JPH06144503A - Building for handling article which dislike dust - Google Patents

Abstract

PURPOSE:To make an effective use of a clean room. CONSTITUTION:A clean warehouse 10 is erected beneath the floor wall 5 of a clean room 8, and the inside of the clean warehouse 10 and the inside of the clean room 8 are connected to each other through a communicating room 21. A lifting base 26 is fitted inside the communicating room 21 and the clean warehouse 10. It is thus possible to eliminate installation of the clean warehouse 10 in the clean room 8.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a building for handling articles that are insensitive to dust.

[0002]

2. Description of the Related Art Heretofore, the following building structures have been known as this type of building. That is, a clean warehouse is installed in the clean room, and articles that hate dust (for example, semiconductor wafers) are stored and stored in the clean warehouse.
If necessary, it can be taken out of the clean room after being taken out of the clean warehouse, subjected to predetermined processing and processing by the equipment installed in the clean room,
It is known that, in some cases, the temporary storage is carried out again in a clean warehouse.

[0003]

Disadvantages of the Prior Art Since the conventional building has a clean warehouse installed in a clean room, it has an advantage that articles taken out from the clean warehouse are not exposed to dust, but has the following drawbacks. That is, since a clean warehouse, that is, a clean warehouse that can maintain a predetermined degree of cleanness by itself, is installed in the clean room, the floor area of the clean room is reduced and the clean room can be effectively used accordingly. It had the drawback of not having it.

[0004]

[Means for Solving the Disadvantages] The present invention adopts the following means in order to eliminate the above disadvantages. According to the present invention, a clean warehouse is installed below a floor wall of a clean room, the inside of the clean warehouse and the inside of the clean room are connected by a communication room, and an elevating device is provided across the communication room and the clean warehouse. Is.

[0005]

The present invention has the following functions. The clean room can be effectively used as much as the clean warehouse is not provided in the clean room. Also,
Since the inside of the clean warehouse and the inside of the clean room are connected by the communication room, the articles are not exposed to dust when the articles are transferred between the clean warehouse and the clean room.

[0006]

DESCRIPTION OF THE PREFERRED EMBODIMENTS The present invention will be described below based on the embodiments shown in the drawings. In this specification, the front means the front side of FIG. 1, the rear means the back side, the left means the left side of FIG. 1, and the right means the right side of FIG.

The building 1 is an ordinary room on the first floor 2
The clean room 8 is on the second floor.

As shown in FIGS. 1 to 3, a clean warehouse 10 is installed on the first floor wall 4 of the first floor portion 2. The clean warehouse 10 includes a pair of front and rear rack devices 11 each having a plurality of upper, lower, left and right article storage shelves 12 having a gap that allows a slide fork 17 described below to move in the vertical direction.
The stacker crane 13 is provided so as to be movable left and right between the front and rear rack devices 11. The stacker crane 13 includes a traveling carriage 14, an elevating stand 16 that can be raised and lowered by a mast 15 provided on the traveling carriage 14, and a slide fork 17 that is slidably mounted in the elevating stand 16 in the front-rear direction. And have. As is known, the slide fork 17 pulls the article W into the lift table 16 by performing an operation of projecting the article W downward, lifting the article W by raising the lift table 16 and retreating to the lift table 16 side. The article W can be unloaded onto the article storage shelf 12 or the like by the reverse operation.

A pair of front and rear article loading / unloading stations 18 are provided on the left side of each of the rack devices 11, and each of the article loading / unloading stations 18 has a driving roller conveyor which can be driven forward and backward with the conveying direction directed to the left and right. 1
9 are installed. These drive roller conveyors 19
On the side close to the rack device 11, a known article elevator is provided. The article elevator includes a lift table that can be raised and lowered by a known lift device below the rollers of the drive roller conveyor 19, and a pair of support frames that are erected on the lift table and are located between the rollers of the drive roller conveyor 19. have. This article elevator forms a fork insertion gap between the conveying surface of the drive roller conveyor 19 and the lower surface of the article W by lifting the article W by the support frame, and the slide fork 17 by the support frame in the raised position. Receive the article W from
By descending, it serves to lower the article W on the drive roller conveyor 19.

As is well known, the clean warehouse 10 has a constant air circulation path therein, and a filter is interposed in the middle of the air circulation path to purify the air. There is.

A vertically long communication chamber 21 having a downward opening is connected and erected on the periphery of an opening 20 formed on the left side of the top wall of the clean warehouse 10.
The opening 22 formed in the floor wall 5 penetrates in an airtight state and projects into the clean room 8.

A first loading / unloading port 2 is provided at the upper part of the communication chamber 21.
3 is formed, and the clean room 8 of the communication room 21 is formed.
Two front and rear second loading / unloading ports 24 are formed in the lower part of the portion.

As shown in FIGS. 1, 3 and 4, a lifting device 25 is provided on the left side of the communication chamber 21 and the clean warehouse 10.
The two front and rear elevating tables 26 constituting the above are arranged side by side with the driving roller conveyor 19 when viewed from above and can be moved up and down by a known elevating device. These lifts 26
Each of them is constituted by a drive roller conveyor 27 which can be driven in the forward and reverse directions with the conveying direction directed to the left and right. Then, by stopping the drive roller conveyor 27 at a position aligned with the drive roller conveyor 19, the articles W can be transferred between the drive roller conveyor 27 (elevation table 26) and the drive roller conveyor 19. The lifting device may be a vertical conveyor.

Further, above the drive roller conveyor 19 and at a height position corresponding to the second carry-in / out port 24, the drive roller conveyor 31 can be driven forward and backward in the communication chamber 21 with the conveying direction directed to the left and right. Is installed.
With such a configuration, the drive roller conveyor 27
By stopping the (elevation table 26) at a position connected to the drive roller conveyor 31, the articles W can be transferred between the drive roller conveyor 27 (elevation table 26) and the drive roller conveyor 31. Then, the article W transported to the vicinity of the second loading / unloading port 24 is transported to a predetermined position in the clean room 8 by a known unmanned transport vehicle (not shown) having an article transfer robot on the loading surface.

A fixed air circulation path is formed in the communication chamber 21, and a filter is interposed in the middle of the air circulation path to purify the air.

As shown in FIGS. 1, 5 and 6, above the drive roller conveyor 31 on the rear side and at the height position corresponding to the first carry-in / out port 23, the carrying direction is left and right outside the communicating chamber 21. A drive roller conveyor 33 is installed which is capable of forward and reverse drive in a desired direction. With such a configuration, by stopping the drive roller conveyor 27 (lifting table 26) at a position connected to the drive roller conveyor 33, the articles W are transferred between the drive roller conveyor 27 (lifting table 26) and the drive roller conveyor 33. Transfer is possible.

A guide rail 35 is provided in the upper rear part of the communication chamber 21 so that the longitudinal direction thereof is oriented in the left-right direction, and along the guide rail 35, a traveling carriage 36 is a traveling drive device such as a linear motor (not shown). It is made free to run.

A transfer robot 38, which transfers the article W between the traveling carriage 36 and the drive roller conveyor 33, which is stopped to transfer the article W between the drive roller conveyor 33 and the transfer roller 38, is installed above the communication chamber 21. It is provided. The transfer robot 38 is provided with a fixed guide tube 39 which is erected on an upper part of the communication chamber 21, a support shaft 40 which is vertically movable and rotatably provided on the fixed guide tube 39, and a support shaft 40. It has a horizontal swivel arm 41 attached in the middle of the length and a pair of hand pieces 42 provided at the free end of the horizontal swivel arm 41 so as to be close to and away from each other. With such a configuration, the hand piece 42 allows the flange F of the article W to be
, The horizontal swivel arm 41 is lifted, then swung 180 degrees horizontally to move the article W to the other position 180 degrees out of the position where it was, and then the horizontal swivel arm 41 is lowered to swivel the article. W drive roller conveyor 3
3 or the carriage 36, and then the hand piece 4
The article W is transferred by opening 2 and raising it again so that the hand piece 42 does not collide with or interfere with the article W.

The first floor portion 2 is a clean room 8 or 2.
The floor part 3 is an ordinary room, and the clean warehouse 10 is provided on the second floor part 3. The clean warehouse 10 and the clean room 8
And the communication chamber 21 may be connected.

[0020]

The present invention has the following effects due to the above-mentioned configuration. The clean room can be effectively used as much as the clean warehouse is not provided, and since the inside of the clean warehouse and the inside of the clean room are connected by the communication room, when transferring articles between the clean warehouse and the clean room. , Does not expose the article to dust.

[Brief description of drawings]

FIG. 1 is a vertical sectional view showing an embodiment of the present invention.

FIG. 2 is an enlarged view of part A of FIG.

FIG. 3 is an enlarged sectional view taken along line III-III of FIG.

FIG. 4 is an enlarged sectional view taken along line IV-IV of FIG.

5 is an enlarged cross-sectional view taken along line VV of FIG.

6 is an enlarged cross-sectional view taken along line VI-VI of FIG.

[Explanation of symbols]

 5 Floor on the 2nd floor 8 Clean room 10 Clean warehouse 21 Communication room 25 Lifting device 26 Lifting platform

Claims (2)

[Claims] 1. A clean warehouse is installed below a floor wall of the clean room, the inside of the clean warehouse is connected to the inside of the clean room by a communication room, and an elevating device is provided across the communication room and the clean warehouse. A building for handling items that dislike dust. 2. A clean warehouse is installed on the upper surface of the ceiling wall of the clean room, the inside of the clean warehouse and the inside of the clean room are connected by a communication room, and an elevating device is provided across the communication room and the clean warehouse. A building for handling items that dislike dust.