FR2514743B1 - Pellicule amorphe a base de carbone, du type diamant, et son procede de fabrication - Google Patents

Pellicule amorphe a base de carbone, du type diamant, et son procede de fabrication

Info

Publication number
FR2514743B1
FR2514743B1 FR8216600A FR8216600A FR2514743B1 FR 2514743 B1 FR2514743 B1 FR 2514743B1 FR 8216600 A FR8216600 A FR 8216600A FR 8216600 A FR8216600 A FR 8216600A FR 2514743 B1 FR2514743 B1 FR 2514743B1
Authority
FR
France
Prior art keywords
carbon
manufacturing
based amorphous
amorphous film
diamond type
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
FR8216600A
Other languages
English (en)
Other versions
FR2514743A1 (fr
Inventor
Joseph Zelez
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
RCA Corp
Original Assignee
RCA Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by RCA Corp filed Critical RCA Corp
Publication of FR2514743A1 publication Critical patent/FR2514743A1/fr
Application granted granted Critical
Publication of FR2514743B1 publication Critical patent/FR2514743B1/fr
Expired legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
    • C03C17/22—Surface treatment of glass, not in the form of fibres or filaments, by coating with other inorganic material
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
    • C23C16/26—Deposition of carbon only
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C2217/00—Coatings on glass
    • C03C2217/20—Materials for coating a single layer on glass
    • C03C2217/28—Other inorganic materials
    • C03C2217/282—Carbides, silicides
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C2218/00—Methods for coating glass
    • C03C2218/10—Deposition methods
    • C03C2218/15—Deposition methods from the vapour phase
    • C03C2218/152—Deposition methods from the vapour phase by cvd
    • C03C2218/153—Deposition methods from the vapour phase by cvd by plasma-enhanced cvd
FR8216600A 1981-10-21 1982-10-04 Pellicule amorphe a base de carbone, du type diamant, et son procede de fabrication Expired FR2514743B1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
GB8131794 1981-10-21
US34802182A 1982-02-11 1982-02-11

Publications (2)

Publication Number Publication Date
FR2514743A1 FR2514743A1 (fr) 1983-04-22
FR2514743B1 true FR2514743B1 (fr) 1986-05-09

Family

ID=26281036

Family Applications (1)

Application Number Title Priority Date Filing Date
FR8216600A Expired FR2514743B1 (fr) 1981-10-21 1982-10-04 Pellicule amorphe a base de carbone, du type diamant, et son procede de fabrication

Country Status (5)

Country Link
JP (1) JPH0699807B2 (fr)
CA (1) CA1202598A (fr)
DE (1) DE3237851A1 (fr)
FR (1) FR2514743B1 (fr)
GB (1) GB2109012B (fr)

Families Citing this family (24)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4640744A (en) * 1984-01-23 1987-02-03 Standard Oil Company (Indiana) Amorphous carbon electrodes and their use in electrochemical cells
DE3442208C3 (de) * 1984-11-19 1998-06-10 Leybold Ag Verfahren und Vorrichtung zum Herstellen harter Kohlenstoffschichten
DE3609503A1 (de) * 1985-03-22 1986-10-02 Canon K.K., Tokio/Tokyo Heizwiderstandselement und heizwiderstand unter verwendung desselben
DE3608887A1 (de) * 1985-03-22 1986-10-02 Canon K.K., Tokio/Tokyo Waermeerzeugungs-widerstandselement und waermeerzeugungs-widerstandsvorrichtung unter verwendung des waermeerzeugungs-widerstandselements
US4845513A (en) * 1985-03-23 1989-07-04 Canon Kabushiki Kaisha Thermal recording head
DE3609691A1 (de) * 1985-03-23 1986-10-02 Canon K.K., Tokio/Tokyo Thermischer schreibkopf
DE3609456A1 (de) * 1985-03-23 1986-10-02 Canon K.K., Tokio/Tokyo Waermeerzeugender widerstand und waermeerzeugendes widerstandselement unter benutzung desselben
GB2175252B (en) * 1985-03-25 1990-09-19 Canon Kk Thermal recording head
GB2176443B (en) * 1985-06-10 1990-11-14 Canon Kk Liquid jet recording head and recording system incorporating the same
JPS62202899A (ja) * 1986-03-03 1987-09-07 Nippon Gakki Seizo Kk 装飾品の製法
JPH0676666B2 (ja) * 1987-02-10 1994-09-28 株式会社半導体エネルギ−研究所 炭素膜作製方法
DE3706340A1 (de) * 1987-02-27 1988-09-08 Winter & Sohn Ernst Verfahren zum auftragen einer verschleissschutzschicht und danach hergestelltes erzeugnis
JPH01103310A (ja) * 1987-10-16 1989-04-20 Sumitomo Electric Ind Ltd 表面弾性波素子
DE3815457A1 (de) * 1988-05-06 1989-11-16 Sipra Patent Beteiligung Strickmaschine
GB2240114B (en) * 1990-01-18 1993-03-24 Stc Plc Film nucleation process
KR930003300A (ko) * 1991-07-23 1993-02-24 스탠 게이어 다이아몬드가 피복된 캐리어
JP2574934Y2 (ja) * 1993-03-02 1998-06-18 シチズン時計株式会社 編機用部品
JPH0676383U (ja) * 1993-04-06 1994-10-28 シチズン時計株式会社 繊維関連機械部品
GB2286347B (en) * 1994-02-10 1998-04-29 Atomic Energy Authority Uk Improved load-bearing polymeric materials
JP2003035707A (ja) * 2001-06-18 2003-02-07 Doko Cho 遺伝子又は蛋白質を着床した生物チップの基板及びその製造方法
WO2007057478A1 (fr) * 2005-11-15 2007-05-24 Fundacion Tekniker Piece a surface exterieure polymere presentant un fini metallique, procede de fabrication et utilisations de ladite piece
US10249495B2 (en) * 2016-06-28 2019-04-02 Applied Materials, Inc. Diamond like carbon layer formed by an electron beam plasma process
JP7122316B2 (ja) * 2017-09-25 2022-08-19 住友電気工業株式会社 硬質炭素系被膜の製造方法、及び被膜付き部材
JP2021006649A (ja) * 2017-09-26 2021-01-21 住友電気工業株式会社 硬質炭素被膜の製造方法

Family Cites Families (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3961103A (en) * 1972-07-12 1976-06-01 Space Sciences, Inc. Film deposition
US4060660A (en) * 1976-01-15 1977-11-29 Rca Corporation Deposition of transparent amorphous carbon films
JPS5838952B2 (ja) * 1976-01-22 1983-08-26 日本電気株式会社 半導体レ−ザ装置
GB1582231A (en) * 1976-08-13 1981-01-07 Nat Res Dev Application of a layer of carbonaceous material to a surface
JPS6023406B2 (ja) * 1977-05-18 1985-06-07 日本電気株式会社 磁気デイスク
JPS5825041B2 (ja) * 1979-08-03 1983-05-25 日本電信電話株式会社 ダイヤモンド状炭素膜の製造方法
DE3064976D1 (en) * 1979-11-20 1983-10-27 Nat Res Dev Infra red reflectors
GB2069008B (en) * 1980-01-16 1984-09-12 Secr Defence Coating in a glow discharge
JPS56108876A (en) * 1980-02-04 1981-08-28 Citizen Watch Co Ltd Silver plated exterior decorative parts for watch and their manufacture
GB2082562B (en) * 1980-08-21 1983-12-14 Secr Defence Coating germanium of silicon with carbon
EP0049032B1 (fr) * 1980-08-21 1986-09-17 National Research Development Corporation Revêtement de matériaux isolants à l'aide d'une décharge luminescente
GB2083841B (en) * 1980-08-21 1985-03-13 Secr Defence Glow discharge coating
DE3172609D1 (en) * 1980-08-21 1985-11-14 Nat Res Dev Coating infra red transparent semiconductor material
JPS57106513A (en) * 1980-12-22 1982-07-02 Nippon Telegr & Teleph Corp <Ntt> Formation of carbon film

Also Published As

Publication number Publication date
GB2109012B (en) 1986-09-03
FR2514743A1 (fr) 1983-04-22
CA1202598A (fr) 1986-04-01
GB2109012A (en) 1983-05-25
JPH0699807B2 (ja) 1994-12-07
DE3237851A1 (de) 1983-04-28
JPS5879807A (ja) 1983-05-13

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Legal Events

Date Code Title Description
ST Notification of lapse