JPH0249204Y2 - - Google Patents

Description

[Detailed Description of the Invention] Industrial Application Field The present invention relates to cargo handling equipment in a clean room used for transporting and storing products such as semiconductors that are extremely sensitive to dust.

Conventional technology Conventionally, this type of equipment was
As seen in Publication No. 61-92613, a cargo storage device surrounded by a box-shaped main body is installed in a clean room, and a cargo transport system is composed of a rail device and a self-propelled cart guided by this rail device. The end of the transport path of the device is configured to be visible inside the main body. The cargo storage device is composed of a shelf and a carry-in/out device, and by the operation of the carry-in/out device, cargo is transferred between the divided storage space intended for the shelf and the self-propelled cart. In addition, in order to remove dust generated in the cargo storage device, clean air is blown downward into the cargo storage device in the same way as in a clean room, and the clean air is sucked under the floor.

Problems to be Solved by the Invention Incidentally, even if the product is extremely sensitive to dust, there may not be a high level of cleanliness required during the manufacturing process. According to the conventional method as described above, since the clean room and the cargo storage device have the same clean conditions, the degree of cleanliness can be adjusted according to the manufacturing process. However, since cargo storage devices must be installed separately for multiple clean rooms with different degrees of cleanliness, equipment costs are disadvantageous. In addition, special door devices are installed at the loading/unloading exits installed in the partition walls that separate different clean rooms.
A device is required to prevent clean air with a low degree of cleanliness from flowing into a clean room with a high degree of cleanliness.

The purpose of this invention is to create a clean room in which one cargo storage device can be shared between two clean rooms, and products (cargos) can be moved between the two clean rooms without compromising the cleanliness of both clean rooms. The point is to provide cargo handling facilities within the country.

Means for Solving the Problems In order to solve the above problems, the cargo handling equipment in the clean room according to the present invention is provided with a partition wall that separates two clean rooms with different degrees of cleanliness, and a closed type system that penetrates this partition wall. A cargo storage device is provided, and the cargo storage device includes a pair of box-shaped bodies having a mutual communication portion formed at their abutting portions, a shelf provided inside each of these bodies, and an action on both shelves through the communication portion. It consists of a flexible loading/unloading device and a highly clean clean unit installed in one main body, and one main body has a first cargo handling area that communicates with a clean room with a low cleanliness level and a clean room with a high cleanliness level. and a second cargo handling area that communicates with
A loading/unloading device is placed inside for sorting, and the other main body is provided with a third cargo handling area that communicates with a clean room with a high degree of cleanliness.

According to the configuration of the present invention, by operating the loading/unloading device, between the first material handling area and both shelves, and between the first material handling area and the second and third material handling areas, Loads can be moved between both shelves and the second and third handling areas. During such work, the clean unit operates to maintain a high level of cleanliness inside one of the main bodies, which acts like an air curtain and prevents air flow between the two clean rooms. At the same time, the moving load will be cleaned with air.

Embodiment An embodiment of the present invention will be described below based on the drawings.

1 indicates a high level of cleanliness (for example, class 10)
0) High clean room, 2 is low clean room with low cleanliness (for example class 1000),
These clean rooms 1 and 2 have vertical partition walls 3
It is divided by. Both clean rooms 1 and 2 are configured so that clean air 6 and 7 are blown downward from the ceiling side through filters 4 and 5, and the descending clean air 6 and 7 is sucked below the floor through mesh-type floors 8 and 9. There is. Reference numeral 10 denotes a closed cargo storage device provided through the partition wall 3, and has a pair of box-shaped main bodies 12 and 13 with a mutual communication portion 11 formed at their abutting portions. Both main bodies 12,
Near the wall on the high clean room 1 side in 13,
Shelves 16 and 17 are provided in which a plurality of storage spaces 14 and 15 are defined in the vertical direction, respectively. Furthermore, both shelves 16,
A loading/unloading device 18 which can be operated freely is provided at 17 .
This loading/unloading device 18 includes a floor rail 19 disposed through the communication portion 11 and wheels 2 on the floor rail 19.
A trolley 22 is supported and guided through the rack 0 and is movable along a fixed path 21 between the front surfaces of the shelves 16 and 17, and a support frame 2 is erected from above the trolley 22.
3, and a guide body 24 disposed within this support frame 23.
A lifting table 25 guided by the lifting table 25, a turntable 26 provided on the lifting table 25, and a movable table 27 provided on the turntable 26 so as to be movable laterally.
A pair of left and right support arms 28 protrude forward from the movable base 27 and are movable toward and away from each other in the left and right directions.
and operating devices (not shown) for each part. The load 29 is in the shape of a case that can store products freely, and is provided with locking protrusions 29a on both sides of the upper part, and the support arm 28 can freely engage with the locking protrusions 29a from below. becomes. A clean unit 30 with a high degree of cleanliness is provided on the back side of the shelf 16 in one main body 12. This clean unit 30 includes a filter 32 that is disposed to cover the back surface of the shelf 16 and forms a flow path 31 between it and the main body 12, and a filter 32 that draws air from the lower part of the main body 12 to form a flow path 31.
The main body 12 is operated to maintain a high level of cleanliness inside the main body 12. A first opening 34 is formed in the lower part of one main body 12 on the low clean room 2 side, and a first cargo handling area 35 in the form of a pedestal is provided in this first opening 34 . The first cargo handling area 35 with the loading/unloading device 18 inside
On the opposite side, there is a second room connected to high clean room 1.
An opening 36 is formed, through which a second progressive material handling area 37 is provided.
A third opening 38 communicating with the high clean room 1 is formed in the other main body 13, and a progressive third material handling area 39 is provided through this third opening 38. The progressive type cargo handling stations 37 and 39 have a similar structure, and have a carrying-in device 41 and a carrying-out device 42 arranged in parallel on a rectangular box-shaped body frame 40. The carry-in device 41 and the carry-out device 42 include a push-pull body 43 provided movably along the conveyance direction within the main body frame 40, cylinders 44 provided at three locations on the push-pull body 43 at predetermined intervals, and these. A support base 46 is attached to the upward piston rod of the cylinder 44 and is movable through a notch groove 45 formed in the top plate of the main body frame 40, and a receiving portion 47 provided on both sides of the notch groove 45. configured. There is a fixed route 4 in the low clean room 2.
A transport vehicle 49 that can automatically run on the
This carrier 49 includes a horizontally movable platform 50,
It is composed of an elevating frame 51 provided on the front surface of the movable table 50, a pair of support arms 52 provided on the elevating frame 51 so as to be able to approach and separate from each other.

Next, the operation of the above embodiment will be explained.

For example, the transport vehicle 49 in the low clean room 2 travels on a fixed path 48, and
It is stopped facing the predetermined location of 5. At this time, if the support arm 52 supports the load 29, the lifting frame 5
1, the forward movement of the movable table 51 toward the first material handling area 35, and the lowering of the lifting frame 51, the load 29 can be unloaded to the first material handling area 35, and the support arms 52 are separated from each other. Thereafter, it is moved backward together with the movable base 50. Further, when the support arms 52 are empty, the movable table 50 is moved forward to move the support arms 52 separated from each other to the load 2.
Position it outside on both sides of 9. Then, the support arm 52 is moved closer to be positioned below the locked protrusion 29a,
After the load 29 is lifted by raising the elevating frame 51, it is pulled onto the carrier vehicle 49 by the backward movement of the movable table 50.
As described above, the cargo 29 can be transferred between the carrier vehicle 49 and the first cargo handling area 35.

Delivery of cargo 29 between the first material handling area 35 and both shelves 16 and 17, and delivery of cargo 29 between the first material handling area 35 and the second and third
Delivery of cargo 29 between cargo handling areas 37 and 39,
Both shelves 16, 17 and second and third cargo handling areas 37, 39
The transfer of the load 29 between the two is performed by the loading/unloading device 18. That is, the running action of the cart 22 in the loading/unloading device 18, the lifting/lowering movement of the lifting platform 25,
The load 2 is moved between target locations by the combined operation of the rotation of the turntable 26, the forward and backward movements of the movable base 27, and the approaching and separating movements of the support arm 28.
Can perform 9 movements.

The carry-in device 41 and the carry-out device 42 in the second and third material handling areas 37 and 29 raise the support table 46 by the cylinder 44 to lift the load 29 on the receiving part 47, and then by the pushing movement of the push-pull body 43. After moving the load 29 by one pitch, then lowering the support stand 46 and unloading the load 29 onto the receiving part 47, the push/pull body 43 is pulled to move the load 29 one pitch.
It can be forwarded one by one.

During the handling of the load 29 as described above, the clean unit 30 is operating on one shelf 16. In other words, air from the blower 33 is sent to the flow path 3.
The air rises inside the air filter 1, passes through the filter 32, becomes highly clean air, and is supplied to the shelf 16 from the rear side. Therefore, the shelf 16
A high degree of cleanliness is maintained inside by the operation of the clean unit 30. The clean air that has passed through the shelf 16 flows into the passage of the loading/unloading device 18, and a portion of it flows out into the lower clean room 2 through the first opening 34. Therefore, low clean room 2
It is possible to prevent the low-level clean air 7 from flowing into the main body 12, and to clean the load 29 unloaded from the carrier vehicle 49 to the first cargo handling area 35 with high-level clean air. Furthermore, a part of the clean air flows out into the high clean room 1 through the second opening 36 and the third opening 38, but the clean air flowing out here and the clean air 6 in the high clean room 1 have the same degree of cleanliness. There is no problem from this.

Effects of the invention According to the present invention having the above configuration, by operating the loading/unloading device, between the first material handling area and both shelves, and between the first material handling area and the second and third material handling areas. Loads can be moved between both shelves and the second and third handling areas. This allows one cargo storage device to be shared by two clean rooms with different degrees of cleanliness. At that time, the clean unit operates to maintain a high level of cleanliness inside one of the main bodies, which acts like an air curtain to prevent air flow between the two clean rooms and prevents the moving loads from moving. Air cleaning can be performed using Therefore, cargo (products) can be moved between both clean rooms without impairing the cleanliness of both clean rooms.

[Brief explanation of the drawing]

The drawings show one embodiment of the present invention, with FIG. 1 being a cross-sectional plan view, FIG. 2 being a longitudinal side view, and FIG. 3 being a front view. 1... High clean room, 2... Low clean room, 3... Partition wall, 6, 7... Clean air,
10... Cargo storage device, 11... Communication section, 12, 1
3... Main body, 16, 17... Shelf, 18... Loading/unloading device, 22... Dolly, 28... Support arm, 29...
Load, 29a... Locked protrusion, 30... Clean unit, 32... Filter, 34... First opening, 35... First cargo handling area, 36... Second opening, 37... 2nd material handling area, 38...Third opening, 39...3rd material handling area, 41... Carrying device,
42... Carrying out device, 49... Transport truck, 52...
supporting arm.

Claims (1)

[Scope of utility model registration request] A partition wall is provided that separates two clean rooms with different degrees of cleanliness, and an airtight cargo storage device is provided through the partition wall. It consists of a shaped main body, shelves provided in each of these main bodies, a loading/unloading device that can freely act on both shelves through the communication part, and a clean unit with a high degree of cleanliness installed in one of the main bodies. A first cargo handling area that communicates with a clean room with a low degree of cleanliness and a second material handling area that communicates with a clean room with a high degree of cleanliness are installed in the main body of the main body, and are divided into two, with a loading/unloading device inside. A cargo handling facility in a clean room characterized by having a third cargo handling area connected to a clean room with a high degree of cleanliness.