JPH0338163Y2 - - Google Patents
Info
- Publication number
- JPH0338163Y2 JPH0338163Y2 JP1986088176U JP8817686U JPH0338163Y2 JP H0338163 Y2 JPH0338163 Y2 JP H0338163Y2 JP 1986088176 U JP1986088176 U JP 1986088176U JP 8817686 U JP8817686 U JP 8817686U JP H0338163 Y2 JPH0338163 Y2 JP H0338163Y2
- Authority
- JP
- Japan
- Prior art keywords
- load
- self
- main body
- cargo
- transfer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 230000003749 cleanliness Effects 0.000 description 2
- 238000007796 conventional method Methods 0.000 description 1
- 239000000428 dust Substances 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000003028 elevating effect Effects 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
Landscapes
- Warehouses Or Storage Devices (AREA)
- Ventilation (AREA)
Description
【考案の詳細な説明】
産業上の利用分野
本考案は、たとえば半導体のような塵埃を極端
にきらう荷(物品)の搬送や保管に採用されるク
リーンルーム内の荷取扱い設備に関するものであ
る。[Detailed Description of the Invention] Industrial Application Field The present invention relates to cargo handling equipment in a clean room used for transporting and storing cargo (articles) such as semiconductors that are extremely sensitive to dust.
従来の技術
従来、この種の設備としては、たとえば実願昭
59−177707号公報で見られるように、箱状の本体
で囲まれた荷保管装置をクリーンルーム内に設置
し、そしてレール装置と、このレール装置に案内
される自走台車とにより構成された荷搬送装置の
搬送経路終端を前記本体内にのぞませている。前
記荷保管装置は棚と搬入出装置とからなり、ここ
で搬入出装置の作業スピードは遅いものである。
したがつて搬送経路は通常、主搬送経路から分岐
して形成され、その作業は、主搬送経路上で走行
する自走台車を分流させ、搬送経路に移してその
終端に停止させ、そして搬入出装置によつて棚と
自走台車との間で荷の受け渡しを行なうことによ
つて、作業スピードに支障のないように行なつて
いる。Conventional technology Conventionally, this type of equipment was
As seen in Publication No. 59-177707, a cargo storage device surrounded by a box-shaped main body is installed in a clean room, and a cargo storage device consisting of a rail device and a self-propelled cart guided by this rail device is installed. The end of the conveying path of the conveying device is visible inside the main body. The cargo storage device includes a shelf and a loading/unloading device, and the loading/unloading device has a slow working speed.
Therefore, the conveyance route is usually formed by branching off from the main conveyance route, and the work involved is to divert the self-propelled carts running on the main conveyance route, move them to the conveyance route, stop them at the end of the conveyance route, and carry out loading/unloading. Loads are transferred between the shelves and the self-propelled trolley using a device, so that the work speed is not affected.
考案が解決しようとする問題点
上記のような従来形式によると、荷保管装置の
作業は、自走台車に対する受け渡しを終えたの
ち、この自走台車が主搬送経路に退出し、かつ次
の自走台車が主搬送経路から分流して到達するま
では行なえず、したがつて作業スピードを充分に
カバーできるサイクルタイムとなつて、全体の作
業能率が悪いものであつた。また分岐、合流のた
めの乗り移し装置が必要であり、この乗り移し装
置はクリーンルーム内に設けることから、それ相
応のクリーン対策、すなわち設備が必要であつ
た。Problems to be Solved by the Invention According to the conventional method described above, the work of the cargo storage device is to complete the delivery to the self-propelled cart, and then the self-propelled cart exits to the main transport route, and the next The work cannot be carried out until the trolley is diverted from the main conveyance route and reaches the destination, and therefore the cycle time is insufficient to cover the work speed, resulting in poor work efficiency as a whole. In addition, a transfer device for branching and merging is required, and since this transfer device is installed in a clean room, appropriate cleanliness measures or equipment are required.
本考案の目的とするところは、分岐搬送経路を
形成することなく、主搬送経路上の自走台車と荷
保管装置との間で荷の受け渡しを能率的に行なえ
るクリーンルーム内の荷取扱い設備を提供する点
にある。 The purpose of this invention is to create cargo handling equipment in a clean room that can efficiently transfer cargo between self-propelled carts on the main transportation route and cargo storage equipment without forming branch transportation routes. It is in the point of providing.
問題点を解決するための手段
上記問題点を解決すべく本考案におけるクリー
ンルーム内の荷取扱い設備は、レール装置と、こ
のレール装置に案内される自走台車とにより荷搬
送装置を構成し、この荷搬送装置の搬送経路を、
箱状の本体で囲まれた荷保管装置の側方に通過形
成するとともに、本体の側方に搬送経路のステー
シヨンを形成し、前記本体に形成した開口を通し
て、自走台車の荷受け台と荷保管装置の一時荷受
台との間で荷を回転装置により回転させて荷の受
け渡しを行なう移載装置を設けている。Means for Solving the Problems In order to solve the above problems, the cargo handling equipment in the clean room according to the present invention comprises a cargo transport device consisting of a rail device and a self-propelled cart guided by the rail device. The transport route of the load transport device,
A cargo storage device surrounded by a box-shaped main body is formed to pass through the side, and a transport path station is formed on the side of the main body, and a cargo receiving stand of a self-propelled cart and a cargo storage are formed through an opening formed in the main body. A transfer device is provided which rotates the load with a rotating device to transfer the load to and from the temporary load receiving platform of the device.
作 用
かかる本考案構成によると、自走台車をステー
シヨンに停止させたのち、移載装置の回転装置を
作動させることにより、開口を通して自走台車に
対する荷の積み卸しを能率的に行なえる。また荷
保管装置の棚に対する荷の出し入れは、荷保管装
置における搬入出装置の所期の作業スピードによ
つて、移載装置側との間で支障なく行なわれる。According to the configuration of the present invention, by stopping the self-propelled cart at the station and then operating the rotating device of the transfer device, it is possible to efficiently load and unload cargo onto the self-propelled cart through the opening. In addition, loading and unloading of loads to and from the shelves of the load storage device is carried out without any problem between the loading and unloading device in the load storage device and the loading and unloading device, depending on the intended operating speed.
実施例
以下に本考案の一実施例を第1図〜第4図に基
づいて説明する。Embodiment An embodiment of the present invention will be described below with reference to FIGS. 1 to 4.
1はクリーンルームで、天井側からフイルター
を通してクリーンエアを下吹きし、下降するクリ
ーンエアをメツシユ形式の床を通して床下に吸引
するように構成してある。2はクリーンルーム1
内に設置した荷保管装置で、矩形箱状の本体3
と、この本体3内に設置され、かつ上下方向なら
びに水平方向に複数の区画収納空間4を形成した
棚5と、目的とする区画収納空間4との間で荷6
を出し入れ自在で、かつフオーク形式の受け渡し
具7を有する搬入出装置8とから構成される。本
体3内は、独自に設けたクリーンユニツト、また
はクリーンルーム1用のクリーンユニツトによつ
てクリーン度が維持されている。前記搬入出装置
8が作用可能な位置の本体壁には開口9が形成さ
れ、そして開口9の外方には、この外方を通過す
る一定の搬送経路10を形成した荷搬送装置11
が配設される。この荷搬送装置11は、上面開放
でC字形のレール装置12と、このレール装置1
2に車輪13などを介して支持案内される自走台
車14と、これらレール装置12と自走台車14
とを囲み、かつ上部にスリツト15を有するダク
ト16と、このダクト16の下部に形成される吸
引路17などから構成し、自走台車14の上面か
ら立設した連結杆18を、前記ダクト16を通し
てクリーンルーム1内に突出させるとともに、そ
の突出端に荷受け台19を設けている。前記荷搬
送装置11の開口9に対向する箇所はステーシヨ
ン20に形成され、そして開口9の部分には、こ
の開口9を通して自走台車14と荷保管装置2と
の間で荷6の受け渡しを行なう移載装置21が設
けられる。この移載装置21は、開口9を形成す
る壁の下縁側に固定した矩形箱状のケース22
と、このケース22の天板上方に配置した昇降板
23と、前記ケース22内に配設され、かつ上方
へ突出したピストンロツドが昇降板23の下面に
連結されるシリンダ装置24と、その昇降を助け
るガイド装置25と、前記昇降板23上に設置し
た回転装置26と、この回転装置26の上向き出
力軸に固定され、縦軸心27の周りに回転自在な
支持装置28と、この支持装置28から垂設さ
れ、かつ回転装置26を囲む筒状カバー29と、
開口9に対向して本体3内に配設した一時荷受部
30とからなり、前記支持装置28は互いに接近
離間自在な左右一対の支持腕31を前方へ突出さ
せている。なお荷6はケース形状であつて、一対
の側面には被係止突条32が設けてある。 1 is a clean room, which is configured so that clean air is blown down from the ceiling through a filter, and the descending clean air is sucked into the floor through a mesh-type floor. 2 is clean room 1
A cargo storage device installed inside the rectangular box-shaped main body 3
A load 6 is placed between the shelf 5 installed in the main body 3 and forming a plurality of compartment storage spaces 4 in the vertical and horizontal directions, and the target compartment storage space 4.
and a loading/unloading device 8 having a fork-type delivery tool 7 that can freely take in and out. The cleanliness inside the main body 3 is maintained by an independently provided clean unit or a clean unit for the clean room 1. An opening 9 is formed in the main body wall at a position where the loading/unloading device 8 can operate, and a load conveying device 11 is formed outside the opening 9 with a constant conveying path 10 passing through the outside.
will be placed. This load conveyance device 11 includes a C-shaped rail device 12 with an open top surface, and a rail device 12 that is C-shaped with an open top.
2, a self-propelled trolley 14 supported and guided via wheels 13, etc., and these rail devices 12 and the self-propelled trolley 14.
The duct 16 is composed of a duct 16 that surrounds the duct 16 and has a slit 15 in the upper part, and a suction passage 17 formed at the lower part of the duct 16. It is made to protrude into the clean room 1 through it, and a cargo receiving stand 19 is provided at the protruding end. A station 20 is formed at a portion facing the opening 9 of the load conveying device 11, and the load 6 is transferred between the self-propelled cart 14 and the load storage device 2 through the opening 9. A transfer device 21 is provided. This transfer device 21 consists of a rectangular box-shaped case 22 fixed to the lower edge side of the wall forming the opening 9.
A lift plate 23 disposed above the top plate of the case 22, a cylinder device 24 disposed inside the case 22 and having an upwardly protruding piston rod connected to the lower surface of the lift plate 23, a rotating device 26 installed on the elevating plate 23; a supporting device 28 fixed to the upward output shaft of the rotating device 26 and rotatable around a vertical axis 27; a cylindrical cover 29 that is vertically disposed from and surrounds the rotating device 26;
The support device 28 includes a temporary cargo receiving portion 30 disposed inside the main body 3 facing the opening 9, and has a pair of left and right support arms 31 projecting forward that can move toward and away from each other. Note that the load 6 has a case shape, and a pair of side surfaces are provided with locking protrusions 32.
次に上記実施例の作用を説明する。 Next, the operation of the above embodiment will be explained.
なお以下においては、荷搬送装置11で運んで
きた荷6を荷保管装置2に入れる(入庫)作業を
説明するが、逆の操作によつて取出す(出庫)作
業が可能となる。荷受け台19上に荷6を載置し
てなる自走台車14は、レール装置12に案内さ
れて一定の搬送経路10上を走行し、そしてステ
ーシヨン20に停止される。このとき移載装置2
1では、支持装置28は上昇するとともに支持腕
31をクリーンルーム1内に突出させており、さ
らに支持腕31は互いに離間動している。この状
態から支持装置28を下降させ、支持腕31を荷
6の外方に位置させる。次いで支持腕31を互い
に接近動させて被係止突条32の下方に位置させ
たのち、支持装置28を上昇させる。これにより
被係止突条32に支持腕31が下方から係合し、
以つて第2図実線に示すように荷受け台19から
荷6を持ち上げ得る。次いで回転装置26を作動
して、支持装置28を縦軸心27の周りに180度
回転させ、荷6を一時荷受部30の上方に位置さ
せる。この前後に、空になつた自走台車14はス
テーシヨン20から出て行き、そしてステーシヨ
ン20には次の自走台車14が到着する。一時荷
受部30に上方から対向した荷6は、前述とは逆
作用によつて一時荷受部30上に卸され、その後
に支持碗31がステーシヨン20の上部に位置す
るよう復帰動される。一時荷受部30上の荷6は
その位置で、または、たとえばコンベヤ形式の移
動装置で位置変更されたのち、搬入出装置8によ
つて目的とする区画収納空間4に入れられる。 In the following, the work of putting the goods 6 carried by the goods conveying device 11 into the goods storage device 2 (warehousing) will be explained, but the work of taking them out (warehousing) becomes possible by performing the reverse operation. A self-propelled cart 14 with a load 6 placed on a load receiving platform 19 is guided by a rail device 12, travels on a fixed conveyance path 10, and is stopped at a station 20. At this time, transfer device 2
1, the support device 28 is raised and the support arms 31 are projected into the clean room 1, and the support arms 31 are further moved away from each other. From this state, the support device 28 is lowered to position the support arm 31 outside the load 6. Next, the support arms 31 are moved closer to each other and positioned below the locked protrusion 32, and then the support device 28 is raised. As a result, the support arm 31 engages with the locked protrusion 32 from below,
Thus, the load 6 can be lifted from the load receiving platform 19 as shown by the solid line in FIG. Next, the rotation device 26 is activated to rotate the support device 28 by 180 degrees around the longitudinal axis 27, and the load 6 is temporarily positioned above the load receiving portion 30. Before and after this, the empty self-propelled cart 14 leaves the station 20, and the next self-propelled cart 14 arrives at the station 20. The load 6 facing the temporary load receiving section 30 from above is unloaded onto the temporary load receiving section 30 by an action opposite to that described above, and then the support bowl 31 is moved back to be located at the upper part of the station 20. The cargo 6 on the temporary cargo receiving section 30 is transferred to the intended compartment storage space 4 by the loading/unloading device 8 either at that position or after being repositioned by, for example, a conveyor-type moving device.
第5図〜第7図は別の実施例を示している。す
なわち開口9は、ステーシヨン20に対向しない
側壁に形成され、この開口9を通して一時荷受部
30を配設している。この一時荷受部30は、ダ
クトケース33と、このダクトケース33内に配
設したレール34と、このレール34に摺動体3
5を介して案内される可動体36と、この可動体
36から立設され、かつダクトケース33に形成
したスリツト37を通る連結杆38と、この連結
杆38に取付けた載置台39とからなる。そして
ダクトケース33内に配設した駆動装置(図示せ
ず)の作動によつて可動体35を正逆移動させる
ことによつて、荷6を開口9を通して本体3の内
外に移送できる。そしてステーシヨン20と一時
荷受部30との間に配設される支持装置28に、
180度変位した2箇所にそれぞれ対となつた支持
碗31を設けて、荷6の支持と卸しとを同時に行
なえるようにしている。 5 to 7 show another embodiment. That is, the opening 9 is formed in a side wall that does not face the station 20, and the temporary cargo receiving section 30 is disposed through the opening 9. This temporary cargo receiving section 30 includes a duct case 33, a rail 34 disposed inside this duct case 33, and a sliding body 3 on this rail 34.
5, a connecting rod 38 which is erected from the movable body 36 and passes through a slit 37 formed in the duct case 33, and a mounting table 39 attached to the connecting rod 38. . The load 6 can be transferred into and out of the main body 3 through the opening 9 by moving the movable body 35 forward and backward through the operation of a drive device (not shown) disposed within the duct case 33 . Then, on the support device 28 disposed between the station 20 and the temporary cargo receiving section 30,
Pairs of support bowls 31 are provided at two locations displaced by 180 degrees, so that the load 6 can be supported and unloaded at the same time.
考案の効果
上記構成の本考案によると、分岐搬送経路を設
けることなく、一方通行形式の搬送経路上の自走
台車と荷保管装置との間で荷の受け渡しを能率的
に行なうことができるとともに、分岐、合流のた
めの乗り移し装置を不要にできる。Effects of the Invention According to the present invention having the above configuration, it is possible to efficiently transfer cargo between the self-propelled cart on the one-way transport route and the cargo storage device without providing a branch transport route. , it is possible to eliminate the need for transfer devices for branching and merging.
第1図〜第4図は本考案の一実施例を示し、第
1図は斜視図、第2図は縦断側面図、第3図は正
面図、第4図は平面図、第5図〜第7図は別の実
施例を示し、第5図は縦断側面図、第6図は縦断
正面図、第7図は平面図である。
1……クリーンルーム、2……荷保管装置、3
……本体、5……棚、6……荷、8……搬入出装
置、9……開口、10……搬送経路、11……荷
搬送装置、12……レール装置、14……自走台
車、19……荷受け台、20……ステーシヨン、
21……移載装置、23……昇降板、26……回
転装置、27……縦軸心、28……支持装置、3
0……一時荷受部、31……支持腕、32……被
係止突条、33……ダクトケース、39……載置
台。
Figures 1 to 4 show an embodiment of the present invention, with Figure 1 being a perspective view, Figure 2 being a vertical side view, Figure 3 being a front view, Figure 4 being a plan view, and Figures 5 to 4. 7 shows another embodiment, FIG. 5 is a longitudinal side view, FIG. 6 is a longitudinal front view, and FIG. 7 is a plan view. 1...Clean room, 2...Cargo storage device, 3
... Main body, 5 ... Shelf, 6 ... Load, 8 ... Carrying in/out device, 9 ... Opening, 10 ... Transport route, 11 ... Load transport device, 12 ... Rail device, 14 ... Self-propelled Trolley, 19... Loading platform, 20... Station,
21... Transfer device, 23... Lifting plate, 26... Rotating device, 27... Vertical axis, 28... Support device, 3
0... Temporary cargo receiving part, 31... Support arm, 32... Locked protrusion, 33... Duct case, 39... Placing table.
Claims (1)
走台車とにより荷搬送装置を構成し、この荷搬送
装置の搬送経路を、箱状の本体で囲まれた荷保管
装置の側方に通過形成するとともに、本体の側方
に搬送経路のステーシヨンを形成し、前記本体に
形成した開口を通して、自走台車の荷受け台と荷
保管装置の一時荷受部との間で荷を回転装置によ
り回転させて荷の受け渡しを行なう移載装置を設
けたことを特徴とするクリーンルーム内の荷取扱
い設備。 A load transfer device is configured by a rail device and a self-propelled cart guided by the rail device, and a transfer path of the load transfer device is formed to pass through the side of the load storage device surrounded by a box-shaped main body. At the same time, a station for a transport path is formed on the side of the main body, and the load is rotated by a rotating device between the load receiving platform of the self-propelled cart and the temporary load receiving part of the load storage device through the opening formed in the main body. Cargo handling equipment in a clean room characterized by being equipped with a transfer device for receiving and receiving items.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1986088176U JPH0338163Y2 (en) | 1986-06-10 | 1986-06-10 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1986088176U JPH0338163Y2 (en) | 1986-06-10 | 1986-06-10 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS62200610U JPS62200610U (en) | 1987-12-21 |
JPH0338163Y2 true JPH0338163Y2 (en) | 1991-08-13 |
Family
ID=30946052
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP1986088176U Expired JPH0338163Y2 (en) | 1986-06-10 | 1986-06-10 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH0338163Y2 (en) |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5931211A (en) * | 1982-08-09 | 1984-02-20 | Itsuhito Mizuno | Conveyor switching apparatus |
JPS60140035A (en) * | 1983-12-27 | 1985-07-24 | Daifuku Co Ltd | Load carrying facility in clean room |
JPS6149713B2 (en) * | 1981-08-26 | 1986-10-30 | Hitachi Ltd |
Family Cites Families (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS60107009U (en) * | 1983-12-21 | 1985-07-20 | 株式会社ダイフク | Cargo storage equipment in the clean room |
JPH0237763Y2 (en) * | 1984-09-04 | 1990-10-12 | ||
JPH0237764Y2 (en) * | 1984-10-11 | 1990-10-12 |
-
1986
- 1986-06-10 JP JP1986088176U patent/JPH0338163Y2/ja not_active Expired
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6149713B2 (en) * | 1981-08-26 | 1986-10-30 | Hitachi Ltd | |
JPS5931211A (en) * | 1982-08-09 | 1984-02-20 | Itsuhito Mizuno | Conveyor switching apparatus |
JPS60140035A (en) * | 1983-12-27 | 1985-07-24 | Daifuku Co Ltd | Load carrying facility in clean room |
Also Published As
Publication number | Publication date |
---|---|
JPS62200610U (en) | 1987-12-21 |
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