JPH082615A - Load keeping facility - Google Patents

Abstract

PURPOSE:To provide a load keeping facility which, in the whole structure, can reduce the lower part of a shelf and a dead space on a shelter side to simplify and compact the facility, and improve its housing efficiency. CONSTITUTION:A load keeping facility can dispense with a space for various devices below a shelf 20, and reduce the height of a dead space 25 in the lower part of the shelf. The part protruding laterally of a lower main body 41 can be moved in a travel direction in the dead space 25, and various driving devices for a receipt and delivery device 40 are arranged in a protruding part 25, and thus the vertical height of the lower main body 41 can be formed thin, and the descending limit position of the carriage 81 can be lowered. In addition, a shelter space can be lessened, and the level of the group of housing spaces 24 on the lowest step can be lowered. The number of housed loads to the installation space of the load keeping facility 10, namely housing efficiency, can therefore be improved, and moreover a division chamber can be narrowed to reduce cleaning operation cost.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a load storage facility used for storing products such as semiconductors that are extremely dustproof.

[0002]

2. Description of the Related Art Conventionally, as this type of equipment, for example, a closed type load storage device disclosed in Japanese Patent Laid-Open No. 3-177208 has been provided. This conventional configuration, in the box-shaped body,
A load storage unit (shelf) having a plurality of storage spaces formed in the vertical direction is provided with the front surface facing the passage. The luggage compartment is
A front surface facing the passage side and a rear surface on the opposite side are opened, a filter covering the rear surface is arranged, and an air supply path is formed between the filter and the main body behind the filter. A blower having a discharge portion communicating with the air supply passage and a passage communicating with the passage is provided in the lower portion of the main body.

A loading / unloading device is provided in the passage, and the loading / unloading device is free to travel on a floor rail and a fixed route supported and guided by the floor rail via wheels and along the front surface of the load storage section. Dolly, a support frame that is erected from the dolly at one end side in the fixed path direction, a lift table that is guided by a guide body that is disposed in the support frame, and a transfer load that is provided on the lift table. It consists of a holding device.

In the conventional load storage device described above, the air discharged from the discharge part of the blower rises in the air supply passage, passes through each filter, and becomes clean air with a high degree of cleanliness. Since the air is supplied from the side, clean air flowing from the rear surface to the front surface maintains a high degree of cleanliness in the load storage unit. Then, the clean air that has passed through the load storage section descends in the passage and is then sucked again by the blower to be circulated and used. The loading and unloading device loads and unloads a load into and from a target storage space by a combined operation of the traveling motion of the carriage, the lifting motion of the lifting platform, and the transfer motion of the load holding device.

[0005]

According to the above-mentioned conventional structure, since the dead space for arranging the blower, which is formed below the load storage portion, is high, the dead space is high.
In addition to increasing the size of the entire shelf, the lowermost level of the load storage unit becomes high, which reduces storage efficiency. In addition, the loading / unloading device has a longer total length due to the presence of the support frame whose thickness in the front-rear direction is increased by accommodating all (almost all) of the lifting drive device, and the load holding device faces the end of the load storage unit. When this is done, the support frame, etc. is located outside the end of the shelf, so the box-shaped main body must be made large, including the evacuation space (dead space) for the support frame. The number of stored items for the load, that is, the storage efficiency decreases, and the clean operating cost increases.

An object of the present invention is to provide a load storage facility which is capable of simplifying and compacting the entire structure by reducing the dead space at the lower part of the shelf or the retreat side and improving the storage efficiency. is there.

[0007]

Means for Solving the Problems In order to achieve the above object, the load storage facility of the first aspect of the present invention has a clean compartment,
A load storage facility having a shelf and a loading / unloading device movable in a passage formed in front of the shelf, the shelf comprising:
A plurality of storage spaces are formed in the vertical direction and the traveling direction, and a dead space whose front facing the aisle is opened is formed below the lowermost storage space group along the traveling direction. And a rear surface on the opposite side is opened, and at the rear of the rear surface, a space whose lower end communicates with a dead space is formed, and in this space, a clean air supply unit for covering the rear surface of the storage space is provided. A lower body that supports and guides the loading / unloading device on a floor rail,
It is composed of a post standing upright from the lower body, a carriage arranged to be able to move up and down along the post, and a loading / unloading tool arranged in the carriage, and a part of the lower body is located in the dead space. I am letting you.

A second aspect of the present invention is the load storage facility according to the first aspect of the present invention, wherein the clean air supply unit includes a box-frame-shaped main body having an open front surface and a filter covering the front side of the main body. The blower is provided on the rear surface side of the main body, and the blower has a discharge portion directed to the filter and a suction portion opened to the space.

Further, in the third aspect of the present invention, in the load storage facility according to the first or second aspect of the present invention, the clean air supply units are arranged in a plurality of upper and lower stages and in a plurality of rows in the traveling direction.

The fourth invention is the above-mentioned first to third inventions.
In the load storage facility according to any one of the inventions, a pair of shelves is provided with a passage interposed therebetween, and a portion of the lower main body that projects in the left-right direction is located in a dead space of both shelves.

Further, the fifth invention is the load storage facility according to any one of the first to fourth inventions described above, in which a plurality of posts are erected on the lower main body while being distributed in the traveling direction. .

According to the sixth aspect of the invention, in the load storage facility according to any of the first to fourth aspects of the invention, one post is provided upright on the lower body. Book 7
The invention is the load storage facility according to any one of the first to sixth inventions described above, wherein the carriage lifting device is arranged from the post to the lower body, and in the lower body,
A lifting drive device is provided with its output shaft in the left-right direction.

The eighth invention is the above-mentioned first to seventh inventions.
In the load storage facility according to any one of the inventions, a traveling drive device is provided in the lower main body with its output shaft in the left-right direction.

[0014]

According to the configuration of the first aspect of the invention described above, the air in the space can be sucked by the operation of the clean air supply unit, and can be supplied to the shelf from the rear surface side as clean air having a high degree of cleanliness. Thereby, the load stored in the shelf can be kept highly clean by the clean air flowing from the rear surface to the front surface. Then, the clean air that has passed through the shelf flows into the passage and then flows downward, and part or all of it flows into the space through the dead space due to the suction force on the clean air supply unit side, and thus circulates. used. At this time, since the space is at atmospheric pressure, the air with low cleanliness does not leak to the shelf side or the outside of the compartment without passing through the clean air supply unit.

Since the space for various devices (blowers) can be eliminated below the shelf, the height of the dead space at the bottom of the shelf can be reduced. Further, since the portion of the lower body protruding in the left-right direction can be moved in the running direction in the dead space, by arranging various drive devices of the loading / unloading device in this protruding portion, the vertical height of the lower body can be increased. It can be formed thin, and the lower limit position of the carriage can be lowered.
This makes it possible to reduce the evacuation space and lower the level of the storage space group at the bottom, thus improving the number of loads stored in the installation space of the load storage facility, that is, storage efficiency, and reducing the size of the compartment. To lower clean operating costs.

According to the configuration of the second invention described above, in the clean air supply unit, the air in the space is sucked from the suction part by the operation of the blower, and the air sent from the discharge part into the main body is opposed. After making clean air with a high degree of cleanness by passing through a filter, it can be supplied to the shelf from the rear side.

Further, according to the configuration of the third aspect of the present invention described above, by providing a large number of clean air supply units on the rear surface of the shelf, it is possible to uniformly supply clean air from these clean air supply units to the shelf. .

According to the configuration of the fourth invention described above,
Various drive devices of the loading / unloading device may be distributed and arranged on the left and right protruding portions. Moreover, according to the configuration of the fifth invention described above, it can be easily adopted in the multiple-post type loading / unloading device, and according to the configuration of the sixth invention described above, it can be easily adopted in the single-post type loading / unloading device. .

Further, according to the configuration of the seventh invention described above, the elevating and lowering drive device utilizes the portion of the lower main body that projects in the left-right direction and can be installed in the lower main body without increasing the front-rear length of the lower main body. It can be easily arranged.

According to the structure of the eighth invention described above,
The traveling drive device can be easily disposed in the lower body by utilizing the portion of the lower body that projects in the left-right direction without increasing the front-rear length of the lower body.

[0021]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS An embodiment of the present invention will be described below with reference to FIGS. In FIG. 1 to FIG. 3, 1 is a clean room in which clean air 3 is blown downward from a ceiling side (or a side wall side) through a filter 2 and the descending clean air 3 is sucked under the floor through a mesh type floor 4. Configured. 10 is a closed type load storage facility with a clean device, and a box-shaped enclosure 12 that is attached using the outer surface of a reinforcing frame 11 is a front and rear wall body 13 and left and right wall bodies 14
And the ceiling wall 15 make the compartment 16 clean inside
Are formed. The compartment 16 is partially or entirely opened on the lower surface side, and the load storage facility 10 is installed on the floor 4 via a landing implement 17 or the like.

A pair of left and right shelves 20 are provided in the compartment 16.
The front faces are provided so as to face each other. These shelves 20
Consists of a shelf frame 21 that also serves as a reinforcement for the enclosure 12, a plurality of upper and lower shelves 22 and a plurality of front and rear rows of vertical partition plates 23, and the like. A plurality of storage spaces 24 are formed in the direction (the running direction of the loading / unloading device described later). The two shelves 20 are provided in a pair on the left and right with the passage 6 in the middle, and the side facing the passage 6 is the front surface. Furthermore, at the bottom of both shelves 20, the lowest storage space
A dead space 25, which is inevitably formed below 24, is formed so that it is open on the front surface and has no obstacle over the entire length in the traveling direction.

Both shelves 20 are open at the front surface facing the passage 6 side and the rear surface on the opposite side, and a space 28 is formed between the rear surface and the left and right wall bodies 14, and the inside of this space 28 is formed. To
Clean air supply units 30 are provided in five upper and lower stages (upper and lower stages) so as to cover the rear surface of the storage space 24. There are five rows of clean air supply units in the traveling direction.
Although 30 is shown, this may be multiple rows other than one or five. The lower end of the space 28 is a dead space.
It is connected to 25.

Each clean air supply unit 30 has a box frame-shaped main body 31 having an open front surface, a filter 32 provided to cover the front surface side of the main body 31, and a blower (fan) provided on the rear surface side of the main body 31. It is composed of 33 etc. This blower 33
The discharge portion 34 faces the filter 32, and the suction portion 35 opens in the space 28.

An access device 40 is provided in the passage 6. The loading / unloading device 40 includes a lower main body 41 supported and guided by a floor-side rail 7 arranged in the front-rear direction through a frame body 11 in the lower portion of the passage 6, and four posts standing from the lower main body 41. 51A, 51B, 51C, 51D and these posts 51
The upper frame 61 that connects the upper portions of A to 51D and is guided by the ceiling side rail 8, the carriage 81 that is vertically movable between the facing surfaces of the posts 51A to 51D, and the carriage 81 are arranged in this carriage 81. Putting in and out tool 91 and the post 51A to 51D
The carriage elevating device 100 and the like are arranged over the inside and the inside of the lower body 41 so that the carriage can be reciprocated on a fixed path 9 which is the traveling direction.

As shown in FIGS. 1 and 4 to 6, the lower main body 41 has a flat box-shaped central box portion 42 and a long box-like shape which is continuous from the left and right sides of the central box portion 42 to the left and right sides. And the side box portion 43 of the. The side box portion 43, which is a portion that projects in the left-right direction, is located in the dead space 25 of the shelf 20 and is configured to be movable back and forth in the dead space 25. The upper surface of the central box portion 42 is formed lower (lower) than the upper surface of the side box portion 43.

A bearing device is provided at the center of the central box portion 42.
A pair of front and rear wheels 45 are arranged via 44 and the like. Both wheels 45 are placed on the floor side rail 7, and in order to prevent the wheels 45 from coming off the floor side rail 7, the central box portion 42 abuts the side surface of the floor side rail 7. A pair of free left and right rollers 46 is provided. One wheel 45 is provided with a traveling drive device (motor with reduction gear, etc.) 48 via a winding transmission device 47.
In that case, the traveling drive device 48 positions a part of the main body in the side box part 43 with the output shaft 49 thereof in the left-right direction.

As shown in FIGS. 1, 4, 6 and 11, the groups of posts 51A to 51D have a rectangular tubular shape in cross section, and each has an L-shaped die member 52 and an L-shaped plate member made of aluminum. It is formed by joining two members with the portion 53, and at that time, the corners (four corners) of the posts 51A to 51D have large curved surfaces.
54 are formed. Each of the posts 51A to 51D is erected from the four corners of the central box portion 42, and is thus positioned at the edge portion in the front-rear direction with respect to the lower body 41 and the intermediate portion in the left-right direction.
Here, the lower ends of the posts 51A to 51D communicate with the inside of the central box portion 42 through the penetrating portions formed in the top plate portion of the central box portion 42, and the suction portions are provided in the central box portion 42. A lower fan 50 is provided so as to face the communication portion (as the lower end side of the post).

In the pair of posts 51A and 51D at diagonal positions of the group of posts 51A to 51D, a vertical slit portion 55 is formed over the entire length on the surface side located inside in the direction of the fixed path 9. Further, on the inner side, an internal dovetail groove portion 56 facing the slit portion 55 is formed over the entire length in the vertical direction. Further, in the pair of posts 51B and 51C, which are diagonally opposite to each other in the group of posts 51A to 51D, a pair of corner portions at diagonal positions inside thereof are formed on the roller guide surface 57.

An external dovetail groove portion is provided on the surface of each of the posts 51A to 51D which is located inward in the direction orthogonal to the fixed path 9.
58 is formed over the entire length in the vertical direction. A plurality of connecting members (bolts and nuts) 59 acting on the external dovetail groove 58 are provided between posts facing each other in an orthogonal direction, that is, 51A and 51C and 51B and 51D.
It is connected by 60 and is reinforced by it.

The upper frame 61 is shown in FIGS.
As shown in FIG. 9, a substrate 62 that is connected and fixed between the upper ends of the posts 51A to 51D, and an upward rib portion 63 that is integral with the substrate 62 are disposed above the substrate 62. The cover body 64 and the like form a flat box shape. At that time, the posts in the direction of the fixed path 9 are provided on the lower surface side of the substrate body 62.
An upward recessed portion 65 starting from the connecting portion with 51A to 51D
Are formed.

A slit 66 extending in the direction along the fixed path 9 is formed in a central portion of the cover body 64 in a direction orthogonal to the direction of the fixed path 9, and the ceiling rail 8 is inserted into the slit 66. It is located. In the upper frame 61, a pair of guided parts 67 guided by the ceiling rail 8 are provided in the direction of the fixed path 9. These guided parts 67
Is a support bracket 68 fixed on the substrate 62, a floating prevention roller 69 supported by the support bracket 68 and abuttable on the lower surface of the ceiling side rail 8, and the support bracket.
It is composed of a pair of left and right shake preventing rollers 70 supported by 68 and abutting on both side surfaces of the ceiling side rail 8.

The posts 51A to 51D are connected to the four corners of the substrate body 62 in the upper frame 61, and the upper ends of the posts 51A to 51D are connected to the upper frame 61 via the through portions 71 formed in the substrate body 62. It is communicated within. Further, in the upper frame 61, upper fans 72 are provided so that the suction portion is on the guided portion 67 side and the discharge portion is opposed to each communicating portion 71 (on the upper end side of the post), and these upper fans 72 are upward ribs. It is attached via part 63.

As shown in FIGS. 2, 4, 10, and 11, the carriage 81 has a rectangular box shape, and a pair of left and right side surfaces are connected to each other so as to extend toward the slit portion 55 side of the columns 51A and 51D. A material 82 is provided, and a rotary table 83 is provided on the upper surface side. The loading / unloading tool 91 is provided on the rotary table 83 so as to be rotatable around a vertical axis 84. That is, the loading / unloading tool 91 has its base end connected to the output shaft 85 from the rotary table 83 side and is rotatable, and the free end of the first link body 92 has the intermediate shaft 93. A second link body 94 whose base ends are connected to each other via an actuating shaft and a free end of the second link body 94.
It is composed of a plate-shaped load support portion 96 whose base ends are connected via 95. Then, both link bodies 92, 94 are formed in a case shape, and transmission mechanisms 97, 98 are provided inside thereof.

These transmission mechanisms 97, 98 are rotated to one side of the output shaft 85 as shown by the solid line in FIG.
11 is rotated on one side on the rotary table 83, the second link body 94 is stored on one end side on the carriage 81, and the load support portion 96 is almost stored on the carriage 81, and FIG.
When the first link body 92 is rotated to the other side by the rotation of the output shaft 85 to the other side as indicated by the phantom line in FIG.
It is arranged and configured so that the free end side of 94 is swung out to the other side with respect to the carriage 81, and the load support portion 96 is linearly moved in the lateral direction to project outward toward the side of the carriage 81. .

As shown in FIGS. 2, 4, and 5 to 11, there are two sets of the carriage lifting device 100, and each set includes a pair of posts 51A, 51B and 51C, which are in non-diagonal positions.
It is constituted by an endless moving body 101 which is arranged within 51D, an upper frame 61 which is between both posts 51A, 51B and 51C, 51D, and a lower body 41. An elevating and lowering drive device 121 for moving in the forward and reverse directions is provided.

That is, the moving body 101 has one post
A lifting body 102 which is guided up and down in the 51A and 51D and is connected to the carriage 81 through the slit portion 55 of the posts 51A and 51D.
And a counterweight 103 that can be lifted and lowered in the other post 51B, 51C, and the lifting body 102 and the counterweight 10
3 is formed by an upper chain (an example of an upper cord) 104 connecting the upper parts and a lower chain (an example of a lower cord) 105 connecting the lower parts.

Lower guide chains 106 around which the lower chains 105 are wound are provided at the positions facing the discharge portions of the lower fans 50 in the lower body 41, respectively, and in the upper frame 61. An upper guide chain 107 around which the upper chain 104 is wound is provided at a position facing the discharge portion of each upper fan 72.
Are provided so as to be freely rotatable.

The elevating body 102 is a long frame body, and sliding bodies 108 are provided on the upper and lower portions of the inner surface thereof. These sliding bodies 108 are provided with internal dovetail grooves in the posts 51A and 51D.
It is fitted with a vertical guide rail 110 fixed via a coupling 109 acting on 56, so that the lifting body 102 is
It can move up and down without shaking in 51A and 51D. Then, the connecting member 111 from the lifting body 102 side is projected to the outside of the posts 51A and 51D through the slit portion 55, and the connecting member 82 from the carriage 81 side is connected to the protruding portion via a fixture. There is. Also, the counter weight 10
Reference numeral 3 is a rectangular rod, and guide rollers 112 that can come into contact with the roller guide surface 57 are attached to the upper and lower portions thereof.

The lifting drive device 121 is the lower chain.
Configured to act on 105. That is, in the central box portion 42 of the lower body 41, the drive chain wheel 122 is arranged so as to be located between the guide chain wheels 106. This drive chain 122
Is linked to the lifting drive device (motor with reduction gear, etc.) 121. At this time, the lifting drive device 121 positions most of the main body in the side box part 43 with its output shaft 123 in the left-right direction. In this way, both carriage lifting devices 100 are arranged using the pair of posts 51A and 51B, and 51C and 51D, which are respectively located at the front and rear.

As shown in FIGS. 10 and 11, a pair of posts 51
The slit portion 55 in A and 51D is closed from the inside by the cover film 115. The cover film 115 is in the form of a strip that is long in the vertical direction, and the upper and lower ends of the cover film 115 have posts 51A, 51.
It is fixed to the inner surface of D. Then, a pair of pressing rollers 116 provided on the upper and lower portions of the lifting body 102 are brought into contact with the back surface of the cover film 115, so that the cover film 115 is attached to posts 51A,
The slit portion 55 is closed by being pressed against the inner surface of 51D.

Further, between the pressing rollers 116, a pair of upper and lower separating rollers 117 provided on the elevating body 102 are covered with a cover film.
By abutting on the surface of 115, the portion of the cover film 115 located between the pressing rollers 116 is separated from the inner surfaces of the posts 51A and 51D, and the slit portion 55 is opened. The connecting member 111 is positioned through the opening.

As shown in FIGS. 1 to 3, the load storage facility 10 having the above-described structure is provided with a carry-in device 131 and a carry-out device 132 for carrying in and out, for example, a bucket type load 5. These carry-in device 131 and carry-out device 132 have various types such as a conveyor, and are provided, for example, by utilizing the storage space 24 at the bottom of one shelf 20. At that time, the carrying-in device 131 and the carrying-out device 132 are provided with openable doors and the like.

Next, the operation of the above embodiment will be described. In the load storage facility 10 equipped with a clean device, a high degree of cleanliness is always maintained. That is, the air in the space 28 is sucked from the suction unit 35 by the operation of each blower 33, and the discharge unit 35
It is discharged from 34 into the main body 31. This discharged air is
The clean air 37 having a high degree of cleanliness is passed through the filters 32 facing each other, and is supplied to the shelf 20 from the rear surface side. At this time, a high-pressure chamber is provided between the blower 33 and the filter 32.

Therefore, the load 5 stored in each storage space 24 of the shelf 20 is kept highly clean by the high-pressure clean air 37 flowing from the rear surface to the front surface. Then, the clean air 37 that has passed through the shelf 20 flows into the passage 6 and then flows downward, part of which flows out below the floor 4, and most of the rest is caused by the suction force generated by the operation of the blower 33. It flows into the space 28 through the dead space 25 and is circulated for use.

In this way, when the clean air 37 is circulated and used, a part of the clean air 37 flowing into the passage 6 through the shelf 20 collides with the withdrawal device 40 side. At this time, the loading and unloading device 40 is a type in which four posts 51A to 51D are provided, and sufficient strength can be obtained even if each of the posts 51A to 51D is formed thin, and the loading and unloading device 40 is disposed in front and back. As a result, the turbulence of the clean air 37 colliding with these posts 51A to 51D becomes small, and the generation of swirls is small and small.

Further, since the corners of the posts 51A to 51D are formed on the curved surface 54, the flow of the clean air 37 at the time of collision becomes smoother, the turbulence of the clean air 37 is smaller, and swirl is generated. Will be less and less. As a result, the inside of the passage 6 is less agitated, and the dust can be moved in the downward flow without being scattered, and thus the dust can be prevented from adhering to the load 5.

During operation of the clean air supply unit 30 described above, since the space 28 is in the atmospheric pressure state, this space is
The air with a low degree of cleanliness inside 28 does not leak to the shelf 20 side without passing through the clean air supply unit 30, and does not leak to the outside from the joint portion of the enclosure 12. Also, on the rear surface of the shelf 20, a blower
By providing the clean air supply units 30 having 33 in the upper and lower stages, the clean air supply units 30 can be separated from the shelves 20.
The clean air 37 can be evenly supplied toward. Spaces for various devices (blowers) are not required below the shelves 20 so that the whole structure can be made compact and the position of the storage space 24 at the bottom can be lowered.

For example, the load 5 to be loaded is received by the loading / unloading device 40 via the loading device 131. Then, the traveling movement of the loading / unloading device 40, the raising / lowering movement of the carriage 81,
The target storage space is obtained by the combined operation of the transfer operation of the loading / unloading tool 91 (see the solid and virtual lines in FIG. 11).
Can fit in 24. At that time, turntable 83 as necessary
By rotating 180 around the vertical axis 84,
The free end of 96 is one of the shelves 1 and the target storage part 3
Can be opposed to. In addition, by reverse operation of the loading / unloading device 40, the target load 5 in the storage space 24 can be unloaded via the unloading device 132.

The traveling motion of the above-mentioned loading / unloading device 40 is performed by the traveling drive device 48 via the winding transmission device 47 on one wheel.
By forcibly rotating 45 in the forward and reverse directions, the roller 46 acting on the floor side rail 7 prevents the lower portion from swinging, and the floating preventing roller 69 acting on the ceiling side rail 8 prevents the floating. In addition, the anti-vibration roller 70 prevents the upper vibration.

When the vehicle is running, as described above, the posts 51A to 51D are thin and the corner portions are formed on the curved surface 54, and the posts 51A to 51D are distributed to the left and right.
The turbulence of the clean air 37 in the passage 6 due to the movement of the posts 51A to 51D is small, and the generation of swirls is small. As a result, the inside of the passage 6 is less agitated, and the dust can be moved in the downward flow without being scattered, and thus the dust can be prevented from adhering to the load 5.

Further, when the loading / unloading device 40 is running, the side box portion 43 in which the running drive device 48 and the lifting drive device 121 are arranged.
Can be moved in the running direction within the dead space 25 formed at the bottom of the shelf 20, the front-rear length of the lower body 41 can be the same as the front-rear pitch of the posts 51A to 51D, and thus the end portion of the shelf 20 can be formed. When the loading / unloading devices 91 are opposed to the row storage spaces 24, the loading / unloading device 40 does not project much from the end of the shelf 20. As a result, the evacuation space generated between the ends of the shelves 20 and the front and rear walls 14 can be reduced, and thus the number of loads 5 stored in the installation space of the load storage facility 10, that is, the storage efficiency can be improved, and the partition Room 16 can be made smaller to reduce clean operating costs.

Further, the carriage 81 when descending is the side box part.
Since it is located close to the upper surface of the central box portion 42 which is lower than the upper surface of 43, the level of the storage spaces 24 in the lowermost stage can be made low, that is, the vertical height of the dead space 25 can be made low. It is possible to improve the number of loads 5 to be stored with respect to the installation height of the load storage facility 10, that is, the storage efficiency.
Can be reduced to lower clean operating costs.

The up-and-down movement of the carriage 81 is performed through the moving body 101 by forcibly rotating the drive chain wheel 122 in the forward and reverse directions by the up-and-down drive device 121. That is, by moving the lower chain 105 in the forward and reverse directions by the forward and reverse rotations of the drive chain wheel 122, the elevating body 102 can be moved up and down in the posts 51A and 51D, whereby the connecting member 111 and the connecting member are connected.
The carriage 81 formed integrally via 82 can be moved up and down.

At this time, the lifting / lowering of the lifting / lowering body 102 is performed by sliding
Is slidably guided by the guide rails 110, so that it can be stably performed without shaking, and can be stably moved up and down, and the carriage which is integrated between the pair of lifting bodies 102 in a diagonal position.
81 can also move up and down stably without shaking. Further, by raising / lowering the counterweight 103 in the other post 51B, 51C in the opposite direction, the raising / lowering drive device 121 can be made compact, and the raising / lowering with a small impact at the time of starting / stopping the raising / lowering can be performed. At that time, the guide weight 112 is guided by the roller guide surface 57 so that the counterweight 103 can be raised and lowered stably without shaking. Further, the elevating and lowering can be surely performed without causing slippage due to the drive chain wheel 122 meshing with the lower chain 105.

During the ascending / descending operation, most of the slits 55 in both posts 51A and 51D are closed by the cover film 115 which abuts from the inside. And lift 10
In the second portion, only the space between the separating rollers 117 is opened to allow the connecting member 111 to move up and down, and the pressing roller 116 and the separating roller 117 move up and down together with the elevating body 102.
The open position of the cover film 115 can be automatically adjusted according to the ascending / descending position of the elevating / lowering body 102, that is, the connecting member 111. Due to such an action, the insides of both posts 51A and 51D can be made almost sealed.

Further, when moving the load 5 in and out of the uppermost storage space 24 as shown by the solid line in FIG. 8 during lifting and lowering, the upper part of the load 5, including the lift amount shown by the phantom line, is in the upper frame. It can be located in the recess 65 of 61, which allows the overall height of the access device 40 to be made low. Therefore, the dead space formed above the storage space 24 at the top of the shelves can be made small, and the ceiling wall body 15 can be provided with respect to the upper end of the loading / unloading device 40.
Can be made closer to each other, and thus the number of loads 5 stored with respect to the installation height of the load storage facility 10, that is, the storage efficiency can be improved, and
The compartment 16 can be made smaller to reduce clean operating costs.

The dust generated in the guided portion 67 and floating in the upper frame 61 during the traveling as described above is sucked from the suction portion by the operation of each upper fan 72, and then the posts 51A to 51D from the discharge portion. Is discharged to the upper part of the inside. At that time, it is generated in the upper guide chain 107 part and the upper frame 61
Dust that is floating inside is also merged into the flow. Here, each lower fan 50 in the lower body 41 is also operated and the post 51A
Since a suction force is applied to the lower part of each of the ~ 51D, a strong suction path from the upper end to the lower end is formed in each of the posts 51A to 51D.

As a result, the dust generated in the upper frame 61 rides on the air flow and is sent down through the posts 51A to 51D, and is then discharged from the inside of the lower body 41 toward the floor 4. At the same time, dust generated by the lifting / lowering body 102 and the counterweight 103 ascending / descending is also carried by the airflow to the posts 51A to.
It is sent down in 51D. Also, the lower wheel 45 and the chain wheel 106, 12
2 and the like, and dust in a floating state in the lower body 41 also rides on the air flow and is discharged toward the floor 4.

In this way, the dust generated in each part of the loading / unloading device 40 can be discharged under the floor 4 without leaking into the compartment 16. In the above embodiment, the lower body 41
From the four posts 51A-51D standing up and down device 40
However, this may be a loading / unloading device 140 in which a post 141 is erected from the center of the central box part 42 in the left-right direction, as shown in FIG. 12, for example. In this case post 141
Are set up in a pair in the running direction to become a two-post type loading / unloading device 140, and by standing up from only one end side in the running direction, a single-post type loading / unloading device 140.

In the above embodiment, most of the clean air 37 that flows into the passage 6 and then flows downward is circulated and used in the space 28, but this all flows out under the floor 4. Then, the space 28 may be supplied (supplemented) from another location. The clean air 3 from the filter 2 side may be lowered in the passage 6. In the first invention, various structures are adopted as the clean air supply unit 30. Further, in the above-mentioned embodiment, the load storage facility 10 equipped with a clean device is installed in the clean room 1,
It may be installed in a normal room.

In the above embodiment, the form in which the take-out device 40 is arranged between the pair of left and right shelves 20 is shown. However, in the first invention, the form in which one of the shelves 20 and the take-out device 40 is combined is used. May be.

In the above embodiment, two sets of carriage lifting and lowering devices 100 are provided, but in the present invention, the posts 51A to 51A are provided.
Carriage lifting device of one set, three sets or four sets using inside D
An example in which 100 is provided may be used. Further, the present invention may be an embodiment in which the two sets of carriage lifting / lowering devices 100 are arranged using a pair of posts in non-diagonal positions.

In the above embodiment, two sets of carriage lifting / lowering devices 100 are arranged between a pair of posts at non-diagonal positions, and a moving body 101, and a counterweight 103 provided on the moving body 101. However, the present invention may be an embodiment in which the moving body 101 is disposed between a pair of posts at diagonal positions, an example in which the counterweight 103 is omitted, or the like. As for, various embodiments are possible.

[0065]

According to the first invention of the above construction, the clean air supply unit is provided on the rear surface of the storage space,
A space for arranging various devices such as a blower can be eliminated above and below the shelf, and the height of the dead space at the bottom of the shelf can be reduced. Furthermore, in the dead space, by moving the part protruding in the left-right direction of the lower body in the running direction, various drive devices of the loading and unloading device can be arranged in this protruding part, and the vertical height of the lower body can be made thin, Therefore, the lower limit position of the carriage can be lowered. This makes it possible to reduce the evacuation space and lower the level of the storage space group at the bottom, which improves the number of loads that can be stored in the installation space of the load storage facility, that is, storage efficiency. The operating cost can be reduced.

Also, since the space is at atmospheric pressure, dirty air that does not pass through the clean air supply unit does not leak to the shelf side or to the outside of the compartment, and therefore a sealing process such as caulking or a special leak occurs. The prevention structure can be dispensed with, and the whole structure can be simplified and provided at a low cost.

According to the second aspect of the present invention having the above-mentioned structure, in the clean air supply unit, the air in the space is sucked from the suction part by the operation of the blower, and the air sent from the discharge part into the main body is opposed. After making clean air with a high degree of cleanness through a filter that is installed, it can be supplied to the shelf from the rear side.

Further, according to the third aspect of the present invention having the above-mentioned structure, by providing a large number of clean air supply units on the rear surface of the shelf, it is possible to uniformly supply clean air from these clean air supply units toward the shelf.

According to the fourth aspect of the present invention having the above-mentioned structure, the various drive devices for the loading / unloading device can be distributed to the left and right projecting portions, so that the lower body can be made more compact and the dead space formed at the bottom of the shelf can be reduced. Can be smaller.

Further, according to the fifth invention of the above-mentioned structure, it can be easily adopted in the plural-post type take-out device, and according to the sixth invention of the above-mentioned structure, it can be easily adopted in the one-post type take-out device. Further, according to the seventh and eighth inventions having the above-described configurations, the lifting drive device and the traveling drive device utilize the portion of the lower body protruding in the left-right direction to increase the length of the lower body or to lower the lower body. It can be easily arranged in the lower main body without increasing the thickness, so that the traveling direction and the height direction can be made compact.

[Brief description of drawings]

FIG. 1 is a vertical sectional front view of a load storage facility according to an embodiment of the present invention.

FIG. 2 is a vertical side view of the same cargo storage facility.

FIG. 3 is a cross-sectional plan view of the same cargo storage facility.

FIG. 4 is a perspective view illustrating a loading / unloading device of the same cargo storage facility.

FIG. 5 is a vertical cross-sectional rear view of a lower body portion of the same cargo storage facility.

FIG. 6 is a cross-sectional plan view of a lower body portion of the same cargo storage facility.

FIG. 7 is a partially cutaway rear view of an upper frame portion of the same cargo storage facility.

FIG. 8 is a partially cutaway side view of an upper frame portion of the same cargo storage facility.

FIG. 9 is a cross-sectional plan view of an upper frame portion of the same cargo storage facility.

FIG. 10 is a partially cutaway side view of a carriage portion of the same cargo storage facility.

FIG. 11 is a horizontal cross-sectional plan view of the loading / unloading device of the same cargo storage facility.

FIG. 12 is a vertical sectional front view of the load storage facility according to another embodiment of the present invention.

[Explanation of symbols]

 4 Floor 5 Load 6 Passage 7 Floor rail 8 Ceiling rail 9 Fixed route 10 Load storage facility 12 Enclosure 16 Partition room 20 Shelf 24 Storage space 25 Dead space 28 Space 30 Clean air supply unit 31 Main body 32 Filter 33 Blower 34 Discharge Part 35 Suction part 37 Clean air 40 Taking in and out device 41 Lower body 42 Central box part 43 Side box part (protruding part) 45 Wheel 48 Travel drive device 49 Output shaft 51A post 51B post 51C post 51D post 54 Curved surface 55 Slit part 61 upper part Frame 81 Carriage 82 Coupling material 83 Rotating table 91 Loading / unloading device 96 Cargo support 100 Carriage lifting device 101 Moving body 102 Lifting body 103 Counterweight 104 Upper chain (upper cord) 105 Lower chain (lower cord) 121 Lifting drive Device 122 Drive chain 123 Output shaft 140 Entry / exit device 141 Post

Claims (8)

[Claims] 1. A load storage facility in which a shelf and a loading / unloading device that is movable in a passage formed in front of the shelf are installed in a clean compartment, and the shelf moves vertically and in a traveling direction. While forming a plurality of storage spaces in the direction,
Below the storage space group at the bottom, a dead space is formed along the traveling direction, the front surface facing the aisle, and the shelf further opens the front surface and the opposite rear surface,
A space whose lower end communicates with a dead space is formed behind the rear surface, and a clean air supply unit that covers the rear surface of the storage space is provided in this space, and the loading / unloading device is supported and guided by a floor rail. The lower body is composed of a lower body, a post standing upright from the lower body, a carriage arranged to move up and down along the post, and a loading / unloading tool arranged in the carriage. A cargo storage facility characterized by being located in a space. 2. The clean air supply unit comprises a box frame-shaped main body having an open front surface, a filter covering the front surface side of the main body, and a blower provided on the rear surface side of the main body,
The blower has a discharge part directed to the filter and a suction part opened in a space.
The listed storage facility. 3. The load storage facility according to claim 1, wherein the clean air supply units are arranged in a plurality of upper and lower stages and in a plurality of rows in the traveling direction. 4. A pair of shelves is provided with a passage in between, and a portion of the lower main body protruding in the left-right direction is located in a dead space of both shelves.
The load storage facility according to any one of 3 above. 5. A plurality of posts are arranged upright on the lower main body so as to be distributed in the traveling direction.
The load storage facility according to any one of 4 above. 6. The load storage facility according to claim 1, wherein one post is provided upright on the lower body. 7. The carriage raising / lowering device is arranged from the post to the lower body, and the raising / lowering drive device is provided in the lower body with its output shaft in the horizontal direction. The storage facility described in any of 1. 8. The lower drive unit is provided with a traveling drive device with its output shaft oriented in the left-right direction.
The load storage facility according to any one of 7.