JPH0318407Y2 - - Google Patents
Info
- Publication number
- JPH0318407Y2 JPH0318407Y2 JP1986142384U JP14238486U JPH0318407Y2 JP H0318407 Y2 JPH0318407 Y2 JP H0318407Y2 JP 1986142384 U JP1986142384 U JP 1986142384U JP 14238486 U JP14238486 U JP 14238486U JP H0318407 Y2 JPH0318407 Y2 JP H0318407Y2
- Authority
- JP
- Japan
- Prior art keywords
- transfer device
- load
- cleanliness
- clean room
- clean
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 230000003749 cleanliness Effects 0.000 claims description 22
- 238000005192 partition Methods 0.000 claims description 13
- 239000000428 dust Substances 0.000 description 8
- 230000000694 effects Effects 0.000 description 2
- 238000007796 conventional method Methods 0.000 description 1
- 238000006073 displacement reaction Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
Landscapes
- Intermediate Stations On Conveyors (AREA)
- Ventilation (AREA)
- Warehouses Or Storage Devices (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1986142384U JPH0318407Y2 (zh) | 1986-09-17 | 1986-09-17 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1986142384U JPH0318407Y2 (zh) | 1986-09-17 | 1986-09-17 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6348707U JPS6348707U (zh) | 1988-04-02 |
| JPH0318407Y2 true JPH0318407Y2 (zh) | 1991-04-18 |
Family
ID=31051071
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1986142384U Expired JPH0318407Y2 (zh) | 1986-09-17 | 1986-09-17 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0318407Y2 (zh) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP5217416B2 (ja) * | 2007-12-25 | 2013-06-19 | 村田機械株式会社 | 保管庫及び入出庫方法 |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0237764Y2 (zh) * | 1984-10-11 | 1990-10-12 |
-
1986
- 1986-09-17 JP JP1986142384U patent/JPH0318407Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6348707U (zh) | 1988-04-02 |
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