JPS6044404A - Load hold installation in clean room - Google Patents

Abstract

PURPOSE:To prevent movement of dust made at handling of loads toward shelves of a load hold installation in a clean room by supplying clean air into each of subdivided storage spaces of the shelves through filters provided at the back thereof. CONSTITUTION:A clean room in which clean air flow 4 is blown down from a ceiling and suctioned downwardly through a meshy floor 5 is provided with a load hold installation which includes a central passage 7 and shelves 6 disposed on both sides of the passage 7 and having a plurality of subdivided storage spaces 11 arranged in lines and columns. There is provided in the passage 7 a conveying device 14 movable along the shelves 6 and having an elevating table 42 and a fork 43. In this installation, the shelves are provided within a body 8 thereof with filters 45 disposed at the back of the whole subdivided storage spaces 11 and air supplying devices 46 disposed at the lower portion of the body 8 for supplying clean air from the back of the filters 45 toward the spaces 11.

Description

DETAILED DESCRIPTION OF THE INVENTION The present invention is installed in a clean room where clean air is blown downward from the ceiling and the descending air is sucked below the floor. Preliminary facilities and t in the clean room used for storage
It is dark to ti.

In general, cargo storage equipment consists of a shelf that has multiple compartment storage stations in the upper and lateral directions, and a shelf that can move freely along a fixed path along the shelf and that can be moved up and down, as well as moved in and out in the lateral direction. It consists of a carry-out device with an A-rail. In such cargo storage equipment, a lot of dust is generated due to wear and tear, especially on the lifting guide device (U) that lifts and lowers the fork, and the lifting drive device, and the dust is generated near the shelves. The dust will not be suctioned away from the original painting, but will migrate to the front side where it is stored on the shelf.

For these reasons, it has been impossible to mechanize and automate the anterior body tube in a clean room, that is, to adopt the anterior body tube installation 1i.

Book: F and Akira's H purpose is to make the entire flow of clean air flow from the rear side to the front side facing the carry-out device in each compartment storage space of the shelf, so that this small carry-in device The aim is to provide cargo storage equipment in a clean room that can prevent dust generated at the part where the forks are raised from being transferred to the shelf side.

In order to achieve the above object, the cargo storage equipment in the clean room of the present invention blows clean air downward from the ceiling side and sucks the descending air below the floor. A carrying-in hanging device is provided which has a shelf having a space and a fork that can move freely on a fixed path along the shelf and can move up and down as well as laterally move in and out, and the shelf has an open front surface facing the carrying-in hanging device. At the same time, a filter is disposed on the rear side, and an air supply device is provided to supply clean air into each storage space through the filter.

According to the configuration of the present invention, the following effects can be expected. In other words, the air in the clean room is sucked in by the operation of the air supply device, and the clean air generated through the filter is distributed from the rear side to the front side facing the material removal device in each compartment storage space of the shelf. ]
It is possible to prevent the most dust generated in the parts where the rack is raised and lowered from moving to the shelf side. This makes it possible to mechanize and automatically charge the anterior body tube within the sifrin room.

An embodiment of the present invention will be described below based on the drawings. (
1) is a clean room, and clean air (4 liters) is blown downward from the ceiling (2) side through the filter (3).
The structure is such that the descending air is sucked through the mesh type floor (5) and below the floor. (6) are shelves arranged in parallel with a predetermined passageway (7). These shelves (6) are
A box-shaped main body (8) that is open from the middle to the top of the front, a large number of vertical partition plates (9) arranged horizontally in the open part, and a large number of horizontal partitions arranged horizontally in the vertical direction. The inner partition plate (9) forms a small number of divided storage spaces aυ in the vertical and horizontal directions. Each compartment storage space αυ is provided with a pair of left and right arm openings, and these arm openings support loads such as semiconductors. 0ψ is a carry-out device disposed in the passage (7), which can freely travel on a fixed path 0 along the shelf (6). That is, a pair of rails) V IJ: θ are arranged at the bottom of the passageway (7) via the machine frame Qf9, and
The main body Q of < is transmitted through multiple wheels Q
It is placed on η. The hon-yaku-a-sho is equipped with a traveling drive device (4) that is linked to the wheel 9, and this traveling drive device is composed of a DC servo motor that does not easily generate shocks, and a storage space in the lowermost compartment. It is arranged to be located below U. A rectangular cylindrical body Qυ is erected from the center of the main body (G), and the upper end of the rectangular cylindrical body Qυ is closed by the top plate (2), and the lower end is connected to the lower end open part - , and a vertical slit (c) is formed in the center of the front surface. A vertical penetrating portion communicating with the lower end open portion is formed in the main body,
A suction device (a), such as an intake fan, is installed in the penetrating part (a) facing from below. (A) is a movable body that is located inside and outside of the rectangular cylinder eυ through the NIF corner, and is arranged so as to be able to move up and down along the rectangular cylinder eυ. In other words, an LM guide type lifting guide device (c) is disposed inside the rectangular cylinder (2η, and this lifting guide device is installed in the vertical direction on the rear inner surface of the rectangular cylinder elυ/this guide tray) V (I). ), and a guided body (7) that can be fully guided by the guide rail 4 and is attached to the rear of the movable body (b). Furthermore, there is an elevating drive fL inside the square cylinder & IJ! l device l, (〃 is arranged. That is, lifting drive device
-#+3 is installed near the top plate (2) -4
, a lower width 1 body disposed near the lower end opening part, a cable body 6 hung between both wheel bodies 6 and fixed to the movable body (c), and the lower wheel body QK interlocked with each other. It also consists of an inverter-controlled motor mounted on the main body (G).

The rear path of the cable body ■ is located inside the protector attached to the rear outer surface of the rectangular cylinder ■υ, and this protector (also only the lower end is open. Note that it is not connected to the inverter control motor) or A protective cover 9 is provided above the travel drive device. At the upper end and I end of the rectangular cylinder θυ, a winding drum (=j) is provided with a spring or the like, respectively, and the sheet curtain (=j) which is wound up on these drums M81 Nylon, etc.) * viv I' Vi!J and upper end are biJ
The movable body is fixed to the vertical force. A lifting platform is integrated into the front part of the movable body (a), and a fork that can move in and out of the platform in the horizontal direction is provided at the upper part of the platform. Note that the lifting platform (6) is provided with a fork drive device including an inverter-controlled motor.

In the main body (8) of the shelf (6), a filter (chemical filter) (
An air supply device 00 consisting of a fan and the like for supplying air to the rear side of the filter (c) is disposed in the lower part of the main body (8). What is θη? 1i'
? Shows L breaker.

The action will be explained below. Loading and unloading of the load α to and from the intended compartment storage space ell) of the shelf (6) using the carrying-in hanging device u4) involves the traveling movement of the carrying-in hanging device 04) on a fixed path Q51 and the lifting and lowering. Nine operations can be performed by combining the lifting and lowering of the platform θ and the lateral movement of the fork wheels. At that time, dust is generated and falls from the arm θ4 supported by the arm θ4 and the fork θ that is used to take in and take out the load (when ..., this dust is removed from the horizontal partition plate located below it). Therefore, it is prevented from falling and accumulating on the grapes 04 stored in the lower section storage station uv.

During this process, in the clean room (1), the clean air (4) that is blown down through the filter (3) descends, and the descending air is transferred to the floor (5).
Since the vacuum is sucked downward, its cleanliness is ensured. In addition, when the movable body (6) supporting the fork (C) etc. is raised or lowered, one of the Oυ (on the sheet curtain) is automatically fed out, and the other is wound up, so this βI moving body ( The slit (c) through which a) passes is always sealed from the inside. Therefore, the dust generated from the elevating drive device (c) and the elevating drive device 6 disposed within υ of the rectangular cylinder remains within the rectangular cylinder Qv and is prevented from migrating to the shelf (6). obtain. At that time, the suction device (A) that is activated applies suction force to the lower end opening, so as mentioned above, the dust remaining inside the rectangular cylinder body ψυ rides on the suction flow and is surrounded by the lower end. It is discharged from the bottom part 4 to the penetration part 4 towards the floor (5), and all of the water is discharged under the floor (5).
It can be removed by suction. Further, during such an action, the inside of the rectangular cylinder (jl) tends to be under negative pressure, but this can be eliminated by the inflow of clean air (4) through the Nulit So. Furthermore, the inflow of clean air (4) from the outside to the inside can effectively prevent dust from flowing out through the slit ψa. At that time, clean air 94
) is regulated by sheet curtain II).
Since this is done almost uniformly in the length direction, even dust generated in the vertical direction inside the rectangular cylinder ■υ can be removed with certainty. In the shelf (6), the clean room (1) is opened by the operation of the air supply device (16).
) is sucked into the main body (8), and the air inside (/
L/Supply to Cape Gu from the rear side. As a result, the wall air passes through the filter 00 and flows out from the rear side to the crease (c) 9, and between each compartment storage station (1υ) to the carry-in hanging device α4NC and the r4i1 side. Therefore, the flow of clean air) can blow out and remove all the dust that is about to accumulate on the horizontal partition plate OQ, and can also stop the dust that is about to enter from the side of the carry-in hanging device α. .

In the above embodiment, the removal device 1 is 1"40".
We have shown a dust removal method that employs a 6-inch dust removal method, but
) is of a type that blows out clean air O→, so all normal types of carrying-in/hanging device a< may be used.

[Brief explanation of drawings]

The drawings show one embodiment of the present invention, the first being a side view and the second being a side view.
The figure is a plan view, Fig. 3 is a partially large front view, Fig. 4 is a partially cutaway side view of the loading/unloading door, Fig. 5 is a partially cutaway plan view of the same, and Fig. 6 is a side view of the shelf. be. (1)...Clean room, (2)...Ceiling, (3
) Mountain filter, (4)...Clean air, (5
)...Floor, (6)...(Tomo, (8)..., main body,
(9)...-Vertical partition plate, horizontal partition plate, αυ...
・Compartment storage space, (6)...arms, (L)...loads,
(14+... Carrying-in hanging device, (15... Fixed route, Sir... Fork, Sir... Filter, 0 area... Air supply device, (c)... Clean air agent Mori Hon Yoshihiro Procedural Amendment (1 Vision January 1980 to 1978 Short Poem Permission No. 150673 2. Name of the invention: Storage equipment in a clean room 3. Relationship with the person making the amendment) Name of the patent applicant (364) ) Daifuku Kiko Co., Ltd. 4, Agent's name (680B) Patent attorney's delivery Yoshihiro Moto 5, Date (shipment date) Showa 1920 Month/Date 6 Number of inventions increased by amendment 7, Inventions in O specification subject to amendment Detailed Explanation Column 0 Page 10 Line 1 Date Insert the following sentence after "I.""Figure 7 shows another embodiment. In other words, in the left half of Figure 7, the shelf ( 6) is arranged at the lower part of the rear side, and in the right half view, a filter (C) is arranged at the upper part of the rear side of the shelf (6).Such another embodiment According to the previous example, the entire back surface of the shelf (6),
It is economical because it is not necessary to use I#: in a filter. ” 0 Brief description of drawings column 0 Page 10, line 6 “This is a side view.” All “Side view, Figure 7 is a partially cutaway front view showing another embodiment.” Yes,” he corrected. Figure 7 is added to some of the 0 drawings.

Claims (1)

[Claims] Inside the clean room where clean air is blown downward from the ceiling and the descending air is sucked below the floor, there is a shelf with multiple compartment storage spaces vertically and horizontally, and the system runs on a fixed path along this shelf. A carry-out device is provided which has a fork that can be moved up and down as well as moved in and out in the lateral direction. 1. A cargo storage facility in a clean room, characterized by being provided with an air supply device that supplies clean air into each compartment storage space through a filter.