JP3067528B2 - Load storage equipment - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a load storage facility used for storing products, such as semiconductors, which are extremely susceptible to dust.

[0002]

2. Description of the Related Art Conventionally, as this kind of equipment, there has been provided a closed-type load storage device as disclosed in Japanese Patent Application Laid-Open No. 3-177208, for example. This conventional configuration, in a box-shaped body,
A load storage unit (shelf) having a plurality of storage spaces formed in a vertical direction is provided with its front surface facing the passage. The load storage section
A front surface facing the passage and a rear surface on the opposite side are opened, and a filter for covering the rear surface is provided, and an air supply path is formed behind the filter and the main body. A blower is provided at a lower portion in the main body, the discharge section communicating with the air supply path, and the blower communicating with the path.

A carry-in / out device is provided in the passage, and the carry-in / out device is supported and guided by a floor rail via wheels on the floor rail, and is free to travel on a fixed path along the front surface of the load storage portion. Trolley, a support frame erected from the trolley at one end in the direction of the fixed path, a lift platform guided by a guide body disposed in the support frame, and a transfer load provided on the lift platform. It is composed of a holding device and the like.

In the above-mentioned conventional load storage device, the air discharged from the discharge section of the blower rises in the air supply path and passes through each filter to become clean air having a high degree of cleanness. A high degree of cleanness is maintained in the load storage unit by clean air flowing from the rear surface to the front surface. Then, the clean air that has passed through the load storage section descends in the passage and is sucked again by the blower to be circulated and used. The loading / unloading device carries out loading / unloading of a load into / from a target storage space by a combination of a traveling motion of a truck, a lifting / lowering motion of a lifting / lowering table, and a delivery / reception motion of a load holding device.

[0005]

According to the above-mentioned conventional structure, the dead space for arranging the blower, which is formed below the load storage portion, is vertically high.
In addition to increasing the size of the entire shelf, the level of the lowermost stage of the load storage unit is increased and storage efficiency is deteriorated. In addition, the carrying-in / out device has a support frame whose thickness in the front-rear direction has been increased by receiving all (almost all) of the lifting / lowering device, and the overall length has been lengthened. In addition, the load holding device faces the end of the load storage unit. Since the support frame and the like are located outside the edge of the shelf when it is made to be made, the box-shaped main body must be formed large including the evacuation space (dead space) of the support frame. , That is, the storage efficiency decreases, and the clean operation cost increases.

An object of the present invention is to provide a load storage facility that can be simplified and compact in size by reducing the dead space at the lower part of the shelf and on the retreat side, and can improve storage efficiency. is there.

[0007]

In order to achieve the above object, a load storage facility according to the first aspect of the present invention comprises:
A shelf and a load storage facility provided with a loading / unloading device that can travel in a passage formed in front of the shelf, wherein the shelf is:
A plurality of storage spaces are formed in the vertical direction and the running direction, and a dead space is formed along the running direction below the lowermost storage space group. And, while opening the rear surface on the opposite side, a space is formed behind the rear surface, the lower end of which communicates with the dead space, and a clean air supply unit that covers the rear surface of the storage space is provided in this space, A lower body that is guided and supported by the floor side rails,
A post erected from the lower body, a carriage arranged up and down along the post, an accessor arranged in the carriage, and a post extending from the post to the lower body.
And a part of the lower body is located in the dead space, and the lift of the carriage lifting device is located in the lower body.
Set the output shaft of the down drive unit and the traveling drive unit to the left.
It is provided as a right direction and runs with
A part of the main body of the row driving device is
And located within a portion of the lower body located within the lower body .

According to a second aspect of the present invention, in the load storage facility according to the first aspect, the clean air supply unit includes a box frame-shaped main body having an open front surface, and a filter for covering the front side of the main body. And a blower provided on the rear surface side of the main body. The blower has a discharge part directed toward the filter and a suction part opened in the space.

According to a third aspect of the present invention, in the load storage facility according to the first or second aspect described above, the clean air supply units are arranged in a plurality of upper and lower stages and in a plurality of rows in the traveling direction.

[0010] The fourth aspect of the present invention relates to the above first to third aspects.
In the load storage facility according to any one of the aspects of the invention, a pair of shelves is provided with the passage interposed therebetween, and a portion of the lower main body protruding in the left-right direction is located in a dead space of both shelves.

According to a fifth aspect of the present invention, in the load storage facility according to any one of the first to fourth aspects, a plurality of posts are erected on the lower body in the traveling direction. .

According to a sixth aspect of the present invention, in the load storage facility according to any one of the first to fourth aspects, one post is erected on the lower body .

[0013]

[0014]

According to the configuration of the first aspect of the present invention, the air in the space is sucked by the operation of the clean air supply unit, and the clean air having a high degree of cleanness can be supplied to the shelf from the rear side. Thus, the load stored in the shelf can maintain a high degree of cleanliness by the clean air flowing from the rear surface to the front surface. The clean air that has passed through the shelves flows into the passage and then flows downward, and part or all of the clean air flows into the space through the dead space due to the suction force of the clean air supply unit, and is circulated. used. At this time, since the inside of the space is at atmospheric pressure, air with a low degree of cleanness in this space does not leak to the shelf side or leak outside the compartment without passing through the clean air supply unit.

Since the space for various devices (blowers) can be eliminated below the shelf, the height of the dead space below the shelf can be reduced. Furthermore, since the portion protruding in the left-right direction of the lower body can be moved in the running direction within this dead space, the vertical height of the lower body can be reduced by arranging various driving devices of the access device in this protruding portion. It can be formed thin, and the lower limit position of the carriage can be lowered.
With this, the evacuation space can be reduced, and the level of the lowermost storage space group can be lowered, so that the number of loads stored in the installation space of the load storage facility, that is, the storage efficiency can be improved, and the compartment is made smaller. And lower the cost of clean operation. In addition, the lifting drive and traveling drive are
Use the part of the body that projects in the left-right direction to
Easy placement in the lower body without lengthening the fore-aft length of the body
Can be set up.

According to the configuration of the second aspect of the present invention, in the clean air supply unit, the air in the space is sucked from the suction section by the operation of the blower, and the air blown from the discharge section into the main body is countered. After being passed through a filter to make clean air with high cleanliness, the air can be supplied to the shelf from the rear side.

Further, according to the configuration of the third aspect of the present invention, by providing a large number of clean air supply units on the rear surface of the shelf, clean air can be uniformly supplied from these clean air supply units to the shelf. .

According to the configuration of the fourth aspect of the present invention,
Various drive devices of the access device can be arranged separately on the left and right protruding portions. In addition, according to the configuration of the fifth aspect of the present invention, it can be easily adopted in a multi-post type in / out device, and according to the sixth aspect of the present invention, it can be easily adopted in a single post type in / out device. .

[0019]

[0020]

[0021]

DESCRIPTION OF THE PREFERRED EMBODIMENTS One embodiment of the present invention will be described below with reference to FIGS. 1 to 3, reference numeral 1 denotes a clean room, in which clean air 3 is blown downward from a ceiling side (or a side wall side) through a filter 2, and the descending clean air 3 is sucked under a floor through a mesh type floor 4. It is composed. Reference numeral 10 denotes a closed storage facility with a clean device, and a box-shaped enclosure 12 attached by using an outer surface of a reinforcing frame 11 includes front and rear walls 13 and left and right walls 14.
The compartment 16 is cleaned inside with the ceiling wall 15
Are formed. The compartment 16 is partially or entirely open on the lower surface side, and the load storage facility 10 is installed on the floor 4 via a landing gear 17 or the like.

A pair of left and right shelves 20 is provided in the compartment 16.
They are provided with their front faces facing each other. These shelves 20
Is composed of a shelf frame 21 which also serves as reinforcement of the surrounding wall body 12, a plurality of upper and lower shelves 22 and a plurality of vertical partitions 23 in front and rear. A plurality of storage spaces 24 are formed in a direction (a traveling direction of a loading / unloading device described later). The two shelves 20 are provided in a pair on the left and right with the passage 6 at the center, and the side facing the passage 6 is the front side. Furthermore, in the lower part of both shelves 20, the lowermost storage space
A dead space 25 necessarily generated below the 24 is formed in a state where it is open at the front surface and there is no obstacle over the entire length in the traveling direction.

The two shelves 20 are open at the front surface facing the passage 6 and at the rear surface on the opposite side, and a space 28 is formed between the rear surface and the left and right walls 14. To
The clean air supply units 30 are provided in five upper and lower stages (upper and lower stages) so as to cover the rear surface of the storage space 24. In the running direction, five rows of clean air supply units
Although 30 is shown, this may be a plurality of rows other than one row or five rows. The lower end of the space 28 is a dead space.
Communicated with 25.

Each of the clean air supply units 30 has a box frame-shaped main body 31 having an open front, a filter 32 provided to cover the front of the main body 31, and a blower (fan) provided on the rear of the main body 31. 33. This blower 33
The discharge part 34 faces the filter 32, and the suction part 35 is opened in the space 28.

An access device 40 is provided in the passage 6. The loading / unloading device 40 includes a lower body 41 supported and guided by floor-side rails 7 arranged in the front-rear direction via the frame body 11 at a lower portion in the passage 6, and four posts standing upright from the lower body 41. 51A, 51B, 51C, 51D and these posts 51
An upper frame 61 that connects the upper portions of A to 51D and is guided by the ceiling side rail 8, a carriage 81 arranged between the opposing surfaces of the posts 51A to 51D so as to be able to move up and down, and is disposed on the carriage 81. The insertion / removal tool 91 and the posts 51A to 51D
A carriage elevating device 100 and the like disposed between the inside and the inside of the lower main body 41 are configured to be able to reciprocate on a fixed path 9 which is a traveling direction.

As shown in FIGS. 1 and 4 to 6, the lower main body 41 has a flat box-shaped central box portion 42 and a long box-shaped portion connected to the left and right sides from the left and right sides of the central box portion 42. Side box 43. Here, the side box portion 43, which is a portion protruding in the left-right direction, is located in the dead space 25 of the shelf 20, and is configured to be able to move back and forth in the dead space 25. The upper surface of the central box portion 42 is formed lower (lower) than the upper surface of the side box portion 43.

A bearing device is provided at the center of the central box 42.
A pair of front and rear wheels 45 are arranged via 44 and the like. Both wheels 45 are mounted on the floor side rail 7, and the central box 42 abuts against the side surface of the floor side rail 7 to prevent the wheels 45 from coming off the floor side rail 7. A pair of freely left and right rollers 46 is provided. One of the wheels 45 is connected to a traveling drive device (e.g., a motor with a reduction gear) 48 via a wrapping transmission 47.
In this case, the traveling drive unit 48 has a part of the main body positioned inside the side box 43 with the output shaft 49 in the left-right direction.

As shown in FIG. 1, FIG. 4, FIG. 6, and FIG. 11, the post 51A-51D group has a rectangular tubular shape in cross section, and is formed of an aluminum L-shaped member 52 and an L-shaped plate, respectively. It is formed by joining two members with the portion 53. At this time, each corner portion (four corners) of the posts 51A to 51D has a large curved surface.
54 is formed. The posts 51A to 51D are erected from the four corners of the central box portion 42, and thus are located at the edges in the front-rear direction with respect to the lower body 41 and at the middle portions in the left-right direction.
Here, the lower end of each of the posts 51A to 51D communicates with the central box 42 through a through-hole formed in the top plate of the central box 42, and a suction unit is provided in the central box 42. A lower fan 50 is provided opposite to the communication portion (as the lower end of the post).

In the pair of posts 51A, 51D at diagonal positions in the group of posts 51A-51D, a vertical slit portion 55 is formed over the entire length on the surface side located inside in the direction of the fixed path 9, Further, on the inner side, an internal dovetail groove portion 56 facing the slit portion 55 is formed over the entire length in the vertical direction. Another pair of posts 51B and 51C at diagonal positions in the group of posts 51A to 51D are formed with a pair of corner portions at diagonal positions inside the roller guide surface 57.

An external dovetail portion is provided on a surface of each of the posts 51A to 51D which is located on the inner side in a direction orthogonal to the fixed path 9.
58 is formed over the entire length in the vertical direction. A plurality of connecting members (bolts and nuts) 59 acting on the external dovetail portion 58 between the posts facing in the orthogonal direction, that is, a plurality of vertical portions between 51A and 51C and between 51B and 51D.
It is connected by 60, and is reinforced.

The upper frame 61 is shown in FIGS.
As shown in FIG. 9, a substrate 62 is connected and fixed between the upper ends of the posts 51A to 51D, and is disposed above the substrate 62 by utilizing an upward rib portion 63 integrated with the substrate 62. It is formed in a flat box shape by the cover body 64 and the like. At this time, each post in the direction of the fixed path 9 is provided on the lower surface side of the substrate body 62.
An upward recess 65 starting from a connection portion with 51A to 51D.
Are formed.

At the center of the cover 64 in a direction orthogonal to the direction of the fixed path 9, a slit 66 is formed in a direction along the fixed path 9, and the ceiling side rail 8 protrudes into the slit 66. Is located. In the upper frame 61, a pair of guided parts 67 guided by the ceiling side rail 8 are provided in the direction of the fixed path 9. These guided parts 67
A supporting bracket 68 fixed on the substrate body 62; a floating prevention roller 69 supported by the supporting bracket 68 and capable of abutting on the lower surface of the ceiling rail 8;
A pair of right and left anti-vibration rollers 70 supported by 68 and freely abutting on both side surfaces of the ceiling rail 8.

The posts 51A to 51D are connected to the four corners of the board body 62 in the upper frame 61, and the upper ends of the posts 51A to 51D are connected to the upper frame 61 via the penetrating portions 71 formed in the board body 62. Is communicated within. Further, in the upper frame 61, upper fans 72 are provided, each having a suction portion facing the guided portion 67 and a discharge portion facing each communication portion 71 (as the upper end side of the post). It is attached via a part 63.

As shown in FIG. 2, FIG. 4, FIG. 10, and FIG. 11, the carriage 81 has a rectangular box shape, and has a pair of left and right side surfaces connected to the slits 55 of the columns 51A and 51D. A member 82 is provided, and a turntable 83 is provided on the upper surface side. The insertion / removal tool 91 is provided on a turntable 83 so as to be rotatable around a vertical axis 84. That is, the insertion / removal tool 91 has a base end connected to a rotatable first link body 92 connected to an output shaft 85 from the turntable 83 side, and a free end of the first link body 92 connected to an intermediate shaft 93. A second link body 94 having a base end connected thereto through a shaft, and an operating shaft connected to the free end of the second link body 94.
And a plate-shaped load supporting portion 96 connected to the base end through a base 95. The two link bodies 92 and 94 are shaped like a case, and transmission mechanisms 97 and 98 are interposed therein.

As shown by the solid line in FIG. 11, these transmission mechanisms 97 and 98 are rotated by one of the output shafts 85 to the first link body 92.
Is rotated to one side on the rotary table 83, the second link body 94 is placed on one end side on the carriage 81, and the load support portion 96 is placed almost on the carriage 81, and FIG.
When the first link body 92 is rotated to the other side by the rotation of the output shaft 85 to the other side as shown by the virtual line, the second link body
The free end side of 94 is swung outward with respect to the other side of the carriage 81, and the load supporting portion 96 is arranged and configured so as to linearly move in the lateral direction so as to protrude outward from the side of the carriage 81. .

As shown in FIGS. 2, 4, and 5 to 11, there are two sets of the carriage lifting / lowering devices 100, each set being a pair of posts 51A, 51B and 51C, 51C,
An endless moving body 101 is provided in the upper frame 61 between the inside of 51D, the posts 51A, 51B and 51C, 51D, and the lower body 41. An elevating drive device 121 for moving in the forward and reverse directions is provided.

That is, the moving body 101 is connected to one of the posts.
An elevating body 102 which is guided up and down in 51A, 51D and connected to the carriage 81 through the slit 55 of the post 51A, 51D.
And a counter weight 103 which can be raised and lowered in the other posts 51B and 51C, a lifting body 102 and a counter weight 10
3 is formed by an upper chain (an example of an upper cord) 104 connecting the upper portions and a lower chain (an example of a lower cord) 105 connecting the lower portions.

At a position in the lower main body 41 facing the discharge portion of each lower fan 50, a lower guide chain ring 106 for winding the lower chain 105 is freely rotatably provided. At a position facing the discharge portion of each upper fan 72, an upper guide chain ring 107 around which the upper chain 104 is wound.
Are provided so as to freely rotate.

The elevating body 102 is a long frame, and a sliding body 108 is provided on the upper and lower portions of its inner surface. These slides 108 are provided with internal dovetails in the posts 51A and 51D.
The lifting / lowering body 102 is fitted to the vertical guide rail 110 fixed via a connecting tool 109 acting on the post 56.
It is possible to move up and down without swinging in 51A and 51D. The connecting member 111 from the lifting / lowering body 102 side is made to protrude out of the posts 51A and 51D through the slit portion 55, and the connecting member 82 from the carriage 81 side is connected to the protruding portion via a fixture. I have. In addition, the counter weight 10
Reference numeral 3 denotes a rectangular rod body, and guide rollers 112 which can abut on the roller guide surface 57 are attached to the upper and lower parts thereof.

The lifting drive device 121 is connected to the lower chain
105 That is, in the central box portion 42 of the lower main body 41, a drive chain wheel 122 is disposed so as to be located between the two guide chain wheels 106. This drive chain wheel 122
Is interlocked with the lifting / lowering drive device (e.g., a motor with a reduction gear) 121, and at this time, the lift / lower drive device 121 has its output shaft 123 in the left-right direction and most of the main body is located in the side box portion 43. In this way, the two carriage lifting / lowering devices 100 are disposed using the pair of posts 51A and 51B and 51C and 51D, which are located at the front and rear, respectively.

As shown in FIGS. 10 and 11, a pair of posts 51
The slits 55 in A and 51D are closed from the inside by the cover film 115. The cover film 115 has a vertically long band shape, and upper and lower ends thereof are formed by posts 51A and 51A.
D is fixed to the inner surface. Then, a pair of pressing rollers 116 provided on the upper and lower portions of the elevating body 102 are brought into contact with the back surface of the cover film 115, so that the cover film 115 is
By pressing against the inner surface of 51D, the slit portion 55 is closed.

Further, between the two pressing rollers 116, a pair of upper and lower separating rollers 117 provided on the elevating body 102 is covered with a cover film.
By contacting the surface of the cover 115, the portion of the cover film 115 located between the pressing rollers 116 is separated from the inner surfaces of the posts 51A and 51D, and the slit 55 is opened. The connecting member 111 is located through the opening.

As shown in FIGS. 1 to 3, the load storage facility 10 having the above-described structure is provided with a carry-in device 131 and a carry-out device 132, for example, for carrying in and out of a bucket type load 5. The carry-in device 131 and the carry-out device 132 have various types such as a conveyor, and are provided, for example, by utilizing the storage space 24 at the lowest stage in one shelf 20. At this time, the carry-in device 131 and the carry-out device 132 are provided with a door that can be opened and closed.

Next, the operation of the above embodiment will be described. A high degree of cleanliness is always maintained in the load storage facility 10 with a clean device. That is, the air in the space 28 is sucked from the suction unit 35 by the operation of each blower 33, and
It is discharged from 34 into the main body 31. This discharged air supply is
Clean air 37 having a high degree of cleanness passes through the opposed filter 32 and is supplied to the shelf 20 from the rear side. At this time, the space between the blower 33 and the filter 32 is a high-pressure chamber.

Therefore, the load 5 stored in each storage space 24 of the shelf 20 is maintained at a high degree of cleanliness by the high-pressure clean air 37 flowing from the rear surface to the front surface. Then, the clean air 37 that has passed through the shelf 20 flows into the passage 6 and then flows downward, part of which flows out below the floor 4, and most of the rest is caused by the suction force generated by the operation of the blower 33. It flows into the space 28 through the dead space 25 and is used for circulation.

When the clean air 37 is circulated and used in this manner, a part of the clean air 37 flowing into the passage 6 through the shelf 20 collides with the loading / unloading device 40 side. At this time, the loading / unloading device 40 has a form in which four posts 51A to 51D are provided, and a sufficient strength can be obtained even if each of the posts 51A to 51D is formed to be thin, and the loading and unloading device 40 is distributed in the front and rear. As a result, the turbulence of the clean air 37 colliding with the posts 51A to 51D is reduced, and the occurrence of swirl is reduced.

Further, since the posts 51A to 51D have the respective corners formed on the curved surface 54, the flow of the clean air 37 at the time of collision becomes smoother, the turbulence of the clean air 37 is smaller, and the generation of swirls is generated. Will be less and smaller. Accordingly, the agitation of the inside of the passage 6 is reduced, and the dust can be moved along the descending flow without being scattered, thereby preventing the dust from adhering to the load 5 or the like.

When the above-described clean air supply unit 30 is operated, the inside of the space 28 is at atmospheric pressure.
The air having a low degree of cleanness inside 28 does not leak to the shelf 20 side without passing through the clean air supply unit 30 and does not leak outside from the joint of the enclosure 12. Also on the back of shelf 20, a blower
By providing the clean air supply units 30 each having a plurality of upper and lower stages 33, the clean air supply units 30
The clean air 37 can be supplied uniformly to. Spaces for various devices (blowers) are not required below the shelf 20, so that the whole can be made compact and the position of the lowermost storage space 24 can be lowered.

For example, a load 5 to be stored is received by the loading / unloading device 40 via the loading device 131. And the running movement of the loading / unloading device 40, the raising / lowering movement of the carriage 81,
The target storage space is formed by a combination operation with the transfer operation of the insertion / removal tool 91 (see the solid line and the virtual line in FIG. 11).
24 can fit. At that time, if necessary, turn table 83
Is rotated 180 degrees around the vertical axis 84,
96 free ends on any of the shelves 1 and the intended storage
Can be opposed. Further, by the reverse operation of the loading / unloading device 40, the target load 5 in the storage space 24 can be unloaded through the unloading device 132.

The traveling motion of the above-mentioned loading / unloading device 40 is controlled by a traveling drive device 48 via a wrapping transmission 47 and one wheel.
By forcibly rotating the roll 45 in the opposite direction, the lower part is prevented from oscillating by the roller 46 acting on the floor side rail 7 and the floating is prevented by the floating prevention roller 69 acting on the ceiling side rail 8. At the same time, the operation is performed in a state where the shake of the upper portion is prevented by the shake prevention roller 70.

During running, as described above, each of the posts 51A to 51D is narrow and each of the corners is formed on the curved surface 54 and is distributed to the left and right.
The turbulence of the clean air 37 in the passage 6 due to the movement of the posts 51A to 51D is small, and the occurrence of swirl is small and small. Accordingly, the agitation of the inside of the passage 6 is reduced, and the dust can be moved along the descending flow without being scattered, thereby preventing the dust from adhering to the load 5 or the like.

When the loading / unloading device 40 travels, the side box 43 provided with the traveling drive device 48 and the elevation drive device 121 is disposed.
Can be moved in the traveling direction within the dead space 25 formed at the lower part of the shelf 20, so that the front-rear length of the lower body 41 can be the same as the front-rear pitch of the posts 51A to 51D, When the loading / unloading tool 91 is opposed to the row of storage spaces 24, the loading / unloading device 40 does not protrude much from the end of the shelf 20. As a result, the evacuation space generated between the end portion of the shelf 20 and the front and rear wall members 14 can be reduced, so that the number of loads 5 stored in the installation space of the load storage facility 10, that is, the storage efficiency, can be improved. The size of the room 16 can be reduced to lower the clean operation cost.

Further, the carriage 81 at the time of the lowest descent is a side box part.
Since it is located close to the upper surface of the central box portion 42, which is lower than the upper surface of 43, the level of the lowermost storage space 24 group can be lowered, that is, the vertical height of the dead space 25 can be formed low. The storage number of the load 5 with respect to the installation height of the load storage facility 10, that is, the storage efficiency can be improved.
To reduce the cost of clean operation.

The above-described lifting and lowering of the carriage 81 is performed via the moving body 101 by forcibly rotating the driving chain wheel 122 in the forward and reverse directions by the lifting and lowering drive device 121. That is, by moving the lower chain 105 in the forward and reverse directions by the forward and reverse rotation of the drive chain wheel 122, the lifting body 102 can be moved up and down in the posts 51A and 51D.
The carriage 81 integrated via 82 can be moved up and down.

At this time, the elevating body 102 is moved up and down
Is guided slidably by the guide rails 110, so that the carriage can be stably moved without swinging, and can be stably moved up and down and integrated between a pair of elevating bodies 102 at diagonal positions.
The 81 can also move up and down stably without shaking. Further, by raising and lowering the counterweight 103 in the other post 51B, 51C in the opposite direction, the lifting drive 121 can be made compact, and the lifting and lowering with a small impact can be performed at the time of starting and stopping the lifting. At this time, the lifting and lowering of the counterweight 103 is performed stably without swinging because the guide roller 112 is guided by the roller guide surface 57. Further, the ascending and descending can be reliably performed without causing a slip or the like by the drive chain wheel 122 meshing with the lower chain 105.

At the time of elevating, most of the slit portions 55 in both the posts 51A and 51D are closed by the cover film 115 which is in contact from the inside. And lifting body 10
In the portion of No. 2, only the space between the two separating rollers 117 is opened to allow the connecting member 111 to move up and down, and the pressing roller 116 and the separating roller 117 move up and down integrally with the elevating body 102.
The opening position of the cover film 115 can be automatically adjusted according to the elevating body 102, that is, the elevating position of the connecting member 111. By such an operation, the insides of both the posts 51A and 51D can be substantially closed.

Further, as shown by the solid line in FIG. 8, when the load 5 is taken in and out of the uppermost storage space 24 during lifting and lowering, the upper portion of the load 5 is lifted, including the lift shown by the virtual line. It may be located in the recess 65 of 61, which may make the overall height of the access device 40 low. Therefore, the dead space formed above the storage space 24 at the top of the shelf can be reduced, and the ceiling wall 15
Can be approached, and the number of stored loads 5 with respect to the installation height of the load storage facility 10, that is, the storage efficiency can be improved,
The compartment 16 can be made smaller to reduce the cost of clean operation.

During traveling as described above, dust generated in the guided portion 67 and floating in the upper frame 61 is sucked from the suction portion by the operation of each upper fan 72, and is discharged from the discharge portion to the posts 51A to 51D. It is discharged to the upper part inside. At that time, it occurs at the upper guide chain ring 107 and the upper frame 61
Dust suspended in the air is also joined to the flow. Here, each lower fan 50 in the lower body 41 is also operated, and the post 51A
The suction force is applied to the lower portion of the posts 51A to 51D, so that a strong suction path from the upper end to the lower end is formed in each of the posts 51A to 51D.

As a result, the dust generated in the upper frame 61 is transported down through the posts 51A to 51D by the airflow, and is discharged from the lower body 41 toward the floor 4. At the same time, dust generated by the elevating body 102 and the counterweight 103 moving up and down also rides on the airflow, and
It is sent down inside 51D. In addition, the lower wheel 45 and the chain wheels 106, 12
2 and the like, and the dust in a floating state in the lower main body 41 also gets into the airflow and is discharged toward the floor 4.

In this way, the dust generated in each part of the loading / unloading device 40 can be discharged under the floor 4 without leaking into the compartment 16. In the above embodiment, the lower body 41
Device 40 with four posts 51A to 51D standing upright
However, as shown in FIG. 12, for example, this may be a loading / unloading device 140 in which a post 141 is erected from the central portion of the central box portion 42 in the left-right direction. Post 141 in this case
Are made upright in a pair in the running direction, thereby providing a two-post type putting-in / out device 140, and being erected only from one end in the running direction to form a one-post type putting-in / out device 140.

In the above embodiment, most of the clean air 37 flowing into the passage 6 and then flowing downward flows into the space 28 and is circulated for use. Then, the space 28 may be supplied (replenished) from another location. Further, the clean air 3 from the filter 2 may be lowered in the passage 6. In the first aspect, the clean air supply unit 30 has various structures. Further, in the above embodiment, the load storage facility 10 with a clean device is installed in the clean room 1,
It may be installed in a normal room.

In the above embodiment, the type in which the loading / unloading device 40 is disposed between the pair of left and right shelves 20 is shown. However, in the first invention, a type in which one of the shelves 20 and the loading / unloading device 40 are combined is used. You may.

In the above embodiment, two sets of carriage lifting / lowering devices 100 are provided.
One, three or four sets of carriage lifting and lowering devices using D
The embodiment in which 100 is provided may be used. Further, in the present invention, there may be an embodiment in which two sets of carriage lifting / lowering devices 100 are disposed using a pair of posts located at non-diagonal positions.

In the above embodiment, two sets of carriage lifting / lowering devices 100 are constituted by a moving body 101 disposed between a pair of posts at non-diagonal positions, and a counter weight 103 provided on the moving body 101. However, in the present invention, the moving body 101 may be disposed between a pair of posts at diagonal positions, the counter weight 103 may be omitted, or the like. Various embodiments are possible.

[0065]

According to the first aspect of the present invention, the clean air supply unit is provided on the rear surface of the storage space,
Above and below the shelf, a space for disposing various devices such as a blower can be eliminated, and the height of the dead space below the shelf can be reduced. Furthermore, by moving the portion of the lower body projecting in the left-right direction in the running direction in the dead space, various driving devices of the loading / unloading device can be arranged in this projecting part, and the vertical height of the lower body can be formed thin, Thus, the lower limit position of the carriage can be lowered. As a result, the evacuation space can be reduced, and the level of the storage space group at the bottom can be lowered, so that the number of loads stored in the space where the load storage equipment is installed, that is, the storage efficiency, can be improved, and the compartments can be made smaller and clean Driving costs can be reduced.

Further, since the inside of the space is at atmospheric pressure, dirty air that does not pass through the clean air supply unit does not leak to the shelf side or leak out of the compartment. The prevention structure can be dispensed with and the whole can be provided at a low cost with a simple structure. In addition, the lifting drive and traveling drive are
The length of the lower body is
Without increasing the length of the lower body or the thickness of the lower body.
Can be easily installed in the lower body of the
Compactness can be achieved.

According to the second aspect of the present invention, in the clean air supply unit, the air in the space is sucked from the suction unit by the operation of the blower, and the air discharged from the discharge unit into the main body is opposed to the air supply. The air can be supplied to the shelf from the rear side after passing through a filter to make clean air with high cleanness.

Further, according to the third aspect of the present invention, by providing a large number of clean air supply units on the rear surface of the shelf, clean air can be uniformly supplied from these clean air supply units to the shelf.

Further, according to the fourth aspect of the present invention, the various driving devices of the loading / unloading device can be arranged separately on the left and right protruding portions, so that the lower body is more compact and the dead space formed at the lower portion of the shelf. Can be made smaller.

Further, according to the fifth aspect of the present invention having the above-described structure, the present invention can be easily applied to a multi-post type in / out device, and according to the sixth aspect of the present invention, it can be easily employed in a single post-type in / out device .

[Brief description of the drawings]

FIG. 1 is a longitudinal sectional front view of a load storage facility according to an embodiment of the present invention.

FIG. 2 is a vertical sectional side view of the load storage facility.

FIG. 3 is a cross-sectional plan view of the load storage facility.

FIG. 4 is a perspective view illustrating a loading / unloading device of the same load storage facility.

FIG. 5 is a longitudinal rear view of a lower main body portion of the load storage facility.

FIG. 6 is a cross-sectional plan view of a lower body portion of the load storage facility.

FIG. 7 is a partially cutaway rear view of an upper frame portion of the load storage facility.

FIG. 8 is a partially cutaway side view of an upper frame portion of the same load storage facility.

FIG. 9 is a cross-sectional plan view of an upper frame portion of the load storage facility.

FIG. 10 is a partially cut-away side view of a carriage portion of the load storage facility.

FIG. 11 is a cross-sectional plan view of the loading / unloading device of the load storage facility.

FIG. 12 shows another embodiment of the present invention and is a longitudinal sectional front view of a load storage facility.

[Explanation of symbols]

 4 Floor 5 Load 6 Passage 7 Floor side rail 8 Ceiling side rail 9 Constant path 10 Load storage facility 12 Enclosure wall 16 Partition room 20 Shelf 24 Storage space 25 Dead space 28 Space 30 Clean air supply unit 31 Main unit 32 Filter 33 Blower 34 Discharge Part 35 Suction part 37 Clean air 40 Access device 41 Lower body 42 Central box 43 Side box (projecting part) 45 Wheels 48 Travel drive 49 Output shaft 51A Post 51B Post 51C Post 51D Post 54 Curved surface 55 Slit part 61 Upper part Frame 81 Carrying 82 Connecting material 83 Rotary table 91 Accessory 96 Loading support unit 100 Carriage elevating device 101 Moving body 102 Elevating body 103 Counterweight 104 Upper chain (upper cable) 105 Lower chain (lower cable) 121 Lifting drive Device 122 Drive chain 123 Output shaft 140 Accessory 141 Post

──────────────────────────────────────────────────続 き Continued on the front page (58) Field surveyed (Int.Cl. ⁷ , DB name) B65G 1/00-1/20 F24F 7/06

Claims (6)

(57) [Claims] 1. A load storage facility in which a shelf and a loading / unloading device that can travel in a passage formed in front of the shelf are disposed in a clean compartment, wherein the shelf is moved vertically and travels. While forming multiple storage spaces in the direction,
Below the lowermost storage space group, a dead space is formed along the running direction where the front facing the aisle opens along the running direction, and the shelf further opens the front and the rear on the opposite side,
A space having a lower end communicating with the dead space is formed at the rear of the rear surface, and a clean air supply unit that covers the rear surface of the storage space is provided in the space, and the access device is supported and guided by a floor rail. A lower body, a post standing upright from the lower body, a carriage arranged up and down along the post, a loading / unloading tool arranged in the carriage, and a post extending from the post to the lower main body.
Were together constituting a and carriage lifting device, it is positioned a part of the lower body to the dead space, before
The lifting drive of the carriage lifting device is provided in the lower body.
And the traveling drive unit, the output shaft of each
As well as the lifting drive device and the traveling drive device.
Part of the body in the
A load storage facility, wherein the load storage facility is located within a part of the lower main body . 2. A clean air supply unit comprising a box frame-shaped main body having an open front surface, a filter for covering the front surface side of the main body, and a blower provided on the rear surface side of the main body.
2. The blower according to claim 1, wherein a discharge unit is directed to the filter, and a suction unit is opened in a space.
The described cargo storage facility. 3. The load storage facility according to claim 1, wherein the clean air supply units are arranged in a plurality of stages in a vertical direction and in a plurality of rows in the traveling direction. 4. A shelf is provided in a pair with a passage interposed therebetween, and a portion of the lower body projecting in the left-right direction is located in a dead space of both the shelves.
3. The cargo storage facility according to any one of 3. 5. The apparatus according to claim 1, wherein a plurality of posts are erected on the lower body while being distributed in the traveling direction.
4. The cargo storage facility according to any one of 4. 6. The load storage facility according to claim 1, wherein one post is erected on the lower body.