JPS56158419A (en) | 1981-12-07 |
| JPH0319694B2 JPH0319694B2 (enrdf_load_stackoverflow) | 1991-03-15 |
Family
ID=13204680
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP6259080A Granted JPS56158419A (en) | 1980-05-12 | 1980-05-12 | Semiamorphous semiconductor and manufacture therefor |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS56158419A (enrdf_load_stackoverflow) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS62119978A (ja) * | 1985-11-20 | 1987-06-01 | Matsushita Electric Ind Co Ltd | 非晶質太陽電池素子 |
| JPH02248037A (ja) * | 1989-03-22 | 1990-10-03 | Fuji Electric Co Ltd | 非晶質半導体の生成方法 |
-
1980
- 1980-05-12 JP JP6259080A patent/JPS56158419A/ja active Granted
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS62119978A (ja) * | 1985-11-20 | 1987-06-01 | Matsushita Electric Ind Co Ltd | 非晶質太陽電池素子 |
| JPH02248037A (ja) * | 1989-03-22 | 1990-10-03 | Fuji Electric Co Ltd | 非晶質半導体の生成方法 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0319694B2 (enrdf_load_stackoverflow) | 1991-03-15 |
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