JP2970403B2 - Load storage equipment - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a load storage facility used for storing products, such as semiconductors, which are extremely susceptible to dust.

[0002]

2. Description of the Related Art Conventionally, as this kind of equipment, there has been provided a closed-type load storage device as disclosed in Japanese Patent Application Laid-Open No. 3-177208, for example. This conventional configuration, in a box-shaped body,
A load storage unit (shelf) having a plurality of storage spaces formed in a vertical direction is provided with its front surface facing the passage. The load storage section
The front surface facing the passage and the rear surface on the opposite side are open, a filter is provided to cover the rear surface, and an air supply passage is formed between the filter and the main body behind the filter. A blower is provided at a lower portion in the main body, the discharge section communicating with the air supply path, and the blower communicating with the path.

A carry-in / out device is provided in the passage, and the carry-in / out device is supported and guided by a floor rail via wheels on the floor rail, and is free to travel on a fixed path along the front surface of the load storage portion. Trolley, a support frame erected from the trolley at one end in the direction of the fixed path, a lift platform guided by a guide body disposed in the support frame, and a transfer load provided on the lift platform. It is composed of a holding device and the like.

In the above-mentioned conventional load storage device, the air discharged from the discharge section of the blower rises in the air supply path and passes through each filter to become clean air with high cleanness. A high degree of cleanliness is maintained in the load storage section by clean air flowing from the rear surface to the front surface. The clean air that has passed through the load storage unit as described above descends in the passage and is sucked again by the blower to be circulated. The loading / unloading device carries out loading / unloading of a load into / from a target storage space by a combination of a traveling motion of a truck, a lifting / lowering motion of a lifting / lowering table, and a delivery / reception motion of a load holding device.

[0005] The lifting platform is disclosed in, for example, Japanese Patent Application Laid-Open No. 63-180610.
As shown in the publication, through a slit formed in a post (support frame), it is interlocked and connected to an elevating drive device provided in the post. Then, by the forward / reverse drive of the lifting / lowering drive device, the vertical movement is performed while being guided by the guide body disposed in the post.

[0006]

According to the above-mentioned conventional construction, one support frame which is erected has a rectangular cross section (rectangular cylinder shape) in cross section, and has a thickness in the front-rear direction and a horizontal direction in view of strength and the like. The clean air that passes through the load storage unit collides with the support frame and becomes turbulent, generating a large swirl. It will be scattered and attached to the load. Furthermore, since the elevating platform and the like are cantilevered on the support frame, the ascending and descending and loading / unloading operations are not stable due to shaking or the like. Therefore, the cross section of the support frame becomes large.

When the cross section of the supporting frame is made as small as possible, a connecting structure (elevating body) for interlocking the elevating table with the elevating drive device and a counterweight for elevating balance are densely packed in the supporting frame. It will be arranged. Therefore, when the connecting structure and the counterweight move up and down in the support frame, an air pumping phenomenon occurs in the support frame, so that the dirty air in the support frame passes through the slit and the cleaned main body. Will be blown out inside.

It is an object of the present invention to reduce the occurrence of turbulence and swirling of clean air from the shelf side, and to simplify the overall structure of the loading / unloading device by reducing the size of the post, thereby reducing the size and size of the post. It is another object of the present invention to provide a load storage facility capable of stably performing a loading / unloading operation including a raising / lowering operation and automatically coping with a pumping phenomenon in a post.

[0009]

According to a first aspect of the present invention, there is provided a load storage facility in which a shelf and a loading / unloading device are arranged in a clean compartment, wherein the loading / unloading device is provided. , A lower body supported and guided by a floor side rail,
Four posts erected from the lower body, an upper frame that connects between the upper parts of the posts, a carriage with a loading / unloading tool that can be moved up and down between the opposing surfaces of each post, inside the post and inside the lower body And a carriage elevating device arranged over the two, and the carriage elevating device is two sets, each set being inside a pair of posts and between above the two posts,
It has an endless moving body disposed in the lower body and has an elevating drive device for moving the moving body in the normal and reverse directions, and moves through a vertical slit formed on one of a pair of posts. A carriage is connected to the body, a counterweight is provided on the moving body located in the other post, and the inside of the post provided with the slit portion and the inside of the post provided with the counterweight are communicated via a duct.

According to a second aspect of the present invention, in the load storage facility according to the first aspect, an upper portion between the post having the slit portion and the post having the counterweight is communicated via a duct. I have.

According to a third aspect of the present invention, in the load storage facility according to the first or second aspect described above, the movable body is connected to a carriage guided up and down in one of the posts and connected to the carriage through a slit. A counterweight which can be raised and lowered in the other post, an upper cable which connects these lifting members and the upper part of the counterweight, and a lower cable which connects between the lower parts. Is configured to act on the lifting drive.

According to a fourth aspect of the present invention, in the load storage facility according to any one of the first to third aspects, the upper frame connected between the four posts is guided by the ceiling rail. A guide unit is provided, and a fan is provided in which the suction unit is the guided portion side and the discharge unit is the upper end of the post.

According to a fifth aspect of the present invention, there is provided the load storage facility according to any one of the first to fourth aspects described above, wherein a fan having a suction portion having a lower end of the post is provided in the lower body. I have.

[0014]

According to the configuration of the first aspect of the present invention, the load stored in the shelf in the load storage facility is maintained at a high degree of cleanliness by the clean air flowing from the rear surface to the front surface. Then, the clean air passing through the shelves flows into the passage and then flows downward. At this time, a part of the clean air flowing into the passage through the shelf collides with the loading / unloading device side, but the loading / unloading device has a structure in which four posts are arranged, and even if each post is formed thin. By being able to obtain sufficient strength and being arranged separately before and after,
The turbulence of the clean air colliding with these posts is small, and the occurrence of swirl is small. This makes it difficult for the inside of the passage to be agitated, so that the dust can be moved on the descending flow without being scattered, thereby preventing the dust from adhering to a load or the like.

For example, a load to be stored is received by the loading / unloading device, and can be stored at a target location on the shelf by a combination of a running motion of the loading / unloading device, a raising / lowering motion of the carriage, and a passing motion of the loading / unloading tool. . In addition, by the reverse operation of the loading / unloading device, a load at a target location can be unloaded. Furthermore, during travel, as described above, since the posts are arranged narrowly and distributed to the left and right, the turbulence of the clean air in the passage due to the movement of these posts is reduced, and the generation of swirls Is small and small.

By moving the movable body in the pair of posts in the forward and reverse directions by the lifting drive device, the carriage integrated with the movable body can be moved up and down stably without shaking. By raising and lowering the counterweight in the opposite direction in the other post, the lifting and lowering drive device can be made compact, and lifting and lowering with a small impact can be performed when lifting and lowering is started or stopped.

When the carriage is raised and lowered, one of the connecting structure in the post and the counterweight in the post is raised and the other is lowered. Will flow into the duct and into the opposite, descending post. Thus, when going up and down,
Air can automatically flow between the ascending post and the descending post.

According to the configuration of the second aspect of the present invention,
The air that is compressed on the ascending side flows into the duct from the upper part of the post, and flows into the upper part of the descending side post. Thus, when going up and down,
Air can automatically flow back and forth between the tops of the ascending and descending posts.

According to the configuration of the third aspect of the present invention, the moving body is constituted by connecting the elevating body, the counterweight, the upper cord-like body, and the lower cord-like body, so that the manufacturing cost can be reduced. In addition, the maintainability is improved, and the raising and lowering of the carriage can be performed by moving the lower cord-like body in the forward and reverse directions by the forward and reverse driving of the lifting and lowering drive device.

Further, according to the configuration of the fourth aspect of the present invention, the dust generated in the guided portion during traveling of the loading / unloading device and floating in the upper frame from the suction portion by the operation of each fan, and then discharged from the suction portion. From the top of the post. At that time, dust generated in the upper guide component of the carriage elevating device and floating in the upper frame,
Can join the stream. Thereby, the dust generated in the upper frame can be sent down in each post by being put on the airflow,
Thus, the liquid can be discharged from the lower body toward the floor without leaking into the compartment. Also, when raising and lowering the carriage,
The air that is compressed on the ascending side tends to be greatly compressed in this post, coupled with the fact that it is discharged from each fan to the top inside the post. And into the opposite descending post.

Further, according to the configuration of the fifth aspect of the present invention, the suction force can be applied to the lower portion of the post by operating the respective fans in the lower body, so that a strong suction passage from the upper end to the lower end is provided in each post. Can be formed. Thereby, the dust generated in the upper frame can be sent down in each post by being put on a strong air current, and the dust generated and floating in the lower main body can be put on the air flow and discharged toward the floor at the same time. . Further, air that is compressed on the descending side can be smoothly removed by the suction force of each fan. In this way, the dust generated in each part of the access device can be discharged under the floor without leaking into the compartment.

[0022]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS One embodiment of the present invention will be described below with reference to the drawings. 2 to 4, reference numeral 1 denotes a clean room, in which clean air 3 is blown downward from a ceiling side (or a side wall side) through a filter 2, and the descending clean air 3 is sucked under a floor through a mesh type floor 4. It is composed. Reference numeral 10 denotes a closed storage facility with a clean device, and a box-shaped enclosure 12 attached using the outer surface of a reinforcing frame 11 includes front and rear walls 13, left and right walls 14, and a ceiling wall 15 The compartment 16 is formed inside. The compartment 16 is partially or entirely open on the lower surface side, and the load storage facility 10 is installed on the floor 4 via a landing gear 17 or the like.

A pair of left and right shelves 20 are provided in the compartment 16.
They are provided with their front faces facing each other. These shelves 20
Is composed of a shelf frame 21 which also serves as reinforcement of the surrounding wall body 12, a plurality of upper and lower shelves 22 and a plurality of front and rear vertical partitions 23, and the like. A plurality of storage spaces 24 are formed in the direction. The two shelves 20 are provided in a pair on the left and right with the passage 6 at the center, and the side facing the passage 6 is the front side. Furthermore, at the bottom of both shelves 20,
A dead space 25 inevitably generated below the lowermost storage space 24 is formed in a state where it is open on the front surface and has no obstacles over the entire length in the front-rear direction.

The two shelves 20 have a front surface facing the passage 6 side and a rear surface on the opposite side are open, and a space 28 is formed between the rear surface and the left and right wall members 14. To
The clean air supply units 30 are provided in five upper and lower stages (upper and lower stages) so as to cover the rear surface of the storage space 24. In the horizontal direction, five rows of clean air supply units 30
However, this may be a plurality of rows other than one row or five rows. The lower end of the space 28 is a dead space 25.
Is communicated to.

Each of the clean air supply units 30 includes a box-frame-shaped main body 31 having an open front, a filter 32 provided to cover the front of the main body 31, and a blower (fan) provided on the rear of the main body 31. 33. This blower 33
The discharge part 34 faces the filter 32, and the suction part 35 is opened in the space 28.

An access device 40 is provided in the passage 6. The loading / unloading device 40 includes a lower body 41 supported and guided by floor-side rails 7 arranged in the front-rear direction via the frame body 11 at a lower portion in the passage 6, and four posts standing upright from the lower body 41. 51A, 51B, 51C, 51D and these posts 51
An upper frame 61 that connects the upper portions of A to 51D and is guided by the ceiling side rail 8, a carriage 81 arranged between the opposing surfaces of the posts 51A to 51D so as to be able to move up and down, and is disposed on the carriage 81. The insertion / removal tool 91 and the posts 51A to 51D
A carriage elevating device 100 and the like disposed between the inside and the lower main body 41 are configured to be able to reciprocate on a fixed path 9 in the front-rear direction.

FIGS. 1, 3, 5, and 6 show the lower main body 41.
As shown in the figure, a flat box-shaped central box portion 42 and this central box portion 42
And a long box-shaped side box portion 43 provided continuously from the left and right sides to the left and right sides. Here, the side box portion 43, which is a portion protruding in the left-right direction, is located in the dead space 25 of the shelf 20, and is configured to be able to move back and forth in the dead space 25.

At the center of the central box 42, a bearing device
A pair of front and rear wheels 45 are arranged via 44 and the like. Both wheels 45 are mounted on the floor side rail 7, and the central box 42 abuts against the side surface of the floor side rail 7 to prevent the wheels 45 from coming off the floor side rail 7. A pair of freely left and right rollers 46 is provided. One of the wheels 45 is connected to a traveling drive device (e.g., a motor with a reduction gear) 48 via a wrapping transmission 47.
And the traveling drive unit 48 has its output shaft 49
The main body portion is located in the side box 43 with the left and right directions.

As shown in FIGS. 1, 3, 6, and 11, the posts 51A to 51D have a rectangular cross section in cross section, and are each formed of an L-shaped member 52 and an L-shaped plate made of aluminum. It is formed by joining two members with the portion 53. At this time, each corner portion (four corners) of the posts 51A to 51D has a large curved surface.
54 is formed. The posts 51A to 51D are erected from the four corners of the central box portion 42, and thus are located at the edges in the front-rear direction with respect to the lower body 41 and at the middle portions in the left-right direction.
Here, the lower end of each of the posts 51A to 51D communicates with the central box 42 through a through-hole formed in the top plate of the central box 42, and a suction unit is provided in the central box 42. A lower fan 50 is provided opposite to the communication portion (as the lower end of the post).

In the pair of posts 51A, 51D at diagonal positions in the group of the posts 51A to 51D, a vertical slit portion 55 is formed over the entire length on the surface side located inside in the direction of the fixed path 9, Further, on the inner side, an internal dovetail groove portion 56 facing the slit portion 55 is formed over the entire length in the vertical direction. Another pair of posts 51B and 51C at diagonal positions in the group of posts 51A to 51D are formed with a pair of corner portions at diagonal positions inside the roller guide surface 57.

An external dovetail portion is provided on the surface of each of the posts 51A to 51D which is located inward in the direction orthogonal to the fixed path 9.
58 is formed over the entire length in the vertical direction. A plurality of connecting members (bolts and nuts) 59 acting on the external dovetail portion 58 between the posts facing in the orthogonal direction, that is, a plurality of vertical portions between 51A and 51C and between 51B and 51D.
It is connected by 60, and is reinforced.

The upper frame 61 is shown in FIGS.
As shown in FIG. 9, a substrate 62 is connected and fixed between the upper ends of the posts 51A to 51D, and is disposed above the substrate 62 by utilizing an upward rib portion 63 integrated with the substrate 62. It is formed in a flat box shape by the cover body 64 and the like. At this time, each post in the direction of the fixed path 9 is provided on the lower surface side of the substrate body 62.
An upward recess 65 starting from a connection portion with 51A to 51D.
Are formed.

At the center of the cover 64 in a direction perpendicular to the direction of the fixed path 9, a slit 66 is formed in a direction along the fixed path 9, and the ceiling rail 8 is inserted into the slit 66. Is located. In the upper frame 61, a pair of guided parts 67 guided by the ceiling side rail 8 are provided in the direction of the fixed path 9. These guided parts 67
A supporting bracket 68 fixed on the substrate body 62; a floating prevention roller 69 supported by the supporting bracket 68 and capable of abutting on the lower surface of the ceiling rail 8;
A pair of right and left anti-vibration rollers 70 supported by 68 and freely abutting on both side surfaces of the ceiling rail 8.

The posts 51A to 51D are connected to the four corners of the board 62 in the upper frame 61, and the upper ends of the posts 51A to 51D are connected to the upper frame 61 through the penetrating portions 71 formed in the board 62. Is communicated within. Further, in the upper frame 61, upper fans 72 are provided, each having a suction portion facing the guided portion 67 and a discharge portion facing each communication portion 71 (as the upper end side of the post). It is attached via a part 63.

As shown in FIG. 1, FIG. 2, FIG. 10, and FIG. 11, the carriage 81 has a rectangular box shape, and has a pair of left and right side surfaces connected to the slits 55 of the columns 51A and 51D. A member 82 is provided, and a turntable 83 is provided on the upper surface side. The insertion / removal tool 91 is provided on a turntable 83 so as to be rotatable around a vertical axis 84. That is, the insertion / removal tool 91 has a base end connected to a rotatable first link body 92 connected to an output shaft 85 from the turntable 83 side, and a free end of the first link body 92 connected to an intermediate shaft 93. A second link body 94 having a base end connected thereto through a shaft, and an operating shaft connected to the free end of the second link body 94.
And a plate-shaped load supporting portion 96 connected to the base end through a base 95. The two link bodies 92 and 94 are shaped like a case, and transmission mechanisms 97 and 98 are interposed therein.

As shown by the solid line in FIG. 11, these transmission mechanisms 97 and 98 are rotated by one of the output shafts 85 to the first link body 92.
Is rotated to one side on the rotary table 83, the second link body 94 is placed on one end side on the carriage 81, and the load support portion 96 is placed almost on the carriage 81, and FIG.
When the first link body 92 is rotated to the other side by the rotation of the output shaft 85 to the other side as shown by the virtual line, the second link body
The free end side of 94 is swung outward with respect to the other side of the carriage 81, and the load supporting portion 96 is arranged and configured so as to linearly move in the lateral direction so as to protrude outward from the side of the carriage 81. .

As shown in FIGS. 1 and 2 and FIGS. 5 to 11, there are two sets of the carriage lifting / lowering devices 100, each set including a pair of posts 51A, 51B and 51C, 51C, 51C,
An endless moving body 101 is provided in the upper frame 61 between the inside of 51D, the posts 51A, 51B and 51C, 51D, and the lower body 41. An elevating drive device 121 for moving in the forward and reverse directions is provided.

That is, the moving body 101 is connected to one of the posts.
An elevating body 102 which is guided up and down in 51A, 51D and connected to the carriage 81 through the slit 55 of the post 51A, 51D.
And a counter weight 103 which can be raised and lowered in the other posts 51B and 51C, a lifting body 102 and a counter weight 10
3 is formed by an upper chain (an example of an upper cord) 104 connecting the upper portions and a lower chain (an example of a lower cord) 105 connecting the lower portions.

At a position in the lower body 41 facing the discharge portion of each lower fan 50, a lower guide chain wheel 106 for winding the lower chain 105 is provided so as to freely rotate. At a position facing the discharge portion of each upper fan 72, an upper guide chain ring 107 around which the upper chain 104 is wound.
Are provided so as to freely rotate.

The elevating body 102 is a long frame, and a sliding body 108 is provided on the upper and lower portions of its inner surface. These slides 108 are provided with internal dovetails in the posts 51A and 51D.
The lifting / lowering body 102 is fitted to the vertical guide rail 110 fixed via a connecting tool 109 acting on the post 56.
It is possible to move up and down without swinging in 51A and 51D. The connecting member 111 from the lifting / lowering body 102 side is made to protrude out of the posts 51A and 51D through the slit portion 55, and the connecting member 82 from the carriage 81 side is connected to the protruding portion via a fixture. I have. In addition, the counter weight 10
Reference numeral 3 denotes a rectangular rod body, and guide rollers 112 which can abut on the roller guide surface 57 are attached to the upper and lower parts thereof.

The lifting drive device 121 is connected to the lower chain
105 That is, in the central box portion 42 of the lower main body 41, a drive chain wheel 122 is disposed so as to be located between the two guide chain wheels 106. This drive chain wheel 122
Is linked to the lifting drive device (e.g., a motor with a reduction gear) 121, and at this time, the lifting drive device 121 has its main body positioned in the side box 43 with its output shaft 123 in the left-right direction. In this way, the two carriage lifting / lowering devices 100 are provided with a pair of posts 51A and 51B located at the front and rear, respectively, and
Installed using 51C and 51D.

As shown in FIGS. 10 and 11, a pair of posts 51
The slits 55 in A and 51D are closed from the inside by the cover film 115. The cover film 115 has a vertically long band shape, and upper and lower ends thereof are formed by posts 51A and 51A.
D is fixed to the inner surface. Then, a pair of pressing rollers 116 provided on the upper and lower portions of the elevating body 102 are brought into contact with the back surface of the cover film 115, so that the cover film 115 is
By pressing against the inner surface of 51D, the slit portion 55 is closed.

Further, between the two pressing rollers 116, a pair of upper and lower separating rollers 117 provided on the elevating body 102 is covered with a cover film.
By contacting the surface of the cover 115, the portion of the cover film 115 located between the pressing rollers 116 is separated from the inner surfaces of the posts 51A and 51D, and the slit 55 is opened. The connecting member 111 is located through the opening.

As shown in FIGS. 1 to 3, FIG. 7, FIG. 8, and FIG. 11, of the above-mentioned posts 51A to 51D, the posts 51A and 51D in which the slit 55 is formed and the post in which the counter weight 103 is provided. The insides of 51B and 51C are communicated via a duct 74. That is, the duct 74 is provided between the upper portions of the posts 51A, 51C and 51B, 51D facing each other on the left and right. These ducts 74 have a rectangular cylindrical shape, and are connected to the posts 51A to 51D via brackets 75 provided at both ends thereof and connecting members 76 acting on the external dovetail grooves 58. In order to allow the flow passage 77 in the duct 74 to communicate with the posts 51A to 51D, through portions 78 are formed at predetermined positions of the posts 51A to 51D. Note that the inner side surface of the duct 74 is formed with a recess 79 for avoiding interference of the insertion / removal tool 91.

As shown in FIGS. 2 to 4, the load storage facility 10 having the above-described structure is provided with a carry-in device 131 and a carry-out device 132, for example, for loading and unloading a bucket-type load 5. The carry-in device 131 and the carry-out device 132 have various types such as a conveyor, and are provided, for example, by utilizing the storage space 24 at the lowest stage in one shelf 20. At this time, the carry-in device 131 and the carry-out device 132 are provided with a door that can be opened and closed.

Next, the operation of the above embodiment will be described. A high degree of cleanliness is always maintained in the load storage facility 10 with a clean device. That is, the air in the space 28 is sucked from the suction unit 35 by the operation of each blower 33, and
It is discharged from 34 into the main body 31. This discharged air supply is
Clean air 37 having a high degree of cleanness passes through the opposed filter 32 and is supplied to the shelf 20 from the rear side.

Therefore, the load 5 stored in each storage space 24 of the shelf 20 is clean air flowing from the rear to the front.
37 maintains a high degree of cleanliness. And shelf 20
The clean air 37 that has passed into the passage 6 flows downward after flowing into the passage 6, and a part of the clean air 37 flows out below the floor 4, and most of the remaining air flows into the dead space 25 due to the suction force generated by the operation of the blower 33. Through the space 28 to be recycled.

When the clean air 37 is circulated and used as described above, a part of the clean air 37 flowing into the passage 6 through the shelf 20 collides with the loading / unloading device 40 side. At this time, the loading / unloading device 40 has a structure in which four posts 51A to 51D are provided, and it is possible to obtain a sufficient strength even if each of the posts 51A to 51D is formed to be thin. As a result, the turbulence of the clean air 37 colliding with the posts 51A to 51D is reduced, and the occurrence of swirl is reduced.

Further, since the posts 51A to 51D have the corners formed on the curved surface 54, the flow of the clean air 37 at the time of collision becomes smoother, the turbulence of the clean air 37 is smaller, and the generation of swirls is generated. Will be less and smaller. Accordingly, the agitation of the inside of the passage 6 is reduced, and the dust can be moved along the descending flow without being scattered, thereby preventing the dust from adhering to the load 5 or the like.

When the above-described clean air supply unit 30 is operated, the inside of the space 28 is at atmospheric pressure.
The air having a low degree of cleanness inside 28 does not leak to the shelf 20 side without passing through the clean air supply unit 30 and does not leak outside from the joint of the enclosure 12. Also on the back of shelf 20, a blower
By providing the clean air supply units 30 each having a plurality of upper and lower stages 33, the clean air supply units 30
The clean air 37 can be supplied uniformly to. Spaces for various devices (blowers) are not required below the shelf 20, so that the whole can be made compact and the position of the lowermost storage space 24 can be lowered.

For example, a load 5 to be stored is received by the loading / unloading device 40 via the loading device 131. And the running movement of the loading / unloading device 40, the raising / lowering movement of the carriage 81,
The target storage space is formed by a combination operation with the transfer operation of the insertion / removal tool 91 (see the solid line and the virtual line in FIG. 11).
24 can fit. At that time, if necessary, turn table 83
Is rotated 180 degrees around the vertical axis 84,
96 free ends on any of the shelves 1 and the intended storage
Can be opposed. Also, by the reverse operation of the loading / unloading device 40,
The intended load 5 in the storage space 24 can be unloaded via the unloading device 132.

The traveling motion of the above-described loading / unloading device 40 is controlled by a traveling drive device 48 via a wrapping transmission device 47 on one wheel.
By forcibly rotating the roll 45 in the forward and reverse directions, the roller 46 acting on the floor rail 7 prevents the lower part from oscillating, and the floating prevention roller 69 acting on the ceiling rail 8.
And prevents run-out of the roller 70.
Is performed in a state in which the upper part is prevented from swinging.

During running, as described above, each of the posts 51A to 51D is narrow and each of the corners is formed on the curved surface 54 and is distributed to the left and right.
The turbulence of the clean air 37 in the passage 6 due to the movement of the posts 51A to 51D is small, and the occurrence of swirl is small and small. Accordingly, the agitation of the inside of the passage 6 is reduced, and the dust can be moved along the descending flow without being scattered, thereby preventing the dust from adhering to the load 5 or the like.

When the loading / unloading device 40 travels, the side box 43 provided with the traveling drive device 48 and the elevation drive device 121 is provided.
Can be moved in the front-rear direction within the dead space 25 formed in the lower part of the shelf 20, so that the front-rear length of the lower body 41 can be the same as the front-rear pitch of the posts 51A to 51D, When the loading / unloading tool 91 is opposed to the row of storage spaces 24, the loading / unloading device 40 does not protrude much from the end of the shelf 20. As a result, the evacuation space generated between the end portion of the shelf 20 and the front and rear wall members 14 can be reduced, so that the number of loads 5 stored in the installation space of the load storage facility 10, that is, the storage efficiency, can be improved. The size of the room 16 can be reduced to lower the clean operation cost.

The above-mentioned raising and lowering movement of the carriage 81 is performed via the moving body 101 by forcibly rotating the drive chain wheel 122 in the forward and reverse directions by the raising and lowering drive device 121. That is, by moving the lower chain 105 in the forward and reverse directions by the forward and reverse rotation of the drive chain wheel 122, the lifting body 102 can be moved up and down in the posts 51A and 51D.
The carriage 81 integrated via 82 can be moved up and down.

At this time, the elevating body 102 is moved up and down
Is guided slidably by the guide rails 110, so that the carriage can be stably moved without swinging, and can be stably moved up and down and integrated between a pair of elevating bodies 102 at diagonal positions.
The 81 can also move up and down stably without shaking. Further, by raising and lowering the counterweight 103 in the other post 51B, 51C in the opposite direction, the lifting drive 121 can be made compact, and the lifting and lowering with a small impact can be performed at the time of starting and stopping the lifting. At this time, the lifting and lowering of the counterweight 103 is performed stably without swinging because the guide roller 112 is guided by the roller guide surface 57. Further, the ascending and descending can be reliably performed without causing a slip or the like by the drive chain wheel 122 meshing with the lower chain 105.

At the time of lifting and lowering, most of the slit portions 55 in both the posts 51A and 51D are closed by the cover film 115 which is in contact from the inside. And lifting body 10
In the portion of No. 2, only the space between the two separating rollers 117 is opened to allow the connecting member 111 to move up and down, and the pressing roller 116 and the separating roller 117 move up and down integrally with the elevating body 102.
The opening position of the cover film 115 can be automatically adjusted according to the elevating body 102, that is, the elevating position of the connecting member 111. By such an operation, the insides of both the posts 51A and 51D can be substantially closed.

Further, as shown by the solid line in FIG. 8, when the load 5 is taken in and out of the uppermost storage space 24 during lifting and lowering, the upper part of the load 5 is lifted, including the lift indicated by the virtual line. It may be located in the recess 65 of 61, which may make the overall height of the access device 40 low. Therefore, the dead space formed above the storage space 24 at the top of the shelf can be reduced, and the ceiling wall 15
Can be approached, and the number of stored loads 5 with respect to the installation height of the load storage facility 10, that is, the storage efficiency can be improved,
The compartment 16 can be made smaller to reduce the cost of clean operation.

During traveling as described above, dust generated in the guided portion 67 and floating in the upper frame 61 is sucked from the suction portion by the operation of each upper fan 72, and is discharged from the discharge portion to the posts 51A to 51D. It is discharged to the upper part inside. At that time, it occurs at the upper guide chain ring 107 and the upper frame 61
Dust suspended in the air is also joined to the flow. Here, each lower fan 50 in the lower body 41 is also operated, and the post 51A
The suction force is applied to the lower portion of the posts 51A to 51D, so that a strong suction path from the upper end to the lower end is formed in each of the posts 51A to 51D.

As a result, the dust generated in the upper frame 61 is transported downward through the posts 51A to 51D by the airflow, and is discharged from the lower body 41 toward the floor 4. At the same time, dust generated by the elevating body 102 and the counterweight 103 moving up and down also rides on the airflow, and
It is sent down inside 51D. In addition, the lower wheel 45 and the chain wheels 106, 12
2 and the like, and the dust in a floating state in the lower main body 41 also gets into the airflow and is discharged toward the floor 4. In this way,
Dust generated in each part of the access device 40 can be discharged under the floor 4 without leaking into the compartment 16.

During the elevating operation as described above, one of the elevating body 102 in the posts 51A and 51D and the counterweight 103 in the posts 51B and 51C is raised and the other is lowered. At this time, the compressed air on the descending side can be smoothly removed by the suction force of the lower fan 50 described above. On the other hand, air that is compressed on the ascending side is discharged from the upper fan 72 to the upper part of the posts 51A to 51D.
The air is largely compressed in A to 51D and the pumping phenomenon is about to occur.
It will flow into the flow passage 77 of the duct 74 through the through hole 78 formed at the top, and will flow into the upper part of the descending post 51A-51D through the opposite through hole 78. .

As described above, at the time of elevating, the elevating body 10
2 automatically moves between the upper portions of the posts 51A and 51D provided with the counterweight 103 and the upper portions of the elevating body 102 provided with the counterweight 103, so that the pumping phenomenon can be automatically dealt with. , And the dirty air in the posts 51A to 51D can be prevented from being blown into the cleaned compartment 16 through the slit 55.

In the above embodiment, most of the clean air 37 flowing into the passage 6 and then flowing downward flows into the space 28 and is circulated for use. Then, the space 28 may be supplied (replenished) from another location. Further, the clean air 3 from the filter 2 may be lowered in the passage 6. The clean air supply unit 30 has various structures. Further, in the above-described embodiment, the load storage facility 10 with a clean device is installed in the clean room 1, but this may be installed in a normal room. In the above-described embodiment, the type in which the loading / unloading device 40 is disposed between the pair of left and right shelves 20 is shown. However, in the present invention, a type in which one of the shelves 20 and the loading / unloading device 40 are combined may be used. Further, in the above embodiment, the square cylindrical post 51 is used.
Although A to 51D are shown, the present invention may be an embodiment using posts 51A to 51D of various shapes such as a round tube.

In the above-described embodiment, the ducts are provided between the posts facing left and right, that is, between the posts 51A and 51C and between the posts 51B and 51D.
In the present invention, a duct is provided between the posts facing each other, namely, between the posts 51A and 51B and between the posts 51C and 51D.
The embodiment provided with 74 may be used. Further, in the above embodiment, the duct 74 is provided between the upper portions of the posts 51A to 51D. However, in the first invention, the duct 74 may be provided between the middle portions of the posts 51A to 51D.

In the above embodiment, the guided portion 67 guided by the ceiling rail 8 is provided on the upper frame 61 and the upper fan 72 is provided. The access structure 40 in which the guide structure and the upper fan 72 are omitted may be used. In this case, for example, a pair of right and left floor rails 7 is employed. In the above embodiment, the lower fan 50 is provided in the lower main body 41. However, in the first to fourth inventions, the access device 40 in which the lower fan 50 is omitted may be used.

In the above embodiment, two sets of carriage lifting / lowering devices 100 are constituted by a moving body 101 disposed between a pair of posts at non-diagonal positions, and a counter weight 103 provided on the moving body 101. However, in the present invention, an embodiment in which the moving body 101 is disposed between a pair of posts at diagonal positions may be used, and various embodiments of the moving body 101 are possible. .

In the above embodiment, the moving body 101 is
2 and upper and lower chains 104 and 105 and counterweight 10
However, in the present invention, an embodiment in which the elevating body 102 and the counterweight 103 are connected to an endless chain may be used. Also, a wire may be used as the upper cord, in which case the noise can be reduced by guiding the wire to the guide wheel, and the overall weight of the loading / unloading device 40 can be reduced and the manufacturing cost can be reduced. Savings can be achieved, and maintenance becomes better.

[0068]

According to the first aspect of the present invention having the above-described structure, by providing four posts, a sufficient strength can be obtained even when each post is formed thin, and By distributing and arranging, the clean air which flows into the passage through the shelf and collides with these posts can be reduced in turbulence, and the generation of swirl can be reduced and reduced. This makes it difficult for the inside of the passage to be agitated, and allows the dust to move along the downward flow without being scattered, thereby preventing the dust from adhering to a load or the like. In addition, the turbulence of the clean air in the passage due to the movement of the post during traveling can be reduced, and the occurrence of swirl can be reduced and reduced.

When the carriage is moved up and down, air can be automatically moved back and forth through the duct between the ascending post and the descending post, so that the pumping phenomenon can be automatically dealt with. Dirty air in the post can be prevented from blowing out into the cleaned compartment through the slit.

Further, according to the second aspect of the present invention, by providing the duct between the upper portions of the posts, the flow of air between the posts can be performed more reliably and sufficiently. According to the third aspect of the present invention, the cost of manufacturing the moving body can be reduced and the maintenance performance can be improved.

Further, according to the fourth aspect of the present invention, dust generated in the guided portion and the upper guide component of the carriage elevating device and floating in the upper frame is moved to the upper portion of the post by the operation of each fan. The dust generated in the upper frame can be discharged, so that the dust generated in the upper frame can be sent down in each post, and can be discharged from the lower body toward the floor without leaking into the compartment. Also, when the carriage is moved up and down, the air that is compressed on the ascending side is greatly compressed inside the post, in combination with being discharged from each fan to the upper part inside the post, but this compressed air is It can flow smoothly through the duct and into the opposite, descending post.

Further, according to the fifth aspect of the present invention, a strong suction path from the upper end to the lower end can be formed in each post by the operation of each fan in the lower main body, and the dust generated in the upper frame can be reduced. In addition to being able to carry down the inside of each post under strong airflow, dust generated in the lower body and floating can be carried in the airflow. Further, the air that is compressed on the descending side can be smoothly removed by the suction force of each fan. In this way, the dust generated in each part of the access device can be discharged under the floor without leaking into the compartment.

[Brief description of the drawings]

FIG. 1 is a perspective view illustrating an embodiment of the present invention and illustrating a loading / unloading device of a load storage facility.

FIG. 2 is a vertical sectional side view of the load storage facility.

FIG. 3 is a vertical sectional front view of the same load storage facility.

FIG. 4 is a cross-sectional plan view of the load storage facility.

FIG. 5 is a longitudinal rear view of a lower main body portion of the load storage facility.

FIG. 6 is a cross-sectional plan view of a lower body portion of the load storage facility.

FIG. 7 is a partially cutaway rear view of an upper frame portion of the load storage facility.

FIG. 8 is a partially cutaway side view of an upper frame portion of the same load storage facility.

FIG. 9 is a cross-sectional plan view of an upper frame portion of the load storage facility.

FIG. 10 is a partially cutaway side view of a carriage portion of the same load storage facility.

FIG. 11 is a cross-sectional plan view of the loading / unloading device of the load storage facility.

[Explanation of symbols]

 4 Floor 5 Load 6 Passage 7 Floor side rail 8 Ceiling side rail 9 Constant path 10 Load storage facility 12 Enclosure wall 13 Front and rear wall 14 Left and right wall 15 Ceiling wall 16 Partition room 20 Shelf 24 Storage space 25 Dead space 28 Space 30 Clean air supply unit 32 Filter 33 Blower 37 Clean air 40 Loading / unloading device 41 Lower body 42 Central box 43 Side box (projecting part) 45 Wheels 48 Traveling drive 49 Output shaft 50 Lower fan 51A post 51B post 51C post 51D post 54 Curved surface 55 Slit part 60 Connecting member 61 Upper frame 62 Substrate body 64 Cover body 65 Recessed part 67 Guided part 72 Upper fan 74 Duct 77 Flow path 78 Penetrating part 81 Carrying 82 Connecting material 83 Rotary table 91 Accessory 92 First link Body 94 Second link body 96 Load support 97 Transmission mechanism 98 Transmission mechanism 100 Carriage elevating device 101 Moving body 102 Elevating body 103 Counterweight 104 Upper chin Over down (upper wick member) 105 lower chain (lower wick member) 106 lower guide Kusariwa 107 upper guide Kusariwa 110 guide rail 111 connecting member 115 cover film 121 elevation driving device 122 drives Kusariwa 123 output shaft

──────────────────────────────────────────────────続 き Continuation of the front page (56) References JP-A-62-60703 (JP, A) JP-A-63-267612 (JP, A) JP-A-2-144305 (JP, A) JP-A-3- 192005 (JP, A) JP-A-61-295903 (JP, A) JP-A-3-177208 (JP, A) JP-A-5-64105 (JP, U) JP-A-56-162296 (JP, U) (58) Field surveyed (Int. Cl. ⁶ , DB name) B65G 1/00-1/20

Claims (5)

(57) [Claims] 1. A load storage facility in which shelves and a loading / unloading device are disposed in a clean compartment, wherein the loading / unloading device includes a lower main body supported and guided by a floor-side rail, and a four-sided upright standing from the lower main body. A book post, an upper frame connecting between the upper portions of the posts, a carriage with a loading / unloading tool arranged between the opposing surfaces of the posts so as to be able to move up and down, and disposed inside the post and the lower body. The carriage lifting device comprises two sets of carriage lifting devices, each of which is an endless moving body disposed in a pair of posts, between upper portions of both posts, and in a lower body. And a lifting drive for moving the moving body in the forward and reverse directions, connecting the carriage to the moving body through a vertical slit formed in one of the pair of posts, and moving the moving body located in the other post. Cow on body A load storage facility, characterized in that the interior of a post provided with a center weight and having a slit portion and the interior of a post provided with a counterweight are communicated via a duct. 2. The load storage facility according to claim 1, wherein an upper portion between the post having the slit portion and the post having the counterweight is communicated via a duct. 3. An elevating body that guides the moving body up and down in one post and is connected to the carriage through a slit portion, and a counterweight that can move up and down in the other post.
It is formed by an upper cord-like body that connects between the lifting body and the upper part of the counterweight, and a lower cord-like body that connects between the lower parts, and is configured to act on the lower cord-like body with a lifting drive. The load storage facility according to claim 1 or 2, wherein 4. An upper frame connected between the four posts is provided with a guided portion guided by the ceiling rail, and a fan is provided with the suction portion as the guided portion side and the discharge portion as the upper end of the post. The load storage facility according to claim 1, wherein: 5. The load storage facility according to claim 1, wherein a fan having a suction portion at a lower end of the post is provided in the lower body.