JPH0231495Y2 - - Google Patents

Description

[Detailed description of the invention] Industrial field of application The present invention relates to an elevator-type transport device that is used to transport between clean rooms a load (article) that is extremely sensitive to dust, such as semiconductors. .

BACKGROUND ART Loads can be transported between clean rooms that are arranged side by side in the horizontal direction using a self-propelled transport trolley or the like. However, when a clean room is formed over multiple floors in the vertical direction and loads are transported between these clean rooms, an elevator-type transport device is used. That is, conventionally, as shown in FIG. 7, clean air 32 is blown down from the ceiling through a filter 31 into a clean room 30 on multiple floors, and the descending clean air 32 is sucked below the floor through a mesh-type floor 33. It consists of A hoistway is formed between these clean rooms 30 by vertical walls 34, and a hoistway 36 is disposed within this hoistway 35. The lifting drive device 37 includes a forward/reverse drive type motor 38 provided at the upper end of the hoistway 35, and a
It consists of a cable body 41 such as a chain that is hung between a drive wheel body 39 and an idling wheel body 40 that are linked to the drive wheel body 8, and one part of the cable body 41 is connected to the upper end of the elevating body 36, and a balance is attached to the other end. Weight 42 is attached. Then, by the operation of the elevating drive device 37, the elevating body 36
can be freely opposed. The elevating body 36 has a ventilated loading platform 44 at its lower part, and the lifting body 36 It keeps the inside super clean.

Problems to be solved by the invention According to the conventional type described above, the clean air 46 blown downward from the clean unit 45
mainly passes through the cargo receiving platform 44 and then moves to the elevating body 36.
The air is exhausted downward into the hoistway 35 from the bottom surface, but when the elevating body 36 is ascending and descending, especially when descending, the air in the hoistway 35 is turbulent and clean air 46 flows into the hoistway 36. This will cause the water to flow backwards, disrupting the cleanliness.

Means for Solving the Problems In order to solve the above problems, the conveyance device between clean rooms according to the present invention has multiple floors of clean rooms, and a lifting body is arranged in a hoistway formed by penetrating these clean rooms. , forming a communication path in each clean room in which the elevating body can freely face each other, providing a cargo receiving platform with freely ventilable ventilation in the lower part of the elevating body, and providing a downward blowing clean unit in the upper part;
An exhaust path is formed below the load receiving platform, which opens at the side and discharges air blown out from the clean unit to the outside of the elevator.

Effects According to the configuration of the present invention, the clean air blown downward from the clean unit passes through the loading platform and then from the side of the elevator via the exhaust passage, and is affected by the air turbulence in the hoistway. It is exhausted without being exhausted.

Embodiment An embodiment of the present invention will be described below with reference to FIGS. 1 to 3.

Reference numeral 1 denotes a hoistway, which is partitioned by vertical walls 3 between clean rooms 2 on multiple floors. The elevating drive device 5 for the elevating body 4 disposed in the hoistway 1 includes a forward/reverse drive type motor 6 provided at the upper end of the hoistway 1, a drive wheel body 7 interlocked with this motor 6, and an idler. It consists of a cable 9 such as a chain suspended between wheels 8, one end of which is connected to the upper end of the elevating body 4, and a balance weight 20 is attached to the other end. A communication passage 1 is provided at a suitable location in the vertical wall body 3.
0 is provided through the communication path 10, and a communication path side opening/closing door 11 is provided on the inner end side of the communication path 10. The elevating body 4 is
A pair of left and right side plates 4a, 4b, a rear plate 4c located on the opposite side of the communication path 10, a chevron-shaped top plate 4d projecting upward, and a chevron-shaped bottom plate 4 projecting downward.
e and the front plate 4f into a rectangular box shape, and the opening formed in the front plate 4f has an elevating body side opening/closing door 12.
will be placed. At the lower part of the elevating body 4, a cargo receiving platform 13 having ventilation in the vertical direction is arranged. A mesh plate 14 is disposed at the upper part of the elevating body 4, and the mesh plate 14 defines an upper unit chamber 15 and a lower cargo storage chamber 16.
A clean unit 19 consisting of a fan 17 and a filter 18 is disposed within the unit chamber 15. A chevron-shaped guide plate 21 that protrudes upward is arranged on the chevron-shaped bottom plate 4e.
B forms an open exhaust path. Furthermore, the cord body 9
is connected to the chevron-shaped top plate 4d via a mounting frame 24.

In the embodiment with the above configuration, the elevating body 4 can be raised and lowered by the operation of the elevating drive device 5, and after being stopped facing the communication path 10, both opening and closing doors 11,
By opening 12, a load (such as a wafer carrier) 25 on load receiving platform 13 can be carried in or out. During such lifting/lowering and loading/unloading work, the clean unit 19 is in operation, and the air discharged from the exhaust port of the fan 17 passes through the filter 18 and becomes clean air 26, and this clean air 26 is 14 and into the cargo storage chamber 16. The downwardly blown clean air 26 flows into the exhaust passage 23 through the loading platform 13, and then through the exhaust ports 22A, 22.
It is exhausted to both sides via B. Therefore, for example, when descending, the air can be exhausted without being affected by rising air currents.

As shown in the embodiment, by providing the chevron-shaped top plate 4d and bottom plate 4e, air can be guided during rising and descending through the inclined surfaces thereof.
This can prevent turbulence.

4 to 6 show another embodiment. That is, exhaust ports 22A, 22 are provided on the front plate 4f and the rear plate 4c.
B is formed so that the exhaust direction is the front-rear direction. Here, the top plate 4d and the bottom plate 4e are flat, but they may also be chevron-shaped.

Effects of the Invention According to the present invention having the above configuration, the clean air blown downward from the clean unit can be exhausted from the side of the elevating body via the exhaust path after passing through the loading platform. Therefore, the exhaust can be exhausted without being affected by air turbulence in the hoistway during lifting and lowering, and there is no backflow inside the hoisting body, making it possible to maintain the desired level of cleanliness.

[Brief explanation of the drawing]

Figures 1 to 3 show an embodiment of the present invention, with Figure 1 being a vertical side view of the main parts, Figure 2 being a front view of the same, Figure 3 being a cross sectional plan view, and Figures 4 to 3. Fig. 6 shows another embodiment of the present invention, Fig. 4 is a longitudinal sectional side view of the main part, Fig. 5 is a longitudinal sectional front view, Fig. 6 is a transverse plan view of the same, and Fig. 7 is a conventional example. FIG. 1...Hoistway, 2...Clean room, 3...
Vertical wall body, 4... Elevating body, 4d... Top plate, 4e...
Bottom plate, 5... Lifting drive device, 10... Communication path, 1
1...Communication passage side opening/closing door, 12...Elevating body side opening/closing door, 13...Loading platform, 14...Mesh plate, 15
... Unit room, 16 ... Cargo storage room, 17 ... Fan, 18 ... Filter, 19 ... Clean unit, 21 ... Guide plate, 22A, 22B ... Exhaust port, 23 ... Exhaust path, 25 ... ...Load, 26...Clean air.

Claims (1)

[Scope of utility model registration request] A plurality of clean rooms are formed, and an elevator is arranged in a hoistway formed by penetrating these clean rooms, and a communication path is formed in each clean room so that the elevator can freely face each other, and the lower part of the elevator is freely ventilated. In addition to providing a cargo receiving platform, a downward-blowing clean unit is provided at the top, and an exhaust path is formed below the cargo receiving platform, opening at the side and discharging the air blown from the cleaning unit to the outside of the lifting body. A transport device between clean rooms featuring: