JPH03172203A - Load storing equipment - Google Patents

Abstract

PURPOSE:To prevent air from stagnating, in a storing equipment for semiconductors and so on, by forming air supplying passages in the rear faces of load storing parts via filters, forming an air circulatory system throughout the storing parts, and providing these storing parts in parallel via side plates with tilt members projecting forward as much as the outer they stand. CONSTITUTION:Air delivered from delivery ports 62 of blowers 64 becomes clean air 65 in passing through supplying passages 41 and filters 25, returns to the blowers 64 via storing spaces 59 and passages 81, and circulates. At that time, air enters partially into a clean room 1 from a penetrated passage 94. Air flowing near side plates out of the clean air 65 supplied to storing parts 54 at this time is led smoothly from one tilt surface to another tilt surface. Therefore, air stagnation can be prevented.

Description

DETAILED DESCRIPTION OF THE INVENTION Field of the Invention The present invention relates to storage equipment used for storing products such as semiconductors that are extremely sensitive to dust.

2. Description of the Related Art Conventionally, this type of equipment has been developed, for example, in the
The structure found in the '7505 publication is provided.

In other words, in the conventional structure, a shelf with open front and rear surfaces and a large number of storage spaces is provided in a box-shaped main body, a filter is disposed on the rear side of this shelf, and a flow-through is provided behind the filter. A passage is formed, and a discharge part of a blower provided below the shelf is communicated with the passage. A plurality of cargo storage devices constructed in this manner are arranged side by side with the outer surfaces of the main bodies in close contact with each other, and the group of cargo storage devices is provided with a common carry-in device.

According to this conventional type, the blower sucks air from the lower part of the main body and supplies it into the flow path, and the supplied air passes through a filter to become clean air, and this clean air flows inside the shelf toward the front side. This maintains a high degree of cleanliness inside the main unit. In addition, the clean air flowing out to the front side flows to the lower part of the main body, and as mentioned above, is sucked by the blower and used for circulation.

At that time, the cargo storage device, for example, as shown in FIG.
The side plates 103 of the main body 102 to which the filter 101 is attached are placed in close contact with each other and fixed to the main body of the lower clean unit so that they are arranged side by side.

Problems to be Solved by the Invention According to the conventional type described above, since the front surface 103a of the side plate 103 is flat, stagnation +05 occurs between the clean air 104 that has passed through the filter +01. If this air stagnation 105 exists, dust particles will remain suspended in the stagnation +05 part, and the dust particles will
Sometimes it flows to the back side, contaminating the product and reducing product yield.

An object of the present invention is to provide cargo storage equipment that prevents stagnation.

Means for Solving the Problems In order to achieve the above object, the cargo storage equipment of the present invention includes a rectangular frame body, and is attached to the front side of the frame body,
and a cargo storage section with open front and rear surfaces, a filter attached to the frame body on the rear side of the cargo storage section, and an air supply path attached to the rear end of the frame body and provided with an air supply path behind the filter. A cargo storage device is constituted by the outer plate to be formed and a blower whose discharge part communicates with the air supply path and which can freely suck clean air that has passed through the cargo storage part from a suction part, and a plurality of the cargo storage devices are arranged in parallel so that the side plates of the frame main body are in contact with each other, and the front side of the side plate is formed into an inclined portion that protrudes forward toward the outside.

According to the configuration of the present invention, air from the blower's discharge section flows through the air supply path, and then passes through the filter to become highly clean air that is supplied to the cargo storage section from the rear side. . Therefore, a high degree of cleanliness can be maintained in the cargo storage section by the clean air flowing from the rear surface to the front surface. The clean air that has passed through the cargo storage area is sucked up by the blower again and used for circulation. At this time, the clean air that has passed through the filter near the side plate of the frame body is guided diagonally forward by the inclined part formed in the front part of the side plate, and flows without stagnation.

EXAMPLE An example of the present invention will be described below with reference to FIGS. 1 to 5.

Reference numeral 1 denotes a clean room, which is configured so that clean air 3 is blown downward from the ceiling side (or side wall side) through a filter 2, and the descending clean air 3 is sucked into the floor through a mesh-type floor 4. Reference numeral 5 designates a closed cargo storage device, and a rectangular frame main body 6 is formed into a box shape with an open front and rear sides by a pair of left and right side plates 7, a top plate 8, and a bottom plate 9.

The front surface of the side plate 7 is formed into an inclined surface 10 that protrudes forward toward the outside, and the inclined surface 10 is formed with a first dovetail groove portion II that opens diagonally forward in the vertical direction. Furthermore, in the front part, there is a second dovetail groove 1 that opens inward in the left and right direction.
2, and a little rearward of the second dovetail groove 12, a protrusion 14 facing forward from the inner surface is formed in the vertical direction. Further, at the rear end of the side plate 7, a stepped portion 16 and a third groove portion 17 that is open to the rear are formed in the vertical direction, respectively. A plurality of intermediate members 21 are provided in the vertical direction between the inner surfaces of the side plates 7 facing each other at the front part of the frame main body 6.
On the front surface of these intermediate members 21, protrusions 22 facing forward are formed from the upper and lower edges, and between the protrusions 22, a fourth dovetail groove 23 that is open to the front is formed in the left-right direction. A filter 25 is installed in the front part of the frame body 6. That is, a buffer material 26 is attached to the outer periphery of the rectangular filter 25, and the buffer material 26 is brought into contact with the protrusions 14.22 when the filter 25 is fitted into the frame body 6 from the front. Then, the abutment frame body 29 consisting of the window frame-like member 27 and the intermediate member 28 is fitted from the front and brought into contact with the filter 25, and then placed in the second dovetail groove 12 and the fourth dovetail groove 23. The filter 25 is assembled into the frame body 6 with its surroundings sealed by fitting screws 32 and bolts 33 passed through the abutment frame body 29 from the outside to the plate nut bodies 30 and 31 and tightening them. The front surface of the window frame-like member 27 is formed into an inclined surface 34 that protrudes forward toward the outside, and the inclined surface 10 is arranged so as to be located on an extension of this inclined surface. Note that the front surface of the intermediate member 28 is formed into a chevron-shaped inclined surface 35.

A body outer plate 45 is disposed at the rear end of the frame body 6, thereby forming an air suction path 46 between it and the filter 25. A plurality of the main body outer plates 45 are arranged in the frame body 4.
7 with screws, etc., and screws 48 passed through the folded portions of the side edges from the rear side are fixed to the frame body 6 by fitting them into the plate nut bodies 49 disposed in the third dovetail grooves 17 and tightening them. be done.

A cargo storage section (shelf) 54 is provided in front of the filter 25 . That is, a support bracket 55 is disposed forward from the front surface of both side plates 7, and the base end of this support bracket 55 is in contact with the inclined surface 10, and a screw 56 passed through the base end from the front side is inserted into the first It is fixed to the side plate 7 by engaging the plate nut body 57 disposed in the dovetail groove 11 and tightening it. A plurality of support brackets 55 are fixed to the side plate 7 in the vertical direction, and by setting shelf boards 58 between the left and right opposing support brackets 55, a plurality of storage spaces 59 that are open in the front and rear direction are formed in the vertical direction. do.

A box frame body 61 having a compartment 6o inside is disposed below the frame body 6, and the top plate of the box frame body 61 and the floor plate 9 of the frame body 6 are connected via bolts, nuts, etc. be integrated. A blower 64 is provided in the compartment 6o, the discharge part 62 of which communicates with the air supply path 41, and the suction part 63 open to the compartment 60.
The clean air 5 flowing forward through the partition chamber 60
A perforated plate 66 is used in the front wall forming this compartment 60 to draw suction through the compartment.

A plurality of antecedent tube devices 5 configured as described above (two in the embodiment) are arranged in parallel, and the side plates 7 of the frame body 6 are in close contact with each other. In order to seal the joint portion 70 that is in close contact with each other, caulking 71 is applied between the front and rear ends.
72 will be constructed. Further, a side cover 75 is provided to cover both left and right ends of the 5 groups of antecedent tube devices arranged in parallel, and is coupled in the same manner as described above, and a top cover 76 that covers the upper side.
are arranged and fixed, thus the cargo storage equipment 79
Configure.

The cargo storage facilities 79 are arranged side by side with their front surfaces facing each other, and are interconnected through a rectangular box-shaped surrounding wall frame 8o, thereby integrating the three facilities. A carry-in device 82 is provided in a passage 81 formed within the surrounding wall frame 80 .

This self-carrying device 82 is supported and guided by a floor rail 83 via wheels 84, and the cargo storage section 5
A trolley 86 that can freely travel on a fixed path 85 along the front surface of 1
A support frame 87 is erected from above the cart 86, and a lifting platform 88 is guided by a guide body disposed within the support frame 87.
A support provided laterally movably on this lifting platform 88 is composed of a passing device 89, a ceiling rail 90 for guiding the upper part of the support frame 87, and the like. In the cargo storage equipment 79 on one side, a through-path 94 in the front-rear direction is formed at a lower part of the cargo storage section 51 by cutting out the main body outer panel 45 and the partition wall 40 and covering it with a cover plate 93. A cargo handling device 96 for storing and unloading cargo 95 is provided in the container 94 .

The front 95 is in the shape of a case in which products can be freely stored, and on both sides of the upper part there are provided locking protrusions that allow the transfer device 89 to be freely engaged and detached from below.

Next, the operation of the above embodiment will be explained.

A high degree of cleanliness is always maintained in the antecedent tube device 5. That is, the air discharged from the discharge part 62 by the operation of the blower 64 rises in the air supply path 41, passes through the filter 25, becomes the clean air 5 with a high degree of cleanliness, and enters the cargo storage part 54 from the rear side. Supplied. Therefore, a high degree of cleanliness is maintained in the cargo storage section 54 by the clean air 5 flowing from the rear surface to the front surface. The clean air 5 that has passed through the cargo storage section 54 is passed through the passage 8
A part of it flows into the clean room 1 through the through passage 94, but most of it flows into the compartment 60 through the perforated plate 66 and is sucked into the blower 64 for circulation use. be done.

Of the clean air 5 that is supplied to the cargo storage section 54 through the filter 25 as described above, the clean air 5 that flows near the side plate 7 is connected to the inclined surface of the window frame member 27 as shown in FIG. 34 to the inclined surface 10 of the front part of the side plate, and as a result, it flows diagonally forward and the side plate 7
No stagnation occurs in the front of the front. Also, the intermediate support member 2
Also in the part 8, as shown in FIG. 3, the clean aero 5 is guided by the mountain-shaped inclined surface 35, and no stagnation occurs in the front.

For example, a load 95 transported by a self-propelled vehicle to be stored is received by a load handling device 96 through a through passage 94, and then the traveling movement of the cart 86 in the small carry-in device 82 and the lifting and lowering movement of the lifting platform 88 are performed. By the combined operation of the receiver and the transfer movement of the receiver and transfer device 89, the receiver is stored in the target storage space 59 from the cargo handling device 96.

In addition, by reverse operation, the cargo 95 in the target storage space 59 is
can be issued.

Effects of the Invention According to the present invention configured as described above, air from the blower's discharge section flows through the air supply path, and then passes through the filter to become highly clean air, which is then supplied to the cargo storage section from the rear side. Therefore, a high degree of cleanliness can be maintained in the cargo storage section by the clean air flowing from the rear to the front. The clean air that has passed through the cargo storage section can be sucked in again by the blower and used for circulation. At this time, the clean air that has passed through the filter near the side plate of the frame main body can be guided diagonally forward by the slope formed at the front of the side plate, which prevents stagnation in the front of the side plate. This prevents dust particles from floating.

[Brief explanation of the drawing]

1 to 5 show one embodiment of the present invention, FIG. 1 is a longitudinal sectional front view, FIG. 2 is a cross-sectional plan view of a joint, and FIG. 3 is a first embodiment of the present invention.
FIG. 4 is an enlarged view of the main part in FIG. 2, FIG. 5 is a schematic cross-sectional view of the whole, and FIG. 6 is a cross-sectional view of the main part showing a conventional example. 1...Clean room, 5...Antecedent tube device, 6...
・Frame body, 7... Side plate, 10... Inclined surface, 21...
- Intermediate member, 25... Filter, 27... Window frame member, 28... Intermediate member, 29... Backing frame body, 3
4... Inclined surface, 35... Chevron-shaped inclined surface, 41... Air supply path, 45... Main body outer plate, 54... Load storage section,
58... Shelf board, 59... Storage space, 60... Compartment, 62... Discharge section, 63... Suction section, 64...
Blower, 65...Clean air, 66...Perforated plate,
79... Cargo storage equipment, 80... Surrounding wall frame, 82...
・Small loading equipment, 89... Receiving and passing equipment, 95... Cargo, 96... Cargo handling equipment.

Claims (1)

[Claims] 1. A rectangular frame body, a cargo storage section attached to the front side of the frame body and with the front and rear surfaces open, and a filter mounted inside the frame body on the rear side of the cargo storage section; An outer plate is attached to the rear end of the frame body and forms an air supply path behind the filter, and a discharge part communicates with the air supply passage, and the clean air that has passed through the cargo storage part is sucked from the suction part. A cargo storage device is constituted by a flexible air blower, and a plurality of the cargo storage devices are arranged in parallel with the side plates of the frame main body in contact with each other, and the front side of the side plate is inclined such that the front side of the side plate protrudes forward as it goes outward. A cargo storage facility characterized by being formed in the section.