JPH0338163Y2 - - Google Patents

Description

[Detailed Description of the Invention] Industrial Application Field The present invention relates to cargo handling equipment in a clean room used for transporting and storing cargo (articles) such as semiconductors that are extremely sensitive to dust.

Conventional technology Conventionally, this type of equipment was
As seen in Publication No. 59-177707, a cargo storage device surrounded by a box-shaped main body is installed in a clean room, and a cargo storage device consisting of a rail device and a self-propelled cart guided by this rail device is installed. The end of the conveying path of the conveying device is visible inside the main body. The cargo storage device includes a shelf and a loading/unloading device, and the loading/unloading device has a slow working speed.
Therefore, the conveyance route is usually formed by branching off from the main conveyance route, and the work involved is to divert the self-propelled carts running on the main conveyance route, move them to the conveyance route, stop them at the end of the conveyance route, and carry out loading/unloading. Loads are transferred between the shelves and the self-propelled trolley using a device, so that the work speed is not affected.

Problems to be Solved by the Invention According to the conventional method described above, the work of the cargo storage device is to complete the delivery to the self-propelled cart, and then the self-propelled cart exits to the main transport route, and the next The work cannot be carried out until the trolley is diverted from the main conveyance route and reaches the destination, and therefore the cycle time is insufficient to cover the work speed, resulting in poor work efficiency as a whole. In addition, a transfer device for branching and merging is required, and since this transfer device is installed in a clean room, appropriate cleanliness measures or equipment are required.

The purpose of this invention is to create cargo handling equipment in a clean room that can efficiently transfer cargo between self-propelled carts on the main transportation route and cargo storage equipment without forming branch transportation routes. It is in the point of providing.

Means for Solving the Problems In order to solve the above problems, the cargo handling equipment in the clean room according to the present invention comprises a cargo transport device consisting of a rail device and a self-propelled cart guided by the rail device. The transport route of the load transport device,
A cargo storage device surrounded by a box-shaped main body is formed to pass through the side, and a transport path station is formed on the side of the main body, and a cargo receiving stand of a self-propelled cart and a cargo storage are formed through an opening formed in the main body. A transfer device is provided which rotates the load with a rotating device to transfer the load to and from the temporary load receiving platform of the device.

According to the configuration of the present invention, by stopping the self-propelled cart at the station and then operating the rotating device of the transfer device, it is possible to efficiently load and unload cargo onto the self-propelled cart through the opening. In addition, loading and unloading of loads to and from the shelves of the load storage device is carried out without any problem between the loading and unloading device in the load storage device and the loading and unloading device, depending on the intended operating speed.

Embodiment An embodiment of the present invention will be described below with reference to FIGS. 1 to 4.

1 is a clean room, which is configured so that clean air is blown down from the ceiling through a filter, and the descending clean air is sucked into the floor through a mesh-type floor. 2 is clean room 1
A cargo storage device installed inside the rectangular box-shaped main body 3
A load 6 is placed between the shelf 5 installed in the main body 3 and forming a plurality of compartment storage spaces 4 in the vertical and horizontal directions, and the target compartment storage space 4.
and a loading/unloading device 8 having a fork-type delivery tool 7 that can freely take in and out. The cleanliness inside the main body 3 is maintained by an independently provided clean unit or a clean unit for the clean room 1. An opening 9 is formed in the main body wall at a position where the loading/unloading device 8 can operate, and a load conveying device 11 is formed outside the opening 9 with a constant conveying path 10 passing through the outside.
will be placed. This load conveyance device 11 includes a C-shaped rail device 12 with an open top surface, and a rail device 12 that is C-shaped with an open top.
2, a self-propelled trolley 14 supported and guided via wheels 13, etc., and these rail devices 12 and the self-propelled trolley 14.
The duct 16 is composed of a duct 16 that surrounds the duct 16 and has a slit 15 in the upper part, and a suction passage 17 formed at the lower part of the duct 16. It is made to protrude into the clean room 1 through it, and a cargo receiving stand 19 is provided at the protruding end. A station 20 is formed at a portion facing the opening 9 of the load conveying device 11, and the load 6 is transferred between the self-propelled cart 14 and the load storage device 2 through the opening 9. A transfer device 21 is provided. This transfer device 21 consists of a rectangular box-shaped case 22 fixed to the lower edge side of the wall forming the opening 9.
A lift plate 23 disposed above the top plate of the case 22, a cylinder device 24 disposed inside the case 22 and having an upwardly protruding piston rod connected to the lower surface of the lift plate 23, a rotating device 26 installed on the elevating plate 23; a supporting device 28 fixed to the upward output shaft of the rotating device 26 and rotatable around a vertical axis 27; a cylindrical cover 29 that is vertically disposed from and surrounds the rotating device 26;
The support device 28 includes a temporary cargo receiving portion 30 disposed inside the main body 3 facing the opening 9, and has a pair of left and right support arms 31 projecting forward that can move toward and away from each other. Note that the load 6 has a case shape, and a pair of side surfaces are provided with locking protrusions 32.

Next, the operation of the above embodiment will be explained.

In the following, the work of putting the goods 6 carried by the goods conveying device 11 into the goods storage device 2 (warehousing) will be explained, but the work of taking them out (warehousing) becomes possible by performing the reverse operation. A self-propelled cart 14 with a load 6 placed on a load receiving platform 19 is guided by a rail device 12, travels on a fixed conveyance path 10, and is stopped at a station 20. At this time, transfer device 2
1, the support device 28 is raised and the support arms 31 are projected into the clean room 1, and the support arms 31 are further moved away from each other. From this state, the support device 28 is lowered to position the support arm 31 outside the load 6. Next, the support arms 31 are moved closer to each other and positioned below the locked protrusion 32, and then the support device 28 is raised. As a result, the support arm 31 engages with the locked protrusion 32 from below,
Thus, the load 6 can be lifted from the load receiving platform 19 as shown by the solid line in FIG. Next, the rotation device 26 is activated to rotate the support device 28 by 180 degrees around the longitudinal axis 27, and the load 6 is temporarily positioned above the load receiving portion 30. Before and after this, the empty self-propelled cart 14 leaves the station 20, and the next self-propelled cart 14 arrives at the station 20. The load 6 facing the temporary load receiving section 30 from above is unloaded onto the temporary load receiving section 30 by an action opposite to that described above, and then the support bowl 31 is moved back to be located at the upper part of the station 20. The cargo 6 on the temporary cargo receiving section 30 is transferred to the intended compartment storage space 4 by the loading/unloading device 8 either at that position or after being repositioned by, for example, a conveyor-type moving device.

5 to 7 show another embodiment. That is, the opening 9 is formed in a side wall that does not face the station 20, and the temporary cargo receiving section 30 is disposed through the opening 9. This temporary cargo receiving section 30 includes a duct case 33, a rail 34 disposed inside this duct case 33, and a sliding body 3 on this rail 34.
5, a connecting rod 38 which is erected from the movable body 36 and passes through a slit 37 formed in the duct case 33, and a mounting table 39 attached to the connecting rod 38. . The load 6 can be transferred into and out of the main body 3 through the opening 9 by moving the movable body 35 forward and backward through the operation of a drive device (not shown) disposed within the duct case 33 . Then, on the support device 28 disposed between the station 20 and the temporary cargo receiving section 30,
Pairs of support bowls 31 are provided at two locations displaced by 180 degrees, so that the load 6 can be supported and unloaded at the same time.

Effects of the Invention According to the present invention having the above configuration, it is possible to efficiently transfer cargo between the self-propelled cart on the one-way transport route and the cargo storage device without providing a branch transport route. , it is possible to eliminate the need for transfer devices for branching and merging.

[Brief explanation of the drawing]

Figures 1 to 4 show an embodiment of the present invention, with Figure 1 being a perspective view, Figure 2 being a vertical side view, Figure 3 being a front view, Figure 4 being a plan view, and Figures 5 to 4. 7 shows another embodiment, FIG. 5 is a longitudinal side view, FIG. 6 is a longitudinal front view, and FIG. 7 is a plan view. 1...Clean room, 2...Cargo storage device, 3
... Main body, 5 ... Shelf, 6 ... Load, 8 ... Carrying in/out device, 9 ... Opening, 10 ... Transport route, 11 ... Load transport device, 12 ... Rail device, 14 ... Self-propelled Trolley, 19... Loading platform, 20... Station,
21... Transfer device, 23... Lifting plate, 26... Rotating device, 27... Vertical axis, 28... Support device, 3
0... Temporary cargo receiving part, 31... Support arm, 32... Locked protrusion, 33... Duct case, 39... Placing table.

Claims (1)

[Scope of utility model registration request] A load transfer device is configured by a rail device and a self-propelled cart guided by the rail device, and a transfer path of the load transfer device is formed to pass through the side of the load storage device surrounded by a box-shaped main body. At the same time, a station for a transport path is formed on the side of the main body, and the load is rotated by a rotating device between the load receiving platform of the self-propelled cart and the temporary load receiving part of the load storage device through the opening formed in the main body. Cargo handling equipment in a clean room characterized by being equipped with a transfer device for receiving and receiving items.