JPH0318407Y2 - - Google Patents

Description

[Detailed Description of the Invention] Industrial Application Field The present invention relates to cargo handling equipment in a clean room used for transporting and storing cargo (articles) such as semiconductors that are extremely sensitive to dust.

Conventional technology Conventionally, this type of equipment was
As seen in No. 59-177707, a cargo storage device surrounded by a box-shaped main body is installed in a clean room.
The end of the transport path of the load transport device, which is composed of a rail device and a self-propelled cart guided by the rail device, is visible inside the main body.
The cargo storage device includes a shelf and a loading/unloading device, and the loading/unloading device has a slow working speed. Therefore, the transport route is usually formed by branching from the main transport route, and the work is to move the self-propelled cart that has traveled on the main transport route to the branch transport route, stop it at the end of the route, and then carry out loading/unloading. Loads are transferred between the shelves and the self-propelled trolley using a device, so that work speed is not affected.

Problems to be Solved by the Invention According to the conventional method described above, the work of the cargo storage device is to complete the transfer of goods to the self-propelled cart using the loading/unloading device, and then the self-propelled cart exits to the main transport route. However, it cannot be carried out until the next self-propelled cart branches off from the main transport route and reaches the end of the transport route. Therefore, although the cycle time is sufficient to cover the work speed of the loading/unloading device, the overall work Efficiency was poor. Furthermore, a transfer device for separating and merging the flow is required between both routes, and since this transfer device is installed in a clean room, appropriate cleanliness measures or equipment are required. Furthermore, cargo storage equipment tends to generate dust due to its various operations, and when installed in a clean room with a high degree of cleanliness,
Appropriate cleanliness measures and equipment are required.

The purpose of this invention is to be able to transfer loads between the self-propelled cart on the main transport route and the cargo storage device without forming a branch transport route, and to partition the cargo storage device into sections using partition walls. We provide cargo handling equipment in a clean room that is installed in the lower clean room of two clean rooms with different cleanliness levels to prevent dust generated in the cargo storage equipment from flowing into the clean room with a higher cleanliness level. It is in the point of doing.

Means for Solving the Problems In order to solve the above problems, the cargo handling equipment in the clean room of the present invention is provided with a partition wall that separates two clean rooms with different degrees of cleanliness. A closed cargo storage device having a clean unit to maintain the cleanliness is provided, and an upper transfer device is provided that passes through an opening formed at the top of the partition wall to connect the clean room with a high degree of cleanliness and the cargo storage device. Along with this, a lower transfer device that looks into either one of the clean rooms is installed, and a load transfer device that faces the end of the upper transfer device and has a self-propelled cart, and a self-propelled cart and upper transfer device are provided in the clean room with a high degree of cleanliness. A transfer device is provided for transferring loads to and from the storage device, and the load storage device includes a shelf having a plurality of storage spaces, and a loading/unloading device for transferring loads between the shelf and both transfer devices. It has a device.

Effect According to the configuration of the present invention, the self-propelled cart is stopped facing the end of the upper transfer device, and then the transfer device is operated to transfer the load between the self-propelled cart and the upper transfer device. Loading and unloading can be carried out. By operating the loading/unloading device, the load can be moved between the upper transfer device and the load storage device, between the lower transfer device and the load storage device, and between both transfer devices. Also, for the lower transfer device,
Loading and unloading can be carried out manually from either side of the clean room or using a cargo handling trolley. During such cargo handling work, clean air from the clean room side, which has a high level of cleanliness, flows into the cargo storage device through the opening formed in the partition wall for installing the transfer device, so that air generated in the cargo storage device is generated. The collected dust will not flow into the clean room, which has a high degree of cleanliness, and will be processed in the clean unit of the cargo storage device. Furthermore, by adjusting the transfer range of the upper transfer device, the placement positions of the load transfer device and the transfer device can be freely determined and adjusted as desired.

Embodiment An embodiment of the present invention will be described below with reference to FIGS. 1 to 4.

1 is a high clean room with a high degree of cleanliness (for example, class 10), and 2 is a low clean room with a low degree of cleanliness (for example, class 100), and these clean rooms 1 and 2 are separated by a vertical partition wall 3. and both clean rooms 1 (2)
is configured so that clean air 6, 7 is blown downward from the ceiling side through filters 4, 5, and the descending clean air 6, 7 is sucked into the floor through mesh-type floors 8, 9. Reference numeral 10 denotes a cargo storage device disposed close to the partition wall 3 in the low clean room 2. Inside the rectangular box-shaped and airtight main body 11, there are shelves 12 and a plurality of storage spaces partitioned in the vertical direction. , a clean unit 60 facing one side of this shelf 12, and a loading/unloading device 3 facing the other side.
4 are arranged. The clean unit 60
is a filter 6 disposed so as to cover the other surface of the shelf 12 and forming a flow path 61 between it and the main body 11;
2, and a blower 63 that sucks air from the lower part of the main body 11 and blows air into the flow path 61.
It operates to maintain a high level of cleanliness inside. Openings 13 and 14 are formed at the upper and lower parts of the partition wall 3 and at opposing locations of the main body 11.
3 and 14, an upper transfer device 15 and a lower transfer device 16 are provided that extend between the high clean room 1 and the cargo storage device 10. These transfer devices 15,
Reference numeral 16 has the same shape, and includes rectangular long box-shaped cases 17 and 18, rails 19 and 20 laid inside the cases 17 and 18, and guides to these rails 19 and 20 via sliding bodies 21 and 22. movable table 23,
24, reciprocating devices 25, 26 which are interlocked with the movable bases 23, 24 and whose transfer range can be freely adjusted;
It is composed of connecting rods 29, 30 passing through slits 27, 28 formed in holes 7, 18, and load supporting stands 31, 32 attached to the protruding ends of these connecting rods 29, 30. The loading/unloading device 34 is configured to transfer the load 33 between the shelf 12 and both transfer devices 15 and 16. In other words, the loading/unloading device 34 is
A lifting table 36 guided by a rail 35, a movable table 37 provided on the lifting table 36 so as to be movable back and forth,
It is formed of a pair of left and right support arms 38 that protrude forward from the movable table 37 and are movable toward and away from each other in the left and right directions. The load 33 has a case shape, and the outer surface of the upper part has a protrusion 33 to be locked around the entire circumference.
a is provided, and the support arm 38 is connected to the locked protrusion 3.
3a can be freely engaged from below. In the high clean room 1, there is disposed a load transfer device 41 having stations 39 facing both ends of the upper transfer device 15 and forming a fixed transfer path 40. This load transfer device 41 includes a C-shaped rail device 42 with an open top surface, and a self-propelled cart 44 that is supported and guided by the rail device 42 via wheels 43 or the like.
and a duct 46 that surrounds the rail device 42 and the self-propelled truck 44 and has a slit 45 at the top.
and the suction path 4 formed at the bottom of this duct 46.
A connecting rod 48, which is constructed of 7 etc. and is erected from the upper surface of the self-propelled cart 44, projects into the high clean room 1 through the slit 45, and a cargo receiving stand 49 is provided at the projecting end. Inside the high clean room 1, there is a transfer device 5 that transfers the load 33 between the self-propelled cart 44 and the upper transfer device 15.
0 is set. The transfer device 50 includes a filter 4
A rotary motion device 51 that penetrates through and is attached to the ceiling side.
A support 54 is fixed to the downward rotating shaft 52 of the rotary motion device 51 and is rotatable around the vertical axis 53, and is movable up and down via the rotating shaft 52, and a 180 degree displacement of the support 54. It is composed of a pair of left and right support arms 55 and 56 that respectively protrude forward from two surfaces and are movable towards and away from each other in the left and right directions.

Next, the operation of the above embodiment will be explained.

First, the unloading operation of the load 33 transported by the load transport device 41 will be explained. A self-propelled cart 44 with a load 33 placed on a load receiving platform 49 is guided by a rail device 42, travels on a fixed transport path 40, and is stopped at a station 39. At this time, in the transfer device 50, the support body 54 is raised, and at least the pair of support arms 55 or 56 located above the load transfer device 41 are moved away from each other and are in an empty state. In this state, the support arm 5 is
5 and 56 are lowered and positioned below and outside of the locked protrusion 33a of the load 33. and support arm 5
By moving the protrusions 5 and 56 toward each other and moving them upward via the support 54, the protrusion 3 to be locked is
3a by engaging the support arms 55 and 56 from below,
The load 33 is lifted from the load receiving platform 49. Next, the support body 54 is rotated 180 degrees around the vertical axis 53 and then lowered to place the load 33 on the load support table 31 located at the end on the load transfer device 41 side. let Then, the support arms 55 and 56 are moved apart and raised, and the load support platform 31 is moved into the load storage device 12 via the movable platform 23, etc., thereby completing the unloading operation of the load 33.

Note that by operating in the opposite direction to that described above, the load 33 on the upper transfer device 15 side can be loaded onto the self-propelled cart 44 side. In addition, by using the two sets of support arms 55 and 56, it is possible to carry out unloading and loading operations twice in a row in a short period of time, or to immediately load the self-propelled cart 44 that has become empty during unloading operations. You can also do this.

Load 33 on load support platform 31 of upper transfer device 15
is transferred into the shelf 12 or to the load support 32 of the lower transfer device 16 by the loading/unloading device 34. That is, this is made possible by a combination of the vertical movement of the lifting platform 36, the back and forth movement of the movable body 37, and the approaching and separating movement of the support arm 38. Moreover, by performing the combination operation in reverse, the load 33 on the load support table 32 of the lower transfer device 16 or in the shelf 12 can be transferred onto the load support table 31 of the upper transfer device 15. Furthermore, the loading/unloading device 34 can be used to transfer the load 33 between the load support table 32 of the lower transfer device 16 and the inside of the shelf 12. The load 33 from inside the high clean room 1 can be transferred to and from the load support platform 32 of the lower transfer device 16 by a self-propelled, fork-type transport vehicle, or manually.

During the cargo handling work as described above, the cargo storage device 1
0, a high degree of cleanliness is maintained by the operation of the clean unit 60. That is, the blower 63
The air from the storage unit rises in the flow path 61, passes through the filter 62, becomes clean air, and is supplied toward the shelf 12 and the loading/unloading device 34. While descending inside the main body 1, this clean air carries the dust generated inside the main body 11 in its flow, and is sucked and removed from the lower part of the main body 11 by the blower 63. Furthermore, the clean air 6 on the high clean room 1 side has both openings 1
3 and 14 into the main body 11, and joins the clean air descending within the main body 11. Therefore, dust generated on the shelves 12 and the loading/unloading device 34 will not flow into the clean room 1 through the openings 13 and 14.

FIG. 5 shows another embodiment. That is, while in the previous embodiment the transfer directions of both the transfer devices 15 and 16 were the same, in this other embodiment the transfer directions were the same.
It is displaced 90 degrees, and the lower transfer device 16 looks into the lower clean room 2. Therefore, only the upper opening 13 is formed in the partition wall 3.

Effects of the Invention According to the present invention having the above-mentioned configuration, after the self-propelled cart is stopped facing the end of the upper transfer device, the transfer device is operated, thereby allowing the transfer between the self-propelled cart and the upper transfer device. By operating the loading and unloading device, the load can be transferred between the upper transfer device and the cargo storage device, between the lower transfer device and the cargo storage device, and between both transfer devices. Each can move cargo. As a result, loading and unloading of loads to and from the load storage device can be carried out without any hindrance to the loading/unloading device depending on the intended working speed of the loading/unloading device. This makes it possible to efficiently transfer cargo between the self-propelled cart and the cargo storage device on the one-way transport route, and eliminates the need for transfer devices for branching and merging. In addition, the lower transfer device can be loaded and unloaded manually from either side of the clean room or by a cargo handling cart. In particular, during cargo handling work as described above, clean air from the clean room side, which has a high degree of cleanliness, flows to the cargo storage device side through an opening formed in the partition wall for installing the transfer device, and then the cargo storage Since the dust is processed in the clean unit of the equipment, dust generated in the cargo storage equipment and loading/unloading equipment can be removed by the clean air and can be prevented from flowing into the clean room, which has a high degree of cleanliness. Further, by adjusting the transfer range of the upper transfer device, the arrangement positions of the load conveyance device and the transfer device can be freely set and adjusted as desired.

[Brief explanation of the drawing]

Figures 1 to 4 show an embodiment of the present invention, with Figure 1 being a partially cutaway perspective view, Figure 2 being a longitudinal side view,
Figure 3 is a vertical front view, Figure 4 is a cross-sectional plan view, and Figure 5 is a cross-sectional front view.
The figure is a partially cutaway perspective view showing another embodiment. 1... High clean room, 2... Low clean room, 3... Partition wall, 6, 7... Clean air,
10... cargo storage device, 11... main body, 12...
Shelf, 13, 14... Opening, 15... Upper transfer device, 16... Lower transfer device, 31, 32... Load support platform, 33... Load, 33a... Locked protrusion, 34
... Carrying in/out device, 38... Support arm, 39... Station, 40... Transport route, 41... Load transport device, 44... Self-propelled trolley, 49... Load receiving platform, 50...
...Transfer device, 51... Rotation device, 55, 56...
...Support arm, 60...Clean unit, 62...
filter.

Claims (1)

[Scope of Claim for Utility Model Registration] A partition wall is provided to separate two clean rooms with different levels of cleanliness, and the clean room with a lower level of cleanliness is provided with an enclosed cargo storage device that has a clean unit to maintain a high level of cleanliness. ,
An upper transfer device is provided that passes through the opening formed in the upper part of the partition wall and extends between a clean room with a high degree of cleanliness and a cargo storage device, and a lower transfer device is provided that looks into either one of the clean rooms, thereby providing a high degree of cleanliness. The clean room is provided with a load transfer device that faces the end of the upper transfer device and has a self-propelled cart, and a transfer device that transfers the load between the self-propelled cart and the upper transfer device. 1. A cargo handling facility in a clean room, wherein the storage device includes a shelf having a plurality of storage spaces, and a loading/unloading device that transfers cargo between the shelf and both transfer devices. handling equipment.