JPH0318406Y2 - - Google Patents

Description

[Detailed Description of the Invention] Industrial Application Field The present invention relates to cargo handling equipment in a clean room used for transporting and storing cargo (articles) such as semiconductors that are extremely sensitive to dust.

Conventional technology Conventionally, this type of equipment was
As seen in No. 59-177707, a cargo storage device surrounded by a box-shaped main body is installed in a clean room.
The end of the transport path of the load transport device, which is composed of a rail device and a self-propelled cart guided by the rail device, is visible inside the main body.
The cargo storage device includes a shelf and a loading/unloading device, and the loading/unloading device has a slow working speed. Therefore, the conveyance route is usually formed by branching from the main conveyance route, and the work involved is to move the self-propelled cart that has traveled on the main conveyance route to the branched conveyance route, stop it at the end of the conveyance route, and then carry out loading/unloading. Loads are transferred between the shelves and the self-propelled trolley using a device, so that the work speed is not affected.

Problems to be Solved by the Invention According to the conventional method described above, the work of the cargo storage device is to complete the transfer of goods to the self-propelled cart using the loading/unloading device, and then the self-propelled cart exits to the main transport route. However, it cannot be carried out until the next self-propelled cart branches off from the main transport route and reaches the end of the transport route. Therefore, although the cycle time is sufficient to cover the work speed of the loading/unloading device, the overall work Efficiency was poor. Furthermore, a transfer device for separating and merging the flow is required between both routes, and since this transfer device is installed in a clean room, appropriate cleanliness measures or equipment are required. Furthermore, cargo storage equipment tends to generate dust due to its various operations, and when installed in a clean room with a high degree of cleanliness,
Appropriate cleanliness measures and equipment are required. Furthermore, when a load is transported between two clean rooms with different degrees of cleanliness, dust will move through the communication section.

The purpose of this invention is to be able to transfer loads between the self-propelled cart on the main transport route and the cargo storage device without forming a branch transport route, and to partition the cargo storage device into sections using partition walls. We provide cargo handling equipment in a clean room that is installed in the lower clean room of two clean rooms with different cleanliness levels to prevent dust generated in the cargo storage equipment from flowing into the clean room with a higher cleanliness level. It is in the point of doing.

Means for Solving the Problems In order to solve the above problems, the cargo handling equipment in the clean room of the present invention is provided with a partition wall that separates two clean rooms with different degrees of cleanliness. A closed cargo storage device having a clean unit for maintaining cleanliness is provided, and a transfer device is provided between the two clean rooms by passing through the cargo storage device and an opening formed in the partition wall. A load transfer device that faces an end of the device and has a self-propelled cart, and a transfer device that transfers the load between the self-propelled cart and the transfer device, and the cargo storage device has a plurality of It has a shelf having a storage space and a loading/unloading device that transfers cargo between the shelf and the transfer device.

According to the configuration of the present invention, in the load transfer devices of both clean rooms, each self-propelled cart is stopped facing the end of the transfer device, and then both transfer devices and the transfer device are operated.
Loads can be transferred between both self-propelled carts. Then, by activating the loading/unloading device, it is possible to transfer the cargo that was not transferred at the right time from the transfer device to the cargo storage device for temporary storage, or conversely, to take the cargo out of the cargo storage device and transfer it via the transfer device, etc. It can be handed over to a self-propelled trolley. During such cargo handling operations, the clean air from both clean rooms flows into the cargo storage device through the openings formed in the partition wall to accommodate the transfer device, resulting in The dust will be processed in the clean unit of the cargo storage device without flowing into the clean room, which has a high degree of cleanliness. Furthermore, when transferring a load, for example from a less clean room to a higher clean room, the load may be cleaned with higher clean air while moving through the load storage device. Furthermore, by adjusting the transfer range of the transfer device, the placement positions of the load transfer device and the transfer device can be freely determined and adjusted as desired.

Embodiment An embodiment of the present invention will be described below based on the drawings.

1 is a high clean room with a high degree of cleanliness (for example, class 10), and 2 is a low clean room with a low degree of cleanliness (for example, class 100), and these clean rooms 1 and 2 are separated by a vertical partition wall 3. And both clean rooms 1 and 2
is configured so that clean air 6, 7 is blown downward from the ceiling side through filters 4, 5, and the descending clean air 6, 7 is sucked under the floor through mesh-type floors 8, 9. Reference numeral 10 denotes a cargo storage device disposed close to the partition wall 3 in the low clean room 2. Inside the rectangular box-shaped airtight main body 11, there are shelves 12 and a plurality of storage spaces partitioned in the vertical direction. , a clean unit 60 facing one side of this shelf 12, and a loading/unloading device 3 facing the other side.
4 are arranged. The clean unit 60
is a filter 6 disposed so as to cover the other surface of the shelf 12 and forming a flow path 61 between it and the main body 11;
2, and a blower 63 that sucks air from the lower part of the main body 11 and blows air into the flow path 61.
It operates to maintain a high level of cleanliness inside. Openings 13 and 14 are formed at the upper and lower parts of the partition wall 3 and at opposing locations of the main body 11. Upper opening 13
The upper transfer device 1 passes through the upper part of the cargo storage device 10 and extends between both clean rooms 1 and 2.
5 is disposed, and a lower transfer device 16 is provided which extends through the lower opening 14 to the high clean room 1 and the lower part of the cargo storage device 10. These transfer devices 15 and 16 have the same shape, and include rectangular and long box-shaped cases 17 and 18, rails 19 and 20 laid in the cases 17 and 18, and rails 19 and 2.
0 via sliding bodies 21 and 22, and interlocked with these movable tables 23 and 24,
Reciprocating devices 25 and 26 that can adjust the transfer range
and connecting rods 29, 30 that are erected from the movable bases 23, 24 and pass through slits 27, 28 formed in the cases 17, 18, and these connecting rods 29, 30.
It consists of load support stands 31 and 32 attached to the protruding ends of. The loading/unloading device 34 is configured to transfer the load 33 between the shelf 12 and both transfer devices 15 and 16. In other words, the loading/unloading device 3
Reference numeral 4 denotes a lifting platform 36 guided by a rail 35, and a movable body 3 provided on the lifting platform 36 so as to be movable back and forth.
7, and a pair of left and right support arms 3 that protrude forward from the movable body 37 and can move toward and away from each other in the left and right directions.
8. The load 33 has a case shape, and a locking protrusion 33a is provided on the outer surface of the upper part over the entire circumference, and the support arm 38 can freely engage with the locking protrusion 33a from below. becomes. In both the clean rooms 1 and 2, there is an upper transfer device 15.
Load transport devices 41A and 41B are provided which have stations 39A and 39B facing each other at both ends of the transport system, and which form fixed transport paths 40A and 40B. These load conveyance devices 41A and 41B have an open top surface and a C.
-shaped rail devices 42A, 42B, self-propelled carts 44A, 44B supported and guided by the rail devices 42A, 42B via wheels 43A, 43B,
These rail devices 42A, 42B and the self-propelled trolley 44
A, 44B and a slit 45 at the top.
It is composed of ducts 46A, 46B having ducts A, 45B, and suction passages 47A, 47B formed at the bottom of these ducts 46A, 46B, and self-propelled carts 44A, 45B.
Connecting rods 48A and 48B erected from the top surface of 44B
are made to protrude into both clean rooms 1 and 2 through the slits 45A and 45B, and load receiving stands 49A and 49B are provided at the protruding ends. A self-propelled trolley 44 is installed in both the clean rooms 1 and 2.
Transfer devices 50A and 50B are provided to transfer the load 33 between A and 44B and the upper transfer device 15. The transfer devices 50A and 50B have filters 4,
Rotating device 51 installed on the ceiling side by penetrating through 5
A, 51B, and a support that is fixed to the downward rotating shafts 52A, 52B of the rotating devices 51A, 51B and is rotatable around the vertical axes 53A, 53B, and is rotatable via the rotating shafts 52A, 52B. 54
A, 54B, and a pair of left and right support arms 55 that protrude forward from two surfaces displaced by 180 degrees of the supports 54A, 54B, respectively, and can move toward and away from each other in the left and right directions.
It is composed of A, 55B, 56A, and 56B.

Next, the operation of the above embodiment will be explained.

First, the load 33 transported by the load transport device 41A
The load 33 is placed on the loading platform 49A.
The self-propelled trolley 44A on which the rail device 4 is mounted is
2A, travels on a fixed transport route 40A, and is stopped at a station 39A. At this time, in the transfer device 50A, the support body 54A is raised, and at least the pair of support arms 55A or 56A located above the load transfer device 41A are moved away from each other and are in an empty state. In this state, the support arms 55A and 56A are lowered via the support body 54A, and positioned below and outside of the locked protrusion 33a of the load 33. Then, by moving the support arms 55A, 56A toward each other and moving them upward via the support body 54A, the support arms 55A, 56A are engaged with the locked protrusion 33a from below, and the load receiving platform is The load 33 is lifted from 49A. Next, by rotating the support body 54A 180 degrees around the vertical axis 53A and lowering it, the load 33 is placed on the load support table 31 located at the end on the load transfer device 41A side. let it be placed and support arms 55A, 56
The unloading work of the load 33 is completed by moving the load supporter 31 apart and upward, and further moving the load support platform 31 into the load storage device 12 via the movable platform 23 or the like.

When loading (handing over) the cargo 33 unloaded in this way to the cargo transport device 41B in the low clean room 2,
The empty self-propelled cart 44B is stopped at the station 39B. Then, by operating the upper transfer device 15, the cargo 33 received in the high clean room 1 is transferred.
After passing through the cargo storage device 10, enter the low clean room 2
move it inside. Next, the transfer device 50B is operated in the opposite manner to the transfer device 50A on the high clean room 1 side described above. Thereby, the load 33 on the load support stand 31 of the upper transfer device 15 can be loaded onto the load receiving stand 49B of the self-propelled cart 44B.

By operating in the opposite manner to that described above, the load 33 carried by the load transfer device 41B in the low clean room 2 can be transferred to the load transfer device 41A in the high clean room 1 via the upper transfer device 15 or the like.

In addition, two sets of support arms 55A, 56A, 55B, 5
By using 6B properly, unloading work and loading work can be performed twice in a short period of time, or empty self-propelled carts 44A and 44B can be loaded immediately.

Load 33 on load support platform 31 of upper transfer device 15
is transferred into the shelf 12 or to the load support 32 of the lower transfer device 16 by the loading/unloading device 34. That is, this is made possible by a combination of the vertical movement of the lifting table 36, the back and forth movement of the movable body 37, and the movement of the support arm 38 toward and away from each other. Moreover, by performing the combination operation in reverse, the load 33 on the load support table 32 of the lower transfer device 16 or in the shelf 12 can be transferred onto the load support table 31 of the upper transfer device 15. Furthermore, the load 33 can be transferred between the load support table 32 of the lower transfer device 16 and the inside of the shelf 12 using the carry-in/out device 34 . The load 33 from within the high clean room 1 can be transferred to and from the load support platform 32 of the lower transfer device 16 by a self-propelled, fork-type transport vehicle, or manually.

During the cargo handling work as described above, the cargo storage device 1
0, a high degree of cleanliness is maintained by the operation of the clean unit 60. That is, the blower 63
The air from the storage unit rises in the flow path 61, passes through the filter 62, becomes clean air, and is supplied toward the shelf 12 and the loading/unloading device 34. While descending inside the main body 11, this clean air carries the dust generated inside the main body 11 in its flow, and is sucked and removed from the lower part of the main body 11 by the blower 63. Further, the clean air 6 from both clean rooms 1 and 2 flows into the main body 11 through the openings 13 and 14, and joins the clean air descending inside the main body 11. Therefore, dust generated on the shelves 12 and the loading/unloading device 34 will not flow into the clean rooms 1, 2 through the openings 13, 14, etc.

Effects of the Invention According to the present invention having the above configuration, in the load transfer devices of both clean rooms, after each self-propelled cart is stopped facing the end of the upper transfer device, both transfer devices and the transfer device are activated. This makes it possible to transfer loads between both self-propelled carts. Then, by activating the loading/unloading device, it is possible to transfer the load that was not transferred at the right time from the transfer device to the shelf for temporary storage. It can be passed to a self-propelled trolley via.
This allows the load to be smoothly moved between the load transfer devices in both clean rooms without adversely affecting the load transfer. Furthermore, depending on the intended working speed of the loading/unloading device, loading and unloading of goods to and from the shelves can be carried out without any hindrance to the loading/unloading device, and there is no need to provide a branched conveyance path, allowing for one-way traffic. Loads can be efficiently transferred between the self-propelled cart and the load storage device on the transport route of the same type, and a transfer device for dividing and merging can be made unnecessary. In particular, during cargo handling work as described above, clean air from both clean rooms flows into the cargo storage device through the openings formed in the partition wall and main body for installing the transfer device, and then the cargo storage device Therefore, the dust generated by the loading/unloading equipment can be removed by the clean air and can be prevented from flowing into both clean rooms. Furthermore, when moving a load from a clean room with a low degree of cleanliness to a clean room with a high degree of cleanliness, for example, the load can be cleaned with clean air of a high degree of cleanliness while being moved within the load storage device. Further, by adjusting the transfer range of the transfer device, the arrangement positions of the load transfer device and the transfer device can be freely set and adjusted as desired.

[Brief explanation of drawings]

The drawings show an embodiment of the present invention, in which FIG. 1 is a partially cutaway perspective view, FIG. 2 is a vertical side view, FIG. 3 is a vertical front view, and FIG. 4 is a cross-sectional plan view. 1... High clean room, 2... Low clean room, 3... Partition wall, 6, 7... Clean air, 10
... cargo storage device, 11 ... main body, 12 ... shelf, 1
3, 14...Opening, 15...Upper transfer device, 3
1, 32... Load support stand, 33... Load, 33a...
Locked protrusion, 34...Carry-in/out device, 38...Support arm, 40A, 40B...Transport route, 41A, 41
B... Load transport device, 44A, 44B... Self-propelled trolley, 49A, 49B... Load receiving stand, 50A, 50B
...Transfer device, 55A, 55B, 56A, 56B
...Support arm, 60...Clean unit.

Claims (1)

[Scope of utility model registration request] A partition wall is installed to separate two clean rooms with different levels of cleanliness, and the clean room with a lower level of cleanliness is equipped with an enclosed cargo storage device that has a clean unit to maintain a high level of cleanliness.
A transfer device is provided between the two clean rooms by penetrating the cargo storage device and the opening formed in the partition wall.
Both clean rooms are provided with a load transfer device that faces the end of the transfer device and has a self-propelled truck, and a transfer device that transfers the load between the self-propelled truck and the transfer device. 1. A cargo handling equipment in a clean room, wherein the storage device includes a shelf having a plurality of storage spaces and a loading/unloading device for transferring cargo between the shelf and the transfer device.