JPH0318406Y2 - - Google Patents
Info
- Publication number
- JPH0318406Y2 JPH0318406Y2 JP1986142383U JP14238386U JPH0318406Y2 JP H0318406 Y2 JPH0318406 Y2 JP H0318406Y2 JP 1986142383 U JP1986142383 U JP 1986142383U JP 14238386 U JP14238386 U JP 14238386U JP H0318406 Y2 JPH0318406 Y2 JP H0318406Y2
- Authority
- JP
- Japan
- Prior art keywords
- load
- transfer device
- clean
- self
- transfer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 230000003749 cleanliness Effects 0.000 claims description 19
- 238000005192 partition Methods 0.000 claims description 12
- 230000000149 penetrating effect Effects 0.000 claims description 2
- 239000000428 dust Substances 0.000 description 8
- 230000003213 activating effect Effects 0.000 description 2
- 230000002411 adverse Effects 0.000 description 1
- 238000004891 communication Methods 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
Landscapes
- Warehouses Or Storage Devices (AREA)
- Intermediate Stations On Conveyors (AREA)
- Ventilation (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1986142383U JPH0318406Y2 (zh) | 1986-09-17 | 1986-09-17 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1986142383U JPH0318406Y2 (zh) | 1986-09-17 | 1986-09-17 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS6348706U JPS6348706U (zh) | 1988-04-02 |
JPH0318406Y2 true JPH0318406Y2 (zh) | 1991-04-18 |
Family
ID=31051069
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP1986142383U Expired JPH0318406Y2 (zh) | 1986-09-17 | 1986-09-17 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH0318406Y2 (zh) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP4623381B2 (ja) * | 2006-06-27 | 2011-02-02 | 株式会社ダイフク | 物品収納設備 |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS60140035A (ja) * | 1983-12-27 | 1985-07-24 | Daifuku Co Ltd | クリ−ンル−ム内の荷搬送設備 |
JPS6149713B2 (zh) * | 1981-08-26 | 1986-10-30 | Hitachi Ltd |
Family Cites Families (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0237763Y2 (zh) * | 1984-09-04 | 1990-10-12 | ||
JPH0237764Y2 (zh) * | 1984-10-11 | 1990-10-12 |
-
1986
- 1986-09-17 JP JP1986142383U patent/JPH0318406Y2/ja not_active Expired
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6149713B2 (zh) * | 1981-08-26 | 1986-10-30 | Hitachi Ltd | |
JPS60140035A (ja) * | 1983-12-27 | 1985-07-24 | Daifuku Co Ltd | クリ−ンル−ム内の荷搬送設備 |
Also Published As
Publication number | Publication date |
---|---|
JPS6348706U (zh) | 1988-04-02 |
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