JPH0319164B2 - - Google Patents

Info

Publication number
JPH0319164B2
JPH0319164B2 JP56130355A JP13035581A JPH0319164B2 JP H0319164 B2 JPH0319164 B2 JP H0319164B2 JP 56130355 A JP56130355 A JP 56130355A JP 13035581 A JP13035581 A JP 13035581A JP H0319164 B2 JPH0319164 B2 JP H0319164B2
Authority
JP
Japan
Prior art keywords
germanium
piece
hard carbon
growing
glow discharge
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP56130355A
Other languages
English (en)
Japanese (ja)
Other versions
JPS57111220A (en
Inventor
Uiriamu Guriin Jefuri
Harorudo Reteinguton Aran
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NAT RES DEV
Original Assignee
NAT RES DEV
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Family has litigation
First worldwide family litigation filed litigation Critical https://patents.darts-ip.com/?family=10515601&utm_source=google_patent&utm_medium=platform_link&utm_campaign=public_patent_search&patent=JPH0319164(B2) "Global patent litigation dataset” by Darts-ip is licensed under a Creative Commons Attribution 4.0 International License.
Application filed by NAT RES DEV filed Critical NAT RES DEV
Publication of JPS57111220A publication Critical patent/JPS57111220A/ja
Publication of JPH0319164B2 publication Critical patent/JPH0319164B2/ja
Granted legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/50—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges
    • C23C16/503—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges using DC or AC discharges
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
    • C23C16/26—Deposition of carbon only
    • G02B1/105—
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B1/00—Optical elements characterised by the material of which they are made; Optical coatings for optical elements
    • G02B1/10—Optical coatings produced by application to, or surface treatment of, optical elements
    • G02B1/11—Anti-reflection coatings
    • G02B1/111—Anti-reflection coatings using layers comprising organic materials
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B1/00—Optical elements characterised by the material of which they are made; Optical coatings for optical elements
    • G02B1/10—Optical coatings produced by application to, or surface treatment of, optical elements
    • G02B1/14—Protective coatings, e.g. hard coatings
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F77/00—Constructional details of devices covered by this subclass
    • H10F77/30—Coatings
    • H10F77/306—Coatings for devices having potential barriers
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/30—Self-sustaining carbon mass or layer with impregnant or other layer

Landscapes

  • Chemical & Material Sciences (AREA)
  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Optics & Photonics (AREA)
  • General Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • General Physics & Mathematics (AREA)
  • Mechanical Engineering (AREA)
  • Plasma & Fusion (AREA)
  • Organic Chemistry (AREA)
  • Inorganic Chemistry (AREA)
  • Chemical Vapour Deposition (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
  • Carbon And Carbon Compounds (AREA)
  • Drying Of Semiconductors (AREA)
JP56130355A 1980-08-21 1981-08-21 Carbon layer coating method Granted JPS57111220A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB8027279 1980-08-21

Publications (2)

Publication Number Publication Date
JPS57111220A JPS57111220A (en) 1982-07-10
JPH0319164B2 true JPH0319164B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1991-03-14

Family

ID=10515601

Family Applications (1)

Application Number Title Priority Date Filing Date
JP56130355A Granted JPS57111220A (en) 1980-08-21 1981-08-21 Carbon layer coating method

Country Status (4)

Country Link
US (1) US4412903A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
EP (1) EP0048542B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
JP (1) JPS57111220A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
DE (1) DE3172609D1 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Families Citing this family (24)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2514743B1 (fr) * 1981-10-21 1986-05-09 Rca Corp Pellicule amorphe a base de carbone, du type diamant, et son procede de fabrication
JPS6055480B2 (ja) * 1982-08-23 1985-12-05 住友電気工業株式会社 ダイヤモンドの気相合成法
EP0106637B1 (en) * 1982-10-12 1988-02-17 National Research Development Corporation Infra red transparent optical components
US4704339A (en) * 1982-10-12 1987-11-03 The Secretary Of State For Defence In Her Britannic Majesty's Government Of The United Kingdom Of Great Britain And Northern Ireland Infra-red transparent optical components
DE3316693A1 (de) * 1983-05-06 1984-11-08 Leybold-Heraeus GmbH, 5000 Köln Verfahren zum herstellen von amorphen kohlenstoffschichten auf substraten und durch das verfahren beschichtete substrate
US4524106A (en) * 1983-06-23 1985-06-18 Energy Conversion Devices, Inc. Decorative carbon coating and method
DE3335623A1 (de) * 1983-09-30 1985-04-11 Siemens AG, 1000 Berlin und 8000 München Verfahren zur herstellung einer kohlenstoff enthaltenden schicht, kohlenstoff enthaltende schicht, verwendung einer kohlenstoff enthaltenden schicht und vorrichtung zur durchfuehrung eines verfahrens zur herstellung einer kohlenstoff enthaltenden schicht
CA1232228A (en) * 1984-03-13 1988-02-02 Tatsuro Miyasato Coating film and method and apparatus for producing the same
JPS60204695A (ja) * 1984-03-28 1985-10-16 Mitsubishi Metal Corp 人工ダイヤモンド皮膜の析出形成方法
GB2291888B (en) * 1984-06-08 1996-06-26 Barr & Stroud Ltd Optical coating
US4579609A (en) * 1984-06-08 1986-04-01 Massachusetts Institute Of Technology Growth of epitaxial films by chemical vapor deposition utilizing a surface cleaning step immediately before deposition
US4490229A (en) * 1984-07-09 1984-12-25 The United States Of America As Represented By The Administrator Of The National Aeronautics And Space Administration Deposition of diamondlike carbon films
US4770940A (en) * 1984-09-10 1988-09-13 Ovonic Synthetic Materials Company Glow discharge method of applying a carbon coating onto a substrate and coating applied thereby
EP0221531A3 (en) * 1985-11-06 1992-02-19 Kanegafuchi Kagaku Kogyo Kabushiki Kaisha High heat conductive insulated substrate and method of manufacturing the same
JPS6379972A (ja) * 1987-09-12 1988-04-09 Semiconductor Energy Lab Co Ltd 炭素被膜
JPS63145776A (ja) * 1987-09-12 1988-06-17 Semiconductor Energy Lab Co Ltd 被膜作成方法
JPH01103310A (ja) * 1987-10-16 1989-04-20 Sumitomo Electric Ind Ltd 表面弾性波素子
GB9018608D0 (en) * 1989-08-30 2013-11-13 Texas Instruments Inc Durable wideband anti-reflection coating for infrared windows
US5638136A (en) * 1992-01-13 1997-06-10 Mitsubishi Denki Kabushiki Kaisha Method and apparatus for detecting flesh tones in an image
JPH08241858A (ja) * 1995-01-25 1996-09-17 Toshiba Corp 半導体の反射防止膜及びこの反射防止膜を用いた半導体の製造方法
US6066399A (en) * 1997-03-19 2000-05-23 Sanyo Electric Co., Ltd. Hard carbon thin film and method of forming the same
JP2003526191A (ja) 1997-08-13 2003-09-02 アプライド マテリアルズ インコーポレイテッド 半導体デバイス用銅エッチング方法
US6410101B1 (en) * 2000-02-16 2002-06-25 Motorola, Inc. Method for scrubbing and passivating a surface of a field emission display
FR3116152A1 (fr) * 2020-11-06 2022-05-13 Lynred Fenetre optique en germanium, detecteur infrarouge et procede de realisation associes

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
SU411037A1 (ru) * 1971-10-28 1974-08-05 В. М. Гол ЯНОВ , А. П. Демидов Способ получения искусственных алмазов
US3854979A (en) * 1972-06-29 1974-12-17 Aerospace Corp Process for applying glassy carbon coatings
JPS5123476B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * 1973-04-12 1976-07-16
US4060660A (en) * 1976-01-15 1977-11-29 Rca Corporation Deposition of transparent amorphous carbon films
CH611341A5 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * 1976-09-09 1979-05-31 Balzers Hochvakuum

Also Published As

Publication number Publication date
EP0048542B1 (en) 1985-10-09
EP0048542B2 (en) 1993-03-31
JPS57111220A (en) 1982-07-10
EP0048542A2 (en) 1982-03-31
US4412903A (en) 1983-11-01
EP0048542A3 (en) 1982-04-28
DE3172609D1 (en) 1985-11-14

Similar Documents

Publication Publication Date Title
JPH0319164B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
US4400410A (en) Coating insulating materials by glow discharge
EP0032788B2 (en) Method for depositing coatings in a glow discharge
EP2009135B1 (en) Base substrate for epitaxial diamond film, method for manufacturing the base substrate for epitaxial diamond film, epitaxial diamond film manufactured by the base substrate for epitaxial diamond film, and method for manufacturing the epitaxial diamond film
EP0106637B1 (en) Infra red transparent optical components
GB2083841A (en) Glow discharge coating
GB2165266A (en) Infra red transparent optical components
GB2082562A (en) Coating germanium or silica with carbon
GB2240114A (en) Film nucleation process for growing diamond film
US5654044A (en) Diamond film deposition on graphite
JPS59136479A (ja) 複合層を生長させる方法
JPH04118884A (ja) 固体放電素子
CN109764264A (zh) 一种深海照明led光源装置及制备方法
JP2002115061A (ja) ダイヤモンド状炭素膜の作製方法
US5753379A (en) Protective coatings for optical components
CN1025353C (zh) 等离子体处理方法和设备
CN112831769B (zh) 一种红外光学产品复合增透膜及其制备方法
JP4148402B2 (ja) Ｃｖｄによるカーボン皮膜の選択的形成方法
JP4148403B2 (ja) Ｃｖｄによるカーボン皮膜の形成方法
Grill Ion beam reactively sputtered silicon nitride coatings
Tochitsky et al. Structure modelling of DLC-films formed by pulsed arc method
JPH0247252A (ja) 複合材料膜の製造方法
JPS58185418A (ja) 厚いカ−ボン膜の成膜方法
JPH07102377A (ja) 炭素または炭素を主成分とする被膜
JP3254202B2 (ja) 炭素膜または炭素を主成分とする膜が設けられた部材