JPS60140035A - Load carrying facility in clean room - Google Patents

Abstract

PURPOSE:To ensure the cleanness of a station section by a constitution wherein a station chamber is arranged so as to surround the track of a load carrying device in a clean room at the titled carrying facility of semiconductor or the like. CONSTITUTION:Clean air 4 is blown downwards from a ceiling 2 through filters 3 into a clean room 1 and then sucked underfloor through a floor 5 and discharged. Dusts produced within a duct 13 for travelling truck 7 is removed through a suction duct by providing a load carrying device 6. In addition, the propriate portion in the travelling course of the load carrying device 6 is surrounded by a surrounding wall bodies 16 so as to form a station chamber 17 with closed ceiling 18 in order to supply clean air 39 from a clean unit 40 therein. In the constitution as mentioned above, when a load 27 is unloaded to a storage rack 20, the clean air 39 is blown-off in order to remove dusts produced by a transfer device 29 by sucking underfloor. Due to the constitution as mentioned above, the bad influence of dust to the clean room and the loads can be prevented.

Description

DETAILED DESCRIPTION OF THE INVENTION Field of the Invention The present invention relates to load transport equipment in a clean room, which is used to transport loads such as semiconductors, which are extremely sensitive to dust, in the clean room.

Conventional Structures and Problems Therein, various measures have been taken to prevent dust generated on the load transfer device side from leaking into the clean room and having an adverse effect on the load transfer equipment as described above. On the other hand, at the station, automatic work by transfer equipment allows
Alternatively, the loading and unloading of loads onto the load conveying device is performed manually by a worker. At this time, dust is generated from the transfer equipment and workers, and this is the biggest problem when transporting cargo in a clean room.

OBJECT OF THE INVENTION The object of the present invention is to provide a method for transporting goods in a clean room, where dust generated in a station can be quickly sucked and removed under the floor without adversely affecting the clean room or the goods, and which can ensure the cleanliness of the station area. The point is to provide facilities.

Structure of the Invention In order to achieve the above object, the load transfer equipment in a clean room according to the present invention blows clean air downward from the ceiling side and sucks the descending air below the floor. A station chamber is formed by a surrounding wall at a suitable location on the travel path of the load conveying device, and a clean unit is provided to supply clean air into the station chamber.

Embodiment and Function An embodiment of the present invention will be described below with reference to FIGS. 1 and 2. (1) is a clean room configured so that clean air (4) is blown downward from the ceiling (2) side through a filter (3), and the descending air is sucked into the bottom of the floor through a mesh-type floor (5). be.

A load transfer device (6) is installed in the upper part of the clean room (1).
will be placed. That is, (7) is a trolley, which has running wheels (8) at the lower part, and the load support part 01 is attached to the upper part via the connecting part (9). θυ is a rail that supports and guides the truck (7), and includes a power supply rail (6) and the like for controlling and automatically driving the truck (7). The trolley (7) and 17-ru0] are arranged in a cylindrical duct 01. A slit 04 is formed in the top plate of the duct 03 over the entire length of the travel route, and an elastic sealing material OQ is provided from the left and right sides of the slit 04 to form a seal type slit portion. Then, the connecting portion (9) is inserted into this seal type slit portion.
) is located. A suction duct (not shown) communicates with the duct (to), so that dust generated within the duct a can be removed. A station room α is formed by the surrounding wall OQ at a suitable location on the travel path of the load conveyance device (6) configured as described above. The upper part on the side of the station room is closed by the top plate 0 barrel, and the lower part communicates with the underfloor via the floor (5). The load transfer device (6) is located in the station room 07).
For this purpose, an opening θ1 is formed in the surrounding wall OQ. In the station room 07), a storage shelf (1) is provided below the load conveying device (6).

This storage shelf (E) consists of a framework main body]), a large number of vertical partition plates (A) arranged horizontally in parallel, and a large number of horizontal partition plates arranged vertically in parallel. It consists of at least a cover plate (c) made of a transparent plate etc. attached to the rear surface of the frame body c7◇, and a plurality of partitioned storage spaces in the vertical and horizontal directions are formed by the side partition plates (a)). . A tray (E) is provided on each horizontal partition plate σ-dyed forming each storage space (C), and the load (B) is supported by the top of each tray. Here, the cargo (goods) refers to a case that can store semiconductors and the like, and locking parts (to) are protruding from both sides of the case. In the station room 0η, a transfer rack is provided extending from the outer side of the load transfer device (6) to the front front of the storage shelf (E). That is, the floor (5
) A frame body (to) is erected from the side, and a pair of guide rods 0υ are arranged in the vertical direction on this frame body. An elevating frame (2) guided by both guide rods clD is provided, and its elevating is controlled by a drive device (toward) provided at the upper part of the frame body A.
This is done via an endless rotating body (2) that is linked to the. A horizontal guide rod is attached to the elevating frame 6, and a left and right movable platform is provided which is guided by the guide rod and can move laterally. A front and rear movable base (b) that can move forward and backward is provided on this left and right movable base (1), and from this front and rear movable base (m), a pair of left and right holding arms (2) are connected to the front. The holding arm (2) is configured to allow relative vertical movement of the load (b) between opposing sides, and to engage the locked portion (to) from below. In the upper part of the station room αη, the station room Qη
A clean unit ■ is installed to supply clean air inside.

Next, the operation of the above embodiment will be explained.

To unload the load (b) transported by the load transfer device (6) onto the storage shelf (e), first move the trolley (7) that has traveled inside the clean room (1) through the opening 09 into the station room α.
η and stop it facing the transfer device).

At this time, in the transfer device), the holding arm (to) is retracted together with the front and rear movable table (2), as shown by the solid line in FIG. Next, raise the lifting frame) and move the left and right movable platform (
Move the holding arm ( ) to the left and right, and hold the holding arm (
(to) to face the cargo (goods). And front and rear movable platform (b)
, and move the locked part (c) forward as shown by the imaginary line (b).
Position the holding arm (to) below. Then to the lift frame)
At the same time, the holding arm (7) is raised to lift the load (goods) via the locked part (c). Then, after retracting the front and rear movable platform (B) and pulling the load (A) above the left and right movable platform (to), the load (A) is lowered by the lowering of the lifting frame and the left and right movement of the left and right movable platform (2). (b) facing the empty compartment storage space. Next, the front and rear movable platform (b) moves forward to insert the cargo (goods) into the compartment storage space (as shown by the imaginary line (c)), and then lowers the cargo (goods) into the lifting frame to receive the cargo (goods). (c) At the same time, move the front and rear movable platform (b) back and pull out the holding arm (to) to finish the cargo control work.

Also, by performing the operation opposite to the above, the storage shelf
The cargo (goods) inside can be loaded onto the cargo support portion OI of the truck (7). During such work, the station room (+71
Then clean air (to the upper clean unit) from
2) is blown downward, and the descending air is sucked from the floor (5) to below the floor. As a result, the station room αη
An air flow from top to bottom is generated inside the room, so that dust generated in the transfer device can be quickly sucked and removed under the floor without adversely affecting the clean room (1) or the cargo (c).

8 to 5 show another embodiment of an automatic station using a transfer device. In other words, the transfer bag Hp) has a conveyor θ1) that can be driven in the left and right directions and a conveyor drive device ←2 on the lifting frame), and transfers the load (b) between the conveyor θ1) and the load support member. is possible. A carry-in/out port (-) is formed at a suitable location in the surrounding wall 06, and a carry-in conveyor (C) is provided in the station room OfJ opposite to this carry-in/in/out port (C), as well as its driving device (C). Note that an opening/closing door may be provided at the loading/unloading exit.

) indicates the upper duct.

6-8 show another embodiment of a manual station that does not use a transfer device. That is, the station room Qη
An upper work floor @ η and a lower work floor are formed inside the lower work floor (goods), and a storage shelf (
e) is installed.

Effects of the Invention According to the present invention having the above configuration, the following effects can be expected. In other words, in the station room, the clean air blown downward from the clean unit descends and is sucked from the floor to the subfloor, and the air flow generated by this removes dust generated from the transfer equipment and workers in the station room. It is possible to quickly suction and remove debris under the floor, thereby preventing any negative impact on the clean room or cargo. In addition, high cleanliness can be maintained only in the station room, which is a necessary location, making it possible to reduce costs and save energy.

[Brief explanation of the drawing]

Figures 1 and 2 show one embodiment of the present invention, Figure 1 is a vertical side view, Figure 2 is a perspective view, and Figures 8 to 5 are other embodiments using a transfer device. FIG. 8 is a vertical side view, FIG. 4 is a vertical front view, FIG. 5 is a partially cutaway plan view, and FIGS. 6 to 8 show another embodiment in which no transfer device is used. , FIG. 6 is a longitudinal sectional front view, FIG. 7 is a longitudinal sectional front view, and FIG. 8 is a partially cutaway plan view. (])...Clean room, (2)...Ceiling, (3
)...Filter, (4)...Clean air, (
5)...Floor, (6)...Load conveyance device, (7)...
Dolly, 01...Load support part, α■...Rail, (to)
... Box-shaped duct, QfS ... Surrounding wall body, Q ... Station room, (E) ... Storage shelf, (B) ... Cargo,
(c)...Locked part, (2)...Transfer device, (2)...
...Clean air, wheel...Clean unit, 67
)...Upper working floor, (Foundation)...Lower working floor agent
Yoshihiro Morimoto

Claims (1)

[Claims] 1. A load transfer device is installed in a clean room that blows clean air downward from the ceiling and sucks the descending air below the floor, and a station room is formed with a surrounding wall at an appropriate location on the travel path of this load transfer device. A cargo transport facility in a clean room characterized by having a clean unit that supplies clean air into the station room.