JPH0238512B2 - KURIINRUUMUKANNOHANSOSOCHI - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION Field of Industrial Application The present invention relates to a transport device for transporting goods (articles) such as semiconductors, which are extremely sensitive to dust, between clean rooms.

BACKGROUND ART Loads can be transported between clean rooms that are arranged side by side in the horizontal direction using a self-propelled transport trolley or the like. However, when a clean room is formed over multiple floors in the vertical direction and loads are transported between these clean rooms, an elevator-type transport device is used.

Problems to be Solved by the Invention In the conventional elevator-type conveyance device as described above, everything in the hoistway was kept clean, but this required equipment to maintain cleanliness to be large-sized and It is expensive including the cost.
Furthermore, the inside of the elevating body that stores and holds the load cannot be sufficiently cleaned.

Means for Solving the Problems In order to solve the above-mentioned problems, the device between clean rooms of the present invention has multiple floors of clean rooms, and a lifting body is disposed in a hoistway formed by penetrating these clean rooms. A communicating path is formed in each clean room so that the elevating body can freely face the communicating path, and a cargo receiving platform is provided in the communicating path, and a communicating path side opening/closing door is provided on the hoistway side of the communicating path, and facing the communicating path of the elevating body. A lift body side opening/closing door is provided on the side, and a carry-in/out device for transferring loads to and from the load receiving platform and a clean unit are further provided inside the lift body.

Effects According to the configuration of the present invention described above, only the elevator interior can be cleaned by operating the clean unit, and the elevator shaft can be cleaned by opening both opening/closing doors after connecting the elevators oppositely to the communication passage. Even though it is a contaminated area, it is possible to transfer cargo while maintaining the cleanliness of each clean room and the inside of the elevator.

Embodiment An embodiment of the present invention will be described below based on the drawings. 1 is a clean room, which is configured so that clean air 3 is blown downward from the ceiling side through a filter 2, and the descending air is sucked into the floor through a mesh-type floor 4. This clean room 1 is formed over multiple floors. A hoistway 6 is formed between these clean rooms 1 by vertical walls 5, and a hoistway 6 is disposed within this hoistway 6. The lifting drive device 8 consists of a forward/reverse drive type motor 9 provided at the upper end of the hoistway 6, and a cable body 12 such as a chain, which is hung between the interlocking drive wheels 10 and the free wheels 11. , one end of the cable body 12 is connected to the upper end of the elevating body 7, and a balance weight 13 is attached to the other end. The elevating body 7 is
A frame body 14 to which the cable body 12 is connected, and this frame body 14
It consists of a cover body 15 that forms a sealed space inside. By being supported and guided by the guide rails 17 disposed within the elevating body 7 via a plurality of guide rollers 16 attached to both sides, the elevating body 7 can be freely raised and lowered on a fixed path. . The interior of the cover body 15 is roughly divided into four chambers. That is, it is divided into front and rear parts by a partition plate 18 extending from the upper end to the middle lower part, and the front part is divided by the mesh plate 1.
9 provides an upper exhaust chamber 20 and a lower cargo storage chamber 21.
It is divided into Further, the rear portion is divided into an upper intake chamber 23 and a lower circulation chamber 24 via a communication member 22. The clean unit 25 provided in the elevating body 7 consists of a filter 26 and a fan 27, where the filter 26 is arranged near the mesh plate 19 at the lower part of the exhaust chamber 20, and the fan 2
7 is attached to the partition plate 18 in the intake chamber 23, with its intake port 28 located within the intake chamber 23, and its exhaust port 29 open to the exhaust chamber 20. On the front side of the cover body 15 and in the cargo storage chamber 2
A window-frame-shaped rectangular frame 31 having an entrance/exit 30 in the center is disposed in a portion facing the cover 15, and a guide mechanism 32 and a pressing drive device provided between the rectangular frame 31 and the cover body 15 are provided. (such as a motor) 33, it can move toward and away from the vertical wall body 5 side. Note that a bellows body 34 for sealing is provided between the rectangular frame body 31 and the cover body 15. The rectangular frame body 31 supports and guides the elevator-side opening/closing door 35 so that it can be raised and lowered, and its raising and lowering is performed by a motor 36 attached to the frame body 14 side and a cable body 37 interlocked with the motor 36. In each clean room 1, a communication passage 39 is formed by a rectangular cylindrical box body 38 extending through the vertical wall body 5 at a portion of the vertical wall body 5 which can freely face the entrance/exit 30 of the elevating body 7. In this communication path 39, two sets of cargo receiving stands 40 are fixedly disposed, one pair being one left and one right. Further, at the end of the communication passage 39 on the hoistway 6 side, a communication passage side opening/closing door 43 is provided which is supported and guided by a guide rod 41 via a plurality of rollers 42 so as to be freely raised and lowered. It is carried out with In addition, boxed body 3
The inner end of 8 is formed into a sealing surface 46 on which a sealing member 45 attached to the front surface of the rectangular frame 31 can freely come into contact. Two sets of loading/unloading devices 48 for transferring loads 47 to and from the loading platform 40 are disposed between the lower portions of the loading chamber 21 and the circulation chamber 24. That is, an elevating table 50 supported and guided via a guide mechanism 49 is provided on the side of the elevating body 7, and this elevating table 50 is interlocked with an elevating drive device 51. A rail 52 extending in the front-rear direction is laid on the elevator platform 50, and a load support plate 54 is provided on the rail 52 and supported and guided via a slide body 53. This load support plate 54 is of a fork type and can be inserted between the pair of right and left load receiving stands 40. The lifting platform 5
0 includes a driving wheel body 56 that is linked to a motor 55;
A pair of front and rear idler wheels 57, 58 are arranged, and one point of an endless rotating body 59 suspended between these wheels 56, 57, 58 is connected between the load supporting plates 54. 60 is a control board, 61 is a cable, and 62 is an inspection walkway.

Next, the operation of the above embodiment will be explained.

The load support plate 54 housed in the cover body 15 supports the load 4.
7, the elevator-side opening/closing door 35 and each communication path-side opening/closing door 43 are closed. At this time, the clean unit 25 is operating, and the air discharged from the exhaust port 29 of the fan 27 passes through the filter 26 to the clean air 63.
Therefore, this clean air 63 is delivered to the cargo storage room 21.
It is blown inside. The downwardly blown clean air 63 flows from the cargo storage chamber 21 to the circulation chamber 24, circulates into the intake chamber 23 via the communication member 22, and is blown into the fan 27. As a result, the inside of the cargo storage chamber 21 is always kept clean. In this state, the lifting drive device 8 is operated to move the lifting body 7.
As shown in the solid line in FIG. 2 and in FIG. 3, it is stopped with the entrance 30 facing the communication path 39 corresponding to the clean room 1 on the target floor. Next, the rectangular frame 31 is moved forward by the operation of the pressing drive device 33, and the sealing member 45 is brought into pressure contact with the sealing surface 46. And both opening/closing doors 35, 43
is opened (raised), and the cargo storage chamber 21 and the communication passage 39 are communicated with each other through the entrance/exit 30. In this state, the load support plate 54 is advanced and positioned above the load receiving platform 40 within the communication path 39, as shown by the imaginary line A in FIG. Next, the load 47 is placed on the load receiving platform 40 by lowering the load support plate 54 as shown by the imaginary line opening.
The load 47 can then be transferred by retracting the load support plate 54. In addition, the load support plate 5
4 can be reversely operated, the load 47 on the load receiving platform 40 can be received on the elevating body 7 side. After the load 47 has been transferred, the elevating body 7 can be raised and lowered again by closing (lowering) the opening/closing doors 35 and 43 and moving the seal member 45 and the like apart.

Effects of the Invention According to the present invention having the above configuration, the inside of the elevating body can be cleaned by operating the clean unit, and by rotating both opening/closing doors after connecting the elevating body oppositely to the intended communication path. Thus, while maintaining the cleanliness of the clean room and the interior of the elevator, cargo can be delivered to and from the cargo receiving platform using the loading/unloading device. Therefore, only the inside of the elevator can be kept clean, and the inside of the hoistway can be a contaminated area, so the equipment for maintaining cleanliness can be downsized and the cost including operating costs can be reduced, and the inside of the elevator can be sufficiently cleaned. can.

[Brief explanation of drawings]

The drawings show an embodiment of the present invention; FIG. 1 is a longitudinal sectional view, FIG. 2 is a longitudinal sectional view of a main part, and FIG. 3 is a cross-sectional view of the same. DESCRIPTION OF SYMBOLS 1...Clean room, 2...Clean air, 5...Vertical wall body, 6...Hoistway, 7...Elevating body, 8...Elevating drive device, 15...Cover body, 2
0... Exhaust chamber, 21... Load storage room, 23... Intake chamber, 24... Circulation chamber, 25... Clean unit, 26... Filter, 27... Fan, 30...
... Entrance/exit, 31... Rectangular frame, 35... Lifting body side opening/closing door, 39... Communication path, 40... Load receiving platform, 43
...Communication passage side opening/closing door, 45...Sealing member, 46
... Seal surface, 47 ... Load, 48 ... Carrying in/out device, 50 ... Lifting platform, 54 ... Load support plate, 63 ...
…Clean air.

Claims (1)

[Claims] 1 A plurality of clean rooms are formed, a lifting body is arranged in a hoistway formed by penetrating these clean rooms, a communicating path is formed in each clean room through which the lifting body can freely face each other, and a loading platform is installed in this communicating path. At the same time, a communication path side opening/closing door is provided on the hoistway side of the communication path, and an elevator side opening/closing door is provided on the side of the elevator body opposite to the communication path, and furthermore, a door is provided on the elevator side opposite to the communication path. A conveyance device between clean rooms characterized by being provided with a carry-in/out device for delivering and receiving items and a clean unit.